FR2336804A1 - Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne - Google Patents

Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne

Info

Publication number
FR2336804A1
FR2336804A1 FR7539500A FR7539500A FR2336804A1 FR 2336804 A1 FR2336804 A1 FR 2336804A1 FR 7539500 A FR7539500 A FR 7539500A FR 7539500 A FR7539500 A FR 7539500A FR 2336804 A1 FR2336804 A1 FR 2336804A1
Authority
FR
France
Prior art keywords
cdxhg1
xte
alloy
manufacturing
semiconductor devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7539500A
Other languages
English (en)
Other versions
FR2336804B1 (fr
Inventor
Jacques Henri Paul Maille
Andre Salaville
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Anonyme de Telecommunications SAT
Original Assignee
Societe Anonyme de Telecommunications SAT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Anonyme de Telecommunications SAT filed Critical Societe Anonyme de Telecommunications SAT
Priority to FR7539500A priority Critical patent/FR2336804A1/fr
Priority to DE2654429A priority patent/DE2654429C2/de
Priority to DE2660229A priority patent/DE2660229C2/de
Priority to US05/746,489 priority patent/US4132999A/en
Priority to GB51747/76A priority patent/GB1566886A/en
Priority to JP51150983A priority patent/JPS5279893A/ja
Priority to NL7614249.A priority patent/NL163905C/xx
Publication of FR2336804A1 publication Critical patent/FR2336804A1/fr
Application granted granted Critical
Publication of FR2336804B1 publication Critical patent/FR2336804B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
    • H01L31/1032—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type the devices comprising active layers formed only by AIIBVI compounds, e.g. HgCdTe IR photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/38—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions
    • H01L21/383—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions using diffusion into or out of a solid from or into a gaseous phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
    • H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Light Receiving Elements (AREA)
FR7539500A 1975-12-23 1975-12-23 Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne Granted FR2336804A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR7539500A FR2336804A1 (fr) 1975-12-23 1975-12-23 Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne
DE2654429A DE2654429C2 (de) 1975-12-23 1976-12-01 Verfahren zum Herstellen eines Photoelements mit einem lichtempfindlichen halbleitenden Substrat aus der Legierung Cd↓x↓Hg↓1↓↓-↓↓x↓Te
DE2660229A DE2660229C2 (de) 1975-12-23 1976-12-01 Verfahren zum Herstellen eines Photoelements
US05/746,489 US4132999A (en) 1975-12-23 1976-12-01 Semiconductor devices
GB51747/76A GB1566886A (en) 1975-12-23 1976-12-10 Semiconductor devices
JP51150983A JPS5279893A (en) 1975-12-23 1976-12-17 Semiconductor device and method of assembling same
NL7614249.A NL163905C (nl) 1975-12-23 1976-12-22 Fotodetector voor infraroodstraling, omvattende een halfgeleiderlichaam, bestaande uit een legering van twee halfgeleidende materialen met verschillende breedten van de verboden energieband tussen de valentieband en de geleidingsband.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7539500A FR2336804A1 (fr) 1975-12-23 1975-12-23 Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne

Publications (2)

Publication Number Publication Date
FR2336804A1 true FR2336804A1 (fr) 1977-07-22
FR2336804B1 FR2336804B1 (fr) 1978-06-30

Family

ID=9164076

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7539500A Granted FR2336804A1 (fr) 1975-12-23 1975-12-23 Perfectionnements apportes aux dispositifs semi-conducteurs, notamment aux detecteurs photovoltaiques comprenant un substrat a base d'un alliage cdxhg1-xte, et procede de fabrication d'un tel dispositif perfectionne

Country Status (6)

Country Link
US (1) US4132999A (fr)
JP (1) JPS5279893A (fr)
DE (2) DE2660229C2 (fr)
FR (1) FR2336804A1 (fr)
GB (1) GB1566886A (fr)
NL (1) NL163905C (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0045258A2 (fr) * 1980-07-30 1982-02-03 Societe Anonyme De Telecommunications (S.A.T.) Détecteur photovoltaique sensible dans l'infrarouge proche
FR2492171A1 (fr) * 1980-10-10 1982-04-16 Philips Nv Procede pour fabriquer un dispositif detecteur de rayons infrarouges
FR2501915A1 (fr) * 1981-03-10 1982-09-17 Telecommunications Sa Photodetecteur sensible dans l'infra-rouge proche
EP0090669A2 (fr) * 1982-03-31 1983-10-05 Honeywell Inc. Détecteur de radiation électromagnétique
WO1989010007A2 (fr) * 1988-04-07 1989-10-19 Santa Barbara Research Center Photodetecteurs infrarouges a jonctions noyees
EP0635892A1 (fr) * 1992-07-21 1995-01-25 Santa Barbara Research Center Photodétecteur en HgCdTe stable au recuit et procédé pour sa fabrication
WO2005077138A1 (fr) 2004-01-19 2005-08-25 Michel Evin Machine de travail du sol, du type dechaumeuse
DE3743288A1 (de) 1986-12-30 2015-06-18 Société Anonyme de Télécommunications Bispektrale Empfangsvorrichtung für elektromagnetische Strahlung

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4206003A (en) * 1977-07-05 1980-06-03 Honeywell Inc. Method of forming a mercury cadmium telluride photodiode
US4286278A (en) * 1977-09-01 1981-08-25 Honeywell Inc. Hybrid mosaic IR/CCD focal plane
IT1088411B (it) * 1977-12-06 1985-06-10 Cise Spa Procedimento per la relaizzazione di rivelatori multispettrali per infrarosso
JPS575325A (en) * 1980-06-12 1982-01-12 Junichi Nishizawa Semicondoctor p-n junction device and manufacture thereof
DE3033457C2 (de) * 1980-09-05 1986-05-15 N.V. Philips' Gloeilampenfabrieken, Eindhoven Verfahren zur Herstellung einer einen PN-Übergang aufweisenden Infrarot-Detektoranordnung
EP0068652B1 (fr) * 1981-06-24 1988-05-25 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Photodiodes
US5079610A (en) * 1985-12-05 1992-01-07 Santa Barbara Research Center Structure and method of fabricating a trapping-mode
US5182217A (en) * 1985-12-05 1993-01-26 Santa Barbara Research Center Method of fabricating a trapping-mode
US4914495A (en) * 1985-12-05 1990-04-03 Santa Barbara Research Center Photodetector with player covered by N layer
US5004698A (en) * 1985-12-05 1991-04-02 Santa Barbara Research Center Method of making photodetector with P layer covered by N layer
US4726885A (en) * 1986-02-07 1988-02-23 Texas Instruments Incorporated Selenidization passivation
US4736104A (en) * 1986-02-07 1988-04-05 Texas Instruments Incorporated Selenidization passivation
US4731640A (en) * 1986-05-20 1988-03-15 Westinghouse Electric Corp. High resistance photoconductor structure for multi-element infrared detector arrays
US4885619A (en) * 1987-08-24 1989-12-05 Santa Barbara Research Center HgCdTe MIS device having a CdTe heterojunction
JP2798927B2 (ja) * 1988-03-28 1998-09-17 株式会社東芝 半導体受光装置及びその製造方法
US5936268A (en) * 1988-03-29 1999-08-10 Raytheon Company Epitaxial passivation of group II-VI infrared photodetectors
US5880510A (en) * 1988-05-11 1999-03-09 Raytheon Company Graded layer passivation of group II-VI infrared photodetectors
US4961098A (en) * 1989-07-03 1990-10-02 Santa Barbara Research Center Heterojunction photodiode array
US5049962A (en) * 1990-03-07 1991-09-17 Santa Barbara Research Center Control of optical crosstalk between adjacent photodetecting regions
US5192695A (en) * 1991-07-09 1993-03-09 Fermionics Corporation Method of making an infrared detector
US5296384A (en) * 1992-07-21 1994-03-22 Santa Barbara Research Center Bake-stable HgCdTe photodetector and method for fabricating same
US5279974A (en) * 1992-07-24 1994-01-18 Santa Barbara Research Center Planar PV HgCdTe DLHJ fabricated by selective cap layer growth
JP5135651B2 (ja) * 2001-05-15 2013-02-06 株式会社アクロラド 半導体放射線検出素子
US20110146788A1 (en) * 2009-12-23 2011-06-23 General Electric Company Photovoltaic cell
CN104616974B (zh) * 2015-01-21 2017-06-27 中国科学院上海技术物理研究所 一种用于高能离子注入的复合掩膜的去除方法
CN104576335A (zh) * 2015-01-21 2015-04-29 中国科学院上海技术物理研究所 一种用于高能离子注入的复合掩膜

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3496024A (en) * 1961-10-09 1970-02-17 Monsanto Co Photovoltaic cell with a graded energy gap
DE1261486B (de) * 1964-07-31 1968-02-22 Ibm Deutschland Verfahren zum n-Dotieren definierter Bereiche von Halbleiterkoerpern
FR2168934B1 (fr) * 1972-01-27 1977-04-01 Telecommunications Sa
JPS499186A (fr) * 1972-05-11 1974-01-26
US3949223A (en) * 1973-11-01 1976-04-06 Honeywell Inc. Monolithic photoconductive detector array
FR2281650A1 (fr) * 1974-08-06 1976-03-05 Telecommunications Sa Procede de fabrication d'une photodiode sensible aux rayonnements infrarouges et photodiode obtenue par ce procede

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0045258A2 (fr) * 1980-07-30 1982-02-03 Societe Anonyme De Telecommunications (S.A.T.) Détecteur photovoltaique sensible dans l'infrarouge proche
FR2488048A1 (fr) * 1980-07-30 1982-02-05 Telecommunications Sa Detecteur photovoltaique sensible dans l'infrarouge proche
EP0045258A3 (en) * 1980-07-30 1982-02-17 Societe Anonyme De Telecommunications Photovoltaic detector sensitive in the near infrared range
FR2492171A1 (fr) * 1980-10-10 1982-04-16 Philips Nv Procede pour fabriquer un dispositif detecteur de rayons infrarouges
FR2501915A1 (fr) * 1981-03-10 1982-09-17 Telecommunications Sa Photodetecteur sensible dans l'infra-rouge proche
EP0060743A1 (fr) * 1981-03-10 1982-09-22 Societe Anonyme De Telecommunications (S.A.T.) Photodétecteur sensible dans l'infra-rouge proche
EP0090669A2 (fr) * 1982-03-31 1983-10-05 Honeywell Inc. Détecteur de radiation électromagnétique
EP0090669A3 (fr) * 1982-03-31 1990-12-19 Honeywell Inc. Détecteur de radiation électromagnétique
DE3743288A1 (de) 1986-12-30 2015-06-18 Société Anonyme de Télécommunications Bispektrale Empfangsvorrichtung für elektromagnetische Strahlung
WO1989010007A2 (fr) * 1988-04-07 1989-10-19 Santa Barbara Research Center Photodetecteurs infrarouges a jonctions noyees
WO1989010007A3 (fr) * 1988-04-07 1990-05-31 Santa Barbara Res Center Photodetecteurs infrarouges a jonctions noyees
EP0635892A1 (fr) * 1992-07-21 1995-01-25 Santa Barbara Research Center Photodétecteur en HgCdTe stable au recuit et procédé pour sa fabrication
US5401986A (en) * 1992-07-21 1995-03-28 Santa Barbara Research Center Bake-stable HgCdTe photodetector with II-VI passivation layer
WO2005077138A1 (fr) 2004-01-19 2005-08-25 Michel Evin Machine de travail du sol, du type dechaumeuse

Also Published As

Publication number Publication date
US4132999A (en) 1979-01-02
DE2654429A1 (de) 1977-07-14
FR2336804B1 (fr) 1978-06-30
GB1566886A (en) 1980-05-08
JPS5279893A (en) 1977-07-05
NL7614249A (nl) 1977-06-27
NL163905B (nl) 1980-05-16
DE2654429C2 (de) 1984-07-19
DE2660229C2 (de) 1986-07-24
NL163905C (nl) 1980-10-15
JPS5433116B2 (fr) 1979-10-18

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