EP0432568A2 - Anode pour tube à rayons X et tube l'utilisant - Google Patents
Anode pour tube à rayons X et tube l'utilisant Download PDFInfo
- Publication number
- EP0432568A2 EP0432568A2 EP90122630A EP90122630A EP0432568A2 EP 0432568 A2 EP0432568 A2 EP 0432568A2 EP 90122630 A EP90122630 A EP 90122630A EP 90122630 A EP90122630 A EP 90122630A EP 0432568 A2 EP0432568 A2 EP 0432568A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- anode
- layer
- tube
- ray
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/122—Cooling of the window
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/18—Windows, e.g. for X-ray transmission
- H01J2235/183—Multi-layer structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
Definitions
- the present invention relates to X-ray tube anodes, and more particularly, to such anodes that efficiently produce a high output hard X-ray flux without suffering thermal damage.
- X-ray imaging performance is limited in two fundamental ways by the properties of prior art X-ray tube anodes.
- the total X-ray flux output is limited by the ability of the anode to dissipate heat, and thus the image signal to raise ratio or contrast may not be as high as desired.
- the spectrum of the emitted X-rays contains too few of high energy (hard) X-ray photons, which are required for imaging of thick or very dense objects.
- the first problem is due to the fact that a large fraction (typically over 99%) of the energy in the electron beam in a conventional X-ray tube is converted to heat, and only a small fraction is converted to X-rays.
- an X-ray tube anode comprising a first means for producing X-rays in response to incident electrons; and a second means, contacting said first means, for supporting said first means and conducting heat away from said first means.
- An X-ray tube in accordance with the invention comprises an envelope having first and second ends, an anode disposed proximate said second end, said anode having a first means for producing X-rays in response to incident electrons; and a second means, contacting said first means, for supporting said first means and conducting heat away from said first means.
- Figure 1 is a cross-sectional view of an X-ray tube having an anode in accordance with the invention.
- Figures 2(a) and 2(b) are graphs of heat and X-ray production, respectively, as a function of anode thickness.
- the Figure shows a microfocus X-ray tube, generally designated 10, having an envelope 12, typically made of grounded electrically conductive metal with sufficient strength and thickness to withstand a vacuum on the inside thereof and ambient pressure on the outside thereof.
- envelope 12 typically made of grounded electrically conductive metal with sufficient strength and thickness to withstand a vacuum on the inside thereof and ambient pressure on the outside thereof.
- a grounded envelope or coating is used to provide a return path for stray electrons and for safety.
- Disposed at a first end 14 of envelope 12 is a cathode 16 coupled to an AC source 18, which typically supplies two to three volts at about one ampere to heat filament cathode 16 so that it will emit electrons.
- a DC supply could also be used for source 18.
- the leads connecting cathode 16 to source 18 are insulated from envelope 12 to prevent a short circuit, as are all other leads extending completely through envelope 12.
- the emitted electrons are provided by a DC source 20 having its positive lead grounded and its negative terminal connected to one of the leads of cathode 16.
- Source 20 typically provides about 100 at about 1 ma.
- cathode 16 is shown as a directly heated cathode, an indirectly heated one can be used; however, the electrons emitted from a directly heated cathode can be more tightly focused.
- the electron beam 20 emitted from cathode 16 passes through an aperture 22 of a control grid 24 disposed proximate cathode 16 and coupled to the negative terminal of DC source 26 having a grounded positive terminal.
- Source 26 provides about two to three KV and is adjustable so as to provide control of the anode-cathode current and thus the amount of X-rays.
- the electron beam goes through a focusing means or electron lens, e.g., a solenoidal coil 27, coupled to a DC lens power supply 28 that provides current to coil 27.
- the amount of current is determined by potentiometer 30, which therefore controls the focusing and spot size on the anode.
- an electromagnetic focusing means has been shown and described, an electrostatic focusing means can be used.
- Electron beam 20 finally impinges (is incident) upon a grounded electrically conducting first layer 31a of an anode 32 (described in detail below), which is disposed proximate a second end 33 of envelope 12.
- anode 32 further comprises a second layer 31b that contacts and supports first layer 31a and also conducts heat away therefrom.
- Second layer 31b also contacts a heat sink 38 that conducts heat away from layer 31a and dissipates it.
- Heat sink 38 has a void 39 in communication with second layer 31b.
- a portion of the kinetic energy of beam 20 is converted into X-rays 34a and 34b at layer 31a.
- X-rays 34a exit tube 10 by way of a normal mode X-ray window 36a disposed in envelope 12 proximate layer 31a.
- X-rays 34b also go through second layer 31b of anode 32 and then pass through a transmission mode X-ray window 36b disposed in heat sink 38 opposing second layer 31b.
- Windows 36 are typically made of Be, Al, etc.
- Some of the electrons in beam 20 do not have their kinetic energy converted to heat, light or X-ray photons.
- these uncoverted electrons 40 are trapped in a beam dump 42 with the aid of a magnetic field. If no dump 42 is used, then they will be collected by window 36b and the upper interior surface of heat sink 38.
- X-rays 34 are then incident upon objects (not shown) to be imaged.
- An X-ray detector (not shown), e.g., scintillator material coupled to a linear photodiode array, detects the X-rays that are transmitted through the object and provides a signal to a computer (not shown) to perform tomography.
- a fluoroscope or X-ray sensitive film can be used.
- first layer 31a comprises a high atomic number and high density material, e.g., Nb, Hf, Ta, Re, Os, Ir, Pt, Au, W, Mo, U, etc., so that a high cross-section is presented to the incident electrons 20.
- a high atomic number and high density material e.g., Nb, Hf, Ta, Re, Os, Ir, Pt, Au, W, Mo, U, etc.
- the thickness of layer 31a is less than to the stopping distance of the electrons 20 in layer 31a, which distance will vary with the material used in layer 31a and the kinetic energy of electrons 20.
- a typical value for the thickness of layer 31a is between about 1 to 15 ⁇ m.
- first layer 31a results in a greater hard X-ray generation efficiency, and also results in the production of less waste heat.
- second layer 31b is preferably made of a low density, low atomic number, and high thermal conductivity material, e.g., Be, Al, and preferably diamond, the latter either polycrystalline or monocrystalline, so that heat is conducted away from the very small impact area of beam 20 on first layer 31a to heat sink 38.
- the low density and low atomic number results in layer 31b efficiently transmitting X-rays 34b.
- second layer 31b has a typical stopping distance of 45 ⁇ m for 100 KEV electrons. This is a typical maximum thickness for layer 31b in order to avoid excessive heat generation therein due to the kinetic energy of the unconverted electrons 40 passing therethrough, although greater thicknesses can be used.
- Second layer 31b if made of diamond, can be formed on first layer 31a by chemical vapor deposition. Other materials can be deposited by such known techniques as electroplating, sputtering or electroless deposition. If it is not desired to use transmission mode X-rays 34b for imaging, then second layer 31b need not have a low density or a low atomic number. In such a case, other high thermal conductivity materials, e.g., Cu and Ag, can be added to the list of materials used for second layer 31b.
- high thermal conductivity materials e.g., Cu and Ag
- This anode design offers enhanced performance because it operates in the most favorable portions of the heat production and X-ray production as a function of the thickness of layer 31a relationships. These relationships are respectively illustrated in Figures 2(a) and 2(b).
- X-rays are most efficiently generated by a monochromic electron beam 20 of high energy. This is the characteristic of the tube's electron beam 20 when it first contacts the X-ray generating anode layer 31a. As electron beam 20 penetrates into the material of layer 31a, scattering and absorption processes lower the average energy of beam 20 and change it from a monoenergetic beam to a spectrum of electron energies, all lower than the incident energy at the lower surface of layer 31a as viewed in Figure 1. This less energetic beam is a less efficient generator of X-rays. Thus, the largest quantity of useful, hard X-rays are generated near the lower surface of layer 31a.
- the loss of average beam 20 energy with thickness of layer 31a has a similar effect on heat production.
- many electrons penetrate the anode layer 31a without scattering.
- the probability of stopping and depositing all of its remaining energy increases.
- the heat production as a function of the thickness of layer 31a reaches a maximum 48 above the lower surface of the anode layer 31a.
- This invention preferably uses anode layers 31a which are thin compared to the average stopping distance of the electron beam in the material of the anode layer 31a.
- These thin film anodes illustrated as the dotted lines 50 in Figures 2(a) and 2(b), interact with the electron beam 20 only in the region where the best achievable X-ray output to heat production ratio is in effect. This accounts for the performance advantage of this design.
- the present invention can also be used with a conventional (non-microfocus) X-ray tube.
- it can be used with a rotating anode X-ray tube, wherein the rotating anode comprises a heat sink made of, e.g., Cu, with bevelled edges.
- Anode 32 is normally disposed only on the bevelled edges.
Landscapes
- X-Ray Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US44838489A | 1989-12-11 | 1989-12-11 | |
US448384 | 1989-12-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0432568A2 true EP0432568A2 (fr) | 1991-06-19 |
EP0432568A3 EP0432568A3 (en) | 1991-08-28 |
Family
ID=23780102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19900122630 Withdrawn EP0432568A3 (en) | 1989-12-11 | 1990-11-27 | X ray tube anode and tube having same |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0432568A3 (fr) |
JP (1) | JPH04144045A (fr) |
Cited By (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0553912A1 (fr) * | 1992-01-27 | 1993-08-04 | Koninklijke Philips Electronics N.V. | Tube à rayons x dissipation thermique améliorée |
EP0584871A1 (fr) * | 1992-08-27 | 1994-03-02 | Dagang Dr. Tan | Tube à rayons X ayant une anode en mode de transmission |
WO1995006952A1 (fr) * | 1993-09-02 | 1995-03-09 | Medical Research Council | Tubes a rayons x |
EP0777255A1 (fr) * | 1995-11-28 | 1997-06-04 | Philips Patentverwaltung GmbH | Tube à rayons X, notamment tube à rayons X à microfoyer |
EP0788136A1 (fr) * | 1996-01-31 | 1997-08-06 | Physical Electronics, Inc. | Assemblage d'anode pour la génération de rayons X et instrument pourvu d'un tel assemblage d'anode |
US5657365A (en) * | 1994-08-20 | 1997-08-12 | Sumitomo Electric Industries, Ltd. | X-ray generation apparatus |
US5878110A (en) * | 1994-08-20 | 1999-03-02 | Sumitomo Electric Industries, Ltd. | X-ray generation apparatus |
EP0974149A1 (fr) * | 1997-04-08 | 2000-01-26 | X-Ray Technologies Pty Ltd | Imagerie radiologique a haute resolution d'objets tres petits |
WO2000057449A1 (fr) * | 1999-03-23 | 2000-09-28 | Medtronic Ave Inc. | Dispositif a rayons x et son procede de fabrication |
WO2001008195A1 (fr) * | 1999-07-26 | 2001-02-01 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Anode a rayons x et procede de fabrication de cette anode |
WO2004053919A2 (fr) * | 2002-12-11 | 2004-06-24 | Koninklijke Philips Electronics N.V. | Source de rayons x permettant de produire des rayons x monochromatiques |
WO2004097886A2 (fr) * | 2003-04-25 | 2004-11-11 | Cxr Limited | Tubes a rayons x |
EP1727185A1 (fr) * | 2005-05-26 | 2006-11-29 | Panalytical B.V. | Anode pour tube à rayons X |
US7186022B2 (en) * | 2002-01-31 | 2007-03-06 | The Johns Hopkins University | X-ray source and method for more efficiently producing selectable x-ray frequencies |
US7298826B2 (en) | 2002-05-09 | 2007-11-20 | Hamamatsu Photonics K.K. | X-ray generator |
US7349525B2 (en) | 2003-04-25 | 2008-03-25 | Rapiscan Systems, Inc. | X-ray sources |
US7471769B2 (en) | 2001-06-21 | 2008-12-30 | Koninklijke Philips Electronics N.V. | X-ray source provided with a liquid metal target |
US7512215B2 (en) | 2003-04-25 | 2009-03-31 | Rapiscan Systems, Inc. | X-ray tube electron sources |
GB2453570A (en) * | 2007-10-11 | 2009-04-15 | Kratos Analytical Ltd | Electrode for x-ray apparatus |
US7564939B2 (en) | 2003-04-25 | 2009-07-21 | Rapiscan Systems, Inc. | Control means for heat load in X-ray scanning apparatus |
DE102008007413A1 (de) | 2008-02-04 | 2009-08-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Röntgentarget |
EP2239757A1 (fr) * | 2008-01-17 | 2010-10-13 | Kabushiki Kaisha Toshiba | Tube à rayons x |
US7929663B2 (en) | 2003-04-25 | 2011-04-19 | Rapiscan Systems, Inc. | X-ray monitoring |
US7949101B2 (en) | 2005-12-16 | 2011-05-24 | Rapiscan Systems, Inc. | X-ray scanners and X-ray sources therefor |
US8085897B2 (en) | 2003-04-25 | 2011-12-27 | Rapiscan Systems, Inc. | X-ray scanning system |
US8094784B2 (en) | 2003-04-25 | 2012-01-10 | Rapiscan Systems, Inc. | X-ray sources |
US8135110B2 (en) | 2005-12-16 | 2012-03-13 | Rapiscan Systems, Inc. | X-ray tomography inspection systems |
US8223919B2 (en) | 2003-04-25 | 2012-07-17 | Rapiscan Systems, Inc. | X-ray tomographic inspection systems for the identification of specific target items |
US8243876B2 (en) | 2003-04-25 | 2012-08-14 | Rapiscan Systems, Inc. | X-ray scanners |
WO2013007484A1 (fr) * | 2011-07-14 | 2013-01-17 | Siemens Aktiengesellschaft | Source de rayons x monochromatique |
US8451974B2 (en) | 2003-04-25 | 2013-05-28 | Rapiscan Systems, Inc. | X-ray tomographic inspection system for the identification of specific target items |
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JP5812700B2 (ja) | 2011-06-07 | 2015-11-17 | キヤノン株式会社 | X線放出ターゲット、x線発生管およびx線発生装置 |
DE102013208103A1 (de) * | 2013-05-03 | 2014-11-06 | Siemens Aktiengesellschaft | Röntgenquelle und bildgebendes System |
JP6326758B2 (ja) | 2013-10-16 | 2018-05-23 | 株式会社島津製作所 | X線発生装置 |
JP6849518B2 (ja) | 2017-04-28 | 2021-03-24 | 浜松ホトニクス株式会社 | X線管及びx線発生装置 |
WO2024029474A1 (fr) * | 2022-08-05 | 2024-02-08 | 株式会社島津製作所 | Dispositif d'imagerie à rayons x et tubes à rayons x |
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GB1249341A (en) * | 1968-10-08 | 1971-10-13 | Rigaku Denki Company Ltd | Improvements in or relating to x-ray tubes |
US3867637A (en) * | 1973-09-04 | 1975-02-18 | Raytheon Co | Extended monochromatic x-ray source |
FR2271659A1 (fr) * | 1974-05-15 | 1975-12-12 | Philips Nv | |
EP0275592A1 (fr) * | 1986-12-23 | 1988-07-27 | Koninklijke Philips Electronics N.V. | Tube à rayon X à foyer annulaire |
EP0292055A2 (fr) * | 1987-05-18 | 1988-11-23 | Philips Patentverwaltung GmbH | Source de rayonnement pour la génération de rayons X essentiellement monochromatiques |
EP0319912A2 (fr) * | 1987-12-07 | 1989-06-14 | Nanodynamics, Incorporated | Procédé et dispositif pour analyser des matériaux avec des rayons X |
-
1990
- 1990-11-27 EP EP19900122630 patent/EP0432568A3/en not_active Withdrawn
- 1990-12-10 JP JP2418519A patent/JPH04144045A/ja not_active Withdrawn
Patent Citations (7)
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---|---|---|---|---|
US3239706A (en) * | 1961-04-17 | 1966-03-08 | High Voltage Engineering Corp | X-ray target |
GB1249341A (en) * | 1968-10-08 | 1971-10-13 | Rigaku Denki Company Ltd | Improvements in or relating to x-ray tubes |
US3867637A (en) * | 1973-09-04 | 1975-02-18 | Raytheon Co | Extended monochromatic x-ray source |
FR2271659A1 (fr) * | 1974-05-15 | 1975-12-12 | Philips Nv | |
EP0275592A1 (fr) * | 1986-12-23 | 1988-07-27 | Koninklijke Philips Electronics N.V. | Tube à rayon X à foyer annulaire |
EP0292055A2 (fr) * | 1987-05-18 | 1988-11-23 | Philips Patentverwaltung GmbH | Source de rayonnement pour la génération de rayons X essentiellement monochromatiques |
EP0319912A2 (fr) * | 1987-12-07 | 1989-06-14 | Nanodynamics, Incorporated | Procédé et dispositif pour analyser des matériaux avec des rayons X |
Cited By (119)
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EP0432568A3 (en) | 1991-08-28 |
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