ATE29088T1 - Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode. - Google Patents

Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode.

Info

Publication number
ATE29088T1
ATE29088T1 AT83105571T AT83105571T ATE29088T1 AT E29088 T1 ATE29088 T1 AT E29088T1 AT 83105571 T AT83105571 T AT 83105571T AT 83105571 T AT83105571 T AT 83105571T AT E29088 T1 ATE29088 T1 AT E29088T1
Authority
AT
Austria
Prior art keywords
cathode
ray tube
grid
electron
glow
Prior art date
Application number
AT83105571T
Other languages
English (en)
Inventor
Alfred Dipl-Ing Reinhold
Original Assignee
Feinfocus Verwaltung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinfocus Verwaltung filed Critical Feinfocus Verwaltung
Application granted granted Critical
Publication of ATE29088T1 publication Critical patent/ATE29088T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/066—Details of electron optical components, e.g. cathode cups

Landscapes

  • X-Ray Techniques (AREA)
AT83105571T 1982-06-16 1983-06-07 Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode. ATE29088T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3222511A DE3222511C2 (de) 1982-06-16 1982-06-16 Feinfokus-Röntgenröhre
EP83105571A EP0096824B1 (de) 1982-06-16 1983-06-07 Feinfokus-Röntgenröhre und Verfahren zur Bildung eines Mikrofokus der Elektronenemission einer Röntgenröhren-Glühkathode

Publications (1)

Publication Number Publication Date
ATE29088T1 true ATE29088T1 (de) 1987-09-15

Family

ID=6166125

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83105571T ATE29088T1 (de) 1982-06-16 1983-06-07 Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode.

Country Status (5)

Country Link
US (1) US4573186A (de)
EP (1) EP0096824B1 (de)
JP (1) JPH0618119B2 (de)
AT (1) ATE29088T1 (de)
DE (1) DE3222511C2 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
DE3426624C2 (de) * 1984-07-19 1987-04-23 Scanray A/S, Kopenhagen Röntgenröhre
US4764947A (en) * 1985-12-04 1988-08-16 The Machlett Laboratories, Incorporated Cathode focusing arrangement
US4868842A (en) * 1987-03-19 1989-09-19 Siemens Medical Systems, Inc. Cathode cup improvement
DE3868324D1 (de) * 1988-08-25 1992-03-19 Steffel Gmbh Spezialmaschbau Rundstrahl-roentgenroehre.
US5077777A (en) * 1990-07-02 1991-12-31 Micro Focus Imaging Corp. Microfocus X-ray tube
JPH04101339A (ja) * 1990-08-20 1992-04-02 Rigaku Denki Kogyo Kk Ｘ線管
US5111494A (en) * 1990-08-28 1992-05-05 North American Philips Corporation Magnet for use in a drift tube of an x-ray tube
US5515413A (en) * 1994-09-26 1996-05-07 General Electric Company X-ray tube cathode cup assembly
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
US6134300A (en) * 1998-11-05 2000-10-17 The Regents Of The University Of California Miniature x-ray source
US6185276B1 (en) * 1999-02-02 2001-02-06 Thermal Corp. Collimated beam x-ray tube
US7062017B1 (en) * 2000-08-15 2006-06-13 Varian Medical Syatems, Inc. Integral cathode
JP4762436B2 (ja) * 2001-05-16 2011-08-31 浜松ホトニクス株式会社 カソードユニット及び開放型ｘ線発生装置
US7180981B2 (en) * 2002-04-08 2007-02-20 Nanodynamics-88, Inc. High quantum energy efficiency X-ray tube and targets
US7138768B2 (en) * 2002-05-23 2006-11-21 Varian Semiconductor Equipment Associates, Inc. Indirectly heated cathode ion source
US7466799B2 (en) * 2003-04-09 2008-12-16 Varian Medical Systems, Inc. X-ray tube having an internal radiation shield
DE10352334B4 (de) * 2003-11-06 2010-07-29 Comet Gmbh Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung
CN1786819B (zh) * 2004-12-09 2011-08-10 Ge医疗系统环球技术有限公司 X射线光阑、x射线辐照器和x射线成像设备
CN101529549B (zh) * 2006-10-17 2014-09-03 皇家飞利浦电子股份有限公司 用于x射线管的发射器及其加热方法
US20110121179A1 (en) * 2007-06-01 2011-05-26 Liddiard Steven D X-ray window with beryllium support structure
US7737424B2 (en) * 2007-06-01 2010-06-15 Moxtek, Inc. X-ray window with grid structure
KR20100037615A (ko) * 2007-07-09 2010-04-09 브라이엄 영 유니버시티 대전된 분자 조작을 위한 방법 및 이를 위한 장치
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
WO2009045915A2 (en) * 2007-09-28 2009-04-09 Brigham Young University Carbon nanotube assembly
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
US7924983B2 (en) * 2008-06-30 2011-04-12 Varian Medical Systems, Inc. Thermionic emitter designed to control electron beam current profile in two dimensions
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US20100239828A1 (en) * 2009-03-19 2010-09-23 Cornaby Sterling W Resistively heated small planar filament
US7983394B2 (en) * 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source
US9153408B2 (en) * 2010-08-27 2015-10-06 Ge Sensing & Inspection Technologies Gmbh Microfocus X-ray tube for a high-resolution X-ray apparatus
US8526574B2 (en) 2010-09-24 2013-09-03 Moxtek, Inc. Capacitor AC power coupling across high DC voltage differential
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
JP5711007B2 (ja) * 2011-03-02 2015-04-30 浜松ホトニクス株式会社 開放型ｘ線源用冷却構造及び開放型ｘ線源
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
US9072154B2 (en) 2012-12-21 2015-06-30 Moxtek, Inc. Grid voltage generation for x-ray tube
US9177755B2 (en) 2013-03-04 2015-11-03 Moxtek, Inc. Multi-target X-ray tube with stationary electron beam position
US9184020B2 (en) 2013-03-04 2015-11-10 Moxtek, Inc. Tiltable or deflectable anode x-ray tube
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
JP6677420B2 (ja) * 2016-04-01 2020-04-08 キヤノン電子管デバイス株式会社 Ｘ線管装置
US10896798B2 (en) 2016-08-01 2021-01-19 Koninklijke Philips N.V. X-ray unit
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
JP6937380B2 (ja) 2017-03-22 2021-09-22 シグレイ、インコーポレイテッド Ｘ線分光を実施するための方法およびｘ線吸収分光システム
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
US10658145B2 (en) 2018-07-26 2020-05-19 Sigray, Inc. High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
CN109036608B (zh) * 2018-08-09 2024-08-16 佛山市纳西弗科技有限公司 一种用于射线管测试的屏蔽装置
CN110867359B (zh) * 2018-08-28 2022-02-01 姚智伟 微焦点x射线源
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
WO2021011209A1 (en) 2019-07-15 2021-01-21 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB701050A (en) * 1950-03-22 1953-12-16 Werner Ehrenberg Improvements in or relating to x-ray tubes
US2866113A (en) * 1952-10-07 1958-12-23 Cosslett Vernon Ellis Fine focus x-ray tubes
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
NL271119A (de) * 1961-07-10
DE1614158A1 (de) * 1967-05-13 1971-04-29 Mueller C H F Gmbh Kathode fuer Roentgenroehre
NL7314131A (nl) * 1973-10-15 1975-04-17 Philips Nv Draaianode roentgenbuis.
GB1597841A (en) * 1977-01-19 1981-09-09 Nicolet Xrd Corp Electron beam focussing
NL7803837A (nl) * 1978-04-11 1979-10-15 Neratoom Inrichting voor het opwekken van roentgenstralen.

Also Published As

Publication number Publication date
EP0096824B1 (de) 1987-08-19
DE3222511C2 (de) 1985-08-29
EP0096824A1 (de) 1983-12-28
JPH0618119B2 (ja) 1994-03-09
DE3222511A1 (de) 1983-12-22
JPS598251A (ja) 1984-01-17
US4573186A (en) 1986-02-25

Similar Documents

Publication Publication Date Title
ATE29088T1 (de) Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode.
JP3020766U (ja) 陰極と、陰極から放射される電子を加速するための電極装置とを有するｘ線管の電子発生装置
GB2015245A (en) X-ray tubes
US3751701A (en) Convergent flow hollow beam x-ray gun with high average power
CN102142346A (zh) X-射线阴极及其制造方法
US4352196A (en) X-Ray tube for producing a flat wide-angle fan-shaped beam of X-rays
US3500097A (en) X-ray generator
US6556656B2 (en) X-ray tube provided with a flat cathode
CN110942967A (zh) 一种x射线管
US5535255A (en) System for the cooling of an anode for an X-ray tube in a radiogenic unit without heat exchanger
ATE257276T1 (de) Röntgenröhre mit variabler abbildungs-fleckgrösse
US1920601A (en) Electron discharge device
US2919362A (en) Stabilized x-ray generator
GB2018507A (en) A single use X-ray source
JP4091217B2 (ja) Ｘ線管
ATE49322T1 (de) Roentgenlithographiegeraet.
US3892989A (en) Convergent flow hollow beam X-ray gun construction
US2836749A (en) 360 u deg. X-ray generator
GB2122806A (en) X-ray source apparatus
JPS5928939B2 (ja) Ｘ線発生器
CN111383876B (zh) X射线管
JPH04231941A (ja) 回転陰極ｘ線管
US10896798B2 (en) X-ray unit
JPH07169422A (ja) Ｘ線管
JPS63124351A (ja) Ｘ線管装置