JP2007281485A - 狭いトレンチ中でスーパー第2結晶粒の成長を発生させる方法 - Google Patents
狭いトレンチ中でスーパー第2結晶粒の成長を発生させる方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 105
- 239000013078 crystal Substances 0.000 title claims abstract description 39
- 239000010949 copper Substances 0.000 claims abstract description 196
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 131
- 229910052802 copper Inorganic materials 0.000 claims abstract description 131
- 239000004065 semiconductor Substances 0.000 claims abstract description 31
- 230000001939 inductive effect Effects 0.000 claims abstract description 20
- 230000004888 barrier function Effects 0.000 claims description 66
- 238000005240 physical vapour deposition Methods 0.000 claims description 41
- 238000000151 deposition Methods 0.000 claims description 32
- 230000008569 process Effects 0.000 claims description 29
- 238000004070 electrodeposition Methods 0.000 claims description 28
- 239000011572 manganese Substances 0.000 claims description 27
- 230000008021 deposition Effects 0.000 claims description 19
- 238000007747 plating Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 13
- 239000010936 titanium Substances 0.000 claims description 11
- 238000001953 recrystallisation Methods 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 8
- 230000009977 dual effect Effects 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 157
- 238000000137 annealing Methods 0.000 description 24
- 239000010408 film Substances 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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Abstract
【解決手段】再結晶した電気化学的に堆積された銅(ECD−Cu)により充填された、少なくとも1つのトレンチおよび/または少なくとも1つのビアを含む半導体装置において、再結晶したECD−Cuの少なくとも80%、85%、90%、91%、または92%が、[100]方位で、少なくとも10ミクロンの寸法を有する銅結晶粒からなる。
【選択図】図2
Description
少なくとも1つのトレンチおよび/または少なくとも1つビアを、誘電体材料の層に開口部をエッチングすることにより提供する工程と、
(誘電体材料中への銅の拡散を防止するために)開口部中にバリア層を堆積または形成する工程と、
バリア層上への電気化学的堆積(または電気化学的メッキ)プロセスの手段により堆積した銅で、開口部を充填する工程と、
ECD−Cu上に直接、物理的気相成長プロセスの手段で、更に銅層を堆積する工程と、
PVD−Cuを再結晶(即ち、スーパー第2結晶粒成長)するための熱処理を行い、これにより、ECD−Cu(4)にも再結晶(即ち、スーパー第2結晶粒成長)を導入する工程と、
余剰の銅を除去する工程とを含む方法に関する。
Claims (35)
- 再結晶した電気化学的に堆積された銅(ECD−Cu)が充填された、少なくとも1つのトレンチおよび/または少なくとも1つのビアを含む半導体装置であって、
再結晶したECD−Cuの少なくとも80%が、[100]方位と、少なくとも10ミクロンの寸法を有する銅の結晶粒からなる半導体装置。 - 再結晶したECD−Cuの少なくとも93%が、[100]方位と、少なくとも10ミクロンの寸法を有する銅の結晶粒からなる請求項1のかかる半導体装置。
- 再結晶したECD−Cuの少なくとも98%が、[100]方位と、少なくとも10ミクロンの寸法を有する銅の結晶粒からなる請求項1のかかる半導体装置。
- [100]方位を有する銅の結晶粒が、少なくとも25ミクロンの寸法である請求項1〜3のいずれかにかかる半導体装置。
- [100]方位を有する銅の結晶粒が、少なくとも100ミクロンの寸法である請求項1〜3のいずれかにかかる半導体装置。
- トレンチが、200nmより小さな幅を有する請求項1〜5のいずれかにかかる半導体装置。
- トレンチが、1より大きなアスペクト比(幅に対する高さの比)を有する請求項6にかかる半導体装置。
- 再結晶したECD−Cuが、拡散バリア層の上に横たわる請求項1〜7のいずれかにかかる半導体装置。
- 拡散バリア層が、8nmより小さな厚みを有する請求項8にかかる半導体装置。
- 拡散バリア層が、タンタル(Ta)、チタン(Ti)、ルテニウム(Ru)、タングステン(W)、および/またはマンガン(Mn)を含むまたはからなる請求項8または9にかかる半導体装置。
- 少なくとも1つのトレンチおよび/または少なくとも1つのビアを銅で埋める方法であって、
誘電体材料(1)の層に開口部をエッチングし、少なくとも1つのトレンチおよび/または少なくとも1つのビアを形成する工程と、
誘電体材料(1)中に銅が拡散するのを防止するために、開口部中にバリア層(2)を堆積または形成する工程と、
バリア層(2)上への電気化学的堆積(または電気化学的メッキ)プロセスの手段により、銅(4)を堆積させて開口部を充填する工程と、
ECD−Cu(4)上に直接、物理的気相堆積プロセスの手段で更に銅層(5)を堆積する工程と、
PVD−Cu(5)の再結晶を誘起する(即ち、スーパー第2結晶粒成長を誘起する)ために熱処理を行い、これにより、再結晶(即ち、スーパー第2結晶粒成長)をECD−Cu(4)中にも誘起する工程と、
余剰の銅を除去する工程とを含む方法。 - トレンチが、50nmと200nmの間に幅を有する請求項11にかかる方法。
- トレンチが、1より大きなアスペクト比を有する請求項12にかかる方法。
- 熱処理が、(約)100℃と(約)420℃の間の温度で行われる請求項11〜13のいずれかにかかる方法。
- 熱処理が、(約)200℃で行われる請求項14にかかる方法。
- 250Wの基板バイアスが、PVD−Cu(5)の堆積のためのPVD堆積中に適用される請求項11〜15のいずれかにかかる方法。
- 熱処理が、少なくとも30分行われる請求項11〜16のいずれかにかかる方法。
- PVD−Cu層(5)の膜厚が、400nmと1000nmの間である請求項11〜17のいずれかにかかる方法。
- バリア層(2)が、タンタル(Ta)、チタン(Ti)、ルテニウム(Ru)、タングステン(W)、および/またはマンガン(Mn)を含むまたはからなる請求項11〜18のいずれかにかかる方法。
- バリア層(2)が、α−Ta、β−Ta、又はTaNを含むまたはからなる請求項11〜19のいずれかにかかる方法。
- ECD−Cu(4)の堆積工程の前に、好適には物理的気相堆積プロセスの手段により、バリア層(2)上に銅のシード層(3)を堆積する工程を更に含む請求項11〜20のいずれかにかかる方法。
- 最初、物理的気相堆積により、銅のシード層(3)の堆積中に、銅のシード層(3)中にMnを混入しながらバリア層(2)を形成し、続いて、Mn含有シード層をアニールする請求項11〜18のいずれかにかかる方法。
- PVD−Cu(5)の堆積工程前に、余剰のECD−Cu(4)を除去する工程を更に含む請求項11〜22のいずれかにかかる方法。
- PVD−Cu(5)の堆積工程前に、可能であればバリア層(2)をストッピング層として用いて、余剰のECD−Cu(4)とシード層(3)とを除去する工程を更に含む請求項21にかかる方法。
- 余剰のECD−Cu(4)および可能であれば余剰のシード層(3)の除去工程が、化学機械研磨(CMP)により行われる請求項23又は24にかかる方法。
- 余剰のPVD−Cu(5)と余剰のバリア層(2)とを除去する工程を更に含む請求項11〜25のいずれかにかかる方法。
- 余剰のPVD−Cu(5)と余剰のバリア層(2)を除去する工程が、化学機械研磨(CMP)で行われる請求項26にかかる方法。
- 余剰のPVD−Cu(5)と余剰のバリア層(2)を除去する工程が、ドライおよび/またはウエットエッチバックで行われる請求項26にかかる方法。
- MnがECD−Cu(4)中に混入され、熱処理工程中に、誘電体層に向かって移動してバリア層として働く請求項11〜28のいずれかにかかる方法。
- 再結晶したECD−Cuの少なくとも80%が、[100]方位で、少なくとも10ミクロンの寸法を有する銅結晶粒からなる請求項11〜29のいずれかにかかる方法。
- 再結晶したECD−Cuの少なくとも93%が、[100]方位で、少なくとも10ミクロンの寸法を有する銅結晶粒からなる請求項11〜29のいずれかにかかる方法。
- 再結晶したECD−Cuの少なくとも98%が、[100]方位で、少なくとも10ミクロンの寸法を有する銅結晶粒からなる請求項11〜29のいずれかにかかる方法。
- 請求項11〜32のいずれかにかかる方法を含む相互接続形成用のダマシン方法。
- 請求項11〜32のいずれかにかかる方法を含む相互接続形成用のデュアルダマシン方法。
- 請求項11〜34のいずれかにかかる方法により得られる半導体装置。
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EP06126251A EP1845554A3 (en) | 2006-04-10 | 2006-12-15 | A method to create super secondary grain growth in narrow trenches |
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Also Published As
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US20070238294A1 (en) | 2007-10-11 |
EP1845554A2 (en) | 2007-10-17 |
US7745935B2 (en) | 2010-06-29 |
EP1845554A3 (en) | 2011-07-13 |
US7452812B2 (en) | 2008-11-18 |
US20090102051A1 (en) | 2009-04-23 |
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