EP1722411A2 - Panneau circuit en céramique - Google Patents

Panneau circuit en céramique Download PDF

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Publication number
EP1722411A2
EP1722411A2 EP06013121A EP06013121A EP1722411A2 EP 1722411 A2 EP1722411 A2 EP 1722411A2 EP 06013121 A EP06013121 A EP 06013121A EP 06013121 A EP06013121 A EP 06013121A EP 1722411 A2 EP1722411 A2 EP 1722411A2
Authority
EP
European Patent Office
Prior art keywords
ceramic
circuit board
plate
substrate
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06013121A
Other languages
German (de)
English (en)
Other versions
EP1722411A3 (fr
Inventor
Takayuki Naba
Hiroshi Komorita
Noritaka Nakayama
Kiyoshi Iyogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of EP1722411A2 publication Critical patent/EP1722411A2/fr
Publication of EP1722411A3 publication Critical patent/EP1722411A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
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    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
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    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
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    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12528—Semiconductor component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12583—Component contains compound of adjacent metal
    • Y10T428/1259—Oxide

Definitions

  • the present invention relates to a ceramic circuit board comprising both high heat-cycle characteristic and high bonding strength characteristic that are suitable for a high-power transistor module circuit board, and more particularly, to a ceramic circuit board to which high thermal conductivity and high strength are imparted by bonding a metal circuit plate such as aluminum circuit plate to ceramic substrate such as silicon nitride substrate.
  • a ceramic circuit board formed by bonding a metal circuit plate to a ceramic substrate has been widely applied to various electronic parts and machinery parts.
  • various substrates such as ceramic substrate and resin substrate or the like have been practically used.
  • the ceramic substrate has been mainly used as the substrate for mounting a highly-heat radiating electronic part, because the ceramic substrate has an excellent insulating property and high-heat radiating property or the like.
  • alumina sintered body has been mainly used because the alumina sintered body has been easily available.
  • the alumina substrate cannot meet the requirement for heat-radiating property.
  • a ceramic substrate composed of aluminum nitride (AlN) sintered body having a thermal conductivity about ten-times larger than that of alumina and having a thermal expansion coefficient similar to that of Si.
  • a circuit board having a high thermal conductivity has been widely used as parts for constituting the various electronic devices.
  • a ceramic circuit board in which aluminum nitride (AlN) sintered body having a high thermal conductivity of about 170W/mK-class is used as the ceramic substrate or silicon nitride (Si 3 N 4 ) sintered body having a high thermal conductivity of about 70W/mK-class is used as the ceramic substrate.
  • the aluminum nitride substrate has above characteristics, however, mechanical strength and toughness of the AlN substrate are relatively small. Therefore, when the AlN substrate is tightly fastened by a screw at an assembling process of the devices using the circuit board, or when a heat cycle is applied to the AlN substrate, there may be posed a disadvantage that a crack is liable to occur. In particular, when the substrate is applied to power transistor modules for automobile, aircraft, machine tool, and robot or the like that are used and operated under severe load conditions and heat conditions, the above disadvantage would be further remarkable.
  • the ceramic substrate for mounting the electronic parts it has been required to improve a mechanical reliability of the ceramic substrate.
  • a ceramic substrate composed of silicon nitride (Si 3 N 4 ) sintered body having a thermal expansion coefficient similar to Si and excellences in mechanical strength and toughness, though the silicon nitride substrate is inferior to aluminum nitride substrate in thermal conductivity.
  • the silicon nitride substrate when grain size of silicon nitride material powder to be formed into sintered body and a composition of sintering agent in the material powder are appropriately controlled, a high thermal conductivity of, for example, 50W/mK or more has been realized.
  • the ceramic circuit board in which silicon nitride (Si 3 N 4 ) sintered body is used as the ceramic substrate can be manufactured in accordance with, for example, an active metal brazing method described hereunder.
  • Ag-Cu-Ti group brazing material is screen-printed on a surface of silicon nitride (Si 3 N 4 ) substrate, then a metal circuit plate composed of Cu is disposed on the printed surface, thereafter, a heat treatment is carried out at a temperature of about 850°C, so that the ceramic substrate and the metal circuit plate are bonded thereby to manufacture a ceramic circuit board.
  • Ti as the active metal and N contained in the nitride type ceramic substrate are covalent-bonded to form TiN (titanium nitride), so that a bonding layer is formed by this TiN, whereby a high-bonding strength can be obtained to some extent.
  • a copper circuit plate has been mainly used as the metal circuit plate. This is because a copper has a high electric conductivity and low-distortion characteristic capable of obtaining an excellent circuit function.
  • an object of the present invention is to provide a ceramic circuit board having a high bonding strength and a high-heat cycle resistance and capable of improving operating reliability as an electronic device.
  • Another object of the present invention is to provide a ceramic circuit board in which a silicon nitride substrate is used as a ceramic substrate, the ceramic circuit board being capable of exhibiting a remarkable effect of preventing crack formation to be caused by fastening operation performed in assembling process of the ceramic circuit board into devices, capable of greatly improve an effect of suppressing the crack formation to be caused at the silicon nitride substrate when heat cycle is applied to the ceramic circuit board in comparison with a case where a copper circuit plate is used as the metal circuit plate, whereby an availability and usability particularly in durability of the ceramic circuit board can be increased.
  • Still another object of the present invention is to provide a ceramic circuit board capable of contributing to reduce a mounting space for the ceramic circuit board to be mounted on a device without impairing the effect of suppressing crack formation caused by the heat cycle applied to the silicon nitride substrate.
  • the inventors of the present invention had reviewed about various factors such as kind of a brazing material for bonding the metal circuit plate to the ceramic substrate, arrangement of a bonding layer composed of the brazing material or the like. As a result, the inventors had obtained the following findings.
  • the brazing material mainly composed of Al and constituting the bonding layer has a function of imparting wettability to ceramic substrates such as AIN and Si 3 N 4 or the like, and firmly combines with the ceramic substrate thereby to metallize the ceramic substrate. Therefore, when the Al plate is applied as the metal circuit plate, it is preferable to bond the Al circuit plate to the ceramic substrate by using the brazing material mainly composed of Al.
  • Sn as Ib family element and Al contained in the brazing material used for forming the insulating layer are soft metals each having an yield strength of 20Mpa or less, so that a residual stress caused by a difference in coefficients of linear-thermal expansion between the copper plate and the ceramic substrate of the ceramic circuit board, and a thermal stress caused by the subsequent heat-load cycles applied to the circuit board can be remarkably reduced, so that a heat-cycle resistance is improved and the ceramic per se hardly cause crack due to the thermal stress.
  • a ceramic circuit board comprising: a ceramic substrate and a metal circuit plate bonded to the ceramic substrate through a brazing material layer; wherein the brazing material layer is composed of Al-Si group brazing material and an amount of Si contained in the brazing material layer is 7 wt% or less.
  • the ceramic substrate is composed of silicon nitride.
  • the metal circuit plate is aluminum plate or aluminum alloy plate.
  • the aluminum alloy is Al-Si alloy.
  • the metal circuit plate has a peel strength of 7 kg/cm or more.
  • a brazing material layer composed of Al and alkaline earth metal element or compound thereof can be also applied in place of Al-Si alloy.
  • an amount of the alkaline earth metal element or compound thereof contained in the brazing material layer is preferably set to 12wt% or less.
  • a ceramic circuit board in which a metal circuit plate is bonded to a ceramic substrate, the ceramic circuit board comprising: a ceramic substrate composed of at least one of aluminum nitride (AIN), silicon nitride (Si 3 N 4 ) and aluminum oxide (Al 2 O 3 ); a bonding layer which is integrally formed to the ceramic substrate and consists of a brazing material mainly composed of Al; an insulating layer for preventing the brazing material from being alloyed with the metal circuit plate, the insulating layer being integrally formed to the bonding layer; and a metal circuit plate bonded to the ceramic substrate through the insulating layer.
  • AIN aluminum nitride
  • Si 3 N 4 silicon nitride
  • Al 2 O 3 aluminum oxide
  • the insulating layer is composed of a metal paste containing metal powder having a grain size of 10 ⁇ m or less, or composed of a metal foil having a thickness of 10 ⁇ m or more. Further, it is preferable that the insulating layer has a thickness of 10 ⁇ m or more. Furthermore, it is preferable that the metal constituting the metal paste or the metal foil in the insulating layer is at least one metal of Ni, Sn and In.
  • a ceramic circuit board in which a metal circuit plate is bonded to a ceramic substrate, the ceramic circuit board comprising: a ceramic substrate composed of at least one of aluminum nitride (AlN), silicon nitride (Si 3 N 4 ) and aluminum oxide (Al 2 O 3 ); a first bonding layer which is integrally formed to the ceramic substrate and consists of a brazing material or alloy mainly composed of Al; an insulating layer for preventing the first bonding layer from being alloyed with the metal circuit plate, the insulating layer being integrally formed to the first bonding layer; a second bonding layer which is integrally formed to a surface of the insulating layer and consists of a brazing material or alloy mainly composed of Al; and a metal circuit plate bonded to the ceramic substrate through the second bonding layer.
  • AlN aluminum nitride
  • Si 3 N 4 silicon nitride
  • Al 2 O 3 aluminum oxide
  • each of the bonding layers and the insulating layer has a thickness of 10 ⁇ m or more, respectively.
  • a ceramic circuit board comprising: a ceramic substrate; and a metal circuit plate bonded to the ceramic substrate; wherein the ceramic substrate is composed of a silicon nitride (Si 3 N 4 ) substrate having a thermal conductivity of 50W/mK or more and the metal circuit plate is composed of aluminum circuit plate; and wherein the silicon nitride substrate and the aluminum circuit plate are directly bonded without providing a brazing material layer.
  • the aluminum circuit plate single substance of Al or Al alloy is applied.
  • the metal circuit, plate is composed of aluminum circuit plate in place of copper circuit plate, it becomes possible to greatly improve an effect of suppressing the crack formation in comparison with a case where the copper circuit plate is used, the crack being caused at silicon nitride substrate when the circuit board is used under a condition of being applied with the heat cycle.
  • the aluminum circuit plate per se is deformed by the heat cycle while the stress due to the heat cycle is hardly caused to the silicon nitride substrate. Therefore, the cracks or allgatorings or the like hardly occur to the silicon nitride substrate.
  • the ceramic circuit board according to fourth aspect of the present invention in which aluminum circuit plate is used as the metal circuit plate, it becomes possible to greatly improve an effect of suppressing the crack formation in comparison with a case where the copper circuit plate is used, the crack being caused at silicon nitride substrate when the circuit board is used under a condition where the heat cycle is applied.
  • the silicon nitride substrate in order to secure a high heat-radiating property of the ceramic circuit board, is required to have a thermal conductivity of 50W/mK or more.
  • the ceramic circuit board according to fourth aspect of the present invention is characterized in that the silicon nitride substrate and the aluminum circuit plate are directly bonded without providing a brazing material layer therebetween.
  • Al-Si alloy plate containing Si is used as aluminum circuit plate, a more excellent bonding strength can be obtained.
  • Al brazing material layer used in the first and second aspects of the invention is replaced by Al plate or Al alloy plate, so that Al-Si alloy plate can exhibit effects as both a bonding layer and a circuit plate.
  • the present invention includes the above first to fourth inventions according to the respective aspects.
  • the Si amount contained in the Al brazing material layer is preferably set to 7wt% or less in the first invention. While, it is preferable to set the Si amount to 50wt% or less in the second to fourth inventions.
  • the Si amount exceeds 7wt% and, for example, the metal circuit plate is Cu plate
  • Cu plate and Al brazing material are melted and mixed thereby to be easily alloyed.
  • the alloying phenomena is advanced, a brittle intermetallic compound is disadvantageously formed thereby to lower the bonding strength.
  • the insulating layer for preventing the Al brazing material layer and the metal circuit plate from being alloyed since the insulating layer for preventing the Al brazing material layer and the metal circuit plate from being alloyed is provided, there is no problem even if Si is added to the Al brazing material with an Si content-range of 50wt% or less. Further, the metal circuit plate and the insulating layer slightly exhibit the alloying phenomena. However, when at least one element selected from Ib, IIb, IIIb and IVb family elements such as Sn, In or the like prescribed in periodic table is used as a component for constituting the insulating layer, the alloying phenomena can be limited to a range of 10% or less of the thickness of the metal circuit plate.
  • the Si amount contained in the Al brazing material or Al circuit plate is set to 50wt% or less, preferably set to 15wt% or less.
  • the Si amount is preferably set to at least 0.01wt%. This is because when the amount is less than 0.01wt%, the effect by the addition cannot be obtained. In addition, to maintain the eutectic bonding, it is preferable to set the Si amount to 0.05wt% or more.
  • the Si amount is set to 0.01-7wt%.
  • the Si amount is set to 0.01-50wt%.
  • the Si amount is set to 0.01-50wt%.
  • the Si amount is set to 0.01-50wt%.
  • the more preferable ranges of Si amounts are 0.05-1wt% for the first invention, 0.05-15wt% for the second invention, 0.05-15wt% for the third invention, 0.05-15wt%, 0.05-15wt% for the fourth invention.
  • the amount is preferably set to a range of 0.01- 12wt% or less.
  • the Si amount to be contained in the brazing material can be reduced to 7wt% or less, preferably to 1wt% or less. This is because Si contributing to the bonding is formerly contained in the silicon nitride substrate, so that Si is supplied to the bonding layer from a side of the silicon nitride substrate.
  • the ceramic circuit board has a multi-layered structure in which at least two aluminum circuit plates are laminated through the silicon nitride substrate.
  • the laminated structure due to the laminated structure of the ceramic substrates and metal circuit plates laminated in a thickness direction of the circuit board, a plain surface area required for installing the circuit board can be reduced, so that a mounting space with respect to electronic devices can be reduced.
  • the laminated structure can contribute to advance the miniaturization of the electronic devices.
  • the effect of suppressing the crack formation to be caused at the silicon nitride substrate by the heat cycle is not impaired at all on the basis of the aforementioned respective structures. Accordingly, there can be exhibited an excellent effect in view of both increase of strength and reduction of the mounting space.
  • FIG. 6 shows an another preferable example of a structure of a ceramic circuit board according to the present invention.
  • the ceramic circuit board 1c of the present invention is formed, for example, by bonding aluminum plate 3 as a metal circuit plate to a ceramic substrate 2.
  • aluminum plate 3 as a metal circuit plate
  • a ceramic substrate 2 When an outer peripheral portion of the aluminum plate 3 is symbolized as 3a and an inside the outer peripheral portion 3a is worked to form a thinned portion 3b, it becomes possible to suppress to cause crack to the ceramic substrate during manufacturing and operating the ceramic circuit board.
  • the inside the outer peripheral portion denotes an area having a constant width ranging from the outer peripheral portion toward a center portion of Al plate.
  • the aluminum plate is directly bonded to the ceramic plate, the plates are heated up to a temperature higher than melting point of aluminum plate.
  • the thinned portion is formed to the inside the outer peripheral portion of the aluminum plate, a thermal stress caused at the outer peripheral portion of the aluminum plate is absorbed by the plastic deformation of the thinned portion formed to the aluminum plate, so that it becomes possible to suppress the crack formation to be caused at the ceramic plate.
  • the thermal stress is caused by the heat cycle.
  • the thermal stress caused at the outer peripheral portion of the aluminum plate is absorbed by the plastic deformation of the thinned portion formed to the aluminum plate, so that it becomes possible to suppress the crack formation to be caused at the ceramic plate.
  • a shape of the thinned portion 3b may be formed, for example, as shown in FIG. 7.
  • This thinned portion 3b is formed by grinding a surface of the aluminum plate to which the ceramic substrate is not bonded, thereby to form the thinned portion as a step portion.
  • working methods such as etching treatment or the like can be used other than the mechanical working method.
  • the thinned portion 3b may be formed after the ceramic substrate and the aluminum plate are bonded. However, when the thinned portion 3b is previously formed before the ceramic substrate and the aluminum plate are bonded, the crack formation to the ceramic plate to be caused by the thermal stress at the bonding operation can be suppressed, thus being more effective.
  • a forming range of the thinned portion 3b is as follows. For example, assuming that a length from the outer peripheral portion of the aluminum plate to the thinned portion 3b is indicated as W and a thickness of the thinned portion 3b is indicated as T, the length W is preferably set to 0.3-1.0mm and the thickness T is preferably set to 1/6 to 5/6 of a thickness at a mounting surface of the aluminum plate. When the length W from the outer peripheral portion to the thinned portion is less than 0.3mm, a sufficient stress-mitigating effect cannot be obtained, so that the crack formation is liable to occur.
  • the stress-mitigating effect will be insufficient and a mounting surface of the aluminum plate to which electronic parts such as semiconductor chip, terminal or the like is mounted will be disadvantageously decreased.
  • the thickness T of the thinned portion 3b is less than 1/6 of the aluminum plate at a mounting surface, there may be posed a fear that the strength of the aluminum plate is disadvantageously lowered. While, when the thickness T exceeds 5/6 of the aluminum plate at the mounting surface, the stress-mitigating effect cannot be observed.
  • FIG. 8 Another embodiment of the ceramic circuit board 1d according to the present invention is shown in FIG. 8.
  • the ceramic circuit board 1d according to the present invention in which the aluminum plate 3 as metal circuit plate is provided with a plurality of holes 6 formed at inside an outer peripheral portion of a surface opposing to a bonding surface of the aluminum plate to which the ceramic substrate 2 is bonded.
  • the plurality of holes 6 are linearly arranged along the outer peripheral portion of the aluminum plate 3a.
  • a cross-sectional shape of the hole 6 may be a circular-shape as shown in FIG. 9 or may be a rectangular-shape as shown in FIG. 10.
  • These a plurality of holes can be formed by etching treatment, or can be also formed by a pressing work using a pressing die. When the plurality of holes are formed to be linearly arranged, it is possible to effectively mitigate a stress-concentration applied to the outer peripheral portion of the aluminum plate.
  • the diameter D is preferably set to 0.3mm to 1.0mm.
  • the interval L is preferably set to 0.3mm to 1.0mm.
  • Z a distance from the outer peripheral portion of the metal plate to the hole.
  • the stress cannot be sufficiently mitigated. While, when the diameter of the hole exceeds 1.0mm, the strength of the aluminum plate is lowered and the mounting surface area is disadvantageously decreased. Further, when the distance between the adjacent holes is excessively large, there may be a fear that a sufficient stress-mitigating effect cannot be obtained. While, when the distance is excessively small, there may be a case to cause a deformation of the aluminum plate. Furthermore, when the distance Z from the outer peripheral portion of the metal plate to the hole is less than 0.3mm, there may be a fear that a sufficient stress-mitigating effect cannot be obtained.
  • the aforementioned plurality of holes can be formed as non-penetrated holes 6a as shown in FIGs. 11 and 12, or can be formed as penetrated holes 6b as shown in FIG. 13.
  • the non-penetrated hole 6a can be easily formed by the pressing work or the like, thus being effective in saving manufacturing man-hour.
  • the penetrated hole 6b also functions as an exhaust hole through which gaseous components such as oxygen or the like exhausted at without contributing to the bonding operation can be exhausted.
  • a shape of the hole 6a in the depth direction may be formed so as to have an uniform shape as shown in FIG.11, or may be formed so as to have an inverse circular cone shape as shown in FIG. 12.
  • the ceramic circuit board le in which an aluminum plate 3 as metal circuit plate is provided with a plurality of non-continuous grooves 7 that are provided along an outer peripheral portion of the metal circuit plate and formed at inside an outer peripheral portion of a surface opposing to a bonding surface of the aluminum plate 3 to which the ceramic substrate 2 is bonded.
  • the inside the outer peripheral portion means a portion having a constant width ranging from the outer peripheral portion toward a center portion of the metal circuit plate.
  • the non-continuous grooves are preferably formed and arranged in a linear-shape.
  • the stress-concentration can be mitigated more effectively.
  • FIG. 15 shows a partially enlarged view of a part of the ceramic circuit board le according to the present invention.
  • the reference character W denotes a width of a single groove
  • E denotes a length of the single groove
  • Z denotes a distance from the outer peripheral portion to the groove.
  • a shape of each single groove constituting the non-continuous grooves is as follows. Namely, it is preferable that the width W of the single groove is set to 0.05-1.0mm, the length E is set to 20mm or less and the distance Z from the outer peripheral portion to the groove is set to 0.3mm or more.
  • the width W is less than 0.05mm, the stress cannot be sufficiently mitigated. While, when the width W exceeds 1.0mm, the strength of the aluminum plate is lowered and the mounting area is also decreased. Further, when the length E of each single groove exceeds 20mm, an area to which the grooves are not formed is decreased, so that there may be a fear that the deformation of the aluminum plate cannot be suppressed. Furthermore, when the distance Z from the outer peripheral portion to the groove is less than 0.3mm, there may be a fear that a sufficient stress-mitigating effect cannot be obtained.
  • a cross sectional shape in a longitudinal direction of the non-continuous groove 7 may be formed to make a groove 7a having a U-shaped in cross section as shown in FIG.16, or may be formed to make a groove 7b having an inverse triangular shape as shown in FIG. 17.
  • the depth H of the groove 7 is preferably set to 1/6 to 5/6 of a thickness at a mounting surface of the aluminum plate.
  • the depth H is less than 1/6 of the thickness at the mounting surface of the aluminum plate, there may be a fear that the effect of dispersing the stress would be insufficient. While, when the depth H exceeds 5/6 of the thickness at the mounting surface of the aluminum plate, the strength of the aluminum plate is liable to be lowered.
  • the ceramic substrate to be used for the ceramic circuit board of the present invention it is preferable to use a substrate mainly composed of at least one material selected from alumina, aluminum nitride and silicon nitride.
  • Example 1 is explained with reference to Samples No.1-No.15 shown in Table 1.
  • Samples No.1-No.9 AlN substrates each having a thermal conductivity of 170W/mK were used as ceramic substrate.
  • Samples No.10-No.15 Si 3 N 4 substrates each having a thermal conductivity of 70W/mK were used as ceramic substrate.
  • Brazing material pastes mainly composed of Al shown in Table 1 were screen printed on both surfaces of each of the ceramic substrates. Thereafter, Cu circuit plates or Al circuit plates as metal circuit plates were disposed on both surfaces of the printed ceramic substrate thereby to form respective laminates. Then, each of the laminates was heated in vacuum atmosphere up to a temperature of 650°C so that the ceramic substrate and the metal circuit plate were bonded thereby to manufacture the respective ceramic circuit boards of Example 1.
  • FIG. 1 is a plan view showing a ceramic circuit board 1 according to the respective Example 1
  • FIG. 2 is a cross sectional view of the ceramic circuit board 1 shown in FIG.1
  • FIG. 3 is a rear end view showing the ceramic circuit board 1 shown in FIG.1.
  • FIG. 1 is a view showing a front pattern of the ceramic circuit board 1 in which Al circuit plate as metal circuit plate having a thickness of 0.3mm was provided onto AIN substrates or Si 3 N 4 substrates as ceramic substrate each having a thickness of 0.635mm. Further, as shown in FIG. 2, Al circuit plates 3, 4 are bonded to both surfaces of the ceramic substrate 2 through a brazing material layer (not shown).
  • FIG. 3 is a view showing a rear (back) pattern of the ceramic circuit board 1 in which Al circuit plate having a thickness of 0.25mm was provided onto AlN substrate or Si 3 N 4 substrate. Note, in a case where Cu plate was used as the metal circuit plate, even if Si 3 N 4 substrate was used as ceramic substrate, the size of the Si 3 N 4 substrate was set to the same size as that of the AIN substrate.
  • Comparative Example 1 is explained with reference to Samples No.16-No.20 shown in Table 1.
  • Samples No.16, No.18 and No.20 AlN substrates each having a thermal conductivity of 170W/mK were used as ceramic substrate.
  • Samples. No.17 and No.19 Si 3 N 4 substrates having a thermal conductivity of 70W/mK were used as ceramic substrate.
  • Brazing material pastes having a composition of Ag-Cu-Ti (Ti content: 2wt%) or the like shown in Table 1 were screen printed on both upper and lower surfaces of each of the AlN substrate and Si 3 N 4 substrate. Thereafter, Cu circuit plates as metal circuit plates were disposed on both surfaces of the printed ceramic substrate thereby to form respective laminates. Then, each of the laminates was heated in vacuum atmosphere up to a temperature of 850°C so that the ceramic substrate and the metal circuit plate were bonded thereby to manufacture the respective ceramic circuit boards of Comparative Example 1.
  • one TCT cycle was set to comprise the steps of: cooling the ceramic circuit board to a temperature of -40 °C and maintaining the ceramic circuit board for 30 min; heating the ceramic circuit board to a room temperature (RT) and maintaining the ceramic circuit board for 10 min; heating the ceramic circuit board to a temperature of +125°C and maintaining the ceramic circuit board for 30 min; and cooling the ceramic circuit board to the room temperature (RT) and maintaining the ceramic circuit board for 10 min.
  • Example 1 could exhibit the peel strength of 10kgf/cm or more in both case where TCT cycle was repeated for 500 cycles and a case where TCT cycle was repeated for 1000 cycles. Therefore, it was confirmed that a ceramic circuit board having a high heat-cycle resistance could be obtained.
  • Si amount was preferably set to 0.01-7wt%, more preferably set to 0.05-2wt%.
  • An amount of a second component to be contained in the Al brazing material is preferably set to 12wt% or less, more preferably set to 1wt% or less. Even if the amount is set so as to exceed 12wt%, the effect of improving the heat cycle resistance and peel strength is saturated and further improvement cannot be expected. On the other hand, when the amount is less than 0.01wt%, the effect per se can be hardly obtained and the bonding strengths disadvantageously became less than 7kg/cm.
  • Si is the most effective element. This reason is considered that Si can easily form an eutectic compound together with Al. This tendency was similarly observed in both cases where Al plate and Cu plate were used as the metal circuit plate.
  • Example 1 the brazing material mainly composed of Al as a soft metal having a yield stress of 20MPa or less was used, so that the residual stress caused by a difference in linear expansion coefficients between the ceramic substrate and the Cu circuit plate could be reduced. Further, the thermal stress caused by the heat load cycle could also reduced, so that the crack due to the thermal stress was hardly caused whereby a bonding strength between the ceramic substrate and the Cu circuit plate could be remarkably improved.
  • Example 2 is explained with reference to Samples No.21-No.31 shown in Table 2.
  • Samples No.21-No.25, No.28-No.31 AlN substrates manufactured in the same sintering lot each having a thermal conductivity of 170W/mK were used as ceramic substrate.
  • Sample No.26 Si 3 N 4 substrate having a thermal conductivity of 70W/mK was used as ceramic substrate.
  • Sample No.27 Al 2 O 3 substrate was used as ceramic substrate.
  • Al-Si brazing material paste mainly composed of Al and containing 0.1-2wt% of Si shown in Table 2 was screen-printed on both upper and lower surfaces of each of the ceramic substrates.
  • a front pattern of the ceramic circuit board was formed by Cu plate having a thickness of 0.3mm which was bonded onto the Si 3 N 4 substrate. While, a rear pattern of the ceramic circuit board was formed by Cu plate having a thickness of 0.25mm which was bonded onto the Si 3 N 4 substrate.
  • Comparative Example 2 is explained with reference to Samples No.32 and No.33 shown in Table 2.
  • Samples No.32 AlN substrate having a thermal conductivity of 170W/mK was used as ceramic substrate.
  • Samples No.33 Si 3 N 4 substrate having a thermal conductivity of 70W/mK was used as ceramic substrate.
  • a brazing material paste having a composition of Ag-Cu-Ti (Ti content: 2.5wt%) shown in Table 2 was screen-printed onto both upper and lower surfaces of each of the AlN substrate and Si 3 N 4 substrate. Thereafter, Cu circuit plates as metal circuit plates were disposed on both surfaces of the printed ceramic substrate thereby to form respective laminates. Then, each of the laminates was heated in vacuum atmosphere up to a temperature of 850 °C so that the ceramic substrate and the Cu circuit plate were bonded thereby to manufacture the respective ceramic circuit boards of Comparative Example 2.
  • Samples of Example 2 could exhibit the peel strength of 12.0kgf/cm or more in both cases where TCT cycle was repeated for 500 cycles and where TCT cycle was repeated for 1000 cycles. Therefore, it was confirmed that the bonding strengths of Example 2 could remarkably improved in comparison with those of Comparative Example 2.
  • Example 2 Cu circuit plate is used as the metal circuit plate, and the insulating layer (metal foil such as Ag foil, Zn foil or the like) composed of at least one element selected from Ib, IIb, IIIb, IVb family elements prescribed in periodic table is provided between the bonding layer composed of the brazing material and the metal circuit plate, Al component contained in the brazing material and Cu component contained in the metal circuit plate could be prevented from being alloyed whereby the bonding strength between the ceramic substrate and the metal circuit plate could be maintained to be high.
  • metal foil such as Ag foil, Zn foil or the like
  • Example 3 is explained with reference to Samples No.34-No.39 shown in Table 3.
  • Samples No.34-No.36 and No.38 AIN substrates manufactured in the same sintering lot each having a thermal conductivity of 170W/mK were used as ceramic substrate.
  • Samples No.37 and No.39 Si 3 N 4 substrates each having a thermal conductivity of 70W/mK were used as ceramic substrates.
  • a brazing material paste mainly composed of Al and containing Si powder having an average grain size of 10 ⁇ m shown in Table 3 was screen-printed on both upper and lower surfaces of each of the ceramic substrates thereby to form a first bonding layer.
  • Ni foil, In foil and Sn foil each having a thickness of 30 ⁇ m as shown in table 3 were disposed on the printed surfaces thereby to form respective insulating layers.
  • the brazing material paste mainly composed of Al shown in Table 3 was again screen-printed onto the insulating layers thereby to form a second bonding layer.
  • Cu circuit plates were disposed on the second bonding layer.
  • Ni foil having a thickness of 50 ⁇ m was disposed on the first bonding layer thereby to form respective insulating layers.
  • the Al-Si alloy mainly composed of Al and containing Si was provided onto the insulating layers thereby to form a second bonding layer.
  • Cu circuit plates were disposed on the second bonding layer thereby to prepare the respective laminates.
  • each of the laminates of Sample No.34-No.39 was heated in vacuum atmosphere up to a temperature of 650°C so that the ceramic substrate and the Cu circuit plate were bonded thereby to manufacture the respective ceramic circuit boards of Example 3.
  • Comparative Example 3 is explained with reference to Samples No.40 and No.41 shown in Table 3. Samples in Comparative Example 3 were manufactured by the following manner in which only the first bonding layer formed in Example 3 was formed and the second bonding layer was not formed.
  • an Al-Si brazing material paste mainly composed of Al and containing Si as shown in Table 3 was screen-printed onto surfaces of each of the AlN substrate and Si 3 N 4 substrate thereby to form a first bonding layer. Then, Ni foil having a thickness of 5 ⁇ m was disposed on the printed surface thereby to form an insulating layer. Thereafter, Cu circuit plates as metal circuit plates were disposed on the insulating layer thereby to form respective laminates. Then, each of the laminates was heated in vacuum atmosphere up to a temperature of 650°C so that the ceramic substrate and the Cu circuit plate were bonded thereby to manufacture the respective ceramic circuit boards of Comparative Example 3.
  • Example 3 since the second bonding layer mainly composed of soft metals such as Al or the like is provided on the insulating layer, Samples of Example 3 can exhibit the peel strength of 10kgf/cm or more in both case where TCT cycle was repeated for 500 cycles and a case where TCT cycle was repeated for 1000 cycles. Therefore, it was confirmed that the bonding strengths of Example 3 could remarkably improved in comparison with those of Comparative Example 3. In addition, though not shown in Table 3, influences of changes in the thickness of the Al group brazing material and the thickness of the insulating layer or the like exhibited almost the same tendency as in Example 2.
  • the metal circuit plate is bonded to the ceramic substrate through the bonding layer mainly composed of Al as soft metal and through the insulating layer composed of at least one element selected from Ib, IIb, IIIb, IVb, VIIIb family elements prescribed in periodic table thereby to prepare the ceramic circuit board, so that the crack formation can be prevented, and a high bonding strength can be maintained even if the thermal load is applied to the circuit board for a long time.
  • the thermal stress to be caused by the thermal load cycle can be reduced in comparison with a case where the bonding layer is formed as a single layer. Therefore, the crack due to the thermal stress hardly occur, and the boding strength between the ceramic substrate and the Cu circuit plate can be improved.
  • a ceramic circuit board having both high heat cycle resistance and high bonding strength capable of improving operating reliability as an electronic device.
  • FIG.4 is a cross sectional view showing a structure of a ceramic circuit board 1a having a single layered structure.
  • the ceramic circuit board 1a according to one embodiment of the present invention has a single layered structure in which aluminum circuit plates 3, 4 are bonded to both surfaces of a silicon nitride substrate 2.
  • the silicon nitride substrate 2 is prepared, at first, sintering agent such as rare earth oxide powder, hafnia powder, alumina powder or the like is added to silicon nitride material powder and uniformly mixed thereby to prepare a material mixed powder.
  • sintering agent such as rare earth oxide powder, hafnia powder, alumina powder or the like is added to silicon nitride material powder and uniformly mixed thereby to prepare a material mixed powder.
  • the silicon nitride material powder as a starting material, it is preferable to use fine silicon nitride powder having an average grain size of 5 ⁇ m or less.
  • the silicon nitride powder having such a fine particle-shape there can be obtained a high thermal conductive silicon nitride sintered body i.e. the silicon nitride substrate 2 having a high density and excellent in mechanical characteristics.
  • the average grain size of the silicon nitride powder is 1 ⁇ m or less, and 0.5 ⁇
  • Examples of the rare earth element oxide to be added as the sintering agent may include oxides of Y, La, Sc, Pr, Ce, Nd, Dy, Gd, Er or the like and substances that are converted into oxide at a time of sintering operation. Hf oxide can be also available. These sintering agents are contained as a single substance or as a composite sintering agent prepared by combining at least two substances. Yttrium oxide (Y 2 O 3 ) is particularly preferable. These sintering agents react with silicon nitride powder to generate a liquid phase which functions as a sintering promoting agent.
  • An addition amount of the sintering agent is preferably set to a range of 2-17.5wt% calculated as oxide thereof with respect to the silicon nitride powder.
  • the addition amount is less than 2wt%, the resulting sintered body cannot be densified, thus resulting in a silicon nitride sintered body having a low strength and a low thermal conductivity.
  • the addition amount exceeds 17.5wt%, an excessive amount of grain boundary phase is formed, so that thermal conductivity and strength are started to be lowered.
  • the range of 5-12wt% is particularly preferable.
  • alumina (Al 2 O 3 ) as another additive component plays a role of promoting the function of above rare earth elements as the sintering agent.
  • the addition amount of alumina as aluminum source is less than 0.5wt%, the densification will become insufficient.
  • the amount exceeds 2wt% an excessive amount of grain boundary phase is formed and alumina starts to dissolve into silicon nitride in a solid-state, so that thermal conductivity starts to be lowered. Therefore, it is preferable that the addition amount of alumina is set to a range of 0.5-2.0wt%.
  • the addition amount of alumina is preferably set to a range of 0.7-1.5wt%.
  • magnesium oxide (MgO) or hafnium oxide (HfO 2 ) or the like are added at amount of 0.1-2wt%, an improvement in strength and sintering property can also be observed.
  • the grain boundaries can be crystallized, so that the thermal conductivity of the silicon nitride sintered body can be increased.
  • the ratio of the crystallized grain boundary phase to entire grain boundary phase is set to 20% or more, preferably set to 50% or more.
  • tantalum oxide, niobium oxide, titanium oxide, tungsten oxide or the like may be added to the above silicon nitride material powder for making the sintered body.
  • other impurity cationic ion elements such as Li, Na, K, Fe, Ca, Sr, Ba, Mn, B or the like inhibit the thermal conductivity of the silicon nitride sintered body. Therefore, in order to secure a high thermal conductivity of 50W/mK or more, an amount of the above impurity cationic ion elements is preferably set to 0.3wt% or less in a total amount.
  • An organic binder and organic solvent are added to the above silicon nitride material mixed powder, and uniformly mixed thereby to prepare a slurry. Then, the slurry is molded to form a sheet-shaped molded body in accordance with an ordinal molding methods such as a Doctor-blade method or the like thereby to prepare a silicon nitride green sheet. Subsequently, the silicon nitride green sheet is subjected to a degreasing treatment in non-oxidizing atmospheres such as air atmosphere or nitrogen gas atmosphere or the like. Thereafter, the degreased green sheet is sintered in a non-oxidizing atmosphere such as nitrogen gas atmosphere thereby to prepare the silicon nitride substrate 2.
  • Al-Si alloy plates 3, 4 as aluminum circuit plates were directly bonded to thus prepared silicon nitride substrate 2 without providing a brazing layer in accordance with DBA (direct bonding aluminum) method thereby to manufacture ceramic circuit boards of Examples 4-9.
  • Si contents in the Al-Si alloy plates were variously changed as shown in Table 4.
  • Table 4 shows peel strengths of the ceramic circuit boards of Examples 4-9 at before and after the thermal cycle test (TCT) was conducted.
  • TCT thermal cycle test
  • One cycle of TCT comprises the step of: cooling the circuit board to a temperature of -40°C and maintaining it for 30 minutes; heating the circuit board to a room temperature (RT) and maintaining it for 10 minutes; heating the circuit board to a temperature of +125°C and maintaining it for 30 minutes; and cooling the circuit board to RT and maintaining it for 10 minutes.
  • TCT thermal cycle test
  • the effect of suppressing the crack to be formed to the silicon nitride substrate 2 can be greatly increased. Therefore, due to the effect, an availability particularly in durability of the ceramic circuit board can be greatly increased.
  • FIG. 5 is a cross sectional view showing another Example of a ceramic circuit board 1b having a multi-layered structure.
  • the ceramic circuit board 1b is manufactured so that two layers of silicon nitride substrates 2, 2 are bonded through an aluminum circuit plate 5, and aluminum circuit plates 3, 4 are bonded onto outer side surface of each silicon nitride substrates 2, 2.
  • a bonding structure shown in FIG. 5 is the same as that in FIG. 4.
  • such laminating structure (multi-layered structure) can contribute to reduce the mounting space for mounting the circuit board to devices. In addition, even in this case, the effect of suppressing the crack to be caused in the silicon nitride substrate due to the heat cycle are not lost.
  • the structure can contribute to reduce the mounting space for mounting the circuit board to devices, and even in this case, the effect of suppressing the crack to be caused in the silicon nitride substrate due to the heat cycle are not deteriorated, so that there can be provided excellent effects in view of both miniaturization and strength.
  • Aluminum plate having a thickness of 0.5mm and a purity of 99% or more was prepared. Then, the aluminum plate was subjected to an etching treatment so that a thickness of a portion having a width of 1mm from outer periphery of the aluminum plate was reduced to 0.25mm thereby to form a thinned portion 3b as shown in FIG. 18. Thereafter, thus etched aluminum plate was directly bonded to an aluminum nitride substrate having a thickness of 0.7mm thereby to manufacture a ceramic circuit board of Example 10.
  • Aluminum plate having a thickness of 0.5mm and a purity of 99% or more was prepared. Then, the aluminum plate was subjected to an etching treatment thereby to form a plurality of holes 6a to an inside the outer peripheral portion of the aluminum plate as shown in FIG. 19. A diameter of each of the holes was set to 0.5mm, a distance between adjacent holes was set to 0.5mm, and an outer periphery of each holes was adjusted to be located at a portion apart 0.5mm from the outer periphery of the aluminum plate. Thereafter, thus etched aluminum plate was directly bonded to an aluminum nitride substrate having a thickness of 0.7mm thereby to manufacture a ceramic circuit board of Example 11.
  • Aluminum plate having a thickness of 0.5mm and a purity of 99% or more was prepared. Then, the aluminum plate was subjected to an etching treatment thereby to form a plurality of grooves 7 to an inside the outer peripheral portion of the aluminum plate. A depth of each of the grooves was set to 0.25mm, a width of the groove was set to 0.05mm, and an outer periphery of each of the grooves was adjusted to be located at a portion apart 0.5mm from the outer periphery of the aluminum plate. Thereafter, thus etched aluminum plate was directly bonded to an aluminum nitride substrate having a thickness of 0.7mm thereby to manufacture a ceramic circuit board of Example 12.
  • Aluminum plate having a thickness of 0.5mm and a purity of 99% or more was prepared. The thinned portion, holes, or grooves formed in Examples 10-12 were formed at all. Thereafter, this aluminum plate was directly bonded to an aluminum nitride substrate having a thickness of 0.7mm thereby to manufacture a ceramic circuit board of Comparative Example 6.
  • thermal cycle test (TCT) was conducted under a TCT condition of 233K ⁇ 30 minutes ⁇ RT ⁇ 10 minutes ⁇ 398K ⁇ 30 minutes ⁇ RT ⁇ 10 minutes wherein RT denotes a room temperature.
  • RT denotes a room temperature.
  • FIGs. 18, 19 and 20 The measured results of the respective Examples and Comparative Example 6 are shown in FIGs. 18, 19 and 20.
  • the stress caused at inside the outer peripheral portion were effectively mitigated by the thinned portion, holes or grooves, so that the stress caused at a portion close to outer periphery of the aluminum plate can be confirmed to be lowered.
  • the thermal stress or residual stress caused in the metal circuit plate are effectively dispersed even if the heat cycle is applied to the ceramic circuit board, so that a stress concentration to the outer peripheral portion of the metal circuit plate can be prevented whereby the crack formation to the ceramic circuit board can be effectively prevented.
  • a ceramic circuit board of the present invention there can be provided a ceramic circuit board having a high bonding strength and a high-heat cycle resistance and capable of improving operating reliability as an electronic device.
  • a ceramic circuit board capable of exhibiting a remarkable effect of preventing crack formation to be caused by fastening operation performed in assembling process of the ceramic circuit board into devices, and capable of greatly improving an effect of suppressing the crack formation to be caused at the silicon nitride substrate when heat cycle is applied to the ceramic circuit board in comparison with a case where a copper circuit plate is used as the metal circuit plate, whereby an availability and usability particularly in durability of the ceramic circuit board can be increased.
  • a ceramic circuit board capable of contributing to reduce a mounting space for the ceramic circuit board to be mounted on a device without impairing the effect of suppressing crack formation caused by the heat cycle applied to the silicon nitride substrate.

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  • Engineering & Computer Science (AREA)
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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Structure Of Printed Boards (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
EP06013121A 1999-09-28 2000-09-27 Panneau circuit en céramique Withdrawn EP1722411A3 (fr)

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EP1701381B1 (fr) 2016-06-15
US6426154B1 (en) 2002-07-30
EP1089334A3 (fr) 2005-11-09
EP1089334A2 (fr) 2001-04-04
JP2010103570A (ja) 2010-05-06
JP2001168482A (ja) 2001-06-22
EP1089334B8 (fr) 2011-09-21
JP4649027B2 (ja) 2011-03-09
EP1701381A3 (fr) 2006-11-22
EP1701381A2 (fr) 2006-09-13
EP1722411A3 (fr) 2007-01-24
JP5023165B2 (ja) 2012-09-12
EP1089334B1 (fr) 2011-06-22

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