GB2429116B - Semiconductor device based on si-ge with high stress liner for enhanced channel carrier mobility - Google Patents

Semiconductor device based on si-ge with high stress liner for enhanced channel carrier mobility

Info

Publication number
GB2429116B
GB2429116B GB0621299A GB0621299A GB2429116B GB 2429116 B GB2429116 B GB 2429116B GB 0621299 A GB0621299 A GB 0621299A GB 0621299 A GB0621299 A GB 0621299A GB 2429116 B GB2429116 B GB 2429116B
Authority
GB
United Kingdom
Prior art keywords
semiconductor device
device based
carrier mobility
high stress
channel carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB0621299A
Other languages
English (en)
Other versions
GB0621299D0 (en
GB2429116A (en
Inventor
Sey-Ping Sun
David E Brown
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of GB0621299D0 publication Critical patent/GB0621299D0/en
Publication of GB2429116A publication Critical patent/GB2429116A/en
Application granted granted Critical
Publication of GB2429116B publication Critical patent/GB2429116B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/792—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions comprising applied insulating layers, e.g. stress liners
    • H01L21/823807—
    • H01L21/823828—
    • H01L29/1054—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/751—Insulated-gate field-effect transistors [IGFET] having composition variations in the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/015—Manufacture or treatment removing at least parts of gate spacers, e.g. disposable spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0167—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0172—Manufacturing their gate conductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
GB0621299A 2004-05-05 2005-04-19 Semiconductor device based on si-ge with high stress liner for enhanced channel carrier mobility Expired - Lifetime GB2429116B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/838,330 US7053400B2 (en) 2004-05-05 2004-05-05 Semiconductor device based on Si-Ge with high stress liner for enhanced channel carrier mobility
PCT/US2005/013239 WO2005112127A1 (en) 2004-05-05 2005-04-19 SEMICONDUCTOR DEVICE BASED ON Si-Ge WITH HIGH STRESS LINER FOR ENHANCED CHANNEL CARRIER MOBILITY

Publications (3)

Publication Number Publication Date
GB0621299D0 GB0621299D0 (en) 2006-12-06
GB2429116A GB2429116A (en) 2007-02-14
GB2429116B true GB2429116B (en) 2009-04-22

Family

ID=34966169

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0621299A Expired - Lifetime GB2429116B (en) 2004-05-05 2005-04-19 Semiconductor device based on si-ge with high stress liner for enhanced channel carrier mobility

Country Status (7)

Country Link
US (2) US7053400B2 (enExample)
JP (1) JP2007536736A (enExample)
CN (1) CN100533766C (enExample)
DE (1) DE112005001029B4 (enExample)
GB (1) GB2429116B (enExample)
TW (1) TWI411100B (enExample)
WO (1) WO2005112127A1 (enExample)

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DE112005001029T5 (de) 2007-02-22
TWI411100B (zh) 2013-10-01
US7053400B2 (en) 2006-05-30
DE112005001029B4 (de) 2017-10-19
GB0621299D0 (en) 2006-12-06
GB2429116A (en) 2007-02-14
US20050247926A1 (en) 2005-11-10
CN1950946A (zh) 2007-04-18
CN100533766C (zh) 2009-08-26
US20060208250A1 (en) 2006-09-21

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