IT1191566B - Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazione - Google Patents
Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazioneInfo
- Publication number
- IT1191566B IT1191566B IT83629/86A IT8362986A IT1191566B IT 1191566 B IT1191566 B IT 1191566B IT 83629/86 A IT83629/86 A IT 83629/86A IT 8362986 A IT8362986 A IT 8362986A IT 1191566 B IT1191566 B IT 1191566B
- Authority
- IT
- Italy
- Prior art keywords
- door
- memory device
- floating gate
- type memory
- manufacturing procedure
- Prior art date
Links
- 238000007667 floating Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000002829 reductive effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/109—Memory devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT83629/86A IT1191566B (it) | 1986-06-27 | 1986-06-27 | Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazione |
EP87830233A EP0252027B1 (en) | 1986-06-27 | 1987-06-22 | Electrically alterable, nonvolatile, floating gate type memory device with reduced tunnelling area and fabrication thereof |
DE8787830233T DE3782279T2 (de) | 1986-06-27 | 1987-06-22 | Elektrisch veraenderbare, nichtfluechtige speicheranordnung vom schwebenden gate-typ, mit geringerer tunneleffektflaeche und herstellung derselben. |
JP62157480A JPH0824148B2 (ja) | 1986-06-27 | 1987-06-24 | 減少したトンネルエリアを有する電気的に変更できる持久記憶浮動ゲ−ト型メモリデバイスとその製造方法 |
US07/379,706 US4931847A (en) | 1986-06-27 | 1989-07-14 | Floating gate memory with sidewall tunnelling area |
US07/531,645 US5081057A (en) | 1986-06-27 | 1990-06-01 | Electrically alterable, nonvolatile, floating gate type memory device with reduced tunnelling area and fabrication thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT83629/86A IT1191566B (it) | 1986-06-27 | 1986-06-27 | Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazione |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8683629A0 IT8683629A0 (it) | 1986-06-27 |
IT1191566B true IT1191566B (it) | 1988-03-23 |
Family
ID=11323384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT83629/86A IT1191566B (it) | 1986-06-27 | 1986-06-27 | Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazione |
Country Status (5)
Country | Link |
---|---|
US (2) | US4931847A (it) |
EP (1) | EP0252027B1 (it) |
JP (1) | JPH0824148B2 (it) |
DE (1) | DE3782279T2 (it) |
IT (1) | IT1191566B (it) |
Families Citing this family (60)
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JP2633541B2 (ja) * | 1987-01-07 | 1997-07-23 | 株式会社東芝 | 半導体メモリ装置の製造方法 |
US5231041A (en) * | 1988-06-28 | 1993-07-27 | Mitsubishi Denki Kabushiki Kaisha | Manufacturing method of an electrically programmable non-volatile memory device having the floating gate extending over the control gate |
US5023694A (en) * | 1988-08-03 | 1991-06-11 | Xicor, Inc. | Side wall contact in a nonvolatile electrically alterable memory cell |
KR950000156B1 (ko) * | 1989-02-08 | 1995-01-10 | 세이꼬 엡슨 가부시끼가이샤 | 반도체 장치 |
US5051793A (en) * | 1989-03-27 | 1991-09-24 | Ict International Cmos Technology, Inc. | Coplanar flash EPROM cell and method of making same |
KR940006094B1 (ko) * | 1989-08-17 | 1994-07-06 | 삼성전자 주식회사 | 불휘발성 반도체 기억장치 및 그 제조방법 |
US5239500A (en) * | 1989-09-29 | 1993-08-24 | Centre Suisse D'electronique Et De Microtechnique S.A. | Process of storing analog quantities and device for the implementation thereof |
JPH081933B2 (ja) * | 1989-12-11 | 1996-01-10 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US5021848A (en) * | 1990-03-13 | 1991-06-04 | Chiu Te Long | Electrically-erasable and electrically-programmable memory storage devices with self aligned tunnel dielectric area and the method of fabricating thereof |
US5019879A (en) * | 1990-03-15 | 1991-05-28 | Chiu Te Long | Electrically-flash-erasable and electrically-programmable memory storage devices with self aligned tunnel dielectric area |
US5108939A (en) * | 1990-10-16 | 1992-04-28 | National Semiconductor Corp. | Method of making a non-volatile memory cell utilizing polycrystalline silicon spacer tunnel region |
DE69217738T2 (de) * | 1991-06-27 | 1997-07-24 | Toshiba Kawasaki Kk | Permanenter Halbleiterspeicher und seine Arbeitsweise |
US5225362A (en) * | 1992-06-01 | 1993-07-06 | National Semiconductor Corporation | Method of manufacturing a full feature high density EEPROM cell with poly tunnel spacer |
US5910912A (en) * | 1992-10-30 | 1999-06-08 | International Business Machines Corporation | Flash EEPROM with dual-sidewall gate |
KR970003845B1 (ko) * | 1993-10-28 | 1997-03-22 | 금성일렉트론 주식회사 | 이이피롬 프래쉬 메모리 셀, 메모리 디바이스 및 그 제조방법 |
US5550072A (en) * | 1994-08-30 | 1996-08-27 | National Semiconductor Corporation | Method of fabrication of integrated circuit chip containing EEPROM and capacitor |
KR100192546B1 (ko) * | 1996-04-12 | 1999-06-15 | 구본준 | 플래쉬 메모리 및 이의 제조방법 |
KR100205309B1 (ko) | 1996-07-23 | 1999-07-01 | 구본준 | 비휘발성 메모리셀 및 이 비휘발성 메모리셀을 프로그래밍하는 방법 |
US6157574A (en) * | 1998-04-01 | 2000-12-05 | National Semiconductor Corporation | Erasable frohmann-bentchkowsky memory transistor that stores multiple bits of data |
US6055185A (en) | 1998-04-01 | 2000-04-25 | National Semiconductor Corporation | Single-poly EPROM cell with CMOS compatible programming voltages |
US6118691A (en) * | 1998-04-01 | 2000-09-12 | National Semiconductor Corporation | Memory cell with a Frohmann-Bentchkowsky EPROM memory transistor that reduces the voltage across an unprogrammed memory transistor during a read |
US6081451A (en) * | 1998-04-01 | 2000-06-27 | National Semiconductor Corporation | Memory device that utilizes single-poly EPROM cells with CMOS compatible programming voltages |
US6141246A (en) * | 1998-04-01 | 2000-10-31 | National Semiconductor Corporation | Memory device with sense amplifier that sets the voltage drop across the cells of the device |
US6525371B2 (en) | 1999-09-22 | 2003-02-25 | International Business Machines Corporation | Self-aligned non-volatile random access memory cell and process to make the same |
JP2001148428A (ja) * | 1999-11-18 | 2001-05-29 | Toshiba Microelectronics Corp | 半導体装置 |
JP2001196476A (ja) * | 2000-01-07 | 2001-07-19 | Toshiba Corp | 半導体装置及びその製造方法 |
US6627946B2 (en) | 2000-09-20 | 2003-09-30 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with control gates protruding portions |
US6868015B2 (en) * | 2000-09-20 | 2005-03-15 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with control gate spacer portions |
US6727545B2 (en) | 2000-09-20 | 2004-04-27 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling |
JP2002100688A (ja) | 2000-09-22 | 2002-04-05 | Oki Electric Ind Co Ltd | 不揮発性半導体メモリの製造方法 |
US6563167B2 (en) * | 2001-01-05 | 2003-05-13 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with floating gates having multiple sharp edges |
US6627942B2 (en) | 2001-03-29 | 2003-09-30 | Silicon Storage Technology, Inc | Self-aligned floating gate poly for a flash E2PROM cell |
US6967372B2 (en) | 2001-04-10 | 2005-11-22 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with vertical control gate sidewalls and insulation spacers |
US6743674B2 (en) * | 2001-09-18 | 2004-06-01 | Silicon Storage Technology, Inc. | Method of forming a semiconductor array of floating gate memory cells and strap regions, and a memory array and strap regions made thereby |
US6952033B2 (en) | 2002-03-20 | 2005-10-04 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with buried bit-line and raised source line |
US6917069B2 (en) * | 2001-10-17 | 2005-07-12 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor |
US6566706B1 (en) * | 2001-10-31 | 2003-05-20 | Silicon Storage Technology, Inc. | Semiconductor array of floating gate memory cells and strap regions |
US6541324B1 (en) | 2001-11-02 | 2003-04-01 | Silicon Storage Technology, Inc. | Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region |
US20030102504A1 (en) * | 2001-12-05 | 2003-06-05 | Geeng-Chuan Chern | Method of forming different oxide thickness for high voltage transistor and memory cell tunnel dielectric |
US6756633B2 (en) * | 2001-12-27 | 2004-06-29 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with horizontally oriented floating gate edges |
US6861698B2 (en) * | 2002-01-24 | 2005-03-01 | Silicon Storage Technology, Inc. | Array of floating gate memory cells having strap regions and a peripheral logic device region |
US6878591B2 (en) * | 2002-02-07 | 2005-04-12 | Silicon Storage Technology, Inc. | Self aligned method of forming non-volatile memory cells with flat word line |
US7411246B2 (en) * | 2002-04-01 | 2008-08-12 | Silicon Storage Technology, Inc. | Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby |
US6891220B2 (en) * | 2002-04-05 | 2005-05-10 | Silicon Storage Technology, Inc. | Method of programming electrons onto a floating gate of a non-volatile memory cell |
US6952034B2 (en) * | 2002-04-05 | 2005-10-04 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with buried source line and floating gate |
US6706592B2 (en) * | 2002-05-14 | 2004-03-16 | Silicon Storage Technology, Inc. | Self aligned method of forming a semiconductor array of non-volatile memory cells |
US6958273B2 (en) * | 2003-03-21 | 2005-10-25 | Silicon Storage Technology, Inc. | Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried floating gate, pointed floating gate and pointed channel region, and a memory array made thereby |
US6873006B2 (en) * | 2003-03-21 | 2005-03-29 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with burried floating gate and pointed channel region |
US6919242B2 (en) * | 2003-04-25 | 2005-07-19 | Atmel Corporation | Mirror image memory cell transistor pairs featuring poly floating spacers |
US6998670B2 (en) * | 2003-04-25 | 2006-02-14 | Atmel Corporation | Twin EEPROM memory transistors with subsurface stepped floating gates |
US6888192B2 (en) * | 2003-04-25 | 2005-05-03 | Atmel Corporation | Mirror image non-volatile memory cell transistor pairs with single poly layer |
US6906379B2 (en) * | 2003-08-28 | 2005-06-14 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with buried floating gate |
EP1524699B1 (en) * | 2003-10-17 | 2012-12-26 | Imec | Method for forming CMOS semiconductor devices having a notched gate insulator and devices thus obtained |
US7315056B2 (en) | 2004-06-07 | 2008-01-01 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with program/erase and select gates |
US7098106B2 (en) * | 2004-07-01 | 2006-08-29 | Atmel Corporation | Method of making mirror image memory cell transistor pairs featuring poly floating spacers |
US7641226B2 (en) * | 2006-11-01 | 2010-01-05 | Autoliv Development Ab | Side airbag module with an internal guide fin |
US8138524B2 (en) | 2006-11-01 | 2012-03-20 | Silicon Storage Technology, Inc. | Self-aligned method of forming a semiconductor memory array of floating memory cells with source side erase, and a memory array made thereby |
US7915664B2 (en) * | 2008-04-17 | 2011-03-29 | Sandisk Corporation | Non-volatile memory with sidewall channels and raised source/drain regions |
US8148768B2 (en) * | 2008-11-26 | 2012-04-03 | Silicon Storage Technology, Inc. | Non-volatile memory cell with self aligned floating and erase gates, and method of making same |
CN111223868A (zh) * | 2018-11-27 | 2020-06-02 | 钰成投资股份有限公司 | 半导体非挥发性存储元件结构 |
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US4132904A (en) * | 1977-07-28 | 1979-01-02 | Hughes Aircraft Company | Volatile/non-volatile logic latch circuit |
US4409723A (en) * | 1980-04-07 | 1983-10-18 | Eliyahou Harari | Method of forming non-volatile EPROM and EEPROM with increased efficiency |
US4477825A (en) * | 1981-12-28 | 1984-10-16 | National Semiconductor Corporation | Electrically programmable and erasable memory cell |
US4608585A (en) * | 1982-07-30 | 1986-08-26 | Signetics Corporation | Electrically erasable PROM cell |
US4701776A (en) * | 1983-08-29 | 1987-10-20 | Seeq Technology, Inc. | MOS floating gate memory cell and process for fabricating same |
EP0164605B1 (en) * | 1984-05-17 | 1990-02-28 | Kabushiki Kaisha Toshiba | Method of manufacturing nonvolatile semiconductor eeprom device |
US4754320A (en) * | 1985-02-25 | 1988-06-28 | Kabushiki Kaisha Toshiba | EEPROM with sidewall control gate |
JPS62125677A (ja) * | 1985-11-26 | 1987-06-06 | Toshiba Corp | 半導体装置及びその製造方法 |
JPS62125678A (ja) * | 1985-11-26 | 1987-06-06 | Toshiba Corp | 半導体装置及びその製造方法 |
JPS6329969A (ja) * | 1986-07-23 | 1988-02-08 | Nec Corp | 浮遊ゲ−ト型不揮発性半導体記憶装置の製造方法 |
JPS6336575A (ja) * | 1986-07-30 | 1988-02-17 | Toshiba Corp | 半導体装置の製造方法 |
JPS63179578A (ja) * | 1987-01-21 | 1988-07-23 | Toshiba Corp | 半導体装置及びその製造方法 |
US4814286A (en) * | 1987-02-02 | 1989-03-21 | Intel Corporation | EEPROM cell with integral select transistor |
-
1986
- 1986-06-27 IT IT83629/86A patent/IT1191566B/it active
-
1987
- 1987-06-22 DE DE8787830233T patent/DE3782279T2/de not_active Expired - Fee Related
- 1987-06-22 EP EP87830233A patent/EP0252027B1/en not_active Expired
- 1987-06-24 JP JP62157480A patent/JPH0824148B2/ja not_active Expired - Fee Related
-
1989
- 1989-07-14 US US07/379,706 patent/US4931847A/en not_active Expired - Lifetime
-
1990
- 1990-06-01 US US07/531,645 patent/US5081057A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3782279T2 (de) | 1993-05-19 |
EP0252027A3 (en) | 1988-07-20 |
IT8683629A0 (it) | 1986-06-27 |
US5081057A (en) | 1992-01-14 |
JPS639981A (ja) | 1988-01-16 |
EP0252027B1 (en) | 1992-10-21 |
JPH0824148B2 (ja) | 1996-03-06 |
DE3782279D1 (de) | 1992-11-26 |
US4931847A (en) | 1990-06-05 |
EP0252027A2 (en) | 1988-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970628 |