JP2005191454A5 - - Google Patents
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- Publication number
- JP2005191454A5 JP2005191454A5 JP2003433992A JP2003433992A JP2005191454A5 JP 2005191454 A5 JP2005191454 A5 JP 2005191454A5 JP 2003433992 A JP2003433992 A JP 2003433992A JP 2003433992 A JP2003433992 A JP 2003433992A JP 2005191454 A5 JP2005191454 A5 JP 2005191454A5
- Authority
- JP
- Japan
- Prior art keywords
- mos transistor
- driver
- insulating film
- interlayer insulating
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 34
- 239000011229 interlayer Substances 0.000 claims 20
- 239000004065 semiconductor Substances 0.000 claims 14
- 239000003990 capacitor Substances 0.000 claims 8
- 229910044991 metal oxide Inorganic materials 0.000 claims 3
- 150000004706 metal oxides Chemical class 0.000 claims 3
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003433992A JP4753534B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
| KR1020040105290A KR20050067003A (ko) | 2003-12-26 | 2004-12-14 | 반도체 기억장치 |
| US11/016,905 US7064398B2 (en) | 2003-12-26 | 2004-12-21 | Semiconductor memory device |
| US11/414,372 US7514737B2 (en) | 2003-12-26 | 2006-05-01 | Semiconductor memory device |
| US12/396,130 US7791122B2 (en) | 2003-12-26 | 2009-03-02 | Semiconductor memory device |
| US12/858,797 US8129771B2 (en) | 2003-12-26 | 2010-08-18 | Semiconductor memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003433992A JP4753534B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010122734A Division JP2010183123A (ja) | 2010-05-28 | 2010-05-28 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005191454A JP2005191454A (ja) | 2005-07-14 |
| JP2005191454A5 true JP2005191454A5 (enExample) | 2007-02-15 |
| JP4753534B2 JP4753534B2 (ja) | 2011-08-24 |
Family
ID=34697749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003433992A Expired - Fee Related JP4753534B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体記憶装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (4) | US7064398B2 (enExample) |
| JP (1) | JP4753534B2 (enExample) |
| KR (1) | KR20050067003A (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4753534B2 (ja) * | 2003-12-26 | 2011-08-24 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
| JP4195409B2 (ja) * | 2004-04-09 | 2008-12-10 | 株式会社東芝 | 半導体記憶装置 |
| US20050275043A1 (en) * | 2004-06-10 | 2005-12-15 | Chien-Chao Huang | Novel semiconductor device design |
| US7921400B1 (en) | 2005-07-20 | 2011-04-05 | Integrated Device Technology, Inc. | Method for forming integrated circuit device using cell library with soft error resistant logic cells |
| JP2007103862A (ja) | 2005-10-07 | 2007-04-19 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP2007287959A (ja) * | 2006-04-18 | 2007-11-01 | Matsushita Electric Ind Co Ltd | 半導体記憶装置 |
| US7864561B2 (en) * | 2006-07-28 | 2011-01-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Cell structure with buried capacitor for soft error rate improvement |
| US8853791B2 (en) * | 2006-11-06 | 2014-10-07 | Infineon Technologies Ag | SRAM memory cell having a dogleg shaped gate electrode structure |
| JP5109403B2 (ja) * | 2007-02-22 | 2012-12-26 | 富士通セミコンダクター株式会社 | 半導体記憶装置およびその製造方法 |
| JP5223302B2 (ja) * | 2007-11-08 | 2013-06-26 | 富士通セミコンダクター株式会社 | 半導体装置 |
| WO2009063542A1 (ja) | 2007-11-12 | 2009-05-22 | Fujitsu Microelectronics Limited | 半導体装置 |
| JP5386819B2 (ja) | 2007-12-14 | 2014-01-15 | 富士通セミコンダクター株式会社 | 半導体記憶装置 |
| KR101426486B1 (ko) * | 2008-07-17 | 2014-08-05 | 삼성전자주식회사 | 테스트 장치 및 반도체 집적 회로 장치 |
| KR101409372B1 (ko) * | 2008-07-17 | 2014-06-18 | 삼성전자 주식회사 | 테스트 장치 및 반도체 집적 회로 장치 |
| US8390033B2 (en) * | 2009-02-23 | 2013-03-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metal structure for memory device |
| US8189368B2 (en) * | 2009-07-31 | 2012-05-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Cell structure for dual port SRAM |
| JP5408455B2 (ja) * | 2011-03-23 | 2014-02-05 | 株式会社東芝 | 半導体記憶装置 |
| JP5711612B2 (ja) * | 2011-05-24 | 2015-05-07 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US8743580B2 (en) | 2012-03-30 | 2014-06-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for high speed ROM cells |
| US10497402B2 (en) | 2012-03-30 | 2019-12-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for high speed ROM cells |
| US8766256B2 (en) | 2012-06-12 | 2014-07-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | SiGe SRAM butted contact resistance improvement |
| US9041117B2 (en) | 2012-07-31 | 2015-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | SRAM cell connection structure |
| US9418896B2 (en) | 2014-11-12 | 2016-08-16 | Samsung Electronics Co., Ltd. | Semiconductor device and fabricating method thereof |
| JP2017069420A (ja) * | 2015-09-30 | 2017-04-06 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
| US10163925B2 (en) * | 2016-03-18 | 2018-12-25 | Toshiba Memory Corporation | Integrated circuit device |
| KR102421300B1 (ko) * | 2017-01-13 | 2022-07-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 기억 장치, 반도체 장치, 전자 부품, 및 전자 기기 |
| CN109841244A (zh) * | 2017-11-24 | 2019-06-04 | 中国电子产品可靠性与环境试验研究所 | 抗单粒子翻转的静态随机存取存储器单元 |
| WO2020139895A1 (en) | 2018-12-24 | 2020-07-02 | The Trustees Of Columbia University In The City Of New York | Circuits and methods for in-memory computing |
| US10964356B2 (en) * | 2019-07-03 | 2021-03-30 | Qualcomm Incorporated | Compute-in-memory bit cell |
| US11631455B2 (en) | 2021-01-19 | 2023-04-18 | Qualcomm Incorporated | Compute-in-memory bitcell with capacitively-coupled write operation |
| US20230016635A1 (en) * | 2021-07-09 | 2023-01-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices and methods of designing and manufacturing the same |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5194749A (en) * | 1987-11-30 | 1993-03-16 | Hitachi, Ltd. | Semiconductor integrated circuit device |
| US5145799A (en) | 1991-01-30 | 1992-09-08 | Texas Instruments Incorporated | Stacked capacitor SRAM cell |
| DE69213973T2 (de) * | 1991-01-30 | 1997-02-13 | Texas Instruments Inc | SRAM-Zelle mit geschichteter Kapazität |
| JP3033385B2 (ja) * | 1993-04-01 | 2000-04-17 | 日本電気株式会社 | 半導体メモリセル |
| JP3535615B2 (ja) * | 1995-07-18 | 2004-06-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
| JP2002076143A (ja) | 2000-08-31 | 2002-03-15 | Mitsubishi Electric Corp | 半導体装置 |
| JP2002176112A (ja) * | 2000-12-08 | 2002-06-21 | Mitsubishi Electric Corp | 半導体記憶装置およびその製造方法 |
| KR100574715B1 (ko) * | 2001-01-30 | 2006-04-28 | 가부시키가이샤 히타치세이사쿠쇼 | 반도체 집적 회로 장치 |
| JP4024495B2 (ja) | 2001-07-05 | 2007-12-19 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
| JP2003297954A (ja) * | 2002-01-29 | 2003-10-17 | Mitsubishi Electric Corp | 半導体記憶装置 |
| JP2005072185A (ja) * | 2003-08-22 | 2005-03-17 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| JP4753534B2 (ja) * | 2003-12-26 | 2011-08-24 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
-
2003
- 2003-12-26 JP JP2003433992A patent/JP4753534B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-14 KR KR1020040105290A patent/KR20050067003A/ko not_active Withdrawn
- 2004-12-21 US US11/016,905 patent/US7064398B2/en not_active Expired - Lifetime
-
2006
- 2006-05-01 US US11/414,372 patent/US7514737B2/en not_active Expired - Lifetime
-
2009
- 2009-03-02 US US12/396,130 patent/US7791122B2/en not_active Expired - Lifetime
-
2010
- 2010-08-18 US US12/858,797 patent/US8129771B2/en not_active Expired - Lifetime
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