JP2005051200A - メッキ処理された基板支持体 - Google Patents

メッキ処理された基板支持体 Download PDF

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Publication number
JP2005051200A
JP2005051200A JP2004140365A JP2004140365A JP2005051200A JP 2005051200 A JP2005051200 A JP 2005051200A JP 2004140365 A JP2004140365 A JP 2004140365A JP 2004140365 A JP2004140365 A JP 2004140365A JP 2005051200 A JP2005051200 A JP 2005051200A
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JP
Japan
Prior art keywords
substrate support
coating
substrate
microinches
support surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004140365A
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English (en)
Japanese (ja)
Other versions
JP2005051200A5 (enExample
Inventor
Soo Young Choi
ヨン チョイ スー
Beom Soo Park
スー パーク ビオム
Quanyuan Shang
シャン クァンユアン
Robert I Greene
アイ． グリーネ ロバート
M White John
ジョン　エム．　ホワイト
Dong-Kil Yim
イム ドン−キル
Chung-Hee Park
パーク シュン−ヒー
Kam Law
ロウ カム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2005051200A publication Critical patent/JP2005051200A/ja
Publication of JP2005051200A5 publication Critical patent/JP2005051200A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/16—Pretreatment, e.g. desmutting
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
JP2004140365A 2003-05-09 2004-05-10 メッキ処理された基板支持体 Pending JP2005051200A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/435,182 US20040221959A1 (en) 2003-05-09 2003-05-09 Anodized substrate support

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009149983A Division JP2009239300A (ja) 2003-05-09 2009-06-24 陽極酸化処理された基板支持体

Publications (2)

Publication Number Publication Date
JP2005051200A true JP2005051200A (ja) 2005-02-24
JP2005051200A5 JP2005051200A5 (enExample) 2008-11-06

Family

ID=32990571

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004140365A Pending JP2005051200A (ja) 2003-05-09 2004-05-10 メッキ処理された基板支持体
JP2009149983A Pending JP2009239300A (ja) 2003-05-09 2009-06-24 陽極酸化処理された基板支持体

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2009149983A Pending JP2009239300A (ja) 2003-05-09 2009-06-24 陽極酸化処理された基板支持体

Country Status (6)

Country Link
US (2) US20040221959A1 (enExample)
EP (1) EP1475460A1 (enExample)
JP (2) JP2005051200A (enExample)
KR (2) KR20040096785A (enExample)
CN (1) CN100385640C (enExample)
TW (1) TW200507157A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
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JP2007051367A (ja) * 2005-07-15 2007-03-01 Applied Materials Inc サセプタの粗面化による静電荷の削減
JP2008138283A (ja) * 2006-12-01 2008-06-19 Applied Materials Inc 表面テクスチャリングを組み込んだプラズマリアクタ基板
US8372205B2 (en) 2003-05-09 2013-02-12 Applied Materials, Inc. Reducing electrostatic charge by roughening the susceptor

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US7964430B2 (en) * 2007-05-23 2011-06-21 Applied Materials, Inc. Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications
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JP6539582B2 (ja) * 2012-10-01 2019-07-03 フォースト・フィジックス・リミテッド・ライアビリティ・カンパニーＦｏｒｃｅｄ Ｐｈｙｓｉｃｓ ＬＬＣ 温度制御のためのシステムおよび方法
KR20150129660A (ko) 2013-03-14 2015-11-20 어플라이드 머티어리얼스, 인코포레이티드 기판 상의 고순도 알루미늄 탑 코트
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JP6170029B2 (ja) * 2014-11-07 2017-07-26 トヨタ自動車株式会社 遮熱膜の形成方法
KR102632725B1 (ko) 2016-03-17 2024-02-05 에이에스엠 아이피 홀딩 비.브이. 기판 지지 플레이트 및 이를 포함하는 박막 증착 장치 및 박막 증착 방법
CN107201507B (zh) * 2016-03-17 2019-09-17 Asm知识产权私人控股有限公司 衬底支撑板和包含其的薄膜沉积设备
KR102652258B1 (ko) * 2016-07-12 2024-03-28 에이비엠 주식회사 금속부품 및 그 제조 방법 및 금속부품을 구비한 공정챔버
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TW200507157A (en) 2005-02-16
US20040221959A1 (en) 2004-11-11
US7732010B2 (en) 2010-06-08
KR20040096785A (ko) 2004-11-17
KR20060100302A (ko) 2006-09-20
CN100385640C (zh) 2008-04-30
CN1551326A (zh) 2004-12-01
US20060185795A1 (en) 2006-08-24
EP1475460A1 (en) 2004-11-10

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