JP2000196093A5 - - Google Patents
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- Publication number
- JP2000196093A5 JP2000196093A5 JP1998370541A JP37054198A JP2000196093A5 JP 2000196093 A5 JP2000196093 A5 JP 2000196093A5 JP 1998370541 A JP1998370541 A JP 1998370541A JP 37054198 A JP37054198 A JP 37054198A JP 2000196093 A5 JP2000196093 A5 JP 2000196093A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- semiconductor device
- tft
- channel
- active layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 17
- 239000011651 chromium Substances 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37054198A JP4008133B2 (ja) | 1998-12-25 | 1998-12-25 | 半導体装置 |
| US09/837,558 US6835586B2 (en) | 1998-12-25 | 2001-04-19 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37054198A JP4008133B2 (ja) | 1998-12-25 | 1998-12-25 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000196093A JP2000196093A (ja) | 2000-07-14 |
| JP2000196093A5 true JP2000196093A5 (https=) | 2006-03-09 |
| JP4008133B2 JP4008133B2 (ja) | 2007-11-14 |
Family
ID=18497178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP37054198A Expired - Fee Related JP4008133B2 (ja) | 1998-12-25 | 1998-12-25 | 半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6835586B2 (https=) |
| JP (1) | JP4008133B2 (https=) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4076648B2 (ja) | 1998-12-18 | 2008-04-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP4008133B2 (ja) | 1998-12-25 | 2007-11-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US8158980B2 (en) | 2001-04-19 | 2012-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a pixel matrix circuit that includes a pixel TFT and a storage capacitor |
| JP4202502B2 (ja) | 1998-12-28 | 2008-12-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US6590229B1 (en) | 1999-01-21 | 2003-07-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and process for production thereof |
| JP3394483B2 (ja) * | 1999-11-16 | 2003-04-07 | 鹿児島日本電気株式会社 | 薄膜トランジスタ基板およびその製造方法 |
| US6613620B2 (en) | 2000-07-31 | 2003-09-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP4772228B2 (ja) * | 2000-07-31 | 2011-09-14 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP4127466B2 (ja) * | 2000-07-31 | 2008-07-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP4831885B2 (ja) | 2001-04-27 | 2011-12-07 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| KR100929666B1 (ko) * | 2002-01-03 | 2009-12-03 | 삼성전자주식회사 | 액정 표시 장치 및 그 제조 방법 |
| JP2003298069A (ja) * | 2002-01-30 | 2003-10-17 | Sanyo Electric Co Ltd | 半導体表示装置、その製造方法及びアクティブマトリクス型表示装置 |
| JP4179800B2 (ja) * | 2002-05-24 | 2008-11-12 | ソニー株式会社 | 表示装置及びその製造方法 |
| TWI231996B (en) | 2003-03-28 | 2005-05-01 | Au Optronics Corp | Dual gate layout for thin film transistor |
| JP4631255B2 (ja) * | 2003-07-16 | 2011-02-16 | セイコーエプソン株式会社 | アクティブマトリクス基板、表示装置、及び電子機器 |
| KR100980021B1 (ko) * | 2003-09-04 | 2010-09-03 | 삼성전자주식회사 | 박막 트랜지스터 표시판 |
| JP4554180B2 (ja) * | 2003-09-17 | 2010-09-29 | ソニー株式会社 | 薄膜半導体デバイスの製造方法 |
| KR100685239B1 (ko) | 2004-01-29 | 2007-02-22 | 가시오게산키 가부시키가이샤 | 트랜지스터어레이 및 그 제조방법 및 화상처리장치 |
| US20060246637A1 (en) * | 2004-04-23 | 2006-11-02 | Sharp Laboratories Of America, Inc. | Sidewall gate thin-film transistor |
| KR100601370B1 (ko) * | 2004-04-28 | 2006-07-13 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그를 이용한 유기 전계 발광 표시 장치 |
| JP2006303153A (ja) * | 2005-04-20 | 2006-11-02 | Toshiba Corp | 半導体装置 |
| KR100790761B1 (ko) * | 2006-09-29 | 2008-01-03 | 한국전자통신연구원 | 인버터 |
| KR100816498B1 (ko) | 2006-12-07 | 2008-03-24 | 한국전자통신연구원 | 표면 처리된 층을 포함하는 유기 인버터 및 그 제조 방법 |
| KR100822216B1 (ko) * | 2007-04-09 | 2008-04-16 | 삼성에스디아이 주식회사 | 박막 트랜지스터 기판, 이를 포함한 유기 발광 표시장치 및유기 발광 표시장치의 제조방법 |
| US7738050B2 (en) * | 2007-07-06 | 2010-06-15 | Semiconductor Energy Laboratory Co., Ltd | Liquid crystal display device |
| TWI464510B (zh) * | 2007-07-20 | 2014-12-11 | Semiconductor Energy Lab | 液晶顯示裝置 |
| WO2009019920A1 (ja) * | 2007-08-09 | 2009-02-12 | Sharp Kabushiki Kaisha | 回路基板及び表示装置 |
| US8586979B2 (en) * | 2008-02-01 | 2013-11-19 | Samsung Electronics Co., Ltd. | Oxide semiconductor transistor and method of manufacturing the same |
| WO2010047217A1 (en) * | 2008-10-24 | 2010-04-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| TW201023341A (en) * | 2008-12-12 | 2010-06-16 | Ind Tech Res Inst | Integrated circuit structure |
| KR101476817B1 (ko) | 2009-07-03 | 2014-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터를 갖는 표시 장치 및 그 제작 방법 |
| KR101870460B1 (ko) * | 2009-07-18 | 2018-06-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제조 방법 |
| US20120146038A1 (en) * | 2009-08-28 | 2012-06-14 | Sharp Kabushiki Kaisha | Semiconductor device, active matrix substrate, and display device |
| WO2012070521A1 (ja) * | 2010-11-24 | 2012-05-31 | シャープ株式会社 | 半導体装置およびその製造方法 |
| JP2013247270A (ja) * | 2012-05-28 | 2013-12-09 | Sony Corp | 撮像装置および撮像表示システム |
| CN102956649A (zh) * | 2012-11-26 | 2013-03-06 | 京东方科技集团股份有限公司 | 阵列基板、阵列基板制作方法及显示装置 |
| JP2014135571A (ja) * | 2013-01-08 | 2014-07-24 | V Technology Co Ltd | 撮像装置 |
| JP6166128B2 (ja) * | 2013-08-20 | 2017-07-19 | ソニーセミコンダクタソリューションズ株式会社 | 放射線撮像装置および放射線撮像表示システム |
| KR20160013430A (ko) * | 2014-07-25 | 2016-02-04 | 삼성디스플레이 주식회사 | 박막 트랜지스터 및 이를 구비하는 표시 장치 |
| CN104409512A (zh) * | 2014-11-11 | 2015-03-11 | 深圳市华星光电技术有限公司 | 基于双栅极结构的低温多晶硅薄膜晶体管及其制备方法 |
| WO2017166167A1 (zh) * | 2016-03-31 | 2017-10-05 | 华为技术有限公司 | 场效应管及其制造方法 |
| JP2017224676A (ja) * | 2016-06-14 | 2017-12-21 | 株式会社ジャパンディスプレイ | 半導体装置及び表示装置 |
| JP6154976B1 (ja) * | 2017-03-10 | 2017-06-28 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Family Cites Families (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732641A (en) | 1980-08-06 | 1982-02-22 | Seiko Epson Corp | Semiconductor device |
| JPS58115850A (ja) | 1981-12-28 | 1983-07-09 | Seiko Epson Corp | アクテイブマトリツクスパネル |
| JPS59204274A (ja) * | 1983-05-06 | 1984-11-19 | Seiko Instr & Electronics Ltd | 薄膜トランジスタ |
| JPS6081869A (ja) | 1983-10-12 | 1985-05-09 | Seiko Epson Corp | 薄膜トランジスタの駆動方法 |
| JPH0727975B2 (ja) | 1984-01-25 | 1995-03-29 | セイコーエプソン株式会社 | 相補型薄膜トランジスタの製造方法 |
| US4727044A (en) * | 1984-05-18 | 1988-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of making a thin film transistor with laser recrystallized source and drain |
| JPS6167269A (ja) | 1984-09-07 | 1986-04-07 | Sharp Corp | 半導体素子 |
| JPS6188565A (ja) | 1984-10-05 | 1986-05-06 | Sony Corp | 電界効果型トランジスタ |
| EP0178447B1 (en) | 1984-10-09 | 1993-02-17 | Fujitsu Limited | A manufacturing method of an integrated circuit based on semiconductor-on-insulator technology |
| US4748485A (en) * | 1985-03-21 | 1988-05-31 | Hughes Aircraft Company | Opposed dual-gate hybrid structure for three-dimensional integrated circuits |
| JPS61220371A (ja) | 1985-03-26 | 1986-09-30 | Toshiba Corp | 絶縁基板上mos形集積回路装置 |
| JPS625661A (ja) | 1985-07-01 | 1987-01-12 | Nec Corp | 薄膜トランジスタ |
| JPH0680799B2 (ja) | 1985-11-18 | 1994-10-12 | 富士通株式会社 | 相補形mos集積回路 |
| JPH0777264B2 (ja) * | 1986-04-02 | 1995-08-16 | 三菱電機株式会社 | 薄膜トランジスタの製造方法 |
| JP2620240B2 (ja) * | 1987-06-10 | 1997-06-11 | 株式会社日立製作所 | 液晶表示装置 |
| JPS6419761A (en) | 1987-07-14 | 1989-01-23 | Ricoh Kk | Thin film transistor |
| US5140391A (en) * | 1987-08-24 | 1992-08-18 | Sony Corporation | Thin film MOS transistor having pair of gate electrodes opposing across semiconductor layer |
| JPS6453460A (en) | 1987-08-24 | 1989-03-01 | Sony Corp | Mos transistor |
| JP2737780B2 (ja) | 1987-08-24 | 1998-04-08 | ソニー株式会社 | Mosトランジスタ |
| JP2666293B2 (ja) | 1987-08-31 | 1997-10-22 | ソニー株式会社 | Mosトランジスタの製造方法 |
| US5327001A (en) * | 1987-09-09 | 1994-07-05 | Casio Computer Co., Ltd. | Thin film transistor array having single light shield layer over transistors and gate and drain lines |
| GB2211022B (en) * | 1987-10-09 | 1991-10-09 | Marconi Electronic Devices | A semiconductor device and a process for making the device |
| US4977105A (en) * | 1988-03-15 | 1990-12-11 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing interconnection structure in semiconductor device |
| JPH0215676A (ja) | 1988-07-01 | 1990-01-19 | Ricoh Co Ltd | 薄膜 トランジスタ |
| JPH02109341A (ja) * | 1988-10-19 | 1990-04-23 | Fuji Xerox Co Ltd | 薄膜トランジスタの製造方法 |
| JP2817246B2 (ja) | 1989-08-25 | 1998-10-30 | カシオ計算機株式会社 | フォトセンサ |
| US4996575A (en) | 1989-08-29 | 1991-02-26 | David Sarnoff Research Center, Inc. | Low leakage silicon-on-insulator CMOS structure and method of making same |
| US5103277A (en) * | 1989-09-11 | 1992-04-07 | Allied-Signal Inc. | Radiation hard CMOS circuits in silicon-on-insulator films |
| US5275972A (en) * | 1990-02-19 | 1994-01-04 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating a semiconductor integrated circuit device including the self-aligned formation of a contact window |
| US5124769A (en) * | 1990-03-02 | 1992-06-23 | Nippon Telegraph And Telephone Corporation | Thin film transistor |
| JPH03256365A (ja) | 1990-03-06 | 1991-11-15 | Sharp Corp | 半導体装置およびその製造方法 |
| US5198379A (en) * | 1990-04-27 | 1993-03-30 | Sharp Kabushiki Kaisha | Method of making a MOS thin film transistor with self-aligned asymmetrical structure |
| FR2664095B1 (fr) * | 1990-06-28 | 1993-12-17 | Commissariat A Energie Atomique | Procede de fabrication d'un contact electrique sur un element actif d'un circuit integre mis. |
| KR920008834A (ko) * | 1990-10-09 | 1992-05-28 | 아이자와 스스무 | 박막 반도체 장치 |
| JPH0824193B2 (ja) * | 1990-10-16 | 1996-03-06 | 工業技術院長 | 平板型光弁駆動用半導体装置の製造方法 |
| US5376561A (en) * | 1990-12-31 | 1994-12-27 | Kopin Corporation | High density electronic circuit modules |
| US5420048A (en) * | 1991-01-09 | 1995-05-30 | Canon Kabushiki Kaisha | Manufacturing method for SOI-type thin film transistor |
| US5521107A (en) * | 1991-02-16 | 1996-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming a field-effect transistor including anodic oxidation of the gate |
| CA2061796C (en) * | 1991-03-28 | 2002-12-24 | Kalluri R. Sarma | High mobility integrated drivers for active matrix displays |
| JP2776059B2 (ja) | 1991-06-11 | 1998-07-16 | 日本電気株式会社 | 絶縁ゲート電界効果トランジスタ |
| US5185535A (en) * | 1991-06-17 | 1993-02-09 | Hughes Aircraft Company | Control of backgate bias for low power high speed CMOS/SOI devices |
| EP0523856A3 (en) * | 1991-06-28 | 1993-03-17 | Sgs-Thomson Microelectronics, Inc. | Method of via formation for multilevel interconnect integrated circuits |
| JPH0590586A (ja) * | 1991-09-30 | 1993-04-09 | Nec Corp | 薄膜トランジスタ |
| US5273921A (en) * | 1991-12-27 | 1993-12-28 | Purdue Research Foundation | Methods for fabricating a dual-gated semiconductor-on-insulator field effect transistor |
| US5485019A (en) * | 1992-02-05 | 1996-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for forming the same |
| JP3133140B2 (ja) * | 1992-04-01 | 2001-02-05 | 株式会社半導体エネルギー研究所 | 表示装置 |
| GB9208324D0 (en) | 1992-04-15 | 1992-06-03 | British Tech Group | Semiconductor devices |
| US5807772A (en) * | 1992-06-09 | 1998-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming semiconductor device with bottom gate connected to source or drain |
| JP3254007B2 (ja) * | 1992-06-09 | 2002-02-04 | 株式会社半導体エネルギー研究所 | 薄膜状半導体装置およびその作製方法 |
| US5359219A (en) * | 1992-12-04 | 1994-10-25 | Texas Instruments Incorporated | Silicon on insulator device comprising improved substrate doping |
| JPH0799251A (ja) * | 1992-12-10 | 1995-04-11 | Sony Corp | 半導体メモリセル |
| CN1095204C (zh) * | 1993-03-12 | 2002-11-27 | 株式会社半导体能源研究所 | 半导体器件和晶体管 |
| US5818076A (en) * | 1993-05-26 | 1998-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
| US5604368A (en) * | 1994-07-15 | 1997-02-18 | International Business Machines Corporation | Self-aligned double-gate MOSFET by selective lateral epitaxy |
| US5497019A (en) * | 1994-09-22 | 1996-03-05 | The Aerospace Corporation | Silicon-on-insulator gate-all-around MOSFET devices and fabrication methods |
| JP3942651B2 (ja) * | 1994-10-07 | 2007-07-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP3535615B2 (ja) * | 1995-07-18 | 2004-06-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
| KR100193987B1 (ko) * | 1996-05-11 | 1999-06-15 | 구자홍 | 구동회로 일체형 액정표시소자 및 제조방법 |
| US6054734A (en) * | 1996-07-26 | 2000-04-25 | Sony Corporation | Non-volatile memory cell having dual gate electrodes |
| JP3716580B2 (ja) * | 1997-02-27 | 2005-11-16 | セイコーエプソン株式会社 | 液晶装置及びその製造方法、並びに投写型表示装置 |
| TW379360B (en) * | 1997-03-03 | 2000-01-11 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| US6320204B1 (en) * | 1997-12-25 | 2001-11-20 | Seiko Epson Corporation | Electro-optical device in which an extending portion of a channel region of a semiconductor layer is connected to a capacitor line and an electronic apparatus including the electro-optical device |
| US5996575A (en) * | 1998-02-17 | 1999-12-07 | Heat-N-Glo Fireplace Products, Inc. | Low cost prefabricated fireplace with fiber insulation firebox |
| TW418539B (en) * | 1998-05-29 | 2001-01-11 | Samsung Electronics Co Ltd | A method for forming TFT in liquid crystal display |
| JP3702096B2 (ja) * | 1998-06-08 | 2005-10-05 | 三洋電機株式会社 | 薄膜トランジスタ及び表示装置 |
| JP2001051292A (ja) * | 1998-06-12 | 2001-02-23 | Semiconductor Energy Lab Co Ltd | 半導体装置および半導体表示装置 |
| JP4076648B2 (ja) | 1998-12-18 | 2008-04-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP4008133B2 (ja) | 1998-12-25 | 2007-11-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP4202502B2 (ja) | 1998-12-28 | 2008-12-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
-
1998
- 1998-12-25 JP JP37054198A patent/JP4008133B2/ja not_active Expired - Fee Related
-
2001
- 2001-04-19 US US09/837,558 patent/US6835586B2/en not_active Expired - Lifetime
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