ES2093325T3 - Ensayar y comprobar los datos de circuitos individuales en una oblea antes del proceso de separacion. - Google Patents

Ensayar y comprobar los datos de circuitos individuales en una oblea antes del proceso de separacion.

Info

Publication number
ES2093325T3
ES2093325T3 ES93110519T ES93110519T ES2093325T3 ES 2093325 T3 ES2093325 T3 ES 2093325T3 ES 93110519 T ES93110519 T ES 93110519T ES 93110519 T ES93110519 T ES 93110519T ES 2093325 T3 ES2093325 T3 ES 2093325T3
Authority
ES
Spain
Prior art keywords
matrices
sector
test
signals
separation process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93110519T
Other languages
English (en)
Inventor
Michael D Rostoker
Carlos Dangelo
James Koford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LSI Corp
Original Assignee
LSI Logic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LSI Logic Corp filed Critical LSI Logic Corp
Application granted granted Critical
Publication of ES2093325T3 publication Critical patent/ES2093325T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
    • G01R31/318511—Wafer Test
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/006—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation at wafer scale level, i.e. wafer scale integration [WSI]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

UNAS SEÑALES (INCLUYENDO SONDAS) DE UN SISTEMA EXTERNO(360) SON CONECTADAS SELECTIVAMENTE A UNA PLURALIDAD DE MATRICES NO SINGULADAS (102) SOBRE UN SECTOR SEMICONDUCTOR (300) CON UN MINIMO NUMERO DE CONEXIONES Y UN MECANISMO DE SELECCION ELECTRONICA (350) ALOJADO EN EL SECTOR (300).EL MECANISMO (350) SE CONECTA A LA MATRIZ INDIVIDUAL (102) MEDIANTE LINEAS CONDUCTORAS (310) SOBRE EL SECTOR (300). EL MECANISMO (350) ES CAPAZ DE PROPORCIONAR LAS SEÑALES EXTERNAS ( O CONECTAR LAS SONDAS EXTERNAS) A UNA MATRIZ SIMPLE (102) O GRUPOS DE LAS MATRICES (102), Y ELECTRONICAMENTE "CAMINAR A TRAVES " DE LA COMPLETA PLURALIDAD DE MATRICES (102). PUEDEN PROVEERSE TAMBIEN,LINEAS REDUNDANTES CONDUCTORAS ASI COMO DIODOS Y/O FUSIBLES EN UNION CON LAS MISMAS, PARA PROTEGERSE CONTRA VARIOS FALLOS QUE PUEDEN SUCEDER EN ESTAS. LOS MECANISMOS DE SELECCION ELECTRONICA REDUNDANTE PUEDEN ASEGURAR LA CAPACIDAD DE PROVEER SELECTIVAMENTE SEÑALES A LAS MATRICES.
ES93110519T 1992-07-02 1993-07-01 Ensayar y comprobar los datos de circuitos individuales en una oblea antes del proceso de separacion. Expired - Lifetime ES2093325T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/908,687 US5442282A (en) 1992-07-02 1992-07-02 Testing and exercising individual, unsingulated dies on a wafer

Publications (1)

Publication Number Publication Date
ES2093325T3 true ES2093325T3 (es) 1996-12-16

Family

ID=25426114

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93110519T Expired - Lifetime ES2093325T3 (es) 1992-07-02 1993-07-01 Ensayar y comprobar los datos de circuitos individuales en una oblea antes del proceso de separacion.

Country Status (5)

Country Link
US (3) US5442282A (es)
EP (1) EP0579993B1 (es)
JP (1) JPH0677298A (es)
DE (1) DE69304276T2 (es)
ES (1) ES2093325T3 (es)

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EP0579993A1 (en) 1994-01-26
US5539325A (en) 1996-07-23
JPH0677298A (ja) 1994-03-18
US5442282A (en) 1995-08-15
DE69304276D1 (de) 1996-10-02
US5838163A (en) 1998-11-17
EP0579993B1 (en) 1996-08-28
DE69304276T2 (de) 1997-03-20

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