JP2000133631A5 - - Google Patents

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Publication number
JP2000133631A5
JP2000133631A5 JP1999240647A JP24064799A JP2000133631A5 JP 2000133631 A5 JP2000133631 A5 JP 2000133631A5 JP 1999240647 A JP1999240647 A JP 1999240647A JP 24064799 A JP24064799 A JP 24064799A JP 2000133631 A5 JP2000133631 A5 JP 2000133631A5
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JP
Japan
Prior art keywords
silicon
corrosion
aqueous
ppm
composition
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Pending
Application number
JP1999240647A
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English (en)
Japanese (ja)
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JP2000133631A (ja
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Publication date
Priority claimed from US09/141,897 external-priority patent/US6162370A/en
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Publication of JP2000133631A publication Critical patent/JP2000133631A/ja
Publication of JP2000133631A5 publication Critical patent/JP2000133631A5/ja
Pending legal-status Critical Current

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JP11240647A 1998-08-28 1999-08-27 窒化ケイ素膜の選択的腐食組成物および方法 Pending JP2000133631A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/141,897 US6162370A (en) 1998-08-28 1998-08-28 Composition and method for selectively etching a silicon nitride film
US09/141897 1998-08-28

Publications (2)

Publication Number Publication Date
JP2000133631A JP2000133631A (ja) 2000-05-12
JP2000133631A5 true JP2000133631A5 (enExample) 2006-09-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP11240647A Pending JP2000133631A (ja) 1998-08-28 1999-08-27 窒化ケイ素膜の選択的腐食組成物および方法

Country Status (10)

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US (2) US6162370A (enExample)
EP (1) EP0989597B1 (enExample)
JP (1) JP2000133631A (enExample)
KR (1) KR100741250B1 (enExample)
AT (1) ATE254337T1 (enExample)
CA (1) CA2279786C (enExample)
DE (1) DE69912712T2 (enExample)
ES (1) ES2210922T3 (enExample)
SG (1) SG85120A1 (enExample)
TW (1) TW576865B (enExample)

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