JP2007165528A - 基板処理装置および基板処理方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0014—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by incorporation in a layer which is removed with the contaminants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Abstract
【解決手段】前処理ユニット2においてその表面に液膜が形成された基板Wは、基板搬送ロボット12により前処理ユニット2から該前処理ユニット2とは分離して配設された凍結処理ユニット4に搬送される。凍結処理ユニット4では、液膜が凍結されることで、基板表面に付着する汚染物質と基板Wとの間の付着力が低減され、さらには汚染物質が基板表面から脱離する。続いて、凍結処理された基板Wは凍結処理ユニット4から該凍結処理ユニット4とは分離して設けられた後処理ユニット6に装置内で搬送され、回転される基板上の凍結膜に洗浄液が供給されることで該凍結膜とともに基板Wに付着する汚染物質が容易に除去される。
【選択図】図1
Description
4…凍結処理ユニット
6…後処理ユニット
12…基板搬送ロボット(搬送手段)
21…スピンチャック(第1保持手段)
22…ノズル(第1上面処理ノズル)
23…モータ(第1回転手段)
42…クーリングプレート(基板冷却部)
42a…基板冷却面
43…プロキシミティボール(支持手段)
61…スピンチャック(第2保持手段)
63…モータ(第2回転手段)
64…ノズル(下面処理ノズル)
74…ノズル(第2上面処理ノズル)
Claims (9)
- 基板を洗浄処理する基板処理装置において、
基板に前処理液を塗布して前記基板の被処理面に前処理液の液膜を形成する前処理ユニットと、
前記基板の被処理面に形成された液膜を凍結させる凍結処理ユニットと、
凍結後の液膜に後処理液を供給して該液膜を前記基板の被処理面から除去する後処理ユニットと、
装置内で相互に分離配置された前記3つの処理ユニットのうち前記前処理ユニットと前記凍結処理ユニットの間および前記凍結処理ユニットと前記後処理ユニットの間で基板を装置内で搬送する搬送手段と
を備えたことを特徴とする基板処理装置。 - 前記凍結処理ユニットは、前記前処理ユニットおよび/または前記後処理ユニットの上方に配置される請求項1記載の基板処理装置。
- 前記前処理ユニットは、前記基板を保持する第1保持手段と、前記第1保持手段により保持された基板を回転させる第1回転手段と、前記第1回転手段により回転される前記基板の上面に前記前処理液を供給する第1上面処理ノズルとを有する請求項1または2記載の基板処理装置。
- 前記凍結処理ユニットは、その表面温度が前記前処理液の凝固点より低い温度を有する基板冷却面を有し、該基板冷却面を前記基板と対向しながら近接配置して前記基板を冷却する基板冷却部と、前記基板の下面に当接して前記基板を支持しながら前記基板と前記基板冷却部を離間配置する支持手段とを有する請求項1ないし3のいずれかに記載の基板処理装置。
- 前記後処理ユニットは、前記基板を保持する第2保持手段と、前記第2保持手段により保持された基板を回転させる第2回転手段と、前記第2回転手段により回転される前記基板の上面に前記後処理液を供給する第2上面処理ノズルとを有する請求項1ないし4のいずれかに記載の基板処理装置。
- 前記後処理ユニットは、前記第2回転手段により回転される前記基板の下面に前記後処理液を供給する下面処理ノズルをさらに有する請求項5記載の基板処理装置。
- 基板を洗浄処理する基板処理方法において、
前処理ユニットにおいて基板の被処理面に前処理液を塗布して前処理液による液膜を形成する液膜形成工程と、
前記前処理液の液膜が形成された基板を、前記前処理ユニットから分離して設けられた凍結処理ユニットに搬送する第1搬送工程と、
前記凍結処理ユニットにおいて液膜を凍結させる凍結工程と、
前記凍結処理ユニットにより液膜が凍結された基板を、前記凍結処理ユニットから分離して設けられた後処理ユニットに搬送する第2搬送工程と、
前記後処理ユニットにおいて前記基板の被処理面に後処理液を供給して前記凍結後の液膜を除去する膜除去工程と
を備えたことを特徴とする基板処理方法。 - 前記第1搬送工程は、前記基板の被処理面に形成された液膜が乾燥しないうちに、前記基板を前記前処理ユニットから前記凍結処理ユニットへ搬送する請求項7記載の基板処理方法。
- 前記第2搬送工程は、凍結後の液膜が融解しないうちに、前記基板を前記凍結処理ユニットから前記後処理ユニットへ搬送する請求項7または8記載の基板処理方法。
Priority Applications (4)
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JP2005358866A JP4514700B2 (ja) | 2005-12-13 | 2005-12-13 | 基板処理装置および基板処理方法 |
TW095131930A TWI327750B (en) | 2005-12-13 | 2006-08-30 | Substrate processing apparatus and substrate processing method |
KR1020060109795A KR100843374B1 (ko) | 2005-12-13 | 2006-11-08 | 기판처리장치 및 기판처리방법 |
US11/567,452 US7867337B2 (en) | 2005-12-13 | 2006-12-06 | Substrate processing method and substrate processing apparatus |
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JP2005358866A JP4514700B2 (ja) | 2005-12-13 | 2005-12-13 | 基板処理装置および基板処理方法 |
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JP2007165528A true JP2007165528A (ja) | 2007-06-28 |
JP4514700B2 JP4514700B2 (ja) | 2010-07-28 |
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JP (1) | JP4514700B2 (ja) |
KR (1) | KR100843374B1 (ja) |
TW (1) | TWI327750B (ja) |
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JP2017174966A (ja) * | 2016-03-23 | 2017-09-28 | 東芝メモリ株式会社 | 基板の生産方法、基板処理装置、および基板の生産システム |
JP2018164031A (ja) * | 2017-03-27 | 2018-10-18 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
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US10486203B2 (en) | 2016-03-23 | 2019-11-26 | Toshiba Memory Corporation | Substrate production method, substrate processing apparatus, and substrate production system |
JP2017174966A (ja) * | 2016-03-23 | 2017-09-28 | 東芝メモリ株式会社 | 基板の生産方法、基板処理装置、および基板の生産システム |
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Also Published As
Publication number | Publication date |
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US7867337B2 (en) | 2011-01-11 |
KR20070062908A (ko) | 2007-06-18 |
TW200723379A (en) | 2007-06-16 |
JP4514700B2 (ja) | 2010-07-28 |
TWI327750B (en) | 2010-07-21 |
KR100843374B1 (ko) | 2008-07-03 |
US20070131246A1 (en) | 2007-06-14 |
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