ES2086375T3 - Metodo para la formacion de una pelicula depositada que utiliza deposito selectivo con utilizacion de hidruro de alquil aluminio. - Google Patents
Metodo para la formacion de una pelicula depositada que utiliza deposito selectivo con utilizacion de hidruro de alquil aluminio.Info
- Publication number
- ES2086375T3 ES2086375T3 ES90310506T ES90310506T ES2086375T3 ES 2086375 T3 ES2086375 T3 ES 2086375T3 ES 90310506 T ES90310506 T ES 90310506T ES 90310506 T ES90310506 T ES 90310506T ES 2086375 T3 ES2086375 T3 ES 2086375T3
- Authority
- ES
- Spain
- Prior art keywords
- aluminum
- aluminum hydride
- formation
- deposited film
- alkyl aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32051—Deposition of metallic or metal-silicide layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
- H01L21/28562—Selective deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
AL OFRECER UN METODO DE FORMACION DE PELICULA DEPOSITADA EN LA QUE EL ALUMINIO O EL METAL COMPUESTO DE PRINCIPALMENTE ALUMINIO DE BUENA CALIDAD SE DEPOSITA SELECTIVAMENTE DE ACUERDO CON EL METODO CVD QUE UTILIZA UN HYDRIDE DE ALUMINIO ALQUIL E HIDROGENO, Y LUEGO ALUMINIO PURO O UN METAL COMPUESTO DE EL ES DEPOSITADO NO SELECTIVAMENTE LO QUE HACE POSIBLE FORMAR UNA PELICULA ELECTROCONDUCTORA DE BUENA CALIDAD DENTRO DE PEQUEÑAS ABERTURAS EN UNA CAPA AISLANTE.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25002189 | 1989-09-26 | ||
JP2036198A JP2721023B2 (ja) | 1989-09-26 | 1990-02-19 | 堆積膜形成法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2086375T3 true ES2086375T3 (es) | 1996-07-01 |
Family
ID=26375242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES90310506T Expired - Lifetime ES2086375T3 (es) | 1989-09-26 | 1990-09-25 | Metodo para la formacion de una pelicula depositada que utiliza deposito selectivo con utilizacion de hidruro de alquil aluminio. |
Country Status (10)
Country | Link |
---|---|
US (2) | US5180687A (es) |
EP (1) | EP0420595B1 (es) |
JP (1) | JP2721023B2 (es) |
KR (1) | KR940010501B1 (es) |
AT (1) | ATE137605T1 (es) |
DE (1) | DE69026783T2 (es) |
ES (1) | ES2086375T3 (es) |
MY (1) | MY107418A (es) |
PT (1) | PT95430B (es) |
SG (1) | SG45388A1 (es) |
Families Citing this family (53)
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KR940011005B1 (ko) * | 1989-09-09 | 1994-11-22 | 캐논 가부시끼가이샤 | 알킬 알루미늄 하이드라이드를 이용한 퇴적막 형성법 |
JP2721023B2 (ja) * | 1989-09-26 | 1998-03-04 | キヤノン株式会社 | 堆積膜形成法 |
EP0460857B1 (en) * | 1990-05-31 | 1997-03-19 | Canon Kabushiki Kaisha | Method for producing a semiconductor device with a high density wiring structure |
JPH0437067A (ja) * | 1990-05-31 | 1992-02-07 | Canon Inc | 半導体素子用電極及び該電極を有する半導体装置及びその製造方法 |
MY107475A (en) * | 1990-05-31 | 1995-12-30 | Canon Kk | Semiconductor device and method for producing the same. |
SG46606A1 (en) * | 1990-05-31 | 1998-02-20 | Conon Kabushiki Kaisha | Device seperation structure and semiconductor device improved in wiring structure |
EP0498580A1 (en) * | 1991-02-04 | 1992-08-12 | Canon Kabushiki Kaisha | Method for depositing a metal film containing aluminium by use of alkylaluminium halide |
JPH04346231A (ja) * | 1991-05-23 | 1992-12-02 | Canon Inc | 半導体装置の製造方法 |
JP3061891B2 (ja) * | 1991-06-21 | 2000-07-10 | キヤノン株式会社 | 半導体装置の製造方法 |
JPH05209279A (ja) * | 1991-10-29 | 1993-08-20 | Canon Inc | 金属膜形成装置および金属膜形成法 |
US6004885A (en) | 1991-12-26 | 1999-12-21 | Canon Kabushiki Kaisha | Thin film formation on semiconductor wafer |
US5447568A (en) * | 1991-12-26 | 1995-09-05 | Canon Kabushiki Kaisha | Chemical vapor deposition method and apparatus making use of liquid starting material |
JP3222518B2 (ja) * | 1991-12-26 | 2001-10-29 | キヤノン株式会社 | 液体原料気化装置および薄膜形成装置 |
JP3048749B2 (ja) * | 1992-04-28 | 2000-06-05 | キヤノン株式会社 | 薄膜形成方法 |
US5486492A (en) * | 1992-10-30 | 1996-01-23 | Kawasaki Steel Corporation | Method of forming multilayered wiring structure in semiconductor device |
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JPH09501612A (ja) * | 1994-04-08 | 1997-02-18 | マーク エー. レイ, | 選択的プラズマ成長 |
US6159854A (en) * | 1994-08-22 | 2000-12-12 | Fujitsu Limited | Process of growing conductive layer from gas phase |
KR100413890B1 (ko) * | 1995-03-02 | 2004-03-19 | 동경 엘렉트론 주식회사 | 반도체장치의제조방법및제조장치 |
KR100440418B1 (ko) * | 1995-12-12 | 2004-10-20 | 텍사스 인스트루먼츠 인코포레이티드 | 저압,저온의반도체갭충전처리방법 |
KR0172851B1 (ko) * | 1995-12-19 | 1999-03-30 | 문정환 | 반도체 장치의 배선방법 |
KR100198624B1 (ko) * | 1995-12-20 | 1999-06-15 | 구본준 | 반도체 소자의 제조방법 |
US5856236A (en) * | 1996-06-14 | 1999-01-05 | Micron Technology, Inc. | Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer |
US6309971B1 (en) | 1996-08-01 | 2001-10-30 | Cypress Semiconductor Corporation | Hot metallization process |
US5907763A (en) * | 1996-08-23 | 1999-05-25 | International Business Machines Corporation | Method and device to monitor integrated temperature in a heat cycle process |
US6130160A (en) * | 1996-10-02 | 2000-10-10 | Micron Technology, Inc. | Methods, complexes and system for forming metal-containing films |
US5924012A (en) | 1996-10-02 | 1999-07-13 | Micron Technology, Inc. | Methods, complexes, and system for forming metal-containing films |
US6025269A (en) * | 1996-10-15 | 2000-02-15 | Micron Technology, Inc. | Method for depositioning a substantially void-free aluminum film over a refractory metal nitride layer |
US6156645A (en) * | 1996-10-25 | 2000-12-05 | Cypress Semiconductor Corporation | Method of forming a metal layer on a substrate, including formation of wetting layer at a high temperature |
US6451179B1 (en) * | 1997-01-30 | 2002-09-17 | Applied Materials, Inc. | Method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
US5858464A (en) * | 1997-02-13 | 1999-01-12 | Applied Materials, Inc. | Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers |
US6222271B1 (en) * | 1997-07-15 | 2001-04-24 | Micron Technology, Inc. | Method of using hydrogen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom |
US5969423A (en) * | 1997-07-15 | 1999-10-19 | Micron Technology, Inc. | Aluminum-containing films derived from using hydrogen and oxygen gas in sputter deposition |
JPH11150084A (ja) | 1997-09-12 | 1999-06-02 | Canon Inc | 半導体装置および基板上への非晶質窒化硅素チタンの形成方法 |
US6156393A (en) * | 1997-11-12 | 2000-12-05 | John C. Polanyi | Method of molecular-scale pattern imprinting at surfaces |
US6319566B1 (en) | 1997-11-12 | 2001-11-20 | John C. Polanyi | Method of molecular-scale pattern imprinting at surfaces |
US6878417B2 (en) * | 1997-11-12 | 2005-04-12 | John C. Polanyi | Method of molecular-scale pattern imprinting at surfaces |
US6057238A (en) * | 1998-03-20 | 2000-05-02 | Micron Technology, Inc. | Method of using hydrogen and oxygen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom |
KR100279067B1 (ko) | 1998-04-23 | 2001-01-15 | 신현국 | 화학증착용알루미늄화합물및그제조방법 |
US6214729B1 (en) | 1998-09-01 | 2001-04-10 | Micron Technology, Inc. | Metal complexes with chelating C-, N-donor ligands for forming metal-containing films |
US6281124B1 (en) | 1998-09-02 | 2001-08-28 | Micron Technology, Inc. | Methods and systems for forming metal-containing films on substrates |
KR100289945B1 (ko) * | 1998-09-15 | 2001-09-17 | 신현국 | 알루미늄박막의화학증착용전구체화합물및이의제조방법 |
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JP2001308094A (ja) * | 2000-04-19 | 2001-11-02 | Oki Electric Ind Co Ltd | 配線薄膜の堆積方法 |
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US7223694B2 (en) * | 2003-06-10 | 2007-05-29 | Intel Corporation | Method for improving selectivity of electroless metal deposition |
CN103147067A (zh) * | 2011-12-07 | 2013-06-12 | 无锡华润华晶微电子有限公司 | 低压化学气相淀积装置及其薄膜淀积方法 |
JP2018532271A (ja) * | 2015-10-15 | 2018-11-01 | 東京エレクトロン株式会社 | インターコネクトのための選択的なボトムアップ式金属フィーチャ充填 |
WO2019177861A1 (en) | 2018-03-10 | 2019-09-19 | Applied Materials, Inc. | Method and apparatus for asymmetric selective physical vapor deposition |
US10950448B2 (en) | 2018-04-06 | 2021-03-16 | Applied Materials, Inc. | Film quality control in a linear scan physical vapor deposition process |
US10927450B2 (en) | 2018-12-19 | 2021-02-23 | Applied Materials, Inc. | Methods and apparatus for patterning substrates using asymmetric physical vapor deposition |
DE102019122078A1 (de) | 2019-08-16 | 2021-02-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer Aluminiumschicht und optisches Element |
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US4923717A (en) * | 1989-03-17 | 1990-05-08 | Regents Of The University Of Minnesota | Process for the chemical vapor deposition of aluminum |
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PT95232B (pt) * | 1989-09-09 | 1998-06-30 | Canon Kk | Processo de producao de uma pelicula de aluminio depositada |
US5196372A (en) * | 1989-09-09 | 1993-03-23 | Canon Kabushiki Kaisha | Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride |
DE69026566T2 (de) * | 1989-09-26 | 1996-11-14 | Canon Kk | Verfahren zur Herstellung von einer abgeschiedenen Metallschicht, die Aluminium als Hauptkomponent enthält, mit Anwendung von Alkalimetallaluminiumhydride |
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-
1990
- 1990-02-19 JP JP2036198A patent/JP2721023B2/ja not_active Expired - Fee Related
- 1990-09-24 US US07/587,045 patent/US5180687A/en not_active Expired - Lifetime
- 1990-09-25 ES ES90310506T patent/ES2086375T3/es not_active Expired - Lifetime
- 1990-09-25 DE DE69026783T patent/DE69026783T2/de not_active Expired - Fee Related
- 1990-09-25 SG SG1996005589A patent/SG45388A1/en unknown
- 1990-09-25 AT AT90310506T patent/ATE137605T1/de not_active IP Right Cessation
- 1990-09-25 EP EP90310506A patent/EP0420595B1/en not_active Expired - Lifetime
- 1990-09-26 MY MYPI90001665A patent/MY107418A/en unknown
- 1990-09-26 PT PT95430A patent/PT95430B/pt not_active IP Right Cessation
- 1990-09-26 KR KR1019900015296A patent/KR940010501B1/ko not_active IP Right Cessation
-
1992
- 1992-10-30 US US07/969,353 patent/US5393699A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0420595B1 (en) | 1996-05-01 |
PT95430A (pt) | 1991-05-22 |
MY107418A (en) | 1995-12-30 |
DE69026783T2 (de) | 1996-11-14 |
JPH03202471A (ja) | 1991-09-04 |
DE69026783D1 (de) | 1996-06-05 |
US5180687A (en) | 1993-01-19 |
KR910007084A (ko) | 1991-04-30 |
KR940010501B1 (ko) | 1994-10-24 |
ATE137605T1 (de) | 1996-05-15 |
SG45388A1 (en) | 1998-01-16 |
PT95430B (pt) | 1997-07-31 |
US5393699A (en) | 1995-02-28 |
EP0420595A2 (en) | 1991-04-03 |
JP2721023B2 (ja) | 1998-03-04 |
EP0420595A3 (en) | 1991-09-11 |
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