JP2008021921A - 配線基板、半導体装置およびその製造方法 - Google Patents
配線基板、半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP2008021921A JP2008021921A JP2006194353A JP2006194353A JP2008021921A JP 2008021921 A JP2008021921 A JP 2008021921A JP 2006194353 A JP2006194353 A JP 2006194353A JP 2006194353 A JP2006194353 A JP 2006194353A JP 2008021921 A JP2008021921 A JP 2008021921A
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- wiring
- wiring board
- insulating film
- pattern
- substrate
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Abstract
【解決手段】ベース絶縁膜111と、ベース絶縁膜111の上面側に形成された第1配線と、ベース絶縁膜111に形成されたビアホール113内に設けられたビア導電体と、ビア導電体を介して第1配線と接続されベース絶縁膜111の下面側に設けられた第2配線を有する配線基板であって、第1配線、ビア導体および第2配線を備え、互いに区分された区分基板領域単位を複数有し、ベース絶縁膜111に反り制御パターンが設けられ、当該配線基板を水平板上に静置したときに、特定方向に沿った一対の各辺の少なくとも中央部が接地し且つ両端が浮き上がる反り形状を有する配線基板。
【選択図】図1
Description
前記ベース絶縁膜の上面側に形成された第1配線と、
前記ベース絶縁膜に形成されたビアホール内に設けられたビア導電体と、
前記ビア導電体を介して第1配線と接続され前記ベース絶縁膜の下面側に設けられた第2配線を有する配線基板であって、
第1配線、前記ビア導体および第2配線を備え、互いに区分された区分基板領域単位を複数有し、
前記ベース絶縁膜に反り制御パターンが設けられ、
当該配線基板を水平板上に静置したときに、基板平面内の第1方向に垂直な第2方向に沿った各辺の少なくとも中央部が接地し且つ両端が浮き上がる反り形状を有する配線基板。
前記ベース絶縁膜の上面側に形成された凹部に設けられた第1配線と、
前記ベース絶縁膜に形成されたビアホール内に設けられたビア導電体と、
前記ビア導電体を介して第1配線と接続され前記ベース絶縁膜の下面側に設けられた第2配線を有する配線基板であって、
第1配線、前記ビア導体および第2配線を備え、互いに区分された区分基板領域単位を複数有し、
前記ベース絶縁膜に反り制御パターンが設けられ、
前記反り制御パターンは、前記ベース絶縁膜の上面側に形成された凹部に設けられたパターンであって、当該配線基板の基板平面内の第1方向に垂直な第2方向に沿った各辺の両端が当該辺の中央部より上方に反るようにライン状パターンを有し、
当該配線基板を第1配線形成面を上にして水平板上に静置したときに、第2方向に沿った各辺の少なくとも中央部が接地し且つ両端が浮き上がる反り形状を有する配線基板。
前記配線基板を、その第1方向が搬送方向に沿うように、第1配線が形成された上面側を上にしてステージ上へ載置する工程と、
前記配線基板の上面側へ半導体チップを搭載する工程と、
半導体チップが搭載された配線基板を第1方向へ搬送する工程を有する半導体装置の製造方法。
まず、本発明の配線基板が有する基本配線構造について図1を用いて説明する。
本発明者らは、このようなブロック基板に、上層配線形成面側が谷となるように湾曲する反りが発生しやすいことに着目した。特に、配線基板の上層配線形成面側に半導体チップを搭載するために、上層配線形成面を上に向けて水平板上に静置した場合、この反りは、X−Y直交座標においてX方向の上層配線が多いとき、図5(a)に示すようにY方向の各辺(短辺)の両端が浮き上がる(X方向の両辺が浮き上がる)ように反ることを見出した。逆に、Y方向の上層配線が多い場合、図5(b)に示すようにX方向の各辺(長辺)の両端が浮き上がる(Y方向の両辺が浮き上がる)ように反ることを見出した。
以下に本発明におけるベース絶縁膜として、好適な樹脂材料について説明する。
温度がt℃のときの弾性率をDt、温度がt℃のときの破断強度をHtとしたとき、
(2)D23 ≧ 5GPa、
(3)D150 ≧ 2.5GPa
(4)D-65/D150 ≦ 3.0
(5)H23 ≧ 140MPa
(6)H-65/H150 ≦ 2.3。
次に半導体装置の構造について説明する。
以下に、配線基板の製造方法について説明する。図11に、図1に示す配線基板の製造工程断面図を示す。
以上のようにして形成された配線基板を用いて、周知の方法により、例えば前述の図10に示すようにバンプを介して半導体チップを搭載し、必要によりアンダーフィルを充填し、さらに必要によりモールド樹脂により封止して半導体パッケージを形成することができる。得られた半導体パッケージは、周知の方法でボードに実装することができる。
111 ベース絶縁膜
111a 凹部
112 上層配線
112a エッチングバリア層
112b 配線本体層
112c 高エッチングレート層
113 ビアホール
114 下層配線
115 ソルダーレジスト層
116 層間絶縁膜
117 ビアホール
118 第2の下層配線
120 半導体チップ
121 バンプ
122 アンダーフィル
131 半田ボール
141 支持基板
142 レジスト層
201 配線基板の構成単位(製品部)
202 配線基板の周縁領域
202a 配線基板の格子状領域
301 ラインアンドスペースパターンからなるパターン領域単位
302 円形ベタパターンからなるパターン領域単位
501 金属板
502 絶縁層
503 ビアホール
504 配線パターン
505 フリップチップパッド部
506 絶縁層
507 基板補強体
508 外部電極端子
601 支持板
602 電極
603 絶縁層
604 ビアホール
605 配線
606 支持体
607 配線基板
700 配線基板
701 ステージ
702 吸引ライン
703 基板押さえ部材
1001 ベース絶縁膜(コア膜)
1002 上層配線
1003 ビア導電体
1004 下層配線
1005、1006 ソルダーレジスト層
Claims (23)
- ベース絶縁膜と、
前記ベース絶縁膜の上面側に形成された第1配線と、
前記ベース絶縁膜に形成されたビアホール内に設けられたビア導電体と、
前記ビア導電体を介して第1配線と接続され前記ベース絶縁膜の下面側に設けられた第2配線を有する配線基板であって、
第1配線、前記ビア導体および第2配線を備え、互いに区分された区分基板領域単位を複数有し、
前記ベース絶縁膜に反り制御パターンが設けられ、
当該配線基板を水平板上に静置したときに、基板平面内の第1方向に垂直な第2方向に沿った各辺の少なくとも中央部が接地し且つ両端が浮き上がる反り形状を有する配線基板。 - ベース絶縁膜と、
前記ベース絶縁膜の上面側に形成された凹部に設けられた第1配線と、
前記ベース絶縁膜に形成されたビアホール内に設けられたビア導電体と、
前記ビア導電体を介して第1配線と接続され前記ベース絶縁膜の下面側に設けられた第2配線を有する配線基板であって、
第1配線、前記ビア導体および第2配線を備え、互いに区分された区分基板領域単位を複数有し、
前記ベース絶縁膜に反り制御パターンが設けられ、
前記反り制御パターンは、前記ベース絶縁膜の上面側に形成された凹部に設けられたパターンであって、当該配線基板の基板平面内の第1方向に垂直な第2方向に沿った各辺の両端が当該辺の中央部より上方に反るようにライン状パターンを有し、
当該配線基板を第1配線形成面を上にして水平板上に静置したときに、第2方向に沿った各辺の少なくとも中央部が接地し且つ両端が浮き上がる反り形状を有する配線基板。 - 前記反り制御パターンは、少なくとも、前記区分領域単位が複数形成された領域の周辺部に設けられている請求項2に記載の配線基板。
- 前記反り制御パターンと第1配線は、第1方向に沿ったX成分の合計成分と、第2方向に沿ったY成分の合計成分との成分比率(X/Y)が1より大きい請求項2又は3に記載の配線基板。
- 前記反り制御パターンは、第1方向に沿ったラインアンドスペースパターンを有する請求項3〜4のいずれかに記載の配線基板。
- 前記反り制御パターンは、区分された複数の区分パターン領域単位で構成されている請求項3〜5のいずれかに記載の配線基板。
- 前記反り制御パターンは、前記区分パターン領域単位がマトリクス状に配置されている請求項6に記載の配線基板。
- 前記区分基板領域単位外部の反り制御パターン形成領域内における凹部内パターン面積Aと凹部外面積Bとの平面投射面積比R1(A/B)と、前記区分基板領域単位内部における凹部内配線面積Pと凹部外面積Qとの平面投射面積比R2(P/Q)との比率(R1/R2)が0.8〜1.2である請求項2〜7のいずれかに記載の配線基板。
- 前記区分基板領域単位外部の反り制御パターン形成領域内における凹部内パターン面積Aと凹部外面積Bとの平面投射面積比(A/B)が0.1〜0.5である請求項2〜8のいずれかに記載の配線基板。
- 前記反り制御パターンは、第1配線と同じ材料で形成され、同じ厚みを有している請求項2〜9のいずれかに記載の配線基板。
- 前記第1配線の上面が、前記ベース絶縁膜の上面より下方に位置している請求項2〜10のいずれかに記載の配線基板。
- 前記第1配線の上面が、前記ベース絶縁膜の上面と同一平面内にある請求項2〜10のいずれかに記載の配線基板。
- 基板の下面側にソルダーレジスト層を有する請求項1〜12のいずれかに記載の配線基板。
- 前記区分基板領域単位がマトリクス状に配置されている請求項1〜13のいずれかに記載の配線基板。
- 前記区分基板領域単位は、第1方向に沿って配列された数が第2方向に沿って配列された数より多くなるように配置されている請求項14に記載の配線基板。
- 当該配線基板の第1方向に沿った辺が第2方向に沿った辺より長い矩形形状を有している請求項1〜15のいずれかに記載の配線基板。
- 当該配線基板の第1方向に沿った各辺が全体にわたって浮き上がる反り形状を有する請求項1〜16のいずれかに記載の配線基板。
- 前記ベース絶縁膜の下面側に設けられた絶縁層と、この絶縁層に形成されたビアホール内に設けられたビア導電体と、このビア導電体を介して上方の配線と接続され当該絶縁層の下面に設けられた配線とを含む配線構造層をさらに一つ又は複数有する請求項1〜17のいずれかに記載の配線基板。
- 前記ベース絶縁膜が、耐熱性樹脂または繊維強化耐熱性樹脂複合材料からなる請求項1〜18のいずれかに記載の配線基板。
- 請求項1〜19のいずれかに記載の配線基板と、この配線基板の第1配線が形成された上面側に搭載され第1配線と接続されている半導体チップとを有する半導体装置。
- 請求項1〜19のいずれかに記載の配線基板を用意する工程と、
前記配線基板を、その第1方向が搬送方向に沿うように、第1配線が形成された上面側を上にしてステージ上へ載置する工程と、
前記配線基板の上面側へ半導体チップを搭載する工程と、
半導体チップが搭載された配線基板を第1方向へ搬送する工程を有する半導体装置の製造方法。 - 前記ステージは、ステージ上に載置された配線基板の第1方向に沿った両辺を押さえる押さえ部材を有し、この押さえ部材により、ステージ上に載置された配線基板の第1方向に沿った両辺を押さえる工程を有する請求項21に記載の半導体装置の製造方法。
- 前記ステージは、ステージ上に載置された配線基板を吸引固定するための吸引手段を有し、ステージ上に載置された配線基板を吸引固定する工程を有する請求項21又は22に記載の半導体装置の製造方法。
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Also Published As
Publication number | Publication date |
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US20080012140A1 (en) | 2008-01-17 |
CN101106121A (zh) | 2008-01-16 |
US7649749B2 (en) | 2010-01-19 |
TWI360212B (en) | 2012-03-11 |
JP5117692B2 (ja) | 2013-01-16 |
US20090137085A1 (en) | 2009-05-28 |
CN101106121B (zh) | 2010-12-08 |
KR100933346B1 (ko) | 2009-12-22 |
US7701726B2 (en) | 2010-04-20 |
TW200810065A (en) | 2008-02-16 |
KR20080007103A (ko) | 2008-01-17 |
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