IN2014MN01916A - - Google Patents

Download PDF

Info

Publication number
IN2014MN01916A
IN2014MN01916A IN1916MUN2014A IN2014MN01916A IN 2014MN01916 A IN2014MN01916 A IN 2014MN01916A IN 1916MUN2014 A IN1916MUN2014 A IN 1916MUN2014A IN 2014MN01916 A IN2014MN01916 A IN 2014MN01916A
Authority
IN
India
Prior art keywords
convex
parts
convex parts
pave
emitting element
Prior art date
Application number
Other languages
English (en)
Inventor
Jun Koike
Yoshimichi Mitamura
Fujito Yamaguchi
Original Assignee
Asahi Kasei E Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei E Materials Corp filed Critical Asahi Kasei E Materials Corp
Publication of IN2014MN01916A publication Critical patent/IN2014MN01916A/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/819Bodies characterised by their shape, e.g. curved or truncated substrates
    • H10H20/82Roughened surfaces, e.g. at the interface between epitaxial layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02367Substrates
    • H01L21/02428Structure
    • H01L21/0243Surface structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02538Group 13/15 materials
    • H01L21/0254Nitrides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02656Special treatments
    • H01L21/02658Pretreatments
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0133Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
    • H10H20/01335Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/819Bodies characterised by their shape, e.g. curved or truncated substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/855Optical field-shaping means, e.g. lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Devices (AREA)
  • Electroluminescent Light Sources (AREA)
IN1916MUN2014 2012-04-02 2013-03-29 IN2014MN01916A (OSRAM)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2012084208 2012-04-02
JP2012103489 2012-04-27
JP2012103490 2012-04-27
JP2012227295 2012-10-12
JP2012267488 2012-12-06
JP2012267377 2012-12-06
JP2012280241 2012-12-21
PCT/JP2013/059635 WO2013150984A1 (ja) 2012-04-02 2013-03-29 光学基板、半導体発光素子及び半導体発光素子の製造方法

Publications (1)

Publication Number Publication Date
IN2014MN01916A true IN2014MN01916A (OSRAM) 2015-07-10

Family

ID=49300468

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1916MUN2014 IN2014MN01916A (OSRAM) 2012-04-02 2013-03-29

Country Status (10)

Country Link
US (1) US9614136B2 (OSRAM)
EP (5) EP2942822A1 (OSRAM)
JP (1) JP6235459B2 (OSRAM)
KR (2) KR101763460B1 (OSRAM)
CN (1) CN104205370B (OSRAM)
BR (1) BR112014024516A2 (OSRAM)
IN (1) IN2014MN01916A (OSRAM)
RU (1) RU2604568C2 (OSRAM)
TW (1) TWI531086B (OSRAM)
WO (1) WO2013150984A1 (OSRAM)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2863260A1 (en) 2011-08-31 2015-04-22 Asahi Kasei E-materials Corporation Nano-imprint mold
EP2942822A1 (en) * 2012-04-02 2015-11-11 Asahi Kasei E-materials Corporation Optical substrate, semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element
KR101421026B1 (ko) * 2012-06-12 2014-07-22 코닝정밀소재 주식회사 유기발광소자용 광추출층 기판 및 그 제조방법
JP6036830B2 (ja) * 2012-08-21 2016-11-30 王子ホールディングス株式会社 半導体発光素子用基板及び半導体発光素子、並びにこれらの製造方法
DE102013108876B4 (de) * 2013-08-16 2022-08-18 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Fotolithografisches Verfahren zur Herstellung einer Struktur in einem Strahlung emittierenden Halbleiterbauelement
CN104459855A (zh) * 2013-09-22 2015-03-25 清华大学 金属光栅的制备方法
CN104459854B (zh) * 2013-09-22 2017-12-01 清华大学 金属光栅的制备方法
CN104459852B (zh) * 2013-09-22 2017-02-01 清华大学 金属光栅的制备方法
TWI632696B (zh) 2013-10-11 2018-08-11 王子控股股份有限公司 半導體發光元件用基板之製造方法、半導體發光元件之製 造方法、半導體發光元件用基板、以及半導體發光元件
TWI597863B (zh) * 2013-10-22 2017-09-01 晶元光電股份有限公司 發光元件及其製造方法
JP2015120879A (ja) * 2013-11-20 2015-07-02 旭化成イーマテリアルズ株式会社 レジスト組成物
KR102099441B1 (ko) * 2013-12-19 2020-04-09 엘지이노텍 주식회사 발광소자
JP6612130B2 (ja) * 2013-12-27 2019-11-27 Jxtgエネルギー株式会社 発光素子
WO2015104968A1 (ja) * 2014-01-10 2015-07-16 Jx日鉱日石エネルギー株式会社 光学基板、光学基板の製造に用いられるモールド、及び光学基板を含む発光素子
US9618836B2 (en) * 2014-04-22 2017-04-11 Asahi Glass Company, Limited Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their production
JP6438678B2 (ja) * 2014-05-14 2018-12-19 Jxtgエネルギー株式会社 凹凸構造を有するフィルム部材
CN106662673B (zh) * 2014-07-10 2018-11-30 Scivax股份有限公司 光学部件及其制造方法
TWI556002B (zh) * 2014-08-05 2016-11-01 群創光電股份有限公司 抗反射結構及電子裝置
CN105449058A (zh) * 2014-09-02 2016-03-30 展晶科技(深圳)有限公司 磊晶基板、磊晶基板的制造方法及发光二极管
TWI605616B (zh) * 2015-08-12 2017-11-11 固美實國際股份有限公司 用於發光二極體的圖案化基板
KR102412409B1 (ko) * 2015-10-26 2022-06-23 엘지전자 주식회사 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
JP6229707B2 (ja) 2015-11-26 2017-11-15 日亜化学工業株式会社 発光素子及びその製造方法
US10340415B2 (en) * 2016-09-01 2019-07-02 Lg Innotek Co., Ltd. Semiconductor device and semiconductor device package including the same
TWI635639B (zh) * 2017-01-05 2018-09-11 機光科技股份有限公司 高折射高導熱oled元件
US10243099B2 (en) 2017-05-16 2019-03-26 Epistar Corporation Light-emitting device
KR102343099B1 (ko) * 2017-06-07 2021-12-24 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 반도체 소자
CN109427940B (zh) * 2017-08-22 2020-04-24 比亚迪股份有限公司 发光二极管外延片及其制造方法
DE102018116783B4 (de) 2017-09-29 2024-05-08 Taiwan Semiconductor Manufacturing Co., Ltd. Halbleitersubstrat und Verfahren zum Fertigen von diesem
KR102456458B1 (ko) 2017-12-27 2022-10-18 엘지디스플레이 주식회사 전계 발광 표시장치
US11181668B2 (en) * 2018-07-13 2021-11-23 University Of Notre Dame Du Lac High contrast gradient index lens antennas
EP3918390A4 (en) * 2019-01-28 2022-10-05 B.G. Negev Technologies and Applications Ltd., at Ben-Gurion University Structure for a waveguide facet
US11249206B2 (en) * 2020-01-06 2022-02-15 Canon Medical Systems Corporation Method and system for PET detector efficiency normalization
CN113436983B (zh) * 2020-03-19 2024-08-13 京东方科技集团股份有限公司 μLED基板及制备方法、EL检测方法及装置
CN111785836B (zh) * 2020-06-27 2022-12-16 上海师范大学 一种具有蛾眼结构空穴传输层的太阳能电池及其制备方法
RU202751U1 (ru) * 2020-08-11 2021-03-04 Постовой Денис Александрович Диодная сборка
FR3115930B1 (fr) * 2020-10-29 2024-03-22 Commissariat Energie Atomique Diode électroluminescente à structure de contact tridimensionnelle, écran d’affichage et procédé de fabrication associé
DE102020215937A1 (de) * 2020-12-15 2022-06-15 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur herstellung eines substrats mit einer strukturierten oberfläche und substrat mit einer strukturierten oberfläche
TWI854755B (zh) * 2022-12-01 2024-09-01 台灣光罩股份有限公司 用以測試半導體元件之測試系統
CN116500403B (zh) * 2023-04-04 2025-09-12 南昌大学 一种测量led芯片光提取效率及内量子效率的方法

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4055503B2 (ja) 2001-07-24 2008-03-05 日亜化学工業株式会社 半導体発光素子
JP4178836B2 (ja) 2002-05-29 2008-11-12 ソニー株式会社 窒化ガリウム系半導体素子及びその製造方法
KR100576854B1 (ko) * 2003-12-20 2006-05-10 삼성전기주식회사 질화물 반도체 제조 방법과 이를 이용한 질화물 반도체
KR100646297B1 (ko) * 2004-03-05 2006-11-23 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 표시 장치의 제조 방법
JP2005259970A (ja) 2004-03-11 2005-09-22 Nichia Chem Ind Ltd 半導体発光素子
JP2005354020A (ja) * 2004-05-10 2005-12-22 Univ Meijo 半導体発光素子製造方法および半導体発光素子
KR20070046024A (ko) * 2004-08-31 2007-05-02 각코우호우징 메이조다이가쿠 반도체 발광 소자 제조 방법 및 반도체 발광 소자
KR100610639B1 (ko) 2005-07-22 2006-08-09 삼성전기주식회사 수직 구조 질화갈륨계 발광다이오드 소자 및 그 제조방법
JP4843284B2 (ja) * 2005-09-22 2011-12-21 パナソニック電工株式会社 半導体発光素子およびその製造方法
KR100659373B1 (ko) * 2006-02-09 2006-12-19 서울옵토디바이스주식회사 패터닝된 발광다이오드용 기판 및 그것을 채택하는 발광다이오드
JP5232969B2 (ja) * 2006-03-23 2013-07-10 豊田合成株式会社 窒化ガリウム系化合物半導体発光素子の製造方法
KR100828873B1 (ko) 2006-04-25 2008-05-09 엘지이노텍 주식회사 질화물 반도체 발광소자 및 그 제조방법
KR100736623B1 (ko) * 2006-05-08 2007-07-09 엘지전자 주식회사 수직형 발광 소자 및 그 제조방법
KR100780233B1 (ko) * 2006-05-15 2007-11-27 삼성전기주식회사 다중 패턴 구조를 지닌 반도체 발광 소자
KR100769727B1 (ko) 2006-08-17 2007-10-23 삼성전기주식회사 표면 요철 형성방법 및 그를 이용한 질화갈륨계발광다이오드 소자의 제조방법
US7977695B2 (en) * 2007-09-21 2011-07-12 Lg Innotek Co., Ltd. Semiconductor light emitting device and method for manufacturing the same
JP4993371B2 (ja) * 2007-11-21 2012-08-08 サンケン電気株式会社 半導体発光素子用ウエーハの粗面化方法及び半導体発光素子
US7598105B2 (en) * 2007-12-21 2009-10-06 Tekcore Co., Ltd. Light emitting diode structure and method for fabricating the same
KR101164663B1 (ko) * 2007-12-28 2012-07-12 니치아 카가쿠 고교 가부시키가이샤 반도체 발광 소자 및 그 제조방법
JP5042100B2 (ja) 2008-03-28 2012-10-03 Dowaエレクトロニクス株式会社 エピタキシャル成長用基板およびその製造方法ならびにiii族窒化物半導体素子
JP5282503B2 (ja) 2008-09-19 2013-09-04 日亜化学工業株式会社 半導体発光素子
JP5343225B2 (ja) * 2008-12-16 2013-11-13 スタンレー電気株式会社 Ii−vi族またはiii−v族化合物系半導体発光素子用エピタキシャルウエハ、および、その製造方法
TW201029073A (en) 2009-01-21 2010-08-01 Univ Nat Chunghsing Epitaxial wafer with low surface defect density
KR101148380B1 (ko) 2009-01-21 2012-05-24 내셔날 충싱 유니버시티 저결함 밀도를 가지는 에피택셜 구조 및 그 제조 방법
KR101134810B1 (ko) 2009-03-03 2012-04-13 엘지이노텍 주식회사 발광소자 및 그 제조방법
WO2010101348A1 (ko) 2009-03-05 2010-09-10 우리엘에스티 주식회사 3족 질화물 반도체 발광소자 및 그 제조방법
JP5196403B2 (ja) * 2009-03-23 2013-05-15 国立大学法人山口大学 サファイア基板の製造方法、および半導体装置
US8941136B2 (en) * 2009-09-07 2015-01-27 El-Seed Corporation Semiconductor light emitting element
JP2012033521A (ja) 2010-07-28 2012-02-16 Hitachi Cable Ltd 基板、及び発光素子
JP5319641B2 (ja) 2010-10-14 2013-10-16 株式会社東芝 診断回路および半導体集積回路
JP2012103490A (ja) 2010-11-10 2012-05-31 Seiko Epson Corp 偏光素子とその製造方法、プロジェクター、液晶装置、電子機器
JP2012103489A (ja) 2010-11-10 2012-05-31 Dainippon Printing Co Ltd 保護フィルム、偏光板、液晶表示パネルおよび表示装置
JP2012124257A (ja) 2010-12-07 2012-06-28 Toshiba Corp 半導体発光素子及びその製造方法
JP5730653B2 (ja) 2011-04-18 2015-06-10 株式会社ソニー・コンピュータエンタテインメント 電子機器
WO2013125823A1 (en) * 2012-02-20 2013-08-29 Seoul Opto Device Co., Ltd. High efficiency light emitting diode and method of fabricating the same
EP2942822A1 (en) * 2012-04-02 2015-11-11 Asahi Kasei E-materials Corporation Optical substrate, semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element
EP2838130A4 (en) * 2012-04-13 2015-08-12 Asahi Kasei E Materials Corp LIGHT EXTRACTION BODY FOR A LIGHT-EMITTING SEMICONDUCTOR ELEMENT AND LIGHT-EMITTING ELEMENT
WO2014199851A1 (ja) * 2013-06-10 2014-12-18 旭化成イーマテリアルズ株式会社 半導体発光装置
KR102208684B1 (ko) * 2013-07-30 2021-01-27 코쿠리츠켄큐카이하츠호진 죠호츠신켄큐키코 반도체 발광 소자 및 그 제조 방법
TWI632696B (zh) * 2013-10-11 2018-08-11 王子控股股份有限公司 半導體發光元件用基板之製造方法、半導體發光元件之製 造方法、半導體發光元件用基板、以及半導體發光元件
DE102014108301A1 (de) * 2014-06-12 2015-12-17 Osram Opto Semiconductors Gmbh Halbleiterchip und Verfahren zur Herstellung eines Halbleiterchips

Also Published As

Publication number Publication date
JP6235459B2 (ja) 2017-11-22
EP2942822A1 (en) 2015-11-11
KR101862500B1 (ko) 2018-05-29
EP2942820A1 (en) 2015-11-11
EP2835836A1 (en) 2015-02-11
RU2014144362A (ru) 2016-05-27
JPWO2013150984A1 (ja) 2015-12-17
EP2835836B1 (en) 2019-06-19
KR20140133867A (ko) 2014-11-20
BR112014024516A2 (pt) 2017-07-25
TWI531086B (zh) 2016-04-21
KR101763460B1 (ko) 2017-07-31
US9614136B2 (en) 2017-04-04
EP2835836A4 (en) 2015-08-05
EP2942819A1 (en) 2015-11-11
CN104205370A (zh) 2014-12-10
WO2013150984A1 (ja) 2013-10-10
KR20160148052A (ko) 2016-12-23
CN104205370B (zh) 2017-03-22
RU2604568C2 (ru) 2016-12-10
US20150048380A1 (en) 2015-02-19
TW201344959A (zh) 2013-11-01
EP2942821A1 (en) 2015-11-11

Similar Documents

Publication Publication Date Title
IN2014MN01916A (OSRAM)
EA201890167A1 (ru) Светодиоды и фотодетекторы, сформированные из нанопроводников/нанопирамид
EP2362447A3 (en) Light emitting diode
WO2014014300A3 (ko) 반도체 발광소자
SE0801649L (sv) Nanostrukturerad ljusdiod
WO2013049415A3 (en) P-type doping layers for use with light emitting devices
WO2012011749A3 (en) Light emitting diode
EA201201243A1 (ru) ГЕТЕРОСТРУКТУРА НА ОСНОВЕ ТВЁРДОГО РАСТВОРА GaInAsSb, СПОСОБ ЕЁ ИЗГОТОВЛЕНИЯ И СВЕТОДИОД НА ОСНОВЕ ЭТОЙ ГЕТЕРОСТРУКТУРЫ
TW200943601A (en) Organic luminous diode, contact arrangement and method for the production of an organic luminous diode
US9165909B2 (en) Light source module
TW201130160A (en) High brightness LED utilizing a roughened active layer and conformal cladding
TW200705706A (en) Light emitting diode structure
WO2011117073A3 (de) Organische lichtemittierende vorrichtung mit homogener leuchtdichteverteilung
USRE47398E1 (en) Light-emitting device having patterned substrate and method of manufacturing thereof
CN103124046A (zh) 一种半导体激光器
WO2011055203A3 (zh) 具有外移式电极之垂直发光二极体
CN204167357U (zh) 发光元件结构
MY165794A (en) Light emitting diode and fabrication method thereof
Lee et al. Simulations of light extraction and light propagation properties of light emitting diodes featuring silicon carbide substrates
CN203165931U (zh) 发光二极管芯片
JP6045779B2 (ja) 波長変換構造及びその製造方法並びに該波長変換構造を含む発光装置
TW201624757A (zh) 半導體發光元件
Lin et al. Enhanced light emission in vertical-structured GaN-based light-emitting diodes with trench etching and arrayed p-electrodes
Halpin et al. Study of GaN LED ITO nano-gratings with standing wave analysis
TW201306308A (zh) 具有漸變折射率導電層的發光二極體