EP3724913A1 - Spectromètre photoélectronique à résolution d'impulsion et procédé de spectroscopie photoélectronique à résolution d'impulsion - Google Patents

Spectromètre photoélectronique à résolution d'impulsion et procédé de spectroscopie photoélectronique à résolution d'impulsion

Info

Publication number
EP3724913A1
EP3724913A1 EP18827013.6A EP18827013A EP3724913A1 EP 3724913 A1 EP3724913 A1 EP 3724913A1 EP 18827013 A EP18827013 A EP 18827013A EP 3724913 A1 EP3724913 A1 EP 3724913A1
Authority
EP
European Patent Office
Prior art keywords
electrons
electron
kinetic energy
detector
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18827013.6A
Other languages
German (de)
English (en)
Inventor
Sergey Borisenko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leibnitz-Institut fur Festkorper- und Werkstoffforschung Dresden Ev
Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV
Original Assignee
Leibnitz-Institut fur Festkorper- und Werkstoffforschung Dresden Ev
Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leibnitz-Institut fur Festkorper- und Werkstoffforschung Dresden Ev, Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV filed Critical Leibnitz-Institut fur Festkorper- und Werkstoffforschung Dresden Ev
Publication of EP3724913A1 publication Critical patent/EP3724913A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0004—Imaging particle spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers

Definitions

  • the invention relates to the field of physics and relates to a pulse-resolving photoelectron spectrometer, with which and with the method of pulse-resolving photoelectron spectroscopy, the physical properties of materials can be determined by their energy distribution and electronic structure.
  • the physical properties of materials are determined by the electronic structure of the material. Therefore, it is advantageous and necessary to gain extensive and detailed knowledge of the electronic structure of the materials. Furthermore, this knowledge can also contribute to the prediction of new compounds and / or physical properties. Likewise, with this knowledge, electronic components such as transistors or solar cells can be constructed in terms of their properties. In order to determine the electronic structure of a material, the behavior of the electrons in the material and in particular their energy and momentum must be determined.
  • the impulse describes the mechanical motion state of an electron.
  • the impulse is a vectorial quantity and thus has an amount and a direction (Wikipedia, keyword impulse).
  • the surface of the material must be atomically clean, which can only be achieved in ultrahigh vacuum (UHV).
  • UHV ultrahigh vacuum
  • electron spectrometers which serve for the energy and momentum analysis of electrons. They usually consist of a lens, an analyzer that lets electrons of a particular energy through with a certain direction, as well as a detector (Wikipedia, keyword
  • Lenses in an electron spectrometer are electron lenses
  • Electron lenses are components for deflecting electron beams by inhomogeneous electrical and / or magnetic fields. Analogous to optical lenses, rays emitted by electron lenses from one point in different directions can be imaged again in one spot
  • Electron lenses are generally made up of several tube lenses or pinhole diaphragms with a potential field. Due to the different potentials of electron-driven lenses, these act as a converging lens or diffusing lens. In this way, a potential field for the electrons can be built up, which on the one hand can accelerate or decelerate them and on the other hand can focus at a certain desired point.
  • the analyzer has an entrance slit for the electrons and an exit slit to the detector or spatially resolved detectors.
  • For filtering the electron energy the deflection of the electrons in an electric or magnetic field is utilized. Only the electrons of a certain energy (pass energy), which hit the entrance slit at a certain angle in one direction, can then pass through the entrance and exit slits.
  • the pass energy of the filter is controlled by changing the electrical voltage, so that then also electrons with different energy can pass.
  • the transmitted electrons are counted by the detector and represented as a distribution of the number of electrons of a given direction.
  • an energy distribution of the electrons can then be determined via these multiplicity of directions and, in most cases, visualized.
  • the detectors are, for example, spatially resolved detectors consisting of a microchannel plate (MCP) and a fluorescent screen.
  • a typical representative of the first class is the spectrometer based on the grating arrangement. Electrons leaving the sample fly through the multiple spherical grids, which act as a flop and low pass filter and select only those electrons that are to reach the detector and be counted.
  • the advantage of these display-type electron analyzers is that a relatively large portion of the momentum space can be studied immediately (large angular acceptance), the design typically involving many elements including the mirrors and spherical gratings (Rieger, D., et al., Nucl. Instr Methods, 208, 777 (1983), H. Matsuda et al: J. Electron Spectrosc., Relat.
  • Such hemispherical electron analyzers are the most successful devices of the above classes. Their energy resolution can reach a sub-meV level, while their angular resolution can be as good as 0.2 °. This is achieved by a sophisticated combination of the electron lens and two flemis spheres (Martensson, N., et al: J. Electron Spectrosc., Relat. Phenom., 70, 117-128, (1994)). First, the electron lens, consisting of 5-7 elements, projects the electron beams to the entrance slit of the analyzer.
  • the electron optics are adjusted so that the entrance slit lies in the focal plane of the electron lens, which means that electrons that have left the sample surface at a certain angle lie on the circle of particular radius in that plane.
  • the distance from the center of the entrance slit corresponds to this angle, which is the convenient way to distinguish between them and to measure the angular distribution.
  • all these electrons which have passed through the entrance slit are energy-analyzed.
  • the photoelectron spectrometer consists of a measuring range, a lens system with a substantially straight optical axis, a deflector arrangement which deflects the particle beam at least twice, a detection arrangement which is capable of the positions of the charged particles in the measuring range in two dimensions and a control unit that controls the deflector assembly.
  • the time-of-fligth electron analyzers work according to the TOF technology of the same name (R. Ovsyannikov et al .: J. Electron Spectrosc., Relat. Phenom. 191, 92-103 (2013)).
  • the TOF electron analyzers have no entrance slits and hemispheres.
  • the electrons are collected in a cone and their energy and momentum are measured simultaneously.
  • the energy filtering is accomplished by placing the detector very far from the sample to be examined and measuring the time of flight of the electrons through the spectrometer.
  • microchannel plate detectors microchannel plates
  • delay line detectors are often used.
  • time-of-fligth electron analyzer is known, with which the kinetic energy of a particle beam of a sample can be determined, and which consists of a first, second and third lens system as well as a 90 ° bandpass filter wherein two spherical electrically conductive plates are coupled to the first and third lens systems, and which comprises a high-speed multi-channel detector (MCP) which captures the photo-emitted electrons after reflection from a target.
  • MCP multi-channel detector
  • the main disadvantage of the method with the TOF electron analyzers is mainly that a pulsed radiation with a rather narrow pulse width must be realized.
  • the use of synchrotron radiation is thus limited to a single-beam mode and the repetition rates of laboratory lasers are usually insufficient to provide an adequate information rate.
  • the object of the present invention is to provide a pulse-resolving photoelectron spectrometer with which a simple construction of the device components is realized with a significantly reduced volume of construction and the determination of the distribution of the pulse of photoelectrons at a certain kinetic energy using a method of pulse-resolving
  • the components are arranged in a chamber in which at least during the measurements floc vacuum or ultra-high vacuum is present.
  • the electron emission sample consists of the material to be examined.
  • the electron lens of the focusing system generates an electric field by which a focal plane for a given kinetic energy of electrons is generated, in which the focusing of the electrons is realized with this specific and the same kinetic energy and with the same momentum.
  • the electron lens of the focusing system consists of a container which has a cylindrical inlet opening and within which two further cylindrical elements are arranged one behind the other.
  • the at least one detector is arranged in the focal plane of the electron lens as a microchannel plate, wherein even more advantageously the detector or detectors are arranged in the container transversely to the optical axis after the three cylindrical elements.
  • grids are arranged in front of the detectors, which are advantageously also arranged in the container and / or advantageously also in the focal plane of the electron lens.
  • the electron lens and / or the detector are designed to be variable in the focal plane of the electron lens by applying a voltage with regard to the detectability of the kinetic energy of the electrons to be focused and detected.
  • electrons are released from an electron emission sample and passed through a focusing system, wherein an electric field is generated by the focusing system, by which the focusing of electrons from a desired kinetic energy to Fermi energy in a certain kinetic Energy associated focal plane of the focusing system is realized, and wherein all electrons with this desired kinetic energy and a substantially same momentum, that is substantially the same Exit direction from the electron emission sample, focused and detected at substantially one point on a detector in the focal plane of the focusing system.
  • electrons will be released from the surface of the electron emission sample by means of photon beam in the form of synchrotron radiation, laser radiation or radiation from other radiation sources, such as a flamelamp, wherein advantageously still the photon beam is a monochromatic photon beam.
  • the desired kinetic energy is set to Fermi energy of the electrons to be focused.
  • substantially all electrons which have a kinetic energy below the desired kinetic energy of the electrons to be detected are braked by the focusing system in front of the detector and thus not detected.
  • the momentum distribution of the emitted electrons is determined as a function of their kinetic energy as a pictorial representation.
  • a pulse-resolving photoelectron spectrometer which in the direction of the optical axis one behind the other at least arranged in a vacuum components, each of which is at least one electron emission and a focusing system with an electron lens and a detector comprises.
  • the electron emission sample consists at least partially and in the region of the impact of the photon beam for the extraction of electrons from the material to be examined.
  • a focusing system which consists of an electron lens and a detector.
  • electrons each having essentially the same kinetic energy and of these electrons focusing those which have left the electron emission specimen in essentially the same exit direction are focused at substantially one point in the respective focal plane of the electron lens, which corresponds to the desired kinetic energy.
  • the detector is in each case in this focal plane.
  • an electric field is generated by the focusing system, which generates a focal plane for the kinetic energy E1.
  • the focal planes intersect the optical axis and can be generated at different distances from the electron emission sample along the optical axis.
  • the detector is then in this focal plane.
  • the focal plane generated by the focusing system is at a different distance from the electron emission sample along the optical axis.
  • the electron lens consists of three cylindrical elements, which are arranged one behind the other and at a distance from one another in the direction of the optical axis of the device according to the invention.
  • the cylindrical elements generate a potential field in their interior, which focuses the electrons emitted by the electron emission probe.
  • the electrons which are to be focused each have the same kinetic energies from a common lower limit of the kinetic energies and the respectively same exit directions from the electron emission sample. These electrons are all focused at one point in the respective focal planes of the focusing system.
  • the electrons emitted by the electron emission sample have a kinetic energy which corresponds to their energy in the crystal of the material of the electron emission sample.
  • Fermi energy As is known, there is a maximum energy of electrons, the so-called Fermi energy. A higher energy can not have electrons. Again, the kinetic energy of these electrons corresponds to the Fermi energy in the crystal, and is also referred to below as Fermi energy.
  • the particular advantage of the device according to the invention is that electrons focus with different kinetic energies and exit directions and thus a plurality of individual points in the respective focal planes can be detected.
  • a lower limit of the kinetic energy to be detected by adjusting the potential field by the electron lens and / or the detector, and also by incorporation of grids within the electron lens and in front of the detector can be determined. Electrons with kinetic energies below the desired lower limit are slowed down and thus not detected. All electrons with a kinetic energy from the desired set lower limit to electrons with Fermi energy can then be focused and detected.
  • the focal plane of the electron lens should be understood to focus all electrons which have the same kinetic energy in the respective focal plane which is generated by the respective potential field of the focusing system.
  • the focal plane of the electron lens is not only a plane in a two-dimensional space, but may be an area in a three-dimensional space that is curved or spherically shaped, for example, or may have valleys and fleas one or more times within the area.
  • the electron lens and the detector can be arranged in a container within the chamber, wherein the container has an electron entrance opening, which is advantageously with element of the electron lens.
  • the focusing of the electrons is effected by an electric field, which is generated by the cylindrical elements of the electron lens and the detector with different potentials.
  • the electron lens of the focusing system according to the invention is an electron lens, which consists of three cylindrical elements which are arranged one behind the other in the direction of the optical axis.
  • the detector is one or more spatially resolved detectors, all detectors being arranged in the respective focal plane of the electron lens.
  • the detectors can be displaced on the optical axis of the device according to the invention at different distances from the electron emission sample be arranged so that these detectors can detect electrons in several focal planes successively.
  • the focal planes can also be generated in each case at the position of the detectors by changing the electric field through the focusing system.
  • the at least one detector in the focal plane of the electron lens is designed as a microchannel plate.
  • a particular advantage of the focusing system according to the invention is that in front of the detector or detectors in the direction of the optical axis gratings can be arranged to realize an acceleration of the electron to be detected with the desired kinetic energy in front of the detector of the electron lens, whereby the electrons by the detector better become detectable.
  • the electron-braking voltage can be applied both to the detector or not to the detector but to a grid. In the latter case, another voltage is present between the grating and the detector surface, which accelerates the passing electrons.
  • the grid is positioned in the focal plane of the electron lens and the detector directly behind it, often only at a distance of a few centimeters.
  • the lower limit of the kinetic energy of the electrons to be focused and detected can be adjusted further by applying an altered electrical voltage to the container and / or the electron lens and / or the detector and by generating a focal plane of the electron lens.
  • an analyzer which has an entrance slit for electrons emitted by the electron emission specimen and focused by the focusing system.
  • this is not required according to the invention.
  • the electron lens and the detector in the focal plane of the electron lens or only the electron lens by applying an electrical voltage with respect to the detectable kinetic energy of focussing and detecting electrons and the exit angle of the electrons can be made changeable from the electron emission sample.
  • electrons are released from an electron emission sample and passed through a focusing system, whereby an electric field is generated by the focusing system, which realizes the focusing of electrons of a desired kinetic energy in the focal plane of the electron lens generated for this kinetic energy and wherein all the electrons with this desired kinetic energy and a substantially identical pulse, ie substantially the same exit direction from the electron emission specimen, are focused and detected at essentially one point on a detector in the respective focal plane of the electron lens
  • the momentum distribution of the emitted electrons is determined.
  • the momentum of electrons is to be understood, under which exit direction, which is determined by the angle pair in the x and y direction or the polar and azimuthal angles, the electrons from the surface of the material to be investigated Exit the electron emission sample.
  • the momentum is a vectorial quantity and thus has an amount and a direction.
  • the direction of the impulse is the direction of movement of the object.
  • the amount of the impulse is the product of the mass of the object and the velocity of its center of mass (see Wikipedia, keyword impulse).
  • electrons are advantageously removed from the surface of the electron emission sample by means of photon beam in the form of synchrotron radiation, laser radiation or by means of radiation from other radiation sources, such as a helium lamp, which are then focused and detected.
  • photon beam in the form of synchrotron radiation, laser radiation or by means of radiation from other radiation sources, such as a helium lamp, which are then focused and detected.
  • the Photon beam with which the electrons are released from the electron emission sample monochromatic.
  • the Fermi energy of the electrons is important. Therefore, it is particularly advantageous that in particular only electrons with substantial Fermi energy are detected with the device according to the invention. This is particularly important, because essentially for all the electron emission samples to be studied, the Fermi energy momentum distribution contains essentially all or the most important information about the physical properties of the electron emission sample material.
  • the pulse distribution of the emitted electrons from the electron emission specimen is determined at an energy which is slightly higher than the energy of the first measurement set as the lower limit of the kinetic energy.
  • the momentum distribution at slightly higher kinetic energy is subtracted from the momentum distribution at lower kinetic energy.
  • the difference in kinetic energies at which the measurements are made determines the accuracy of the momentum distribution at the lower kinetic energy.
  • the method according to the invention for pulse-resolving photoelectron spectroscopy can be realized.
  • inventive method and the pulse-resolving photoelectron spectrometer expensive and expensive components can be saved, such as grids or hemispherical analyzers. It is also possible to work with conventional light sources.
  • the pulse resolution is a measure of the accuracy of the pulse distribution.
  • the signals are simultaneously available from a large part of the room to be detected (pulse space) in a solid angle of up to 30 °, which is otherwise only possible with ToF and display type analyzers.
  • the pulse distribution is further imaged with the solution according to the invention almost directly on the detector in the focal plane of the electron lenses, without it being necessary to recalculate them from the angular distribution.
  • the essential difference of the solution according to the invention with the solutions of the prior art is in particular that electrons are not detected at different kinetic energies, which emerge from the electron emission probe under only one specific exit direction, but that electrons with a certain desired kinetic energy below each Outlet direction (ie pulse) focused and detected.
  • the pulse distribution at a specific, desired kinetic energy of electrons of an electron emission sample can be determined with essentially two measurements, and the physical properties of the electron emission sample can be immediately deduced.
  • the pulse distribution at a desired energy of the electrons with the solutions of the prior art can only be determined by a significantly higher number of measurements and / or with a significantly higher expenditure on equipment.
  • the electron emission sample it is also not necessary for the electron emission sample to be moved and / or rotated during the detection.
  • the solution according to the invention achieves a higher transmission of electrons and thus a higher intensity of the electrons at the detector, which leads to a higher information rate for the evaluation of the determined data.
  • the data acquisition at the detector or detectors becomes significantly faster, so that more information can also be collected from the electron emission sample.
  • an electron emission probe and the focusing system in the direction of the optical axis, starting from the electron emission sample, are arranged one behind the other.
  • the electron emission sample consists of TaSe2 and has the following dimensions: 1 mm surface diameter and 0.2 mm height.
  • the focusing system consists of an electron lens and a detector.
  • the electron lens consists of a cylindrical container with a length of 108 mm and a diameter of 140 mm and a cylindrical inlet opening of 30 mm diameter and 15 mm length.
  • two cylindrical members each having a radius of 49 mm and a length of the first cylinder of 35 mm and the second cylinder of 42 mm in length are arranged at a distance of 5 mm in the direction of the optical axis.
  • the cylindrical element adjacent to the inlet opening of the container is located at a distance of 11 mm from the inner edge of the cylindrical inlet opening.
  • the sample is located 28 mm away from the container opening.
  • the detector is a circular microchannel plate of 75 mm diameter, which is arranged at a distance of 130 mm from the sample, that is still within the second cylindrical element transverse to the optical axis in the container, and which is coupled to a phosphor screen arranged behind it (standard design , so-called MCP assembly or MCP assembly).
  • the electrons are emitted from the sample surface by the radiation of the He lamp with a photon energy of 21, 2 eV. Because of the work function of about 4.2 eV of TaSe2, the electrons have the highest kinetic energy of ⁇ 17 eV, depending on the temperature of the sample. This energy is the Fermi energy and the corresponding momentum distribution is the so-called Fermi surface.
  • the following voltages are applied to the focusing elements:
  • the intensity distribution at the surface of the detector corresponds directly to the Fermi momentum distribution or the Fermi area of TaSe2. This intensity distribution is amplified by the detector (MCP) and is on the coupled phosphor screen visible. It can be picked up by the CCD camera from outside the vacuum camera through the window flange.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

L'invention concerne le domaine de la physique et concerne un spectromètre photoélectronique à résolution d'impulsions avec lequel les propriétés physiques peuvent être déterminées. L'objet de cette invention est de spécifier un spectromètre photoélectronique à résolution d'impulsions permettant de réaliser une structure simple des composants de l'appareil avec un volume considérablement réduit. La tâche est résolue par un spectromètre photoélectronique à résolution d'impulsions comprenant des composants qui sont disposés l'un derrière l'autre dans la direction de l'axe optique dans au moins un vide et qui sont chacun au moins un échantillon à émission d'électrons et un système de focalisation, le système de focalisation comprenant au moins une lentille électronique et au moins un détecteur, la lentille électronique étant constituée de trois éléments cylindriques, dans lequel le premier élément cylindrique comporte un potentiel = 0 et les deux éléments cylindriques suivants comportent un potentiel de ≠0, et le détecteur étant un ou plusieurs détecteur(s) à résolution spatiale disposé(s) dans le plan focal de la lentille électronique.
EP18827013.6A 2017-12-15 2018-12-14 Spectromètre photoélectronique à résolution d'impulsion et procédé de spectroscopie photoélectronique à résolution d'impulsion Pending EP3724913A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017130072.4A DE102017130072B4 (de) 2017-12-15 2017-12-15 Impulsauflösendes Photoelektronenspektrometer und Verfahren zur impulsauflösenden Photoelektronenspektroskopie
PCT/EP2018/084995 WO2019115784A1 (fr) 2017-12-15 2018-12-14 Spectromètre photoélectronique à résolution d'impulsion et procédé de spectroscopie photoélectronique à résolution d'impulsion

Publications (1)

Publication Number Publication Date
EP3724913A1 true EP3724913A1 (fr) 2020-10-21

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EP18827013.6A Pending EP3724913A1 (fr) 2017-12-15 2018-12-14 Spectromètre photoélectronique à résolution d'impulsion et procédé de spectroscopie photoélectronique à résolution d'impulsion

Country Status (6)

Country Link
US (1) US11133166B2 (fr)
EP (1) EP3724913A1 (fr)
JP (1) JP7038828B2 (fr)
CN (1) CN111727489B (fr)
DE (1) DE102017130072B4 (fr)
WO (1) WO2019115784A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3324421A4 (fr) * 2015-07-15 2019-04-24 National University corporation Nara Institute of Science and Technology Lentille électrostatique, et dispositif de génération de faisceau parallèle et dispositif de convergence de faisceau parallèle utilisant la lentille électrostatique et un collimateur

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1332207A (en) * 1971-05-07 1973-10-03 Ass Elect Ind Apparatus for charged particle spectroscopy
US3710103A (en) * 1971-12-03 1973-01-09 Varian Associates Planar retarding grid electron spectrometer
DE2920972A1 (de) * 1978-05-25 1979-11-29 Kratos Ltd Vorrichtung zur spektroskopie mit geladenen teilchen
GB8612099D0 (en) * 1986-05-19 1986-06-25 Vg Instr Group Spectrometer
US4764673A (en) * 1987-04-30 1988-08-16 Kevex Corporation Electric electron energy analyzer
JPH03155030A (ja) * 1989-11-10 1991-07-03 Jeol Ltd 時間／エネルギー分解型電子分光器
GB9306374D0 (en) * 1993-03-26 1993-05-19 Fisons Plc Charged-particle analyser
DE19701192C2 (de) * 1997-01-15 2000-10-05 Staib Instr Gmbh Vorrichtung und Verfahren zum Betrieb eines Spektrometers mit Energie- und Winkelauflösung
DE19828476A1 (de) * 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
DE19929185A1 (de) * 1999-06-25 2001-01-04 Staib Instr Gmbh Vorrichtung und Verfahren zur energie- und winkelaufgelösten Elektronenspektroskopie
JP4802340B2 (ja) * 2004-07-15 2011-10-26 国立大学法人 奈良先端科学技術大学院大学 球面収差補正静電型レンズ、インプットレンズ、電子分光装置、光電子顕微鏡、および測定システム
US20070090288A1 (en) * 2005-10-20 2007-04-26 Dror Shemesh Method and system for enhancing resolution of a scanning electron microscope
CN1995996B (zh) * 2006-12-27 2011-04-20 中国科学院物理研究所 一种准连续或连续激光角分辨光电子能谱分析装置
US7718961B1 (en) * 2007-01-15 2010-05-18 Raymond Browning Photoelectron microscope
US20130126727A1 (en) 2009-08-11 2013-05-23 The Regents Of The University Of California Time-of-Flight Electron Energy Analyzer
CN103123325B (zh) * 2011-11-18 2015-06-03 中国科学院物理研究所 能量、动量二维解析的高分辨电子能量损失谱仪
PL2851933T3 (pl) 2012-03-06 2017-04-28 Scienta Omicron Ab Układ analizatora do spektrometru cząstek
JP5836171B2 (ja) * 2012-03-21 2015-12-24 日本電子株式会社 透過型電子顕微鏡の調整方法
CN102680503B (zh) * 2012-04-27 2014-07-02 西安空间无线电技术研究所 一种确定粗糙金属表面二次电子发射特性的方法
EP2747121A1 (fr) * 2012-12-21 2014-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Optique pour électrons secondaires et dispositif de détection
US9671356B2 (en) 2012-12-27 2017-06-06 National University Corporation Nagoya University Method and device for measuring energy of electrons excited by sunlight
DE102013005173C5 (de) 2013-03-25 2019-04-04 Johannes Gutenberg-Universität Mainz Messvorrichtung und Verfahren zur Erfassung einer Impulsverteilung geladener Teilchen
WO2015182641A1 (fr) * 2014-05-29 2015-12-03 国立研究開発法人科学技術振興機構 Dispositif de spectroscopie photoélectronique inverse
WO2016117099A1 (fr) * 2015-01-23 2016-07-28 株式会社 日立ハイテクノロジーズ Dispositif à faisceau de particules chargées, élément optique de dispositif à faisceau de particules chargées , et procédé de production d'élément de dispositif à faisceau de particules chargées
EP3324421A4 (fr) * 2015-07-15 2019-04-24 National University corporation Nara Institute of Science and Technology Lentille électrostatique, et dispositif de génération de faisceau parallèle et dispositif de convergence de faisceau parallèle utilisant la lentille électrostatique et un collimateur
WO2017126089A1 (fr) 2016-01-21 2017-07-27 公益財団法人高輝度光科学研究センター Analyseur d'énergie du type à potentiel retardé
JP2016197124A (ja) * 2016-07-25 2016-11-24 シエンタ・オミクロン・アーベー 粒子分光計のための分析装置

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US20210090868A1 (en) 2021-03-25
DE102017130072A1 (de) 2019-06-19
US11133166B2 (en) 2021-09-28
CN111727489A (zh) 2020-09-29
JP7038828B2 (ja) 2022-03-18
JP2021507459A (ja) 2021-02-22
CN111727489B (zh) 2023-11-17
WO2019115784A1 (fr) 2019-06-20

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