JP2000256845A5 - - Google Patents

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Publication number
JP2000256845A5
JP2000256845A5 JP1999066067A JP6606799A JP2000256845A5 JP 2000256845 A5 JP2000256845 A5 JP 2000256845A5 JP 1999066067 A JP1999066067 A JP 1999066067A JP 6606799 A JP6606799 A JP 6606799A JP 2000256845 A5 JP2000256845 A5 JP 2000256845A5
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JP
Japan
Prior art keywords
pulse
substrate
thin film
plasma
incident
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JP1999066067A
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English (en)
Japanese (ja)
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JP4351755B2 (ja
JP2000256845A (ja
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Priority claimed from JP06606799A external-priority patent/JP4351755B2/ja
Priority to JP06606799A priority Critical patent/JP4351755B2/ja
Application filed filed Critical
Priority to US09/453,883 priority patent/US6348238B1/en
Priority to KR10-2000-0007829A priority patent/KR100372385B1/ko
Priority to TW089102929A priority patent/TW477824B/zh
Publication of JP2000256845A publication Critical patent/JP2000256845A/ja
Priority to US09/799,609 priority patent/US6872289B2/en
Publication of JP2000256845A5 publication Critical patent/JP2000256845A5/ja
Publication of JP4351755B2 publication Critical patent/JP4351755B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP06606799A 1999-03-12 1999-03-12 薄膜作成方法および薄膜作成装置 Expired - Lifetime JP4351755B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP06606799A JP4351755B2 (ja) 1999-03-12 1999-03-12 薄膜作成方法および薄膜作成装置
US09/453,883 US6348238B1 (en) 1999-03-12 2000-02-15 Thin film fabrication method and thin film fabrication apparatus
KR10-2000-0007829A KR100372385B1 (ko) 1999-03-12 2000-02-18 박막형성방법 및 박막형성장치
TW089102929A TW477824B (en) 1999-03-12 2000-02-21 Thin film fabrication method and thin film fabrication apparatus
US09/799,609 US6872289B2 (en) 1999-03-12 2001-03-07 Thin film fabrication method and thin film fabrication apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06606799A JP4351755B2 (ja) 1999-03-12 1999-03-12 薄膜作成方法および薄膜作成装置

Publications (3)

Publication Number Publication Date
JP2000256845A JP2000256845A (ja) 2000-09-19
JP2000256845A5 true JP2000256845A5 (enExample) 2006-05-11
JP4351755B2 JP4351755B2 (ja) 2009-10-28

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Family Applications (1)

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JP06606799A Expired - Lifetime JP4351755B2 (ja) 1999-03-12 1999-03-12 薄膜作成方法および薄膜作成装置

Country Status (4)

Country Link
US (2) US6348238B1 (enExample)
JP (1) JP4351755B2 (enExample)
KR (1) KR100372385B1 (enExample)
TW (1) TW477824B (enExample)

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