WO2014069804A1 - 웨이퍼 퍼지 가능한 천장 보관 장치 - Google Patents
웨이퍼 퍼지 가능한 천장 보관 장치 Download PDFInfo
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- WO2014069804A1 WO2014069804A1 PCT/KR2013/008923 KR2013008923W WO2014069804A1 WO 2014069804 A1 WO2014069804 A1 WO 2014069804A1 KR 2013008923 W KR2013008923 W KR 2013008923W WO 2014069804 A1 WO2014069804 A1 WO 2014069804A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
Definitions
- the present invention relates to an apparatus for storing a wafer to be used in a next step during a semiconductor manufacturing process.
- a wafer is produced, and the produced wafer is transferred to the next stage to manufacture a semiconductor package.
- the produced wafers can not be used in the next step, and after waiting for a certain time, they are sequentially sent to the next step as needed. Equipment for such storage is needed.
- the facilities for storing the above are installed on the ground of the semiconductor factory, and there is a problem that it occupies a lot of space.
- the wafer may be damaged over time.
- An object of the present invention is to provide a wafer purgable ceiling storage device capable of increasing the storage time of wafers while enhancing space availability.
- a wafer purgable ceiling storage device in accordance with an embodiment of the present invention for realizing the above-mentioned problems comprises: a rail formed to be mounted on a ceiling to guide a vehicle; A beam relationship formed to be installed in the ceiling and configured to receive a container for receiving a wafer from the vehicle and store the wafer; And a purge assembly configured to communicate with the vessel via the beam connection, the purge assembly configured to purge the wafer received within the vessel with a gas.
- the beam relationship may include: a body; A shelf installed in the main body and formed to support the container; And a fastening unit installed on the main body, the fastening unit being configured to fasten the main body to the ceiling.
- the main body includes a bottom frame on which the shelf is installed; And a pair of sidewall frames coupled to both ends of the bottom frame, and each free end is provided with the tightening unit.
- the purge assembly may include: a supply unit configured to supply the gas into the interior of the container; And a discharge unit configured to discharge the gas injected into the interior of the container.
- the shelf includes a supply nozzle and a discharge nozzle formed to communicate with the interior of the container, the supply unit and the discharge unit each being formed to extend along the rail, pipe; And a sub pipe communicating with the main pipe and connected to the supply nozzle or the discharge nozzle.
- the sub-pipe may include: a first sub-pipe communicating with the main pipe; And a second sub-pipe connecting the first sub-pipe to the supply nozzle or the discharge nozzle and having a smaller flow cross-sectional area than the first sub-pipe.
- the supply unit may include: a supply valve installed in the second sub-pipe of the supply unit and configured to open and close the second sub-pipe of the supply unit; And a supply flow meter installed in the second sub-pipe of the supply unit so as to be positioned between the supply valve and the supply nozzle, the supply flow meter being configured to measure a flow rate of the gas flowing to the shelf.
- the supply unit may further include a gas filter installed in the second sub-pipe of the supply unit so as to be positioned between the supply flow meter and the supply nozzle of the lathe.
- the discharge unit may include: a discharge valve installed in the second sub-pipe of the discharge unit and configured to open and close the second sub-pipe of the discharge unit; And a discharge flow meter mounted on the second sub-pipe of the discharge unit so as to be positioned between the discharge valve and the discharge nozzle, the discharge flow meter being configured to measure a flow rate of the gas flowing out of the shelf.
- the purge assembly may further include a control unit connected to the supply valve and the discharge valve, for controlling opening and closing of the supply valve and the discharge valve, respectively.
- control unit may be configured to open or close the supply valve or the discharge valve based on a difference between the supply flow rate measured in the supply flow meter and the discharge flow rate measured in the discharge flow meter.
- the shelf may further include a container detecting sensor for detecting the presence of the container, and the control unit may be configured to open or close the supply valve or the discharge valve based on the detection result of the container detecting sensor .
- a wafer purgable ceiling storage device includes: a rail installed on a ceiling; A vehicle formed to move along the rail and configured to load a container for receiving a wafer therein; A plurality of beam relationships installed in the ceiling to be positioned next to the rails and configured to receive and store the containers from the vehicle; And a purge assembly configured to communicate with the vessel via the beam connection, the purge assembly configured to purge the wafer received within the vessel with a gas.
- the beam relationship may be a bottom frame; A pair of sidewall frames coupled to both ends of the bottom frame and configured to be positioned between the bottom frame and the ceiling; And a shelf mounted on the bottom frame to support the container, the shelf having a supply nozzle and a discharge nozzle in communication with the container.
- the purge assembly includes a supply unit, which is formed to supply the gas into the interior of the container through the supply nozzle, and has a supply valve formed to start or block the supply of the gas; A discharge unit formed to discharge the gas injected into the interior of the vessel through the discharge nozzle and having a discharge valve formed to start or interrupt discharge of the gas; And a control unit for controlling the operation of the supply valve or the discharge valve based on the amount of gas inside the vessel.
- the wafer purgable ceiling storage apparatus of the present invention configured as described above, it is possible to increase the storage time of the wafer while improving the utilization of the space on the bottom surface of the semiconductor factory.
- FIG. 1 is a perspective view showing a wafer purgeable ceiling storage device 1000 according to an embodiment of the present invention.
- FIG. 2 is a perspective view showing the beam relationship 300 and the purge assembly 400 of FIG.
- Figure 3 is a conceptual diagram illustrating a fuzzy operation on the vessel (S 2) by a fuzzy assembly 400 of FIG.
- FIG. 4 is a block diagram for explaining a control configuration of the purge assembly 400 of FIG.
- FIG. 1 is a perspective view showing a wafer purgeable ceiling storage device 1000 according to an embodiment of the present invention.
- a wafer purgable ceiling storage device 1000 may include a rail 100, a vehicle 200, a beam relationship 300, and a purge assembly 400.
- the rail 100 is provided on the ceiling C so as to form a movement path.
- the rail 100 may be formed to form two lines, for example, a closed curve line.
- the vehicle 200 is installed on the rail 100 so as to move along the movement path. Vehicle 200, the container (S 1) for accommodating a wafer is loaded. The vehicle 200 is provided with means for unloading the container and means (S 1) for loading the container (S 1).
- Beam relationship 300 is configured to be installed on the ceiling (C) storage container (S 2).
- the container S 2 is the same as the container S 1 loaded on the vehicle 200, but is distinguished from each other due to necessity of explanation.
- the container (S 1) will be loaded on the vehicle 200
- a container (S 2) is unloaded between the beam 300 in the vehicle 200 stored in the security relationships (300).
- the beam relationship 300 may be positioned to be positioned next to the rail 100. Also, a plurality of beam relationships 300 may be formed, so that several to several beam relationships 300 may be associated with one rail 100. FIG.
- the purge assembly 400 is a configuration for supplying gas for purging into the container S 2 stored in the beam relationship 300. To this end, the purge assembly 400 may communicate with the container S 2 through the beam relationship 300.
- the vehicle 200 moves along the rail 100 by loading the container S 1 containing the wafers produced in the previous step.
- the vehicle 200 stops in response to the designated beam relationship 300 during movement.
- the vehicle 200 unloads the container S 1 and causes the container S 2 to be stored in the designated container relationship 300.
- the stored container S 2 is affected by the purge assembly 400, and the wafer in the container S 2 is purged.
- the accommodated in the container (S 2) the wafer is purged with the gas it can be more long storage. Further, since the retention of a longer time of the container (S 2) of the beam between 300 and purge assembly 400 made in the ceiling (C) side, it is possible to take advantage of the bottom surface near the area.
- the beam relationship 300 and the purge assembly 400 will be described in more detail with reference to FIG.
- FIG. 2 is a perspective view showing the beam relationship 300 and the purge assembly 400 of FIG.
- the beam relationship 300 may include a main body 310, a shelf 330, and a fastening unit 350.
- the body 310 is the skeleton part of the beam relationship 300.
- the main body 310 can be configured as a bottom frame 311 and a side wall frame 313.
- the floor frame 311 is arranged to be substantially horizontal to the ceiling C.
- the side wall frame 313 is formed as a pair extending from both ends of the bottom frame 311 toward the ceiling C.
- the shelf 330 is installed in the main body 310 and is formed to support the container S 2 (Fig. 1). Specifically, the shelf 330 is installed in the bottom frame 311 of the main body 310, and the ceiling C is arranged substantially in parallel. For one bottom frame 311, the shelves 330 may be provided in more than one. In the present embodiment, three shelves 330 are provided on one floor frame 311. As shown in FIG. The shelf 330 is provided with a supply nozzle 331 and a discharge nozzle 333 formed to communicate with the inside of the container S 2 (FIG. 1).
- the fastening unit 350 is installed on the main body 310 and specifically on the side wall frame 313 so that the main body 310 is fastened to the ceiling C.
- This fastening unit 350 may be the same as the structure for fastening the rail 100 to the ceiling C.
- the purge assembly 400 may include a supply unit 410 and a discharge unit 430.
- the supply unit 410 is formed to supply the gas into the interior of the container S 2 (FIG. 1).
- the discharge unit 430 is formed to discharge the gas filled in the container S 2 (FIG. 1).
- each of the supply unit 410 and the discharge unit 430 may include main pipes 411 and 431 and sub-pipes 413 and 433.
- the main piping 411 of the supply unit 410 is connected to the tank for supplying the gas and the main piping 431 of the discharge unit 430 is connected to the tank for recovering the gas.
- the main pipes 411 and 431 may be formed on the side surface of the rail 100 and extend along the rail 100 (see FIG. 1).
- the sub pipes 413 and 433 connect the main pipes 411 and 431 to the shelf 330 (supply nozzle 331 and discharge nozzle 333). If the main pipes 411 and 431 are provided for one rail 100 (Fig. 1), the sub-pipes 413 and 433 are branched from the main pipes 411 and 431 corresponding to the respective bo- And may be provided in plural.
- the sub pipe 413 of the supply unit 410 is connected to the first sub pipe 414 connected to the main pipe 411 and the second sub pipe 414 connecting the first sub pipe 414 and the supply nozzle 331 415).
- the sub-pipe 433 of the discharge unit 430 includes a first sub-pipe 434 connected to the main pipe 431 and a second sub-pipe 434 connected to the first sub-pipe 434 and the supply nozzle 333 2 sub-pipe 435.
- the second sub-pipes 415 and 435 may have a small flow cross-sectional area.
- Figure 3 is a conceptual diagram illustrating a fuzzy operation on the vessel (S 2) by a fuzzy assembly 400 of FIG.
- the supply unit 410 further includes a supply valve 417, a supply flow meter 419, and a gas filter 421 in addition to the main pipe 411 and the sub pipe 413 described above .
- the supply valve 417, the supply flow meter 419, and the gas filter 421 are both provided so as to communicate with the second sub pipe 415.
- the supply valve 417 is formed to open and close the flow path for the gas flow in the second sub pipe 415.
- the supply valve 417 is an electric valve, and is formed to perform an operation for opening and closing by an electrical signal.
- the feed flow meter 419 is disposed between the feed valve 417 and the feed nozzle 331 to measure the flow rate of the gas toward the feed nozzle 331.
- a gas filter 421 is provided between the feed flow meter 419 and the feed nozzle 331 to filter foreign substances in the gas supplied into the container S 2 through the feed nozzle 331.
- the discharge unit 430 may further include a discharge valve 437 and a discharge flow meter 439 in addition to the main piping 431 and the sub piping 433 described above. Both the discharge valve 437 and the discharge flow meter 439 are installed so as to communicate with the second sub-pipe 435.
- the discharge valve 437 is formed to open and close the flow path for the gas flow in the second sub-pipe 435.
- the discharge valve 437 is an electric valve, and is formed to perform an operation for opening and closing by an electrical signal.
- the discharge flow meter 439 is disposed between the discharge valve 437 and the discharge nozzle 333 to measure the flow rate of the gas discharged to the outside of the container S 2 through the discharge nozzle 333.
- FIG. 4 is a block diagram for explaining a control configuration of the purge assembly 400 of FIG.
- the shelf 330 may further include a container detection sensor 335.
- the container detecting sensor 335 is provided on the upper surface of the shelf 330 to detect whether the container S 2 is placed on the shelf 330.
- the purge assembly 400 may further include a control unit 450 for controlling the operation of the supply unit 410 and the discharge unit 430 described above.
- the control unit 450 can receive various kinds of information from the supply flow meter 419, the discharge flow meter 439 and the container detection sensor 335 and control the operation of the supply valve 417 and the discharge valve 437 .
- control unit 450 controls the opening and closing of the supply valve 417 and the discharge valve 437 based on the difference between the supply flow rate measured in the supply flow meter 419 and the discharge flow rate measured in the discharge flow meter 439 Can be controlled. Specifically, in the supply flow rate by subtracting the discharge flow rate, the amount of the gas filled in the container (S 2) is calculated. When the amount of the charged gas is less than the reference value, the discharge valve 437 can be closed with the supply valve 417 open. Conversely, if the amount of the charged gas exceeds the criterion, the discharge valve 437 can be opened while the supply valve 417 is closed.
- the control unit 450 can also control the opening and closing of the supply valve 417 and / or the discharge valve 437 based on the detection result of the container detection sensor 335.
- a container sensor 335 Specifically, a container sensor 335.
- the container (S 2) if it detects to be present on the rack 330, it is possible to open the supply valve (417).
- the control unit 450 can control the opening of the discharge valve 437 when the gas is charged to a certain amount in the container S 2 after a certain period of time after controlling the opening of the supply valve 417.
- the above-described wafer purgable ceiling storage device is not limited to the configuration and operation of the above-described embodiments.
- the embodiments may be configured so that all or some of the embodiments may be selectively combined so that various modifications may be made.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
Description
Claims (15)
- 비히클을 안내하기 위해 천장에 설치되도록 형성되는 레일;상기 천장에 설치되도록 형성되고, 웨이퍼를 내부에 수용하는 용기를 상기 비히클로부터 전달받아 보관하도록 형성되는 보관계; 및상기 보관계를 통해 상기 용기에 연통되도록 설치되어, 상기 용기의 내부에 수용된 상기 웨이퍼를 가스로 퍼지하도록 형성되는 퍼지 어셈블리를 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제1항에 있어서,상기 보관계는,본체;상기 본체에 설치되며, 상기 용기를 지지하도록 형성되는 선반; 및상기 본체에 설치되고, 상기 본체가 상기 천장에 체결되게 하도록 형성되는 체결 유닛을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제2항에 있어서,상기 본체는,상기 선반이 설치되는 바닥 프레임; 및상기 바닥 프레임의 양단부에 결합되며, 각각의 자유단에는 상기 체결 유닛이 설치되는 한 쌍의 측벽 프레임을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제2항에 있어서,상기 퍼지 어셈블리는,상기 용기의 내부에 상기 가스를 공급하도록 형성되는 공급 유닛; 및상기 용기의 내부에 주입된 상기 가스를 배출하도록 형성되는 배출 유닛을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제4항에 있어서,상기 선반은, 상기 용기의 내부와 연통되도록 형성되는 공급 노즐 및 배출 노즐을 포함하고,상기 공급 유닛 및 상기 배출 유닛은 각각,상기 레일을 따라 연장 형성되고, 상기 가스가 유동하도록 형성되는 메인 배관; 및상기 메인 배관에 연통되고, 상기 공급 노즐 또는 상기 배출 노즐에 연결되는 서브 배관을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제5항에 있어서,상기 서브 배관은,상기 메인 배관에 연통되는 제1 서브 배관; 및상기 제1 서브 배관과, 상기 공급 노즐 또는 상기 배출 노즐을 연결하고, 상기 제1 서브 배관보다 작은 유동 단면적을 가지는 제2 서브 배관을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제6항에 있어서,상기 공급 유닛은,상기 공급 유닛의 상기 제2 서브 배관에 설치되어, 상기 공급 유닛의 상기 제2 서브 배관을 개폐하도록 형성되는 공급 밸브; 및상기 공급 밸브와 상기 공급 노즐 사이에 위치하도록 상기 공급 유닛의 상기 제2 서브 배관에 설치되어, 상기 선반으로 유동하는 상기 가스의 유량을 측정하도록 형성되는 공급 유량계를 더 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제7항에 있어서,상기 공급 유닛은,상기 공급 유량계와 상기 선반의 공급 노즐 사이에 위치하도록 상기 공급 유닛의 상기 제2 서브 배관에 설치되는 가스 필터를 더 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제7항에 있어서,상기 배출 유닛은,상기 배출 유닛의 상기 제2 서브 배관에 설치되어, 상기 배출 유닛의 상기 제2 서브 배관을 개폐하도록 형성되는 배출 밸브; 및상기 배출 밸브와 상기 배출 노즐 사이에 위치하도록 상기 배출 유닛의 상기 제2 서브 배관에 설치되어, 상기 선반에서 벗어나도록 유동하는 상기 가스의 유량을 측정하도록 형성되는 배출 유량계를 더 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제9항에 있어서,상기 퍼지 어셈블리는,상기 공급 밸브 및 상기 배출 밸브와 연결되어, 상기 공급 밸브 및 상기 배출 밸브 각각의 개폐를 제어하는 제어 유닛을 더 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제10항에 있어서,상기 제어 유닛은, 상기 공급 유량계에서 측정된 공급 유량과 상기 배출 유량계에서 측정된 배출 유량의 차이에 근거하여, 상기 공급 밸브 또는 상기 배출 밸브를 개폐하도록 형성되는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제10항에 있어서,상기 선반은 상기 용기의 존재를 감지하는 용기 감지 센서를 더 포함하고,상기 제어 유닛은, 상기 용기 감지 센서의 감지 결과에 근거하여, 상기 공급 밸브 또는 상기 배출 밸브를 개폐하도록 형성되는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 천장에 설치되는 레일;상기 레일을 따라 이동하도록 형성되고, 웨이퍼를 내부에 수용하는 용기를 적재하도록 형성되는 비히클;상기 레일 옆에 위치하도록 상기 천장에 설치되고, 상기 비히클로부터 상기 용기를 전달받아 보관하도록 형성되는 복수의 보관계; 및상기 보관계를 통해 상기 용기에 연통되도록 설치되어, 상기 용기의 내부에 수용된 상기 웨이퍼를 가스로 퍼지하도록 형성되는 퍼지 어셈블리를 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제13항에 있어서,상기 보관계는,바닥 프레임;상기 바닥 프레임의 양단부에 결합되며, 상기 바닥 프레임과 상기 천장 사이에 위치하도록 형성되는 한 쌍의 측벽 프레임; 및상기 용기를 지지하도록 상기 바닥 프레임에 설치되고, 상기 용기와 연통되는 공급 노즐 및 배출 노즐을 구비하는 선반을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
- 제14항에 있어서,상기 퍼지 어셈블리는,상기 공급 노즐을 통해 상기 용기의 내부에 상기 가스를 공급하도록 형성되며, 상기 가스의 공급을 개시 또는 차단하도록 형성되는 공급 밸브를 구비하는 공급 유닛;상기 배출 노즐을 통해 상기 용기의 내부에 주입된 상기 가스를 배출하도록 형성되며, 상기 가스의 배출을 개시 또는 차단하도록 형성되는 배출 밸브를 구비하는 배출 유닛; 및상기 용기의 내부에 가스량에 근거하여, 상기 공급 밸브 또는 상기 배출 밸브의 작동을 제어하는 제어 유닛을 포함하는, 웨이퍼 퍼지 가능한 천장 보관 장치.
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CN201380020849.9A CN104246970B (zh) | 2012-10-31 | 2013-10-07 | 可吹净晶片的顶棚保管装置 |
JP2015539494A JP6075461B2 (ja) | 2012-10-31 | 2013-10-07 | ウェハパージ可能な天井保管装置(apparatus for stocking and purging wafer at ceiling) |
US14/395,878 US9412631B2 (en) | 2012-10-31 | 2013-10-07 | Ceiling storage device capable of wafer purging |
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CN104246970A (zh) | 2014-12-24 |
US20150235884A1 (en) | 2015-08-20 |
US9412631B2 (en) | 2016-08-09 |
JP2015533026A (ja) | 2015-11-16 |
KR20140055393A (ko) | 2014-05-09 |
SG11201407406RA (en) | 2015-03-30 |
TWI568508B (zh) | 2017-02-01 |
JP6075461B2 (ja) | 2017-02-08 |
CN104246970B (zh) | 2017-06-13 |
TW201416142A (zh) | 2014-05-01 |
KR101418812B1 (ko) | 2014-07-16 |
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