EP0096824B1 - Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X - Google Patents
Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X Download PDFInfo
- Publication number
- EP0096824B1 EP0096824B1 EP83105571A EP83105571A EP0096824B1 EP 0096824 B1 EP0096824 B1 EP 0096824B1 EP 83105571 A EP83105571 A EP 83105571A EP 83105571 A EP83105571 A EP 83105571A EP 0096824 B1 EP0096824 B1 EP 0096824B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- cathode
- ray tube
- wire
- electron
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/066—Details of electron optical components, e.g. cathode cups
Definitions
- the invention relates to a fine focus X-ray tube, in the evacuated piston of which is housed a hot cathode partially surrounded by a rotationally symmetrical control electrode, formed by a heating wire, and an anode equipped with a target, electromagnetic electron beam focusing and deflection devices and an inlet aperture, and a method for forming a microfocus Electron emission.
- the X-ray tube mentioned in the introduction has become known from US-A-41 59 436.
- a hot cathode formed from a V-shaped wire is provided here, which is surrounded by a hollow cylinder with a front internal protrusion as a control electrode, special means for forming a microfocus are not provided here, however, because problems of improving the insulation and problems are involved electrostatic or electromagnetic focusing.
- the greatly shortened service life of the hot cathode means that it must be replaced frequently, a process in which the X-ray blush has to be evacuated again before it is ready for use again. This is a time-consuming process that affects the ratio of usage time to downtime very unfavorably.
- the invention is based on the finding that the longer the cross-section of the filament and the lower its temperature, at least at the surface, the longer the service life of a hot cathode, and that a microfocus can be formed on this surface of a relatively thick wire if it is only possible to expose a location of the surface to special physical conditions that do not exist on other parts of the surface and that are preferably suitable for electron emission.
- the invention consists in that the cross-sectional dimensions of the wire of the hot cathode are large compared to the dimensions of the electron exit surface and that a device for achieving an increased surface temperature is provided at the point at which the electric field between the anode and cathode reaches its highest value.
- control electrode offers itself as a simple component that is present anyway if it is only dimensioned in a suitable manner.
- the glow wire is cooled (to different extents) in such a way that the highest temperature prevails on the surface of the glow wire at the location of the electron exit surface.
- the device for achieving an elevated temperature is a device which strongly absorbs heat radiation and which partially surrounds the hot cathode. Because with this device, an enormous increase in the intensity of the electron emission can be achieved with the least effort.
- This device can be the control electrode present in the X-ray tube anyway, if it is only adapted in a special way to this purpose of heat absorption.
- a fine focus X-ray tube is characterized in that the control electrode is designed as a thick-walled body which has the shape of a hollow cylinder with an inward projection on the end face, the outside of which widens in a funnel shape, this funnel having an angle of 100 ° to Includes 140 °, and that the hot cathode with its most emerging from the inside of the control electrode in the axis of the control electrode is arranged in a plane which is in the region of the lower edge of the funnel-shaped part of the end face.
- the hot cathode can be designed such that the hot cathode consists of a U-shaped or V-shaped wire.
- the control electrode which acts as a cooling device, a tiny spot is then formed in the tip of the bend in the filament, which is least affected by the cooling effect and which, because it is also located at the location of the highest field strength, is a location of particularly intense electron emission .
- a microfocus is achieved on a by no means pointed electrode of previously unsuitable shape and size, the efficiency of the emission of which significantly exceeds the pointed shaped known electrodes.
- the cooling effect of the surface parts of the hot cathode is the cause of the significant increase in the life of the hot cathode.
- a further increase in the intensity of the X-rays, which goes far beyond what is to be expected after the increase in electron emission, can be achieved in that the target has a spherically curved surface and the target angle has a value between 0 ° and 10 °.
- the interaction of the measures according to the invention on the cathode with the measures according to the invention on the anode shows an increase in intensity by more than an order of magnitude, without any particular effort being made and without a loss in service life.
- the piston of the X-ray tube consists of two parts 1, 2.
- Part 1 takes the cathode, consisting of the filament 3, which serves as an emitter for the electron current 11, the contacts 12, 13 for the filament 3 and the base 14 and the control electrode 4, which is also carried by the base 14 and which is connected via the connection contact 15 to a voltage source, not shown.
- the part 2 serving as the anode accommodates in its interior focusing coils 5, deflection coils 6 provided with an air gap 26 and is provided with the target head 7, which receives the target 8 (the anti-cathode) and a shield 16 in its interior, which provides an opening for has the exit of the X-rays 10 generated at the target 8, which exit through the exit window 9.
- the target head is cooled by a cooling liquid which enters or exits a cooling chamber through the tubes 17.
- the piston of the x-ray tube has a vacuum connection 18.
- the electrical connections for the focusing coil 5 and the deflection coils 6 are designated 19 to 22.
- FIG. 2 is an enlarged view of the Structure of cathode and control electrode shown.
- the filament 3 Via the connection contacts 12, 13, which end in clamping devices 27, 28 for the U-shaped filament (emitter) 3, the filament 3 is supplied with voltage, which makes this filament glow.
- the two clamping devices 27, 28 are accommodated in a holder 29 which also supports the grating 4 by means of the insulating ring 30.
- This control electrode 4 is designed as a thick-walled hollow cylinder which has on its one end, surrounding the filament 3, an inward projection 34, which is formed on the outside in the form of a funnel 31, which has an opening angle ⁇ of 100 ° to 140 ° , preferably 120 °.
- This funnel 31 merges on its inside into a cylindrical surface 32, the rounded edge 33.
- the control electrode 4 ensures that more radiation is emitted from all surface parts of the filament 3 to the control electrode than from that location of the filament at which the geometric axis breaks through the surface of the heating wire 3 facing the target. As a result, the surface of the heating wire is cooled everywhere, but the cooling is lowest at the location at which the geometric axis 36 breaks through the surface of the heating wire facing the target 8.
- the diameter D of the heating wire is chosen to be more than 0.17 mm, the inner radius Ri of the curvature is selected to be greater than 0.1 D. These dimensions are significantly larger than the dimensions previously used for fine focus X-ray tubes.
- the inner radius Ri and the outer radius Ra can also have significantly larger values.
- This apron 37 is expediently produced in one piece with the control electrode 4 and essentially represents a solid hollow cylinder.
- FIG. 3 shows the detail 1 from FIG. 1, namely a part of the target head 7 and the target 8 in cross section.
- the target 8 is designed as a solid block, which has a cylindrical or spherical surface on the side facing the electron stream 11.
- the inside of the target head 7 is provided with a lining 16 made of lead.
- the target head 7 has a lateral opening which is closed by the radiation exit window 9 for the emerging X-rays 10.
- the values set on the target 8 are explained in more detail with reference to FIG. 4:
- the electron beam axis E of the electron beam with the electron beam diameter De runs parallel to the tube axis 36.
- the point of impact of the electron beam axis E and the target radius of curvature R is chosen so that a target angle a of 10 ° results. Since, with the measures according to the invention, a very thinly focused electron beam already hits the target 8, the optical focal spot width BFo is very small.
- the hot cathode need not necessarily consist of a current-carrying wire, it can also be heated indirectly, e.g. B. are heated inductively. In this case, too, it is important that the cross-sectional dimensions of the hot cathode, which may well have the shape of a needle, are large compared to the dimensions of the electron exit area and that a point with a higher surface temperature than the other surface parts is present on the hot cathode at which the electric field between anode and cathode reaches its highest value. However, there are also ways of heating the cathode both directly through a current flowing through it and additionally indirectly.
Landscapes
- X-Ray Techniques (AREA)
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT83105571T ATE29088T1 (de) | 1982-06-16 | 1983-06-07 | Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3222511A DE3222511C2 (de) | 1982-06-16 | 1982-06-16 | Feinfokus-Röntgenröhre |
DE3222511 | 1982-06-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0096824A1 EP0096824A1 (fr) | 1983-12-28 |
EP0096824B1 true EP0096824B1 (fr) | 1987-08-19 |
Family
ID=6166125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP83105571A Expired EP0096824B1 (fr) | 1982-06-16 | 1983-06-07 | Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X |
Country Status (5)
Country | Link |
---|---|
US (1) | US4573186A (fr) |
EP (1) | EP0096824B1 (fr) |
JP (1) | JPH0618119B2 (fr) |
AT (1) | ATE29088T1 (fr) |
DE (1) | DE3222511C2 (fr) |
Families Citing this family (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3330806A1 (de) * | 1983-08-26 | 1985-03-14 | Feinfocus Röntgensysteme GmbH, 3050 Wunstorf | Roentgenlithographiegeraet |
DE3426624A1 (de) * | 1984-07-19 | 1986-01-30 | Scanray A/S, Kopenhagen | Roentgenroehre |
US4764947A (en) * | 1985-12-04 | 1988-08-16 | The Machlett Laboratories, Incorporated | Cathode focusing arrangement |
US4868842A (en) * | 1987-03-19 | 1989-09-19 | Siemens Medical Systems, Inc. | Cathode cup improvement |
ATE72498T1 (de) * | 1988-08-25 | 1992-02-15 | Steffel Gmbh Spezialmaschbau | Rundstrahl-roentgenroehre. |
US5077777A (en) * | 1990-07-02 | 1991-12-31 | Micro Focus Imaging Corp. | Microfocus X-ray tube |
JPH04101339A (ja) * | 1990-08-20 | 1992-04-02 | Rigaku Denki Kogyo Kk | X線管 |
US5111494A (en) * | 1990-08-28 | 1992-05-05 | North American Philips Corporation | Magnet for use in a drift tube of an x-ray tube |
US5515413A (en) * | 1994-09-26 | 1996-05-07 | General Electric Company | X-ray tube cathode cup assembly |
GB9620160D0 (en) * | 1996-09-27 | 1996-11-13 | Bede Scient Instr Ltd | X-ray generator |
US6134300A (en) * | 1998-11-05 | 2000-10-17 | The Regents Of The University Of California | Miniature x-ray source |
US6185276B1 (en) * | 1999-02-02 | 2001-02-06 | Thermal Corp. | Collimated beam x-ray tube |
US7062017B1 (en) * | 2000-08-15 | 2006-06-13 | Varian Medical Syatems, Inc. | Integral cathode |
JP4762436B2 (ja) * | 2001-05-16 | 2011-08-31 | 浜松ホトニクス株式会社 | カソードユニット及び開放型x線発生装置 |
US7180981B2 (en) * | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
US7138768B2 (en) * | 2002-05-23 | 2006-11-21 | Varian Semiconductor Equipment Associates, Inc. | Indirectly heated cathode ion source |
US7466799B2 (en) * | 2003-04-09 | 2008-12-16 | Varian Medical Systems, Inc. | X-ray tube having an internal radiation shield |
DE10352334B4 (de) * | 2003-11-06 | 2010-07-29 | Comet Gmbh | Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung |
CN1786819B (zh) * | 2004-12-09 | 2011-08-10 | Ge医疗系统环球技术有限公司 | X射线光阑、x射线辐照器和x射线成像设备 |
EP2084728A2 (fr) * | 2006-10-17 | 2009-08-05 | Philips Intellectual Property & Standards GmbH | Émetteur pour tubes à rayons x et procédé de chauffage dudit émetteur |
US20110121179A1 (en) * | 2007-06-01 | 2011-05-26 | Liddiard Steven D | X-ray window with beryllium support structure |
US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
EP2167632A4 (fr) * | 2007-07-09 | 2013-12-18 | Univ Brigham Young | Procédés et dispositifs pour une manipulation de molécules chargées |
US8498381B2 (en) | 2010-10-07 | 2013-07-30 | Moxtek, Inc. | Polymer layer on X-ray window |
WO2009045915A2 (fr) * | 2007-09-28 | 2009-04-09 | Brigham Young University | Ensemble de nanotubes de carbone |
US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
US7924983B2 (en) * | 2008-06-30 | 2011-04-12 | Varian Medical Systems, Inc. | Thermionic emitter designed to control electron beam current profile in two dimensions |
US20100239828A1 (en) * | 2009-03-19 | 2010-09-23 | Cornaby Sterling W | Resistively heated small planar filament |
US8247971B1 (en) | 2009-03-19 | 2012-08-21 | Moxtek, Inc. | Resistively heated small planar filament |
US7983394B2 (en) * | 2009-12-17 | 2011-07-19 | Moxtek, Inc. | Multiple wavelength X-ray source |
CN103189955A (zh) * | 2010-08-27 | 2013-07-03 | Ge传感与检测技术有限公司 | 用于高分辨率x射线设备的微焦点x射线管 |
US8526574B2 (en) | 2010-09-24 | 2013-09-03 | Moxtek, Inc. | Capacitor AC power coupling across high DC voltage differential |
US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
US8750458B1 (en) | 2011-02-17 | 2014-06-10 | Moxtek, Inc. | Cold electron number amplifier |
US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
JP5711007B2 (ja) * | 2011-03-02 | 2015-04-30 | 浜松ホトニクス株式会社 | 開放型x線源用冷却構造及び開放型x線源 |
US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
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US9072154B2 (en) | 2012-12-21 | 2015-06-30 | Moxtek, Inc. | Grid voltage generation for x-ray tube |
US9184020B2 (en) | 2013-03-04 | 2015-11-10 | Moxtek, Inc. | Tiltable or deflectable anode x-ray tube |
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US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
US9748070B1 (en) | 2014-09-17 | 2017-08-29 | Bruker Jv Israel Ltd. | X-ray tube anode |
US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
JP6677420B2 (ja) * | 2016-04-01 | 2020-04-08 | キヤノン電子管デバイス株式会社 | X線管装置 |
EP3491658A1 (fr) | 2016-08-01 | 2019-06-05 | Koninklijke Philips N.V. | Appareil à rayons x |
US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
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US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
CN110867359B (zh) * | 2018-08-28 | 2022-02-01 | 姚智伟 | 微焦点x射线源 |
WO2020051061A1 (fr) | 2018-09-04 | 2020-03-12 | Sigray, Inc. | Système et procédé pour fluorescence à rayon x avec filtration |
WO2020051221A2 (fr) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | Système et procédé d'analyse de rayons x sélectionnable en profondeur |
US11302508B2 (en) | 2018-11-08 | 2022-04-12 | Bruker Technologies Ltd. | X-ray tube |
WO2021011209A1 (fr) | 2019-07-15 | 2021-01-21 | Sigray, Inc. | Source de rayons x avec anode tournante à pression atmosphérique |
US11164713B2 (en) * | 2020-03-31 | 2021-11-02 | Energetiq Technology, Inc. | X-ray generation apparatus |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB701050A (en) * | 1950-03-22 | 1953-12-16 | Werner Ehrenberg | Improvements in or relating to x-ray tubes |
US2866113A (en) * | 1952-10-07 | 1958-12-23 | Cosslett Vernon Ellis | Fine focus x-ray tubes |
US3141993A (en) * | 1959-12-24 | 1964-07-21 | Zeiss Jena Veb Carl | Very fine beam electron gun |
NL271119A (fr) * | 1961-07-10 | |||
DE1614158A1 (de) * | 1967-05-13 | 1971-04-29 | Mueller C H F Gmbh | Kathode fuer Roentgenroehre |
NL7314131A (nl) * | 1973-10-15 | 1975-04-17 | Philips Nv | Draaianode roentgenbuis. |
GB1597841A (en) * | 1977-01-19 | 1981-09-09 | Nicolet Xrd Corp | Electron beam focussing |
NL7803837A (nl) * | 1978-04-11 | 1979-10-15 | Neratoom | Inrichting voor het opwekken van roentgenstralen. |
-
1982
- 1982-06-16 DE DE3222511A patent/DE3222511C2/de not_active Expired
-
1983
- 1983-06-07 AT AT83105571T patent/ATE29088T1/de active
- 1983-06-07 EP EP83105571A patent/EP0096824B1/fr not_active Expired
- 1983-06-16 US US06/505,056 patent/US4573186A/en not_active Expired - Lifetime
- 1983-06-16 JP JP58110022A patent/JPH0618119B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0096824A1 (fr) | 1983-12-28 |
ATE29088T1 (de) | 1987-09-15 |
DE3222511A1 (de) | 1983-12-22 |
DE3222511C2 (de) | 1985-08-29 |
US4573186A (en) | 1986-02-25 |
JPS598251A (ja) | 1984-01-17 |
JPH0618119B2 (ja) | 1994-03-09 |
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