JP2005502193A5 - - Google Patents

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Publication number
JP2005502193A5
JP2005502193A5 JP2003524788A JP2003524788A JP2005502193A5 JP 2005502193 A5 JP2005502193 A5 JP 2005502193A5 JP 2003524788 A JP2003524788 A JP 2003524788A JP 2003524788 A JP2003524788 A JP 2003524788A JP 2005502193 A5 JP2005502193 A5 JP 2005502193A5
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article
sacrificial template
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template
composite
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JP2003524788A
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JP2005502193A (ja
JP4401168B2 (ja
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Priority claimed from US09/947,253 external-priority patent/US6958093B2/en
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JP2003524788A 2001-09-05 2002-08-12 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎ物品を形成する方法 Expired - Lifetime JP4401168B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/947,253 US6958093B2 (en) 1994-01-27 2001-09-05 Free-standing (Al, Ga, In)N and parting method for forming same
PCT/US2002/025412 WO2003020497A1 (en) 2001-09-05 2002-08-12 Free-standing (al, ga, in)n and parting method for forming same

Related Child Applications (1)

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JP2008103245A Division JP4958833B2 (ja) 2001-09-05 2008-04-11 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎを形成するための分割方法および装置

Publications (3)

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JP2005502193A JP2005502193A (ja) 2005-01-20
JP2005502193A5 true JP2005502193A5 (enExample) 2006-01-12
JP4401168B2 JP4401168B2 (ja) 2010-01-20

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JP2003524788A Expired - Lifetime JP4401168B2 (ja) 2001-09-05 2002-08-12 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎ物品を形成する方法
JP2008103245A Expired - Lifetime JP4958833B2 (ja) 2001-09-05 2008-04-11 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎを形成するための分割方法および装置
JP2011229598A Expired - Lifetime JP5580803B2 (ja) 2001-09-05 2011-10-19 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎ物品を形成する方法

Family Applications After (2)

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JP2008103245A Expired - Lifetime JP4958833B2 (ja) 2001-09-05 2008-04-11 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎを形成するための分割方法および装置
JP2011229598A Expired - Lifetime JP5580803B2 (ja) 2001-09-05 2011-10-19 独立（Ａｌ、Ｇａ、Ｉｎ）Ｎ物品を形成する方法

Country Status (8)

Country Link
US (1) US6958093B2 (enExample)
EP (3) EP2248931B1 (enExample)
JP (3) JP4401168B2 (enExample)
KR (2) KR100921409B1 (enExample)
CN (3) CN100420569C (enExample)
MY (1) MY130719A (enExample)
TW (1) TW593797B (enExample)
WO (1) WO2003020497A1 (enExample)

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