EP0777255A1 - Tube à rayons X, notamment tube à rayons X à microfoyer - Google Patents

Tube à rayons X, notamment tube à rayons X à microfoyer Download PDF

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Publication number
EP0777255A1
EP0777255A1 EP96203254A EP96203254A EP0777255A1 EP 0777255 A1 EP0777255 A1 EP 0777255A1 EP 96203254 A EP96203254 A EP 96203254A EP 96203254 A EP96203254 A EP 96203254A EP 0777255 A1 EP0777255 A1 EP 0777255A1
Authority
EP
European Patent Office
Prior art keywords
ray tube
electrons
passage channel
tube according
anode body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP96203254A
Other languages
German (de)
English (en)
Inventor
Geoffrey Dr. c/o Philips Harding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Corporate Intellectual Property GmbH
Philips Patentverwaltung GmbH
Koninklijke Philips Electronics NV
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Corporate Intellectual Property GmbH, Philips Patentverwaltung GmbH, Koninklijke Philips Electronics NV, Philips Electronics NV filed Critical Philips Corporate Intellectual Property GmbH
Publication of EP0777255A1 publication Critical patent/EP0777255A1/fr
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Definitions

  • the invention relates to an X-ray tube, in particular a microfocus X-ray tube with an electron source for the emission of electrons and with an anode body which has a conical passage channel for the electrons, the inlet opening facing the electron source is larger than its outlet opening.
  • Such an X-ray tube is known from DE-OS 20 04 359.
  • the electrons are accelerated from a cathode to the anode and mostly hit the walls inside the passage.
  • X-ray radiation is thereby generated everywhere in the passage channel, the useful radiation being led out through a radiation exit window which is located at the exit of the passage passage narrowed in relation to the entrance.
  • a small focus can thus be achieved, which in one embodiment is 1 mm 2 , for example.
  • the smallest possible focus with a diameter e.g. can be achieved in the range of 10 ⁇ m.
  • a first problem is to focus the electrons on a very small focus. Even complex electron optics are no longer sufficient for this.
  • Another problem is that the electron source must be very small, but still provide an electron beam of sufficiently high density.
  • the object of the invention is therefore to create an x-ray tube with which the smallest possible focus can be achieved.
  • this object is achieved according to the invention by arranging the passage channel in such a manner and It is formed that the electrons are scattered at a small angle on a surface of the passage towards the exit opening, and that a target element is arranged in the direction of flight of the electrons behind the exit opening of the passage, in which X-ray radiation is produced when the electrons impact.
  • the invention is based on the finding that as the angle between the electron beam and the surface of the passage channel becomes smaller, more and more electrons entering the passage channel are elastically scattered on its surface.
  • the x-ray tube according to the invention both the electrons that hit the target element in a direct way through the passage channel and the target element uses the electrons scattered on the surface towards the target element to generate useful X-ray radiation when it hits the target element.
  • Another advantage of such an X-ray tube is that the focus is determined solely by the mechanical dimensions of the passage, ie the cross section of the narrowed exit opening of the passage, behind which the target element is arranged, determines the size of the focus.
  • the passage channel itself does not serve as a target element here, ie X-rays generated by a small proportion of the electrons in the passage channel should not be used as useful radiation. Due to the conical configuration of the passage channel, the outlet opening of which is considerably smaller than the inlet opening, a much smaller focus is achieved in the X-ray tube according to the invention than in the known X-ray tube, since the electrons in the passage channel itself do not generate any useful X-ray radiation. Conical does not necessarily mean that it is rotationally symmetrical, including a passage channel for example a rectangular or polygonal cross section is conceivable in the implementation of the invention.
  • the target element is an element which consists of a material with a high atomic number Z, for example greater than 26, for example of gold or molybdenum, and in which X-rays are generated when electrons strike, which radiation is useful the x-ray tube is rejected.
  • the total opening angle is in the range between 3 ° and 7 °.
  • the electrons entering the passage there are not elastically scattered when they hit the surface due to this large opening angle, but instead generate X-rays.
  • the anode itself with the passage channel serves here as the target element, and the X-rays generated in the passage channel are discharged from the tube as useful radiation.
  • the electrons come into the passage as a beam parallel to the central axis (or, in the case of a rotationally symmetrical passage, parallel to the axis of symmetry).
  • electron optics it can be achieved that the electrons hit the passage channel approximately parallel to the surface thereof and hit it at a very small angle, so that elastic scattering is possible.
  • the passage channel is preferably arranged and designed such that the electrons strike the surface of the passage channel at an angle of at most 2 °, preferably at most 1 °.
  • the total opening angle of the passage channel does not exceed a certain upper limit.
  • One embodiment of the invention therefore provides that the total opening angle is a maximum of 8 °. Only when using a parallel electron beam, the rays of which are aligned parallel to the central axis of the through-channel, is it necessary that the total opening angle of the through-channel should not exceed a certain size. Laboratory tests have shown that particularly many electrons are scattered elastically in the passage channel in a further development according to the invention, which is characterized in that the passage channel has a total opening angle of 2 °. This further development also has the advantage that the use of complex electron optics is not necessary.
  • the anode body has an anode layer on the inner surface of the passage channel, which consists of a material with a nuclear charge number Z> 26.
  • the anode layer consists of copper, silver or gold. If materials with an atomic number that is too low are used for the anode layer, the probability of elastic scattering when the electrons strike is becoming less and less. If the atomic number Z is too small, the electrons lose more and more energy the smaller Z is when they hit the anode layer, i.e., more and more electrons are scattered inelastically, which means that the efficiency of the X-ray tube becomes less and less.
  • the target element is arranged on a target carrier in a conical depression directly opposite the outlet opening of the passage channel.
  • the electrons arrive directly in this depression and generate X-rays there.
  • the area of the target element on which the electrons strike is thereby increased compared to a target element without a depression, without the focus being larger. This allows a further increase in the X-ray yield to be achieved.
  • An embodiment of the invention preferably provides that the target carrier is a thin plate made of diamond.
  • the thickness of the plate is in the range of a few hundred micrometers, for example around 500 ⁇ m.
  • a further development according to the invention provides that the anode body is designed in a ring shape around an electron focusing point located on the surface of the target element and has at least two passage channels directed towards the electron focusing point and narrowing thereon and that the electron source is a cathode element arranged in a circular arc around the anode body.
  • This ensures that the cathode delivers as many electrons as possible.
  • the dimension of the cathode element for example a cathode heating wire, must be very small and precisely determined, the cathode element here can be significantly larger and thus also supply significantly more electrons. Overall, this version achieves a significant increase in the number of electrons hitting the target element.
  • the anode body has a curved, preferably hemispherical surface and that the electron source has a curved, preferably hemispherical surface facing the anode body.
  • very good focusing of the electrons can be achieved in such a way that very many electrons emitted by the electron source hit the passage channel.
  • the design of the electron source and the anode body can create such an electric field that the electrons hit the surface of the passage channel at a small angle and are scattered there as desired toward the outlet opening.
  • the mutually facing surfaces of the electron source and the anode body are preferably designed as part of a spherical surface, preferably hemispherical, the radii of curvature being approximately the same size are.
  • the radii of curvature can also be of different sizes, in particular in order to compensate for disturbances in the electrical field that occur in the surface of the anode body due to the opening required for the passage channel.
  • the electron source has a cathode element, preferably a cathode filament or a cathode plate, arranged in the center of its curved surface.
  • This cathode element which can be made of tungsten, for example, has the same potential as the rest of the surface and is heated directly (cathode filament) or indirectly (cathode plate), so that electrons are only emitted from the cathode element.
  • a useful beam of X-rays emerges from the microfocus X-ray tube at an angle unequal to 0 ° to the central axis running in the center of the passage channel.
  • the target element can be arranged, for example, at an angle not equal to 90 ° to the central axis. A further reduction in focus can be achieved if the useful beam emerges at an angle unequal to 90 ° to the surface of the target element.
  • the anode body or the anode layer have good thermal conductivity. It is also important that the surface within the passage is as smooth as possible, i.e. that the arithmetic roughness is as low as possible. If the surface is not smooth enough, the electrons scattered by the surface can be reabsorbed.
  • the object is also achieved by an x-ray device with an x-ray tube according to the invention. Due to the aforementioned properties and The x-ray tube according to the invention or the x-ray device are particularly suitable for checking electrical contact points, in particular in the case of integrated circuits.
  • Fig. 1 denotes an electron source, which consists of a cathode body 2 and a cathode filament 3, usually a tungsten wire.
  • the electrons 4 are accelerated towards the anode body 5 due to the voltage of approximately 60 to 200 kV between the anode body 5 and the cathode filament 3.
  • the anode body 5 has a conical passage channel 9, in the inlet opening 17 of which the electrons enter and through which the electrons 4 can fly from the electron source 1 to the target element 6, which is located at the narrowed outlet opening 13 of the passage channel 9.
  • X-ray radiation 11 Upon impact of the electrons 4 on the target element 6, X-ray radiation 11 is generated, which can exit the X-ray tube through the target carrier 7 at an angle not equal to 0 ° to the perpendicular central axis 12.
  • the anode block 8 surrounding the anode body 5 can be also enclose the X-ray tube below the target carrier 7 and only have a radiation exit window where X-radiation is to be diverted as useful radiation.
  • An anode layer 10 which consists of a material with high thermal conductivity, preferably copper, gold or silver, is applied to the surface of the anode body 5 in the interior of the passage channel 9.
  • the anode body 5 consists here, for example, of copper.
  • the electrons 4, which enter the passage channel 9 but do not directly hit the target element 6, either penetrate into the anode layer 10 or are reflected on this anode layer 10, i.e. scattered elastically ( without loss of energy). The smaller the angle between the trajectory of the electron and the surface of the anode layer 10, the greater the probability that an electron is reflected on the surface.
  • the total opening angle of the passage channel must be as small as possible with an electron beam 4 with electron beams parallel to the central axis 12.
  • the diameter of the passage 9 at the widest point at the inlet opening is approximately 1.5 mm, while the diameter at the outlet opening 13 is approximately 10 to 20 ⁇ m (or less).
  • the total opening angle is approximately 1.7 °.
  • the surface of the anode layer 10 is necessary for the surface of the anode layer 10 to be as smooth as possible, that is to say to have a very low arithmetic mean roughness. If the surface were too rough, the electrons in the anode layer 10 would be scattered inelastically with loss of energy instead of being reflected.
  • the target element 6, which is designed here as a layer of a few ⁇ m thick made of a material with a high atomic number Z, preferably gold, is firmly attached to a target carrier 7, for example vapor-deposited.
  • the target carrier 7 consists of a material with high thermal conductivity, for example diamond, in order to dissipate the heat generated during operation of the X-ray tube in the target element 6.
  • the anode body 5 is enclosed by an anode block 8 made of steel and is configured essentially rotationally symmetrically about the central axis 12, which runs vertically in FIG. 1 and through the cathode heating wire 3.
  • the passage channel 9 is designed to be rotationally symmetrical about the central axis 12.
  • the surface of the anode layer 10 should have an arithmetic mean roughness value of less than 0.1 ⁇ m.
  • a desirable upper limit is given by the mean free path of an electron in matter, which also depends on the type of material.
  • the mean free path length of an electron is 0.01 ⁇ m at a voltage of 100 kV. A surface with such a low average roughness value is desirable, but can only be produced with great effort.
  • the arrangement shown in FIG. 1 can also be designed such that the electrons 4 arrive in the passage channel 9 from a direction that does not exactly correspond to the vertical 12.
  • the passage 9 does not necessarily have to be rotationally symmetrical about this vertical 12.
  • the angle of incidence at which the electrons 4 strike the anode layer 10 is as small as possible.
  • the X-ray radiation 11 emerges vertically downwards (along the axis 12) or that a reflection target is used so that the X-ray radiation 11 emerges laterally from the tube.
  • the target carrier 15 here consists of a material with a low atomic number Z, for example of beryllium, aluminum, diamond or carbon, and is designed as a thin plate with a thickness of approximately 500 ⁇ m. Symmetrical to the vertical axis 12, the target carrier 15 has a conical recess 16 in which a target layer 14 is applied to the surface.
  • the target layer 14 which consists of a material with a high atomic number Z, for example gold or molybdenum, serves here as a transmission target for the generation of X-rays 11, which arise when the electrons strike and exit the target carrier 15 downwards in an angular range of approximately 30 ° .
  • a shield 18, for example lead plates, is arranged on the underside of the target carrier 15, which only allows X-rays 11 to pass in this angular range.
  • Cooling can take place here, for example, by means of a coolant channel in the anode body 5 that extends in a ring around the passage channel 9.
  • a coolant channel in the anode body 5 that extends in a ring around the passage channel 9.
  • one or more coolant channels could be attached to the underside of the target carrier 15.
  • the entire target carrier 15 including the target layer 14 consists of material with a high atomic number Z.
  • the schematic diagram in FIG. 3 shows a further embodiment of a microfocus X-ray tube according to the invention.
  • the electron source here consists of a cathode filament 25, which is arranged in a circular arc around an electron focusing point 36 on the surface of the target element 31.
  • the anode body 26 is arranged in a ring between the target element 31 and the cathode filament 25.
  • the target element 31 is firmly attached in a target carrier 30.
  • the anode body 26 has a plurality of passage channels 27, 28, 29 which are rectangular in cross section and narrow towards the target element 31.
  • electrons can either get directly through these passage channels 27, 28, 29 from the cathode filament 25 to the target element 31 (electron path 34) or can be scattered on the inside of a passage channel 27, 28, 29 to the target 31 (electron path 35).
  • Some of the electrons (electron path 33) will also strike the outer surface of the anode body 26 and generate X-rays there, which, however, is absorbed in the anode body 26 due to the high atomic number of the anode material.
  • a diaphragm 32 Between the anode body 26 and the target element 31 there is a diaphragm 32 with a bore directly above the electron focusing point 36, which shields the X-rays generated by electrons in the anode body 26 from the target element 31.
  • a typical value for the radius of the cathode filament 25 is 50 mm.
  • the outer radius of the anode body 26 is typically 25 mm and the inner radius 10 mm.
  • a passage channel 27, 28, 29 on the outer edge of the anode body 26 has a height of 100 ⁇ m and a width of 100 ⁇ m.
  • the cross section has a height of 100 ⁇ m and a width of 60 ⁇ m. This results in a passage 27, 28, 29 a total opening angle of approximately 0.15 °.
  • the cathode filament 25 and the anode body 26 can be arranged in any angular range up to 180 ° around the electron focusing point 36. In practical use, an angular range of approximately 60 ° is sufficient, since otherwise the anode would take up too large dimensions. It is also irrelevant to the invention whether the anode body has two or more passage channels.
  • the target element 31 is shown enlarged again in FIG. 4.
  • a carrier layer 37 made of diamond a gold layer 38 is applied, in which the X-rays are generated when the electrons strike.
  • a further diamond layer 39 with an opening directly above the conical recess 40 in the gold layer 38 and the diamond layer 37.
  • the diamond layer 39 prevents electrons from striking the outside of the gold layer 38 and generating X-rays there.
  • the target carrier 15 shown in FIG. 2 could also be used.
  • FIG. 5 shows a further embodiment of an X-ray tube according to the invention.
  • the electron source is designated
  • the contact element unit which contains for example the voltage connection for the electron source.
  • 43 designates the anode body, which has an electron collimator 45 with the passage channel 44.
  • the target element 46 from which the X-ray radiation 47 emerges downwards, is again located at the exit opening of the passage channel.
  • the arrangement shown is enclosed in a vacuum-tight manner by the tube housing 49.
  • the anode body 43 has a curved surface 430, which here is designed as part of a spherical surface approximately hemispherical, and is formed by a layer made of copper, for example.
  • the center of the sphere is located on the axis of symmetry 48 approximately at the electron focusing point 50, at which the electrons hit the target element 46 after passing through the passage channel 44.
  • a top view of the anode body 43 is shown in FIG. 6. It can also be seen there that the passage channel 44 designed as a narrowing gap 51 has a circular cross section.
  • the surface 410 facing the anode body 43 of the electron source 41 which is preferably made of copper, is likewise designed approximately as part of a spherical surface. Their radius, which is approximately 20 mm, is smaller in the embodiment shown than the outer radius of the anode body 43, which is approximately 40 mm. This is necessary to compensate for the divergence of the electric field due to the opening of the passage 44 in the surface 430.
  • FIG. 7 shows a plan view from below of the electron source 41, in which the centrally arranged cathode plate 52 made of tungsten can also be seen. This is indirectly heated by a heating element, not shown, so that electrons are emitted therefrom.
  • the passage channel 44 has an overall opening angle of approximately 4 °. With such an embodiment, a focus with a diameter of approximately 30 ⁇ m is achieved, the X-ray tube being operated at 120 kV. Most of the X-rays generated are X-ray brake radiation and only to a small extent (approx.
  • the hole in the surface 430 of the anode body 43 required for the passage channel 44 could also be covered by an electrically conductive film through which the electrons can fly.
  • the electrical field between the electron source 41 and the anode body 43 then does not have such a strong divergence, and the radius of the curved surface 410 of the electron source can be chosen to be larger than the radius of the surface 430 of the anode body 43.
  • the embodiment shown in FIG. 5 is particularly advantageous because the requirements such as small size of the total opening angle, low surface roughness in the passage channel and high atomic number of the surface material of the passage channel are not as strict as, for example, in the embodiment shown in FIG. 1.
  • microfocus X-ray tube With the microfocus X-ray tube according to the invention, an electron beam with a high electron density and a small cross section is generated on the target element, the cross section being determined mechanically. A very small focus can thus be achieved on the target element, the focus here being dependent on the mechanical dimensions and not on the electrical voltage, as is the case with conventional X-ray tubes.
  • the x-ray yield based on the focus size is here significantly increased compared to conventional X-ray tubes.
  • the efficiency output power of the X-ray radiation based on the input power of the X-ray tube) is also significantly higher than with conventional X-ray tubes.

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  • X-Ray Techniques (AREA)
EP96203254A 1995-11-28 1996-11-20 Tube à rayons X, notamment tube à rayons X à microfoyer Ceased EP0777255A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19544203 1995-11-28
DE19544203A DE19544203A1 (de) 1995-11-28 1995-11-28 Röntgenröhre, insbesondere Mikrofokusröntgenröhre

Publications (1)

Publication Number Publication Date
EP0777255A1 true EP0777255A1 (fr) 1997-06-04

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EP96203254A Ceased EP0777255A1 (fr) 1995-11-28 1996-11-20 Tube à rayons X, notamment tube à rayons X à microfoyer

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EP (1) EP0777255A1 (fr)
JP (1) JPH09171788A (fr)
DE (1) DE19544203A1 (fr)

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EP1028449A1 (fr) * 1999-02-12 2000-08-16 Philips Corporate Intellectual Property GmbH Tube a rayons x
EP1418610A1 (fr) * 2002-11-06 2004-05-12 feinfocus Röntgen-Systeme GmbH Tube à rayons X à microfoyer
EP1580787A2 (fr) * 2004-03-26 2005-09-28 Shimadzu Corporation dispositif generateur des rayons X
EP1599883A2 (fr) * 2003-02-21 2005-11-30 Xoft Microtube, Inc. Ensemble d'anode pour tube a rayons x
WO2011105035A3 (fr) * 2010-02-23 2012-02-02 Canon Kabushiki Kaisha Appareil de production de rayons radioactifs et système d'imagerie par rayons radioactifs
WO2013032014A1 (fr) * 2011-08-31 2013-03-07 Canon Kabushiki Kaisha Appareil de génération de rayons x et appareil radiographique à rayons x
US9570264B2 (en) 2011-08-31 2017-02-14 Canon Kabushiki Kaisha X-ray generator and X-ray imaging apparatus
US9595415B2 (en) 2011-08-31 2017-03-14 Canon Kabushiki Kaisha X-ray generator and X-ray imaging apparatus
EP4451308A1 (fr) * 2023-04-18 2024-10-23 Excillum AB Atténuation de rayonnement secondaire

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GB0525593D0 (en) 2005-12-16 2006-01-25 Cxr Ltd X-ray tomography inspection systems
US8094784B2 (en) 2003-04-25 2012-01-10 Rapiscan Systems, Inc. X-ray sources
US9208988B2 (en) 2005-10-25 2015-12-08 Rapiscan Systems, Inc. Graphite backscattered electron shield for use in an X-ray tube
US8243876B2 (en) 2003-04-25 2012-08-14 Rapiscan Systems, Inc. X-ray scanners
US10483077B2 (en) 2003-04-25 2019-11-19 Rapiscan Systems, Inc. X-ray sources having reduced electron scattering
GB0812864D0 (en) 2008-07-15 2008-08-20 Cxr Ltd Coolign anode
JP4601994B2 (ja) * 2004-05-18 2010-12-22 株式会社東芝 Ｘ線源及びその陽極
US9046465B2 (en) 2011-02-24 2015-06-02 Rapiscan Systems, Inc. Optimization of the source firing pattern for X-ray scanning systems
DE102006062454A1 (de) * 2006-12-28 2008-07-03 Comet Gmbh Mikrofocus-Röntgenröhre
GB0816823D0 (en) 2008-09-13 2008-10-22 Cxr Ltd X-ray tubes
GB0901338D0 (en) 2009-01-28 2009-03-11 Cxr Ltd X-Ray tube electron sources
DE102010030713B4 (de) * 2010-02-17 2018-05-03 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Röntgenquelle zur Erzeugung von Röntgenstrahlen mit einem Hohlkörpertarget und ein Verfahren zur Erzeugung von Röntgenstrahlung in einem Hohlkörpertarget
JP2013051165A (ja) 2011-08-31 2013-03-14 Canon Inc 透過型ｘ線発生装置
JP5871528B2 (ja) 2011-08-31 2016-03-01 キヤノン株式会社 透過型ｘ線発生装置及びそれを用いたｘ線撮影装置
US9368316B2 (en) 2013-09-03 2016-06-14 Electronics And Telecommunications Research Institute X-ray tube having anode electrode
KR102120400B1 (ko) * 2014-03-26 2020-06-09 한국전자통신연구원 타깃 유닛 및 그를 구비하는 엑스 선 튜브
DE102017120285B4 (de) * 2017-09-04 2021-07-01 Comet Ag Bauteil oder Elektronenfanghülse für eine Röntgenröhre und Röntgenröhre mit einer solchen Vorrichtung
WO2020052773A1 (fr) 2018-09-14 2020-03-19 Yxlon International Gmbh Composant ou douille d'interception d'électrons pour un tube à rayons x et tube à rayons x comprenant un dispositif de ce type

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1717309A (en) * 1924-07-23 1929-06-11 Philips Nv X-ray tube
FR54902E (fr) * 1946-02-26 1951-04-30 France Etat Tube à rayons x de grande brillance
FR1367866A (fr) * 1963-08-14 1964-07-24 Bbc Brown Boveri & Cie Collimateur pour des faisceaux d'électrons rapides
DE2004359A1 (fr) 1969-01-30 1970-08-06
GB1249341A (en) * 1968-10-08 1971-10-13 Rigaku Denki Company Ltd Improvements in or relating to x-ray tubes
US3668454A (en) * 1969-08-05 1972-06-06 Rigaku Denki Co Ltd Fine focus x-ray tube
FR2393416A1 (fr) * 1977-06-02 1978-12-29 Philips Corp Tube de rontgen a anode rotative
DE3139899A1 (de) * 1981-10-07 1983-04-21 Schöfer, Hans, Dipl.-Phys., 8011 Zorneding Roentgenroehre zur erzeugung sehr hoher dosen in kleinen volumen
EP0292055A2 (fr) * 1987-05-18 1988-11-23 Philips Patentverwaltung GmbH Source de rayonnement pour la génération de rayons X essentiellement monochromatiques
EP0432568A2 (fr) * 1989-12-11 1991-06-19 General Electric Company Anode pour tube à rayons X et tube l'utilisant

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1717309A (en) * 1924-07-23 1929-06-11 Philips Nv X-ray tube
FR54902E (fr) * 1946-02-26 1951-04-30 France Etat Tube à rayons x de grande brillance
FR1367866A (fr) * 1963-08-14 1964-07-24 Bbc Brown Boveri & Cie Collimateur pour des faisceaux d'électrons rapides
GB1249341A (en) * 1968-10-08 1971-10-13 Rigaku Denki Company Ltd Improvements in or relating to x-ray tubes
DE2004359A1 (fr) 1969-01-30 1970-08-06
US3668454A (en) * 1969-08-05 1972-06-06 Rigaku Denki Co Ltd Fine focus x-ray tube
FR2393416A1 (fr) * 1977-06-02 1978-12-29 Philips Corp Tube de rontgen a anode rotative
DE3139899A1 (de) * 1981-10-07 1983-04-21 Schöfer, Hans, Dipl.-Phys., 8011 Zorneding Roentgenroehre zur erzeugung sehr hoher dosen in kleinen volumen
EP0292055A2 (fr) * 1987-05-18 1988-11-23 Philips Patentverwaltung GmbH Source de rayonnement pour la génération de rayons X essentiellement monochromatiques
EP0432568A2 (fr) * 1989-12-11 1991-06-19 General Electric Company Anode pour tube à rayons X et tube l'utilisant

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6359968B1 (en) 1999-02-12 2002-03-19 U.S. Philips Corporation X-ray tube capable of generating and focusing beam on a target
EP1028449A1 (fr) * 1999-02-12 2000-08-16 Philips Corporate Intellectual Property GmbH Tube a rayons x
EP1418610A1 (fr) * 2002-11-06 2004-05-12 feinfocus Röntgen-Systeme GmbH Tube à rayons X à microfoyer
US7050543B2 (en) 2002-11-06 2006-05-23 Feinfocus Röntgen-Systeme GmbH Microfocus X-ray tube
EP1599883A4 (fr) * 2003-02-21 2010-03-24 Xoft Microtube Inc Ensemble d'anode pour tube a rayons x
EP1599883A2 (fr) * 2003-02-21 2005-11-30 Xoft Microtube, Inc. Ensemble d'anode pour tube a rayons x
EP1580787A2 (fr) * 2004-03-26 2005-09-28 Shimadzu Corporation dispositif generateur des rayons X
EP1580787A3 (fr) * 2004-03-26 2010-11-24 Shimadzu Corporation dispositif generateur des rayons X
WO2011105035A3 (fr) * 2010-02-23 2012-02-02 Canon Kabushiki Kaisha Appareil de production de rayons radioactifs et système d'imagerie par rayons radioactifs
US20120318987A1 (en) * 2010-02-23 2012-12-20 Canon Kabushiki Kaisha Radioactive ray generating apparatus and radioactive ray imaging system
US9208987B2 (en) * 2010-02-23 2015-12-08 Canon Kabushiki Kaisha Radioactive ray generating apparatus and radioactive ray imaging system
WO2013032014A1 (fr) * 2011-08-31 2013-03-07 Canon Kabushiki Kaisha Appareil de génération de rayons x et appareil radiographique à rayons x
US9570264B2 (en) 2011-08-31 2017-02-14 Canon Kabushiki Kaisha X-ray generator and X-ray imaging apparatus
US9595415B2 (en) 2011-08-31 2017-03-14 Canon Kabushiki Kaisha X-ray generator and X-ray imaging apparatus
EP4451308A1 (fr) * 2023-04-18 2024-10-23 Excillum AB Atténuation de rayonnement secondaire

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JPH09171788A (ja) 1997-06-30

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