JP2008169005A - 天井走行車システム - Google Patents
天井走行車システム Download PDFInfo
- Publication number
- JP2008169005A JP2008169005A JP2007004463A JP2007004463A JP2008169005A JP 2008169005 A JP2008169005 A JP 2008169005A JP 2007004463 A JP2007004463 A JP 2007004463A JP 2007004463 A JP2007004463 A JP 2007004463A JP 2008169005 A JP2008169005 A JP 2008169005A
- Authority
- JP
- Japan
- Prior art keywords
- buffer
- traveling vehicle
- overhead traveling
- vehicle system
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
- B65G47/46—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points
- B65G47/51—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination
- B65G47/5104—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination for articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【課題】天井走行車システムの周囲の装置などの移動時に、バッファが邪魔にならないようにする。また、バッファをコンパクトに格納できるとともに格納や復旧が容易にできるようにする。
【解決手段】バッファ30に、物品の載置部33と該載置部33を上方から吊り下げる支柱34,35,36,37とリンク38,39を設け、該支柱34,35,36,37を載置部33側へ折り曲げ自在に構成した。また、バッファ30を上方へ付勢する付勢手段40,41を設けた。
【選択図】図4
Description
請求項2の発明での追加の課題は、バッファをコンパクトに格納することにある。
請求項3の発明での追加の課題は、バッファをコンパクトにかつ出っ張りが生じないように格納することにある。
請求項4の発明での追加の課題は、バッファの格納や復旧を容易にすることにある。
バッファを上方へ格納自在に構成したことを特徴とする。
また好ましくは、バッファに、物品の載置部と該載置部を上方から吊り下げる支柱とを設け、該支柱を前記載置部側へ折り曲げ自在に構成する。
特に好ましくは、前記バッファを上方へ付勢する付勢手段を設ける。
バッファを物品の保管位置から退避もしくは折り畳み自在に構成したことを特徴とする。
またこの発明では、バッファを退避させたり折り畳んだりすることにより、処理装置の搬出入が可能になるように、スペースを設けることができる。このためクリーンルームのレイアウト変更などをバッファが妨げない。
バッファに、物品の載置部と該載置部を上方から吊り下げる支柱とを設け、該支柱を前記載置部側へ折り曲げ自在に構成すると、支柱の折り曲げでバッファを格納でき、かつ格納時に出っ張りが生じない。
さらに前記バッファを上方へ付勢する付勢手段を設けると、バッファを上方へ格納するのも、格納したバッファを下へ降ろして復旧するのも容易になる。
(1) サイドバッファ30を上方へ格納できる。
(2) 格納したサイドバッファ30は、サイドバッファ30が通常時に占めていたスペースからはみ出さず、出っ張りがない。
(3) またサイドバッファ30の格納と連動して、アンダーバッファ50も上方へ格納できる。
(4) 下部フレーム33等へ加わる重力を、定張力バネ40で軽減するので、サイドバッファ30やアンダーバッファ50の昇降が容易になる。従ってバッファ30,50を容易に格納でき、かつ容易に復旧できる。
3 天井
4 軌道
5 支柱
6 天井走行車
7 ラテラルドライブ
8 θドライブ
9 昇降駆動部
10 昇降台
12 カバー
20 カセット
22 フランジ
30 サイドバッファ
31 支柱
32 上部フレーム
33 下部フレーム
34〜37 支柱
38,39 リンク
40 定張力バネ
41 巻き取り部
50 アンダーバッファ
52 フレーム
53 支柱
54,55 補強片
56,57 取付部材
58 ピン
60 処理装置
70〜72 支柱
73,74 ガイド
81 支柱
82 上部フレーム
83 下部フレーム
91 上部フレーム
92 支柱
91,92 支柱
101,102 支柱
103,108 ジョイント
104 軸
105,106 取付片
109 ピン
110 アコーディオン
120,122 バッファ
123 軸
Claims (5)
- 上方より吊り下げた軌道に沿って天井走行車を走行させると共に、該軌道に沿ってバッファを上方より吊り下げた天井走行車システムにおいて、
バッファを上方へ格納自在に構成したことを特徴とする、天井走行車システム。 - バッファを格納した際に、バッファの収納スペースにバッファの一部部材が格納されるようにしたことを特徴とする、請求項1の天井走行車システム。
- バッファに、物品の載置部と該載置部を上方から吊り下げる支柱とを設け、該支柱を前記載置部側へ折り曲げ自在に構成したことを特徴とする、請求項1または2の天井走行車システム。
- 前記バッファを上方へ付勢する付勢手段を設けたことを特徴とする、請求項1〜3のいずれかの天井走行車システム。
- 上方より吊り下げた軌道に沿って天井走行車を走行させると共に、該軌道に沿ってバッファを上方より吊り下げた天井走行車システムにおいて、
バッファを物品の保管位置から退避もしくは折り畳み自在に構成したことを特徴とする、天井走行車システム。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007004463A JP4688824B2 (ja) | 2007-01-12 | 2007-01-12 | 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法 |
KR1020070092436A KR101111584B1 (ko) | 2007-01-12 | 2007-09-12 | 천정 반송 시스템 |
TW096135508A TWI388478B (zh) | 2007-01-12 | 2007-09-21 | Overhead handling system |
DE602008000761T DE602008000761D1 (de) | 2007-01-12 | 2008-01-08 | Automatisiertes Lager und Verfahren zur Steuerung eines Stapelkranses in dem automatisierten Lager |
EP08000235A EP1944251B8 (en) | 2007-01-12 | 2008-01-08 | Automated warehouse and method for controlling stacker crane in automated warehouse |
CNA2008100031216A CN101219731A (zh) | 2007-01-12 | 2008-01-10 | 桥式输送系统 |
US11/972,851 US7735424B2 (en) | 2007-01-12 | 2008-01-11 | Overhead traveling vehicle system and method of transporting processing equipment into, or out of position around the overhead traveling vehicle system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007004463A JP4688824B2 (ja) | 2007-01-12 | 2007-01-12 | 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008169005A true JP2008169005A (ja) | 2008-07-24 |
JP4688824B2 JP4688824B2 (ja) | 2011-05-25 |
Family
ID=39311532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007004463A Expired - Fee Related JP4688824B2 (ja) | 2007-01-12 | 2007-01-12 | 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7735424B2 (ja) |
EP (1) | EP1944251B8 (ja) |
JP (1) | JP4688824B2 (ja) |
KR (1) | KR101111584B1 (ja) |
CN (1) | CN101219731A (ja) |
DE (1) | DE602008000761D1 (ja) |
TW (1) | TWI388478B (ja) |
Cited By (5)
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---|---|---|---|---|
JP2012076898A (ja) * | 2010-10-04 | 2012-04-19 | Daifuku Co Ltd | 物品搬送装置 |
KR20130072121A (ko) | 2011-12-21 | 2013-07-01 | 가부시키가이샤 다이후쿠 | 물품 반송 설비 |
WO2014069804A1 (ko) * | 2012-10-31 | 2014-05-08 | 가부시키가이샤 다이후쿠 | 웨이퍼 퍼지 가능한 천장 보관 장치 |
KR101423221B1 (ko) | 2010-11-04 | 2014-07-28 | 무라다기카이가부시끼가이샤 | 반송 시스템 및 반송 방법 |
WO2022219949A1 (ja) * | 2021-04-14 | 2022-10-20 | 村田機械株式会社 | 保管棚 |
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---|---|---|---|---|
JP4543338B2 (ja) * | 2007-11-13 | 2010-09-15 | 村田機械株式会社 | 天井走行車システムとそのバッファの施工方法 |
TWI461341B (zh) * | 2009-03-30 | 2014-11-21 | Ihi Corp | 行駛車系統 |
JP5024337B2 (ja) * | 2009-07-29 | 2012-09-12 | 村田機械株式会社 | 搬送システム及び保管装置 |
US8550006B2 (en) * | 2010-04-02 | 2013-10-08 | Murata Machinery, Ltd. | Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system |
JP5273118B2 (ja) * | 2010-10-04 | 2013-08-28 | 村田機械株式会社 | 搬送車及び搬送システム |
JP5382470B2 (ja) * | 2010-11-04 | 2014-01-08 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP5648983B2 (ja) | 2010-11-04 | 2015-01-07 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP5750926B2 (ja) * | 2011-02-15 | 2015-07-22 | 村田機械株式会社 | 天井搬送車 |
FI123784B (fi) * | 2011-03-25 | 2013-10-31 | Konecranes Oyj | Järjestely kuormauselimen heilahduksen vaimentamiseksi nosturissa |
US20130259617A1 (en) * | 2012-03-27 | 2013-10-03 | Ming Wang | Overhead cartridge placement system |
KR101680271B1 (ko) * | 2012-07-26 | 2016-11-28 | 무라다기카이가부시끼가이샤 | 천정 주행차 시스템 및 천정 주행차 시스템에서의 이재 제어 방법 |
KR101501257B1 (ko) * | 2013-09-30 | 2015-03-11 | 크린팩토메이션 주식회사 | 퍼지 기능을 갖는 이동형 웨이퍼 보관 장치 및 퍼지형 웨이퍼 보관 시스템 |
US9881824B2 (en) * | 2014-01-07 | 2018-01-30 | Murata Machinery, Ltd. | Transfer apparatus and control method thereof |
US10479601B2 (en) * | 2014-08-26 | 2019-11-19 | Murata Machinery, Ltd. | Sorting system and sorting method |
US11045004B2 (en) * | 2017-07-14 | 2021-06-29 | Sharp Kabushiki Kaisha | Chair with solar panel |
CN107933462B (zh) * | 2017-11-20 | 2020-12-11 | 中车株洲电力机车有限公司 | 一种车辆辅机的控制方法及装置 |
US10418263B2 (en) * | 2018-01-20 | 2019-09-17 | Boris Kesil | Overhead transportation system for transporting objects between multiple work stations |
KR102490595B1 (ko) * | 2018-06-14 | 2023-01-20 | 세메스 주식회사 | 버퍼 장치 |
KR102501700B1 (ko) * | 2018-10-29 | 2023-02-17 | 무라다기카이가부시끼가이샤 | 천장 반송차 및 천장 반송차 시스템 |
CN113511451B (zh) * | 2021-07-07 | 2023-03-24 | 罗伯泰克自动化科技(苏州)有限公司 | 一种超长多巷道共用的桥式堆垛机 |
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-
2007
- 2007-01-12 JP JP2007004463A patent/JP4688824B2/ja not_active Expired - Fee Related
- 2007-09-12 KR KR1020070092436A patent/KR101111584B1/ko not_active IP Right Cessation
- 2007-09-21 TW TW096135508A patent/TWI388478B/zh not_active IP Right Cessation
-
2008
- 2008-01-08 DE DE602008000761T patent/DE602008000761D1/de active Active
- 2008-01-08 EP EP08000235A patent/EP1944251B8/en not_active Expired - Fee Related
- 2008-01-10 CN CNA2008100031216A patent/CN101219731A/zh active Pending
- 2008-01-11 US US11/972,851 patent/US7735424B2/en not_active Expired - Fee Related
Patent Citations (8)
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JPH01177531U (ja) * | 1988-05-27 | 1989-12-19 | ||
JPH04166555A (ja) * | 1990-10-30 | 1992-06-12 | Sanwa Shutter Corp | 可動式天井収納庫 |
JPH0680710U (ja) * | 1993-04-22 | 1994-11-15 | 京橋工業株式会社 | 上下可動物体の任意位置停止機構及びそれを用いた可動吊り棚装置 |
JPH11276271A (ja) * | 1998-03-27 | 1999-10-12 | Matsushita Electric Works Ltd | 吊戸棚 |
JP2003210256A (ja) * | 2002-01-25 | 2003-07-29 | Sun Wave Ind Co Ltd | 回転式載置台 |
JP2005001886A (ja) * | 2003-05-20 | 2005-01-06 | Asyst Shinko Inc | 搬送システム及びそれに用いられる保管装置 |
JP2005144064A (ja) * | 2003-11-20 | 2005-06-09 | Matsushita Electric Works Ltd | 吊戸棚 |
JP2005206371A (ja) * | 2003-12-26 | 2005-08-04 | Murata Mach Ltd | 天井走行車システム |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012076898A (ja) * | 2010-10-04 | 2012-04-19 | Daifuku Co Ltd | 物品搬送装置 |
US8757401B2 (en) | 2010-10-04 | 2014-06-24 | Daifuku Co., Ltd. | Article transport device |
TWI511912B (zh) * | 2010-10-04 | 2015-12-11 | Daifuku Kk | 物品搬送裝置 |
KR101423221B1 (ko) | 2010-11-04 | 2014-07-28 | 무라다기카이가부시끼가이샤 | 반송 시스템 및 반송 방법 |
KR20130072121A (ko) | 2011-12-21 | 2013-07-01 | 가부시키가이샤 다이후쿠 | 물품 반송 설비 |
JP2013129501A (ja) * | 2011-12-21 | 2013-07-04 | Daifuku Co Ltd | 物品搬送設備 |
US9139380B2 (en) | 2011-12-21 | 2015-09-22 | Daifuku Co., Ltd. | Article transport facility with position-changeable loading unit |
WO2014069804A1 (ko) * | 2012-10-31 | 2014-05-08 | 가부시키가이샤 다이후쿠 | 웨이퍼 퍼지 가능한 천장 보관 장치 |
KR101418812B1 (ko) * | 2012-10-31 | 2014-07-16 | 크린팩토메이션 주식회사 | 웨이퍼 퍼지 가능한 천장 보관 장치 |
CN104246970A (zh) * | 2012-10-31 | 2014-12-24 | 株式会社大福 | 可吹净晶片的顶棚保管装置 |
US9412631B2 (en) | 2012-10-31 | 2016-08-09 | Daifuku Co., Ltd. | Ceiling storage device capable of wafer purging |
WO2022219949A1 (ja) * | 2021-04-14 | 2022-10-20 | 村田機械株式会社 | 保管棚 |
Also Published As
Publication number | Publication date |
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KR101111584B1 (ko) | 2012-02-20 |
CN101219731A (zh) | 2008-07-16 |
EP1944251B1 (en) | 2010-03-10 |
DE602008000761D1 (de) | 2010-04-22 |
EP1944251A1 (en) | 2008-07-16 |
KR20080066533A (ko) | 2008-07-16 |
US20080168920A1 (en) | 2008-07-17 |
EP1944251B8 (en) | 2010-06-02 |
JP4688824B2 (ja) | 2011-05-25 |
US7735424B2 (en) | 2010-06-15 |
TW200829488A (en) | 2008-07-16 |
TWI388478B (zh) | 2013-03-11 |
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