EP1418610A1 - Tube à rayons X à microfoyer - Google Patents

Tube à rayons X à microfoyer Download PDF

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Publication number
EP1418610A1
EP1418610A1 EP03024511A EP03024511A EP1418610A1 EP 1418610 A1 EP1418610 A1 EP 1418610A1 EP 03024511 A EP03024511 A EP 03024511A EP 03024511 A EP03024511 A EP 03024511A EP 1418610 A1 EP1418610 A1 EP 1418610A1
Authority
EP
European Patent Office
Prior art keywords
target
ray tube
microfocus
head
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP03024511A
Other languages
German (de)
English (en)
Other versions
EP1418610B1 (fr
Inventor
Udo Emil Dr. Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
comet GmbH
Original Assignee
Feinfocus Rontgen-Systeme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinfocus Rontgen-Systeme GmbH filed Critical Feinfocus Rontgen-Systeme GmbH
Publication of EP1418610A1 publication Critical patent/EP1418610A1/fr
Application granted granted Critical
Publication of EP1418610B1 publication Critical patent/EP1418610B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Definitions

  • the invention relates to a microfocus X-ray tube the type mentioned in the preamble of claim 1.
  • microfocus x-ray tubes are general known and are used for example for testing printed circuit boards used in the electronics industry.
  • the Known x-ray tubes have one when the X-ray tube facing an object to be examined Head on, on or in which a target is arranged, which are hit by high-energy accelerated electrons, so that x-rays in a generally known manner is produced.
  • the X-rays generated in this way is used in imaging techniques, for example Components or component arrangements on printed circuit boards to represent and the circuit boards on this Way to visually inspect.
  • Microfocus X-ray tubes are known, the in operation facing the object to be examined Head has a diameter of a few cm. to To achieve high magnification, it is necessary the focus and thus the head of the microfocus X-ray tube close enough to the component to be tested. This is only possible if on the test item Component there are no surveys against which the Head before reaching the required distance encounters.
  • the known X-ray tubes are therefore suitable primarily for testing flat components while they are for testing components with elevations, for example, printed circuit boards, only in limited Dimensions are suitable.
  • a disadvantage of such X-ray tubes is that that the rod anodes used are not very stable and are sensitive to mechanical damage. To prevent mechanical damage to the rod anode Prevent bumping into the component to be tested it is necessary to bring the rod anode closer to that carry out testing components under optical observation, which requires a lot of equipment and is therefore expensive. It also requires visual control of the advancement of the rod anode to the component to be tested a lot of time and causes high personnel costs.
  • the disadvantage is that when the head with its flat side to achieve an oblique radiation of a component to be tested is not parallel to a surface of the component, but inclined to this surface is brought up to the component, the There is a risk of being present on the surface Elevations of the head are not close enough to one the part of the component to be checked can.
  • the invention has for its object a Microfocus X-ray tube specifying an examination even jagged components is possible and the is robust in construction.
  • the invention solves the underlying problem in a surprisingly simple way in that the outer surface of the head towards its free end has a tapering cross-section. That way achieved that the head on the one hand at its free end has small dimensions, which in the sense of an investigation of jagged components is an advantage on the other hand, however, at its free end End at which the head with the main body of the x-ray tube connected, has a sufficiently large base, around the head insensitive to mechanical damage, for example when toasting a testing component.
  • the taper of the cross section the outer surface to the free end of the head it also allows the head to slant towards the surface to bring a component to this, so far is prevented as much as possible from the head from that free end distant areas of its outer surface abuts the surface of the component to be tested.
  • the head the X-ray tube even with oblique radiation of the component to be tested very close to the component to be tested Bring place of the component so that with the invention Microfocus X-ray tube very high magnification factors can be achieved.
  • According to the invention is under the head of the X-ray tube that when operating the microfocus x-ray tube Free end of the component to be examined X-ray tube understood.
  • microfocus x-ray tube according to the invention is robust in construction and insensitive to mechanical Damage, for example when bumping into a testing component. It is versatile and especially for testing printed circuit boards in the electronics industry suitable.
  • microfocus X-ray tube according to the invention is that they are simple and is inexpensive to manufacture.
  • the focal spot a diameter of ⁇ 200 ⁇ m, in particular ⁇ 10 ⁇ m hat.
  • the taper of the cross section of the outer surface the head can be formed in any suitable manner his.
  • the head on his free end like a pointed saddle roof be trained.
  • An advantageous further education the teaching of the invention provides that the outer surface essentially rotationally symmetrical is.
  • the outer surface expediently essentially conical trained in how this provides for further training. On this further simplifies the manufacture of the head.
  • the outer surface by one in the radiation direction of the X-rays collimator arranged in front of the target.
  • the At least the outer surface of the head in the direction of radiation in sections by a holder for the Target be formed.
  • the opening angle of the in substantially conical outer surface preferably less than 50 °. In this way, the head can also be used strong inclination to the surface of the component to be tested be introduced.
  • the head at least two in the radiation direction of the X-rays areas arranged one behind the other with different Opening angles of the conical outer surface on.
  • the head is in the direction of radiation the x-rays from cones with different Composed opening angles.
  • the target is expediently a transmission target, how this is provided for by further training.
  • a target according to the invention is in claim 11 specified.
  • Advantageous and practical training of the target according to the invention are in the subclaims 12 to 14 specified.
  • claim 15 is a collimator according to the invention specified for a target of a microfocus X-ray tube.
  • Advantageous and expedient further training of the Collimators according to the invention are in the subclaims 16 to 19 specified.
  • FIG. 1 shows a microfocus X-ray tube according to the invention 2 shown at its in operation the microfocus x-ray tube 2 a component to be tested, that in Fig. 1 by a dash-dotted line 4th is symbolized, facing end has a head 6, in the manner explained in more detail below a target is arranged.
  • the microfocus x-ray tube 2, hereinafter referred to briefly as an X-ray tube is also points in the drawing not recognizable arranged on a base body 3 of the X-ray tube 2 Means for accelerating electrons and for Alignment of the electrons on the target.
  • the structure To this extent, the x-ray tube 2 is general to the person skilled in the art is known and is therefore not explained in detail here.
  • the metal in this embodiment exists and has an outer surface 10, the cross section According to the invention to the free end of the Targets 8 tapered.
  • the outer surface is essentially rotationally symmetrical and conical and ends in a point 12.
  • the conical outer surface 10 of the target 8 has in this embodiment, an opening angle ⁇ of about 45 °, which however corresponds to the respective Requirements can be selected within wide limits.
  • the Target 8 is hollow in this embodiment and has one on its radial inner surface 14 thin coating 16 of tungsten on the in operation the X-ray tube 2 is subjected to accelerated electrons which releases X-rays becomes.
  • a bracket 18 is shown by means of the target 8 with the base body 3 of the X-ray tube 2 is connectable.
  • the bracket 18 has a tapered outer surface to the target 8 on.
  • the target 8 is connected to the holder 18, and for connecting the bracket 18 to the base body 3 means are not shown in the drawing.
  • the bracket 18 has a continuous central Recess 22 through which during operation the X-ray tube 2 electrons on the radial Hit the inside surface of the target 8.
  • the collimator 24 has a continuous one centric recess 26 through which the X-ray beam exits spatially limited.
  • the bracket 24 has a conical taper towards its free end Outer surface 28 while its radial inner surface 30 to the radial outer surface 10 of the target 8 is essentially complementary, such that the collimator 24 is essentially positive the target 8 can be placed.
  • FIG. 5 shows the head 6 of the X-ray tube 2 in the assembled state, in which the target 8 on the bracket 18th and the collimator 24 is placed on the target.
  • the collimator 24 is firmly connected to the holder 18, so that the target 8 is held firmly on the bracket 18 is.
  • the through the target 8 and the bracket 18th unit formed can be detachably with the base body 3 of the X-ray tube 2 are connected so that they can be used if necessary can be easily replaced.
  • the head 6 may be due to its tapering towards its free end Cross section inclined to the surface of the test Component 4 are brought up without the Head 6 abuts the surface of component 4 before one to achieve a high-magnification image required small distance of the head 6 from the surface of the component 4 is reached.
  • a dashed line Line 34 is a head of a conventional x-ray tube shown. It can be seen that the head of such conventional X-ray tube with an inclined Bring the head 6 to the surface of the component 4 would hit this surface before using the X-ray tube 2 according to the invention achievable and to achieve an image with high magnification required small distance of the head from the surface of component 4 is reached.
  • the X-ray tube 2 according to the invention enables thus an inclined approach of the head 6 up to an extremely short distance. Because the head 6 one at its end facing away from the free end larger diameter than at the free end the X-ray tube 2 according to the invention has one particularly stable construction. It therefore does not exist the risk that the head 6 when hitting bumps the component 4 to be tested is damaged, as this in known from the prior art, as a rod anode small diameter trained heads the case is.
  • the X-ray tube according to the invention is simple and inexpensive to manufacture.
  • collimator 24 is advantageous however not mandatory. If the collimator 24 is omitted, so forms with that shown in the drawing Embodiment the conical outer surface of the invention Targets 8 a conical outer surface of the Head 6.

Landscapes

  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Confectionery (AREA)
  • Paper (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
EP03024511A 2002-11-06 2003-10-24 Tube à rayons X à microfoyer Expired - Lifetime EP1418610B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10251635 2002-11-06
DE10251635A DE10251635A1 (de) 2002-11-06 2002-11-06 Röntgenröhre, insbesondere Mikrofokus-Röntgenröhre

Publications (2)

Publication Number Publication Date
EP1418610A1 true EP1418610A1 (fr) 2004-05-12
EP1418610B1 EP1418610B1 (fr) 2005-10-19

Family

ID=32103371

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03024511A Expired - Lifetime EP1418610B1 (fr) 2002-11-06 2003-10-24 Tube à rayons X à microfoyer

Country Status (5)

Country Link
US (1) US7050543B2 (fr)
EP (1) EP1418610B1 (fr)
AT (1) ATE307386T1 (fr)
DE (2) DE10251635A1 (fr)
DK (1) DK1418610T3 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006062452B4 (de) 2006-12-28 2008-11-06 Comet Gmbh Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre
US8831179B2 (en) 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning
RU2645749C2 (ru) * 2016-05-23 2018-02-28 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" Микрофокусная рентгеновская трубка
DE102017105546B4 (de) * 2017-03-15 2018-10-18 Yxlon International Gmbh Steckdose zur Aufnahme eines Steckers eines Hochspannungskabels für eine Mikrofokus-Röntgenröhre, Steckverbindung für ein Hochspannungskabel
US20190272970A1 (en) * 2018-03-02 2019-09-05 AcceleRAD Technologies, Inc. Static collimator for reducing spot size of an electron beam

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1717309A (en) * 1924-07-23 1929-06-11 Philips Nv X-ray tube
US3584219A (en) * 1969-01-30 1971-06-08 Du Pont X-ray generator having an anode formed by a solid block with a conical bore closed by a target toil
GB1249341A (en) * 1968-10-08 1971-10-13 Rigaku Denki Company Ltd Improvements in or relating to x-ray tubes
US3668454A (en) * 1969-08-05 1972-06-06 Rigaku Denki Co Ltd Fine focus x-ray tube
DE3139899A1 (de) * 1981-10-07 1983-04-21 Schöfer, Hans, Dipl.-Phys., 8011 Zorneding Roentgenroehre zur erzeugung sehr hoher dosen in kleinen volumen
EP0083198A1 (fr) * 1981-12-29 1983-07-06 Andrex Radiation Products A/S Générateur de rayons X
US4618972A (en) * 1984-09-07 1986-10-21 At&T Bell Laboratories X-ray source comprising double-angle conical target
EP0292055A2 (fr) * 1987-05-18 1988-11-23 Philips Patentverwaltung GmbH Source de rayonnement pour la génération de rayons X essentiellement monochromatiques
EP0777255A1 (fr) * 1995-11-28 1997-06-04 Philips Patentverwaltung GmbH Tube à rayons X, notamment tube à rayons X à microfoyer

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DE662408C (de) * 1934-04-14 1938-07-12 Ernst Pohl Roentgenroehre, insbesondere fuer Durchleuchtung und Aufnahme, mit von der Kathode umgebener Kegelanode
FR2355428A1 (fr) * 1976-06-14 1978-01-13 Elf Aquitaine Dispositif d'irradiation a haut rendement comportant un tube generateur de rayons x avec anode fenetre
FR2386109A1 (fr) * 1977-04-01 1978-10-27 Cgr Mev Tete d'irradiation a rayons g pour une irradiation panoramique et generateur de rayons g comportant une telle tete d'irradiation
FR2514108B1 (fr) 1981-10-06 1986-06-13 Framatome Sa Procede et dispositif d'elimination des boues sur la plaque tubulaire des generateurs de vapeur
US4439870A (en) * 1981-12-28 1984-03-27 Bell Telephone Laboratories, Incorporated X-Ray source and method of making same
US4521902A (en) * 1983-07-05 1985-06-04 Ridge, Inc. Microfocus X-ray system
FR2600422B1 (fr) * 1986-05-29 1989-10-13 Instruments Sa Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x
NL8603264A (nl) * 1986-12-23 1988-07-18 Philips Nv Roentgenbuis met een ringvormig focus.
US4825454A (en) * 1987-12-28 1989-04-25 American Science And Engineering, Inc. Tomographic imaging with concentric conical collimator
US4870671A (en) * 1988-10-25 1989-09-26 X-Ray Technologies, Inc. Multitarget x-ray tube
US5428658A (en) * 1994-01-21 1995-06-27 Photoelectron Corporation X-ray source with flexible probe
DE19633860A1 (de) * 1995-08-18 1997-02-20 Ifg Inst Fuer Geraetebau Gmbh Verfahren zur Erzeugung von Röntgenstrahlung hoher Intensität und unterschiedlicher Energie und Röntgenröhre zur Durchführung des Verfahrens
JPH0982252A (ja) * 1995-09-07 1997-03-28 Toshiba Corp 分析用ｘ線管
US5729583A (en) * 1995-09-29 1998-03-17 The United States Of America As Represented By The Secretary Of Commerce Miniature x-ray source
DE19639243C2 (de) * 1996-09-24 1998-07-02 Siemens Ag Multi-, insbesondere dichromatische Röntgenquelle
US6075839A (en) * 1997-09-02 2000-06-13 Varian Medical Systems, Inc. Air cooled end-window metal-ceramic X-ray tube for lower power XRF applications
JP4334639B2 (ja) * 1998-07-30 2009-09-30 浜松ホトニクス株式会社 Ｘ線管
JP2000306533A (ja) * 1999-02-19 2000-11-02 Toshiba Corp 透過放射型ｘ線管およびその製造方法
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
US6195411B1 (en) * 1999-05-13 2001-02-27 Photoelectron Corporation Miniature x-ray source with flexible probe
AUPQ831200A0 (en) * 2000-06-22 2000-07-13 X-Ray Technologies Pty Ltd X-ray micro-target source
JP2002253687A (ja) * 2001-03-02 2002-09-10 Mitsubishi Heavy Ind Ltd 放射線医療装置
US6661876B2 (en) * 2001-07-30 2003-12-09 Moxtek, Inc. Mobile miniature X-ray source

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1717309A (en) * 1924-07-23 1929-06-11 Philips Nv X-ray tube
GB1249341A (en) * 1968-10-08 1971-10-13 Rigaku Denki Company Ltd Improvements in or relating to x-ray tubes
US3584219A (en) * 1969-01-30 1971-06-08 Du Pont X-ray generator having an anode formed by a solid block with a conical bore closed by a target toil
US3668454A (en) * 1969-08-05 1972-06-06 Rigaku Denki Co Ltd Fine focus x-ray tube
DE3139899A1 (de) * 1981-10-07 1983-04-21 Schöfer, Hans, Dipl.-Phys., 8011 Zorneding Roentgenroehre zur erzeugung sehr hoher dosen in kleinen volumen
EP0083198A1 (fr) * 1981-12-29 1983-07-06 Andrex Radiation Products A/S Générateur de rayons X
US4618972A (en) * 1984-09-07 1986-10-21 At&T Bell Laboratories X-ray source comprising double-angle conical target
EP0292055A2 (fr) * 1987-05-18 1988-11-23 Philips Patentverwaltung GmbH Source de rayonnement pour la génération de rayons X essentiellement monochromatiques
EP0777255A1 (fr) * 1995-11-28 1997-06-04 Philips Patentverwaltung GmbH Tube à rayons X, notamment tube à rayons X à microfoyer

Also Published As

Publication number Publication date
US7050543B2 (en) 2006-05-23
DE10251635A1 (de) 2004-05-27
US20040091081A1 (en) 2004-05-13
EP1418610B1 (fr) 2005-10-19
ATE307386T1 (de) 2005-11-15
DE50301406D1 (de) 2006-03-02
DK1418610T3 (da) 2006-03-06

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