FR2647267B1 - Cellule de memoire vive dynamique et procede de fabrication - Google Patents
Cellule de memoire vive dynamique et procede de fabricationInfo
- Publication number
- FR2647267B1 FR2647267B1 FR8911703A FR8911703A FR2647267B1 FR 2647267 B1 FR2647267 B1 FR 2647267B1 FR 8911703 A FR8911703 A FR 8911703A FR 8911703 A FR8911703 A FR 8911703A FR 2647267 B1 FR2647267 B1 FR 2647267B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- memory cell
- dynamic random
- random memory
- dynamic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/377—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate having a storage electrode extension located over the transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890006720A KR920010695B1 (ko) | 1989-05-19 | 1989-05-19 | 디램셀 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2647267A1 FR2647267A1 (fr) | 1990-11-23 |
FR2647267B1 true FR2647267B1 (fr) | 1995-03-10 |
Family
ID=19286319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8911703A Expired - Lifetime FR2647267B1 (fr) | 1989-05-19 | 1989-09-07 | Cellule de memoire vive dynamique et procede de fabrication |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPH0715949B2 (fr) |
KR (1) | KR920010695B1 (fr) |
DE (1) | DE3927176A1 (fr) |
FR (1) | FR2647267B1 (fr) |
GB (1) | GB2231718B (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5185284A (en) * | 1989-05-22 | 1993-02-09 | Mitsubishi Denki Kabushiki Kaisha | Method of making a semiconductor memory device |
KR910013554A (ko) * | 1989-12-08 | 1991-08-08 | 김광호 | 반도체 장치 및 그 제조방법 |
JPH03200366A (ja) * | 1989-12-27 | 1991-09-02 | Nec Corp | 半導体装置及びその製造方法 |
JPH03278573A (ja) * | 1990-03-28 | 1991-12-10 | Mitsubishi Electric Corp | 半導体記憶装置 |
KR930007194B1 (ko) * | 1990-08-14 | 1993-07-31 | 삼성전자 주식회사 | 반도체 장치 및 그 제조방법 |
JP2748050B2 (ja) * | 1991-02-08 | 1998-05-06 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US5272103A (en) * | 1991-02-08 | 1993-12-21 | Mitsubishi Denki Kabushiki Kaisha | DRAM having a large dielectric breakdown voltage between an adjacent conductive layer and a capacitor electrode and method of manufacture thereof |
US5208177A (en) * | 1992-02-07 | 1993-05-04 | Micron Technology, Inc. | Local field enhancement for better programmability of antifuse PROM |
JPH11145414A (ja) * | 1997-09-04 | 1999-05-28 | Toshiba Corp | 半導体装置 |
KR100689514B1 (ko) | 2006-01-23 | 2007-03-02 | 주식회사 하이닉스반도체 | 반도체 소자 및 그의 제조 방법 |
CN112750899B (zh) * | 2019-10-31 | 2022-05-27 | 广东美的白色家电技术创新中心有限公司 | 一种半导体器件及其制备方法、电器设备 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137245A (ja) * | 1982-02-10 | 1983-08-15 | Hitachi Ltd | 大規模半導体メモリ |
EP0169938B1 (fr) * | 1983-12-15 | 1989-03-29 | Kabushiki Kaisha Toshiba | Dispositif de mémoire semi-conducteur comportant un condensateur dans un sillon |
JPS60189964A (ja) * | 1984-03-12 | 1985-09-27 | Hitachi Ltd | 半導体メモリ |
JPS62120070A (ja) * | 1985-11-20 | 1987-06-01 | Toshiba Corp | 半導体記憶装置 |
JPS63122261A (ja) * | 1986-11-12 | 1988-05-26 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH01119053A (ja) * | 1987-10-31 | 1989-05-11 | Sony Corp | 半導体メモリ装置 |
JP2548957B2 (ja) * | 1987-11-05 | 1996-10-30 | 富士通株式会社 | 半導体記憶装置の製造方法 |
-
1989
- 1989-05-19 KR KR1019890006720A patent/KR920010695B1/ko not_active IP Right Cessation
- 1989-08-17 DE DE3927176A patent/DE3927176A1/de active Granted
- 1989-08-30 JP JP1221888A patent/JPH0715949B2/ja not_active Expired - Fee Related
- 1989-09-07 FR FR8911703A patent/FR2647267B1/fr not_active Expired - Lifetime
- 1989-11-24 GB GB8926627A patent/GB2231718B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3927176A1 (de) | 1990-11-22 |
GB2231718B (en) | 1993-05-26 |
DE3927176C2 (fr) | 1992-03-26 |
KR900019141A (ko) | 1990-12-24 |
FR2647267A1 (fr) | 1990-11-23 |
GB2231718A (en) | 1990-11-21 |
KR920010695B1 (ko) | 1992-12-12 |
JPH02312270A (ja) | 1990-12-27 |
GB8926627D0 (en) | 1990-01-17 |
JPH0715949B2 (ja) | 1995-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2603128B1 (fr) | Cellule de memoire eprom et son procede de fabrication | |
DE3854421D1 (de) | Dynamische Speicheranordnung mit wahlfreiem Zugriff und Herstellungsverfahren dafür. | |
FR2616576B1 (fr) | Cellule de memoire eprom et son procede de fabrication | |
FR2629941B1 (fr) | Memoire et cellule memoire statiques du type mis, procede de memorisation | |
DE3888632D1 (de) | Schichtstruktur für eine Speicherzelle für eine dynamische Speicheranordnung mit wahlfreiem Zugriff und Herstellungsverfahren dafür. | |
FR2617923B1 (fr) | Palier spherique et son procede de fabrication | |
DE3880750T2 (de) | Vertikale Transistor-/Kapazitätspeicherzellen-Struktur und Herstellungsverfahren dafür. | |
DE69022609D1 (de) | Dynamische Speicherzelle mit wahlfreiem Zugriff. | |
FR2676863B1 (fr) | Procede de fabrication d'un condensateur de cellule dram et structure de celui-ci. | |
FR2647267B1 (fr) | Cellule de memoire vive dynamique et procede de fabrication | |
DE69132998T2 (de) | Speicheranordnung mit wahlfreiem Zugriff und Herstellungsverfahren dafür | |
FR2579221B1 (fr) | Composition detergente liquide enzymatique stable, son procede de fabrication et ses applications | |
FR2664098B1 (fr) | Condensateur empile d'une cellule dram et son procede de fabrication. | |
FR2622975B1 (fr) | Accelerometre capacitif et son procede de fabrication | |
FR2776834B1 (fr) | Procede de fabrication d'un condensateur de cellule de memoire vive dynamique | |
FR2632080B1 (fr) | Lentille de contact poreuse et son procede de fabrication | |
FR2654870B1 (fr) | Dispositif semi-conducteur, notamment dispositif de memoire a condensateur, et procede pour sa fabrication. | |
FR2778269B1 (fr) | Procede de fabrication d'un condensateur de cellule de memoire dynamique | |
FR2553558B1 (fr) | Memoire dynamique | |
FR2549274B1 (fr) | Cellule de memoire vive dynamique a rendement eleve et procede de fabrication | |
FR2638000B1 (fr) | Carte a memoire magnetique a grande capacite et procede de fabrication | |
FR2745973B1 (fr) | Memoire de masse et procede de fabrication de memoire de masse | |
FR2511801B1 (fr) | Memoire d'informations et son procede de fabrication | |
FR2623320B1 (fr) | Memoire de type dynamique | |
FR2638021B1 (fr) | Memoire eprom de type damier et procede de fabrication |