JP2001250776A5 - - Google Patents
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- Publication number
- JP2001250776A5 JP2001250776A5 JP2000062066A JP2000062066A JP2001250776A5 JP 2001250776 A5 JP2001250776 A5 JP 2001250776A5 JP 2000062066 A JP2000062066 A JP 2000062066A JP 2000062066 A JP2000062066 A JP 2000062066A JP 2001250776 A5 JP2001250776 A5 JP 2001250776A5
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- semiconductor film
- semiconductor
- applying
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000010410 layer Substances 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Claims (1)
- 前記高純度化工程では、前記高純度化工程において、前記非晶質の半導体膜を熱処理する際に、前記非晶質の半導体膜において前記基板に隣接する領域の温度を、前記非晶質の半導体膜における上部表面層の温度より低くすること、前記非晶質の半導体膜に電界を印加すること、前記非晶質の半導体膜に磁界を印加することおよび前記非晶質の半導体膜に遠心力を加えることかなる群から選択される少なくとも2つを実施する、請求項6に記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000062066A JP4057215B2 (ja) | 2000-03-07 | 2000-03-07 | 半導体装置の製造方法および液晶表示装置の製造方法 |
KR10-2001-0011351A KR100411321B1 (ko) | 2000-03-07 | 2001-03-06 | 박막 전계 효과 트랜지스터를 구비한 반도체 장치 및 그제조 방법 |
US09/799,110 US6812071B2 (en) | 2000-03-07 | 2001-03-06 | Method of producing crystalline semiconductor film and semiconductor device from the film |
TW090105088A TW499763B (en) | 2000-03-07 | 2001-03-06 | Semiconductor device having a thin film fieldeffect transistor, liquid crystal display device, and production method thereof |
CNB011109513A CN1196200C (zh) | 2000-03-07 | 2001-03-07 | 半导体装置的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000062066A JP4057215B2 (ja) | 2000-03-07 | 2000-03-07 | 半導体装置の製造方法および液晶表示装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001250776A JP2001250776A (ja) | 2001-09-14 |
JP2001250776A5 true JP2001250776A5 (ja) | 2004-12-09 |
JP4057215B2 JP4057215B2 (ja) | 2008-03-05 |
Family
ID=18582125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000062066A Expired - Fee Related JP4057215B2 (ja) | 2000-03-07 | 2000-03-07 | 半導体装置の製造方法および液晶表示装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6812071B2 (ja) |
JP (1) | JP4057215B2 (ja) |
KR (1) | KR100411321B1 (ja) |
CN (1) | CN1196200C (ja) |
TW (1) | TW499763B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4831885B2 (ja) | 2001-04-27 | 2011-12-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7067849B2 (en) | 2001-07-17 | 2006-06-27 | Lg Electronics Inc. | Diode having high brightness and method thereof |
US6949395B2 (en) | 2001-10-22 | 2005-09-27 | Oriol, Inc. | Method of making diode having reflective layer |
US7148520B2 (en) | 2001-10-26 | 2006-12-12 | Lg Electronics Inc. | Diode having vertical structure and method of manufacturing the same |
KR100831227B1 (ko) * | 2001-12-17 | 2008-05-21 | 삼성전자주식회사 | 다결정 규소를 이용한 박막 트랜지스터의 제조 방법 |
JP4271413B2 (ja) | 2002-06-28 | 2009-06-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2005276944A (ja) * | 2004-03-23 | 2005-10-06 | Sharp Corp | 半導体デバイス、その製造方法および製造装置 |
JP2006190897A (ja) * | 2005-01-07 | 2006-07-20 | Sharp Corp | 半導体デバイス、その製造方法および製造装置 |
US20080237593A1 (en) * | 2005-01-07 | 2008-10-02 | Junichiro Nakayama | Semiconductor Device, Method of Fabricating the Same, and Apparatus for Fabricating the Same |
WO2006117954A1 (ja) * | 2005-04-26 | 2006-11-09 | Mitsui Mining & Smelting Co., Ltd. | Al-Ni-B合金配線材料及びそれを用いた素子構造 |
JP4732219B2 (ja) * | 2006-04-03 | 2011-07-27 | 相模サーボ株式会社 | 高純度シリコン製造方法及び高純度シリコン製造装置 |
JP4656441B2 (ja) * | 2007-03-29 | 2011-03-23 | 株式会社日本製鋼所 | 薄膜の結晶化方法および結晶化装置 |
US7781076B2 (en) * | 2007-06-26 | 2010-08-24 | Eastman Kodak Company | Heteropyrene-based semiconductor materials for electronic devices and methods of making the same |
CN105097667B (zh) * | 2015-06-24 | 2018-03-30 | 深圳市华星光电技术有限公司 | 低温多晶硅tft基板结构的制作方法及低温多晶硅tft基板结构 |
JP7213726B2 (ja) * | 2019-03-13 | 2023-01-27 | 東京エレクトロン株式会社 | 成膜方法及び熱処理装置 |
CN111584362B (zh) * | 2020-05-14 | 2023-08-22 | Tcl华星光电技术有限公司 | 一种半导体器件制程方法、半导体器件及显示面板 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6046022A (ja) * | 1983-08-23 | 1985-03-12 | Sumitomo Electric Ind Ltd | イオン注入用基板の前処理方法 |
JPS62262431A (ja) * | 1986-05-08 | 1987-11-14 | Fujitsu Ltd | 半導体装置の製造方法 |
US5332441A (en) * | 1991-10-31 | 1994-07-26 | International Business Machines Corporation | Apparatus for gettering of particles during plasma processing |
JP3065825B2 (ja) * | 1992-10-21 | 2000-07-17 | 株式会社半導体エネルギー研究所 | レーザー処理方法 |
US5466953A (en) * | 1993-05-28 | 1995-11-14 | Santa Barbara Research Center | Denuded zone field effect photoconductive detector |
US5587045A (en) * | 1995-04-27 | 1996-12-24 | International Business Machines Corporation | Gettering of particles from an electro-negative plasma with insulating chuck |
JP3240263B2 (ja) * | 1995-09-14 | 2001-12-17 | 株式会社東芝 | 不純物濃縮・分析方法およびこれに用いる装置 |
KR100440083B1 (ko) * | 1996-01-23 | 2004-10-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체박막제작방법 |
US6465287B1 (en) * | 1996-01-27 | 2002-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device using a metal catalyst and high temperature crystallization |
JPH09213630A (ja) * | 1996-02-05 | 1997-08-15 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP3319963B2 (ja) | 1996-11-06 | 2002-09-03 | シャープ株式会社 | 半導体装置の製造方法 |
JPH10200120A (ja) * | 1997-01-10 | 1998-07-31 | Sharp Corp | 半導体装置の製造方法 |
JP3867283B2 (ja) * | 1997-06-06 | 2007-01-10 | 日本テキサス・インスツルメンツ株式会社 | 強誘電体キャパシタの作製方法及び強誘電体メモリ装置の製造方法 |
US5950078A (en) * | 1997-09-19 | 1999-09-07 | Sharp Laboratories Of America, Inc. | Rapid thermal annealing with absorptive layers for thin film transistors on transparent substrates |
US6110649A (en) * | 1997-11-19 | 2000-08-29 | International Business Machines Corporation | Process for manufacture of integrated circuit device |
US6017805A (en) * | 1998-01-26 | 2000-01-25 | Lucent Technologies Inc. | Method of reducing mobile ion contaminants in semiconductor films |
KR100325066B1 (ko) * | 1998-06-30 | 2002-08-14 | 주식회사 현대 디스플레이 테크놀로지 | 박막트랜지스터의제조방법 |
JP2000040828A (ja) | 1998-07-24 | 2000-02-08 | Toshiba Corp | 薄膜トランジスタの製造方法 |
-
2000
- 2000-03-07 JP JP2000062066A patent/JP4057215B2/ja not_active Expired - Fee Related
-
2001
- 2001-03-06 US US09/799,110 patent/US6812071B2/en not_active Expired - Fee Related
- 2001-03-06 TW TW090105088A patent/TW499763B/zh not_active IP Right Cessation
- 2001-03-06 KR KR10-2001-0011351A patent/KR100411321B1/ko not_active IP Right Cessation
- 2001-03-07 CN CNB011109513A patent/CN1196200C/zh not_active Expired - Fee Related
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