JP2008153680A5 - - Google Patents

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Publication number
JP2008153680A5
JP2008153680A5 JP2008000960A JP2008000960A JP2008153680A5 JP 2008153680 A5 JP2008153680 A5 JP 2008153680A5 JP 2008000960 A JP2008000960 A JP 2008000960A JP 2008000960 A JP2008000960 A JP 2008000960A JP 2008153680 A5 JP2008153680 A5 JP 2008153680A5
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JP
Japan
Prior art keywords
radiant energy
energy source
chamber
substrate
radiant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008000960A
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English (en)
Japanese (ja)
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JP2008153680A (ja
JP4931833B2 (ja
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Publication date
Priority claimed from US09/910,298 external-priority patent/US6376806B2/en
Application filed filed Critical
Publication of JP2008153680A publication Critical patent/JP2008153680A/ja
Publication of JP2008153680A5 publication Critical patent/JP2008153680A5/ja
Application granted granted Critical
Publication of JP4931833B2 publication Critical patent/JP4931833B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2008000960A 2001-07-20 2008-01-08 フラッシュアニール Expired - Fee Related JP4931833B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/910,298 2001-07-20
US09/910,298 US6376806B2 (en) 2000-05-09 2001-07-20 Flash anneal

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003514597A Division JP2004536457A (ja) 2001-07-20 2002-07-18 フラッシュアニール

Publications (3)

Publication Number Publication Date
JP2008153680A JP2008153680A (ja) 2008-07-03
JP2008153680A5 true JP2008153680A5 (enExample) 2011-04-21
JP4931833B2 JP4931833B2 (ja) 2012-05-16

Family

ID=25428586

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003514597A Pending JP2004536457A (ja) 2001-07-20 2002-07-18 フラッシュアニール
JP2008000960A Expired - Fee Related JP4931833B2 (ja) 2001-07-20 2008-01-08 フラッシュアニール

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2003514597A Pending JP2004536457A (ja) 2001-07-20 2002-07-18 フラッシュアニール

Country Status (8)

Country Link
US (1) US6376806B2 (enExample)
EP (1) EP1410423B1 (enExample)
JP (2) JP2004536457A (enExample)
KR (1) KR100809240B1 (enExample)
AT (1) ATE356430T1 (enExample)
DE (1) DE60218690T2 (enExample)
TW (1) TWI270104B (enExample)
WO (1) WO2003009350A2 (enExample)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6048411A (en) * 1997-05-12 2000-04-11 Silicon Genesis Corporation Silicon-on-silicon hybrid wafer assembly
US20070122997A1 (en) * 1998-02-19 2007-05-31 Silicon Genesis Corporation Controlled process and resulting device
US6594446B2 (en) * 2000-12-04 2003-07-15 Vortek Industries Ltd. Heat-treating methods and systems
JP3798674B2 (ja) * 2001-10-29 2006-07-19 大日本スクリーン製造株式会社 熱処理装置および熱処理方法
US7255899B2 (en) * 2001-11-12 2007-08-14 Dainippon Screen Mfg. Co., Ltd. Heat treatment apparatus and heat treatment method of substrate
CN101324470B (zh) * 2001-12-26 2011-03-30 加拿大马特森技术有限公司 测量温度和热处理的方法及系统
US6849831B2 (en) 2002-03-29 2005-02-01 Mattson Technology, Inc. Pulsed processing semiconductor heating methods using combinations of heating sources
US7005601B2 (en) 2002-04-18 2006-02-28 Applied Materials, Inc. Thermal flux processing by scanning
US6987240B2 (en) * 2002-04-18 2006-01-17 Applied Materials, Inc. Thermal flux processing by scanning
JP4429609B2 (ja) * 2002-06-25 2010-03-10 大日本スクリーン製造株式会社 熱処理装置
US6809035B2 (en) * 2002-08-02 2004-10-26 Wafermasters, Inc. Hot plate annealing
JP2004134674A (ja) * 2002-10-11 2004-04-30 Toshiba Corp 基板処理方法、加熱処理装置、パターン形成方法
US6835914B2 (en) * 2002-11-05 2004-12-28 Mattson Technology, Inc. Apparatus and method for reducing stray light in substrate processing chambers
US6881681B2 (en) * 2002-11-22 2005-04-19 Freescale Semiconductor, Inc. Film deposition on a semiconductor wafer
JP4258631B2 (ja) * 2002-12-03 2009-04-30 信越化学工業株式会社 フォトマスクブランク及びフォトマスクの製造方法
JP4988202B2 (ja) 2002-12-20 2012-08-01 マトソン テクノロジー カナダ インコーポレイテッド 工作物の支持及び熱処理の方法とシステム
JP4675579B2 (ja) * 2003-06-30 2011-04-27 大日本スクリーン製造株式会社 光エネルギー吸収比率の測定方法、光エネルギー吸収比率の測定装置および熱処理装置
US7115837B2 (en) * 2003-07-28 2006-10-03 Mattson Technology, Inc. Selective reflectivity process chamber with customized wavelength response and method
US20050074985A1 (en) * 2003-10-01 2005-04-07 Yoo Woo Sik Method of making a vertical electronic device
US7354815B2 (en) * 2003-11-18 2008-04-08 Silicon Genesis Corporation Method for fabricating semiconductor devices using strained silicon bearing material
WO2005059991A1 (en) * 2003-12-19 2005-06-30 Mattson Technology Canada Inc. Apparatuses and methods for suppressing thermally induced motion of a workpiece
US7102141B2 (en) * 2004-09-28 2006-09-05 Intel Corporation Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths
US20060118892A1 (en) * 2004-12-02 2006-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and Structures to Produce a Strain-Inducing Layer in a Semiconductor Device
JP4866020B2 (ja) * 2005-05-02 2012-02-01 大日本スクリーン製造株式会社 熱処理装置
TWI254960B (en) * 2005-07-01 2006-05-11 Chunghwa Picture Tubes Ltd Plasma display device
US20070221640A1 (en) 2006-03-08 2007-09-27 Dean Jennings Apparatus for thermal processing structures formed on a substrate
US7652227B2 (en) * 2006-05-18 2010-01-26 Applied Materials, Inc. Heating and cooling plate for a vacuum chamber
US20080025354A1 (en) * 2006-07-31 2008-01-31 Dean Jennings Ultra-Fast Beam Dithering with Surface Acoustic Wave Modulator
US7548364B2 (en) 2006-07-31 2009-06-16 Applied Materials, Inc. Ultra-fast beam dithering with surface acoustic wave modulator
US8993410B2 (en) 2006-09-08 2015-03-31 Silicon Genesis Corporation Substrate cleaving under controlled stress conditions
US9362439B2 (en) 2008-05-07 2016-06-07 Silicon Genesis Corporation Layer transfer of films utilizing controlled shear region
US7811900B2 (en) * 2006-09-08 2010-10-12 Silicon Genesis Corporation Method and structure for fabricating solar cells using a thick layer transfer process
US8293619B2 (en) 2008-08-28 2012-10-23 Silicon Genesis Corporation Layer transfer of films utilizing controlled propagation
WO2008058397A1 (en) * 2006-11-15 2008-05-22 Mattson Technology Canada, Inc. Systems and methods for supporting a workpiece during heat-treating
US7629275B2 (en) * 2007-01-25 2009-12-08 Taiwan Semiconductor Manufacturing Company, Ltd. Multiple-time flash anneal process
JP2010525581A (ja) * 2007-05-01 2010-07-22 マトソン テクノロジー カナダ インコーポレイテッド 照射パルス熱処理方法および装置
US20090034071A1 (en) * 2007-07-31 2009-02-05 Dean Jennings Method for partitioning and incoherently summing a coherent beam
US20090034072A1 (en) 2007-07-31 2009-02-05 Dean Jennings Method and apparatus for decorrelation of spatially and temporally coherent light
US8148663B2 (en) 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
JP5465373B2 (ja) * 2007-09-12 2014-04-09 大日本スクリーン製造株式会社 熱処理装置
JP5221099B2 (ja) * 2007-10-17 2013-06-26 大日本スクリーン製造株式会社 熱処理装置および熱処理方法
US9498845B2 (en) * 2007-11-08 2016-11-22 Applied Materials, Inc. Pulse train annealing method and apparatus
US7800081B2 (en) * 2007-11-08 2010-09-21 Applied Materials, Inc. Pulse train annealing method and apparatus
JP4816634B2 (ja) * 2007-12-28 2011-11-16 ウシオ電機株式会社 基板加熱装置及び基板加熱方法
US8314368B2 (en) * 2008-02-22 2012-11-20 Applied Materials, Inc. Silver reflectors for semiconductor processing chambers
JP5346484B2 (ja) 2008-04-16 2013-11-20 大日本スクリーン製造株式会社 熱処理方法および熱処理装置
WO2009137940A1 (en) 2008-05-16 2009-11-19 Mattson Technology Canada, Inc. Workpiece breakage prevention method and apparatus
US20100047476A1 (en) * 2008-08-21 2010-02-25 Maa Jer-Shen Silicon Nanoparticle Precursor
US8330126B2 (en) * 2008-08-25 2012-12-11 Silicon Genesis Corporation Race track configuration and method for wafering silicon solar substrates
US8329557B2 (en) * 2009-05-13 2012-12-11 Silicon Genesis Corporation Techniques for forming thin films by implantation with reduced channeling
JP2012043548A (ja) * 2010-08-13 2012-03-01 Thermo Riko:Kk 高効率赤外線導入加熱装置
KR101286058B1 (ko) 2011-03-22 2013-07-19 (주) 엔피홀딩스 열처리 장치
DE102012110343A1 (de) * 2012-10-29 2014-04-30 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur lokal differenzierbaren Bedampfung von Substraten
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
US9842753B2 (en) * 2013-04-26 2017-12-12 Applied Materials, Inc. Absorbing lamphead face
JP5718975B2 (ja) * 2013-05-23 2015-05-13 株式会社Ｓｃｒｅｅｎホールディングス 熱処理方法
JP5898258B2 (ja) * 2014-05-01 2016-04-06 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置
US9287148B1 (en) * 2014-12-18 2016-03-15 Varian Semiconductor Equipment Associates, Inc. Dynamic heating method and system for wafer processing
CN108028214B (zh) * 2015-12-30 2022-04-08 玛特森技术公司 用于毫秒退火系统的气体流动控制
CN107393971A (zh) * 2016-05-16 2017-11-24 昱晶能源科技股份有限公司 回复太阳能电池模块的效率的方法及其可携式装置
JP6783571B2 (ja) * 2016-07-13 2020-11-11 日本碍子株式会社 放射装置及び放射装置を用いた処理装置
CN110785684B (zh) 2017-06-29 2022-06-03 3M创新有限公司 制品及其制造方法
JP7508303B2 (ja) 2020-07-31 2024-07-01 株式会社Ｓｃｒｅｅｎホールディングス 熱処理方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575224A (en) * 1978-12-01 1980-06-06 Ushio Inc Annealing furnace
US4356384A (en) 1980-03-03 1982-10-26 Arnon Gat Method and means for heat treating semiconductor material using high intensity CW lamps
US4436985A (en) 1982-05-03 1984-03-13 Gca Corporation Apparatus for heat treating semiconductor wafers
US4707217A (en) 1986-05-28 1987-11-17 The United States Of America As Represented By The Secretary Of The Navy Single crystal thin films
US4755654A (en) 1987-03-26 1988-07-05 Crowley John L Semiconductor wafer heating chamber
US5073698A (en) * 1990-03-23 1991-12-17 Peak Systems, Inc. Method for selectively heating a film on a substrate
JPH0448621A (ja) * 1990-06-14 1992-02-18 Fujitsu Ltd 半導体装置の製造方法及び製造装置
US5446825A (en) * 1991-04-24 1995-08-29 Texas Instruments Incorporated High performance multi-zone illuminator module for semiconductor wafer processing
GB2284469B (en) 1993-12-01 1997-12-03 Spectral Technology Limited Lamp assembly
US5452396A (en) * 1994-02-07 1995-09-19 Midwest Research Institute Optical processing furnace with quartz muffle and diffuser plate
JP3195157B2 (ja) 1994-03-28 2001-08-06 シャープ株式会社 半導体装置の製造方法およびその製造装置
US5712191A (en) 1994-09-16 1998-01-27 Semiconductor Energy Laboratory Co., Ltd. Method for producing semiconductor device
JP3573811B2 (ja) 1994-12-19 2004-10-06 株式会社半導体エネルギー研究所 線状レーザー光の照射方法
DE19544838A1 (de) 1995-12-01 1997-06-05 Bosch Gmbh Robert Zündvorrichtung für eine Hochdruck-Gasentladungslampe
US5756369A (en) 1996-07-11 1998-05-26 Lsi Logic Corporation Rapid thermal processing using a narrowband infrared source and feedback
JPH1174206A (ja) * 1997-08-27 1999-03-16 Japan Steel Works Ltd:The 多結晶半導体の製造方法および製造装置
US6080965A (en) * 1997-09-18 2000-06-27 Tokyo Electron Limited Single-substrate-heat-treatment apparatus in semiconductor processing system
JPH1197370A (ja) 1997-09-18 1999-04-09 Tokyo Electron Ltd 熱処理装置
KR20010006155A (ko) * 1998-02-13 2001-01-26 야스카와 히데아키 반도체장치의 제조방법 및 열처리장치
US6144171A (en) 1999-05-07 2000-11-07 Philips Electronics North America Corporation Ignitor for high intensity discharge lamps
DE19923400A1 (de) * 1999-05-21 2000-11-30 Steag Rtp Systems Gmbh Vorrichtung und Verfahren zum thermischen Behandeln von Substraten
JP2003100638A (ja) * 2001-07-16 2003-04-04 Seiko Epson Corp 半導体薄膜及び薄膜トランジスタの製造方法、電気光学装置及び電子機器

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