EP0096824B1 - Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X - Google Patents

Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X Download PDF

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Publication number
EP0096824B1
EP0096824B1 EP83105571A EP83105571A EP0096824B1 EP 0096824 B1 EP0096824 B1 EP 0096824B1 EP 83105571 A EP83105571 A EP 83105571A EP 83105571 A EP83105571 A EP 83105571A EP 0096824 B1 EP0096824 B1 EP 0096824B1
Authority
EP
European Patent Office
Prior art keywords
cathode
ray tube
wire
electron
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83105571A
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German (de)
English (en)
Other versions
EP0096824A1 (fr
Inventor
Alfred Dipl.-Ing. Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Feinfocus Verwaltungs & Co KG GmbH
Original Assignee
Feinfocus Verwaltungs & Co KG GmbH
Feinfocus Verwaltungs & Co KG GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinfocus Verwaltungs & Co KG GmbH, Feinfocus Verwaltungs & Co KG GmbH filed Critical Feinfocus Verwaltungs & Co KG GmbH
Priority to AT83105571T priority Critical patent/ATE29088T1/de
Publication of EP0096824A1 publication Critical patent/EP0096824A1/fr
Application granted granted Critical
Publication of EP0096824B1 publication Critical patent/EP0096824B1/fr
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/14Arrangements for concentrating, focusing, or directing the cathode ray
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • H01J35/064Details of the emitter, e.g. material or structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • H01J35/066Details of electron optical components, e.g. cathode cups

Definitions

  • the invention relates to a fine focus X-ray tube, in the evacuated piston of which is housed a hot cathode partially surrounded by a rotationally symmetrical control electrode, formed by a heating wire, and an anode equipped with a target, electromagnetic electron beam focusing and deflection devices and an inlet aperture, and a method for forming a microfocus Electron emission.
  • the X-ray tube mentioned in the introduction has become known from US-A-41 59 436.
  • a hot cathode formed from a V-shaped wire is provided here, which is surrounded by a hollow cylinder with a front internal protrusion as a control electrode, special means for forming a microfocus are not provided here, however, because problems of improving the insulation and problems are involved electrostatic or electromagnetic focusing.
  • the greatly shortened service life of the hot cathode means that it must be replaced frequently, a process in which the X-ray blush has to be evacuated again before it is ready for use again. This is a time-consuming process that affects the ratio of usage time to downtime very unfavorably.
  • the invention is based on the finding that the longer the cross-section of the filament and the lower its temperature, at least at the surface, the longer the service life of a hot cathode, and that a microfocus can be formed on this surface of a relatively thick wire if it is only possible to expose a location of the surface to special physical conditions that do not exist on other parts of the surface and that are preferably suitable for electron emission.
  • the invention consists in that the cross-sectional dimensions of the wire of the hot cathode are large compared to the dimensions of the electron exit surface and that a device for achieving an increased surface temperature is provided at the point at which the electric field between the anode and cathode reaches its highest value.
  • control electrode offers itself as a simple component that is present anyway if it is only dimensioned in a suitable manner.
  • the glow wire is cooled (to different extents) in such a way that the highest temperature prevails on the surface of the glow wire at the location of the electron exit surface.
  • the device for achieving an elevated temperature is a device which strongly absorbs heat radiation and which partially surrounds the hot cathode. Because with this device, an enormous increase in the intensity of the electron emission can be achieved with the least effort.
  • This device can be the control electrode present in the X-ray tube anyway, if it is only adapted in a special way to this purpose of heat absorption.
  • a fine focus X-ray tube is characterized in that the control electrode is designed as a thick-walled body which has the shape of a hollow cylinder with an inward projection on the end face, the outside of which widens in a funnel shape, this funnel having an angle of 100 ° to Includes 140 °, and that the hot cathode with its most emerging from the inside of the control electrode in the axis of the control electrode is arranged in a plane which is in the region of the lower edge of the funnel-shaped part of the end face.
  • the hot cathode can be designed such that the hot cathode consists of a U-shaped or V-shaped wire.
  • the control electrode which acts as a cooling device, a tiny spot is then formed in the tip of the bend in the filament, which is least affected by the cooling effect and which, because it is also located at the location of the highest field strength, is a location of particularly intense electron emission .
  • a microfocus is achieved on a by no means pointed electrode of previously unsuitable shape and size, the efficiency of the emission of which significantly exceeds the pointed shaped known electrodes.
  • the cooling effect of the surface parts of the hot cathode is the cause of the significant increase in the life of the hot cathode.
  • a further increase in the intensity of the X-rays, which goes far beyond what is to be expected after the increase in electron emission, can be achieved in that the target has a spherically curved surface and the target angle has a value between 0 ° and 10 °.
  • the interaction of the measures according to the invention on the cathode with the measures according to the invention on the anode shows an increase in intensity by more than an order of magnitude, without any particular effort being made and without a loss in service life.
  • the piston of the X-ray tube consists of two parts 1, 2.
  • Part 1 takes the cathode, consisting of the filament 3, which serves as an emitter for the electron current 11, the contacts 12, 13 for the filament 3 and the base 14 and the control electrode 4, which is also carried by the base 14 and which is connected via the connection contact 15 to a voltage source, not shown.
  • the part 2 serving as the anode accommodates in its interior focusing coils 5, deflection coils 6 provided with an air gap 26 and is provided with the target head 7, which receives the target 8 (the anti-cathode) and a shield 16 in its interior, which provides an opening for has the exit of the X-rays 10 generated at the target 8, which exit through the exit window 9.
  • the target head is cooled by a cooling liquid which enters or exits a cooling chamber through the tubes 17.
  • the piston of the x-ray tube has a vacuum connection 18.
  • the electrical connections for the focusing coil 5 and the deflection coils 6 are designated 19 to 22.
  • FIG. 2 is an enlarged view of the Structure of cathode and control electrode shown.
  • the filament 3 Via the connection contacts 12, 13, which end in clamping devices 27, 28 for the U-shaped filament (emitter) 3, the filament 3 is supplied with voltage, which makes this filament glow.
  • the two clamping devices 27, 28 are accommodated in a holder 29 which also supports the grating 4 by means of the insulating ring 30.
  • This control electrode 4 is designed as a thick-walled hollow cylinder which has on its one end, surrounding the filament 3, an inward projection 34, which is formed on the outside in the form of a funnel 31, which has an opening angle ⁇ of 100 ° to 140 ° , preferably 120 °.
  • This funnel 31 merges on its inside into a cylindrical surface 32, the rounded edge 33.
  • the control electrode 4 ensures that more radiation is emitted from all surface parts of the filament 3 to the control electrode than from that location of the filament at which the geometric axis breaks through the surface of the heating wire 3 facing the target. As a result, the surface of the heating wire is cooled everywhere, but the cooling is lowest at the location at which the geometric axis 36 breaks through the surface of the heating wire facing the target 8.
  • the diameter D of the heating wire is chosen to be more than 0.17 mm, the inner radius Ri of the curvature is selected to be greater than 0.1 D. These dimensions are significantly larger than the dimensions previously used for fine focus X-ray tubes.
  • the inner radius Ri and the outer radius Ra can also have significantly larger values.
  • This apron 37 is expediently produced in one piece with the control electrode 4 and essentially represents a solid hollow cylinder.
  • FIG. 3 shows the detail 1 from FIG. 1, namely a part of the target head 7 and the target 8 in cross section.
  • the target 8 is designed as a solid block, which has a cylindrical or spherical surface on the side facing the electron stream 11.
  • the inside of the target head 7 is provided with a lining 16 made of lead.
  • the target head 7 has a lateral opening which is closed by the radiation exit window 9 for the emerging X-rays 10.
  • the values set on the target 8 are explained in more detail with reference to FIG. 4:
  • the electron beam axis E of the electron beam with the electron beam diameter De runs parallel to the tube axis 36.
  • the point of impact of the electron beam axis E and the target radius of curvature R is chosen so that a target angle a of 10 ° results. Since, with the measures according to the invention, a very thinly focused electron beam already hits the target 8, the optical focal spot width BFo is very small.
  • the hot cathode need not necessarily consist of a current-carrying wire, it can also be heated indirectly, e.g. B. are heated inductively. In this case, too, it is important that the cross-sectional dimensions of the hot cathode, which may well have the shape of a needle, are large compared to the dimensions of the electron exit area and that a point with a higher surface temperature than the other surface parts is present on the hot cathode at which the electric field between anode and cathode reaches its highest value. However, there are also ways of heating the cathode both directly through a current flowing through it and additionally indirectly.

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  • X-Ray Techniques (AREA)

Claims (8)

1. Tube à rayons X à foyer fin, comportant une ampoule mise sous vide dans laquelle sont logées une cathode à incandescence formée par un fil chauffant et entouré partiellement par une électrode de commande à symétrie de révolution ainsi qu'une anode pourvue d'une cible, de dispositifs électromagnétiques de déviation et de concentration de faisceau d'électrons et d'un diaphragme d'entrée, caractérisé en ce que les dimensions de section du fil (3) de la cathode à incandescence sont grandes par rapport aux dimensions de la surface de sortie d'électrons et en ce qu'il est prévu un dispositif pour produire une température surfacique accrue à l'endroit où le champ électrique entre l'anode et la cathode atteint sa valeur maximale.
2. Tube à rayons X à foyer fin selon la revendication 1, caractérisé en ce que le dispositif pour produire une température accrue est un dispositif absorbant fortement le rayonnement thermique qui entoure partiellement la cathode à incandescence.
3. Tube à rayons X à foyer fin selon la revendication 1, caractérisé en ce que l'électrode de commande (4) est agencée comme un corps à paroi épaisse qui a la forme d'un cylindre creux comportant une saillie dirigée vers l'intérieur sur le côté frontal et dont le côté extérieur s'élargit en forme d'entonnoir, cet entonnoir couvrant un angle de 100° à 140°, et en ce que la cathode à incandescence est disposée de telle sorte que sa partie sortant le plus loin de l'intérieur de l'électrode de commande dans l'axe de l'électrode de commande soit dans un plan qui est situé dans la zone du bord inférieur de la partie en forme d'entonnoir de la surface frontale.
4. Tube à rayons X à foyer fin selon la revendication 1, caractérisé en ce que le fil (3) de la cathode à incandescence est plié en forme de U ou de V.
5. Tube à rayons X à foyer fin selon la revendication 1, caractérisé en ce que la cible (8) comporte une surface de courbure sphérique et l'angle de cible a une valeur comprise entre 0° et 10°.
6. Procédé pour former un microfoyer d'émission d'électrons de la cathode à incandescence d'un tube à rayons X, caractérisé en ce qu'il est utilisé un fil à incandescence (3) dont les dimensions de section sont grandes par rapport aux dimensions de la surface de sortie d'électrons, en ce que sur le fil à incandescence (3) est créée, dans la zone de la surface de sortie d'électrons, une zone de température accrue et en ce que le champ électrique est engendré de telle sorte qu'il atteigne sa valeur de crête dans cette zone de température accrue.
7. Procédé selon la revendication 6, caractérisé en ce que la zone de température accrue est créée par le fait que, au moyen d'un corps (4) absorbant le rayonnement thermique, il est absorbé plus de rayonnement thermique à partir de toute l'étendue de la surface du fil à incandescence qu'à partir de la zone de la surface de sortie d'électrons.
8. Procédé selon la revendication 6, caractérisé en ce que le fil à incandescence (3) est refroidi à un degré suffisamment différent pour qu'il règne dans la zone de la surface de sortie d'électrons la température la plus haute établie sur la surface du fil à incandescence (3).
EP83105571A 1982-06-16 1983-06-07 Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X Expired EP0096824B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT83105571T ATE29088T1 (de) 1982-06-16 1983-06-07 Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3222511A DE3222511C2 (de) 1982-06-16 1982-06-16 Feinfokus-Röntgenröhre
DE3222511 1982-06-16

Publications (2)

Publication Number Publication Date
EP0096824A1 EP0096824A1 (fr) 1983-12-28
EP0096824B1 true EP0096824B1 (fr) 1987-08-19

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EP83105571A Expired EP0096824B1 (fr) 1982-06-16 1983-06-07 Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X

Country Status (5)

Country Link
US (1) US4573186A (fr)
EP (1) EP0096824B1 (fr)
JP (1) JPH0618119B2 (fr)
AT (1) ATE29088T1 (fr)
DE (1) DE3222511C2 (fr)

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Also Published As

Publication number Publication date
EP0096824A1 (fr) 1983-12-28
ATE29088T1 (de) 1987-09-15
DE3222511A1 (de) 1983-12-22
DE3222511C2 (de) 1985-08-29
US4573186A (en) 1986-02-25
JPS598251A (ja) 1984-01-17
JPH0618119B2 (ja) 1994-03-09

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