FR2600422B1 - Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x - Google Patents

Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x

Info

Publication number
FR2600422B1
FR2600422B1 FR8607740A FR8607740A FR2600422B1 FR 2600422 B1 FR2600422 B1 FR 2600422B1 FR 8607740 A FR8607740 A FR 8607740A FR 8607740 A FR8607740 A FR 8607740A FR 2600422 B1 FR2600422 B1 FR 2600422B1
Authority
FR
France
Prior art keywords
chemical analysis
solid materials
electron spectroscopy
local chemical
ray photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8607740A
Other languages
English (en)
Other versions
FR2600422A1 (fr
Inventor
Pierre Morin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR8607740A priority Critical patent/FR2600422B1/fr
Priority to US07/156,940 priority patent/US4857730A/en
Priority to EP87903348A priority patent/EP0270589A1/fr
Priority to PCT/FR1987/000187 priority patent/WO1987007429A1/fr
Priority to JP62503372A priority patent/JPH01500547A/ja
Publication of FR2600422A1 publication Critical patent/FR2600422A1/fr
Application granted granted Critical
Publication of FR2600422B1 publication Critical patent/FR2600422B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR8607740A 1986-05-29 1986-05-29 Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x Expired FR2600422B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8607740A FR2600422B1 (fr) 1986-05-29 1986-05-29 Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x
US07/156,940 US4857730A (en) 1986-05-29 1987-05-27 Apparatus and method for local chemical analyses at the surface of solid materials by spectroscopy of X photoelectrons
EP87903348A EP0270589A1 (fr) 1986-05-29 1987-05-27 Appareil et procede d'analyse chimique de solides par spectroscopie de photo-electrons x
PCT/FR1987/000187 WO1987007429A1 (fr) 1986-05-29 1987-05-27 Appareil et procede d'analyse chimique de solides par spectroscopie de photo-electrons x
JP62503372A JPH01500547A (ja) 1986-05-29 1987-05-27 Ｘ光電子の分光による固体材料表面における局所的化学分析用の装置及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8607740A FR2600422B1 (fr) 1986-05-29 1986-05-29 Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x

Publications (2)

Publication Number Publication Date
FR2600422A1 FR2600422A1 (fr) 1987-12-24
FR2600422B1 true FR2600422B1 (fr) 1989-10-13

Family

ID=9335794

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8607740A Expired FR2600422B1 (fr) 1986-05-29 1986-05-29 Appareil et procede d'analyses chimiques locales a la surface de materiaux solides par spectroscopie de photo-electrons x

Country Status (5)

Country Link
US (1) US4857730A (fr)
EP (1) EP0270589A1 (fr)
JP (1) JPH01500547A (fr)
FR (1) FR2600422B1 (fr)
WO (1) WO1987007429A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747821A (en) * 1995-08-04 1998-05-05 X-Ray Optical Systems, Inc. Radiation focusing monocapillary with constant inner dimension region and varying inner dimension region
KR100382760B1 (ko) * 2000-09-25 2003-05-01 삼성전자주식회사 엑스선 전자 분광 분석기
DE10251635A1 (de) * 2002-11-06 2004-05-27 Feinfocus Röntgen-Systeme GmbH Röntgenröhre, insbesondere Mikrofokus-Röntgenröhre
US11311917B2 (en) 2007-08-09 2022-04-26 Bruker Nano, Inc. Apparatus and method for contamination identification
MX2011009486A (es) 2011-09-09 2013-03-15 Ct Investig Y Estudios Del Ipn Metodo combinado de espectroscopias de masas de iones secundarios y de rayos x de energia dispersada, para analisis quimico cuantitativo de diversos materiales solidos y peliculas delgadas.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3525863A (en) * 1967-12-28 1970-08-25 Minnesota Mining & Mfg Differential emission x-ray gauging apparatus and method using two monochromatic x-ray beams of balanced intensity
US3963922A (en) * 1975-06-09 1976-06-15 Nuclear Semiconductor X-ray fluorescence device
JPS599850B2 (ja) * 1975-11-14 1984-03-05 株式会社島津製作所 Ｘ センコウデンシブンセキホウホウ
SE415804B (sv) * 1978-06-21 1980-10-27 Nils Johannes Baecklund Sett att medelst rontgenstralning meta halten eller mengden av ett forutbestemt grundemne i ett prov, samt anordning for utforande av settet
DE3206861A1 (de) * 1982-02-26 1983-05-26 Richard Dipl.-Phys. 7000 Stuttgart Eckert Roentgenfluoreszenz-zusatz fuer elektronenstrahlgeraete

Also Published As

Publication number Publication date
US4857730A (en) 1989-08-15
FR2600422A1 (fr) 1987-12-24
EP0270589A1 (fr) 1988-06-15
WO1987007429A1 (fr) 1987-12-03
JPH01500547A (ja) 1989-02-23

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Legal Events

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ST Notification of lapse