EP0096824A1 - Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X - Google Patents

Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X Download PDF

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Publication number
EP0096824A1
EP0096824A1 EP83105571A EP83105571A EP0096824A1 EP 0096824 A1 EP0096824 A1 EP 0096824A1 EP 83105571 A EP83105571 A EP 83105571A EP 83105571 A EP83105571 A EP 83105571A EP 0096824 A1 EP0096824 A1 EP 0096824A1
Authority
EP
European Patent Office
Prior art keywords
cathode
ray tube
hot cathode
grid
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83105571A
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German (de)
English (en)
Other versions
EP0096824B1 (fr
Inventor
Alfred Dipl.-Ing. Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Feinfocus Verwaltungs & Co KG GmbH
Original Assignee
Feinfocus Verwaltungs & Co KG GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinfocus Verwaltungs & Co KG GmbH filed Critical Feinfocus Verwaltungs & Co KG GmbH
Priority to AT83105571T priority Critical patent/ATE29088T1/de
Publication of EP0096824A1 publication Critical patent/EP0096824A1/fr
Application granted granted Critical
Publication of EP0096824B1 publication Critical patent/EP0096824B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/066—Details of electron optical components, e.g. cathode cups

Definitions

  • the invention relates to a fine focus X-ray tube, in the evacuated flask of which a hot cathode surrounded by a grid and an anode equipped with a target, electromagnetic electron beam focusing and deflecting device and an entrance aperture are accommodated and a method for forming a microfocus of the electron emission of an X-ray tube hot cathode.
  • X-ray tubes were developed whose glow cathodes were made from ever finer wires and which were shaped like pointed needles to cover the electron exit surface - at the needle tip - to be made as small as possible. This is the only way to believe the optics rule - the smaller and more point-like the light source, the higher the resolution - corresponds to can and to be able to achieve sharp X-ray images.
  • the invention is based on the finding that the longer the cross-section of the filament and the lower its temperature, at least at the surface, the longer the service life of a hot cathode, and that a microfocus can be formed on this surface of a relatively thick wire , if it is only possible to expose a location on the surface to special physical conditions that do not exist on other parts of the surface and that are preferably suitable for electron emission.
  • the invention consists in using a glow wire whose dimensions are large compared to the dimensions of the electron exit surface.
  • the grid offers itself as a simple, existing component if it is only dimensioned in a suitable manner.
  • the filament is cooled (to different extents) in such a way that at the location of the electron exit surface the highest temperature prevails on the surface of the filament.
  • This method can be implemented with a fine focus X-ray tube, which is characterized in that the hot cathode consists of a wire whose dimensions are large compared to the dimensions of the electron exit surface and that a device for achieving an increased surface temperature is provided at the point where the electric field between the anode and cathode reaches its highest value.
  • the device for achieving an elevated temperature is a device which strongly absorbs radiation and which partially surrounds the hot cathode. Because with this device, an enormous increase in the intensity of the electron emission can be achieved with the least effort.
  • This device can be the grid present in the X-ray tube anyway, if it is only adapted in a special way to this purpose of heat absorption.
  • a fine-focus X-ray tube is characterized in that the grating is designed as a thick-walled, rotationally symmetrical body which partially surrounds the hot cathode and has the shape of a hollow cylinder with an inward projection on the end face, the outside of which widens in a funnel shape, the latter Funnel includes an angle of 100 ° to 140 0 , and that the hot cathode with its point emerging most from the interior of the grid is arranged in the axis of the grid in a plane which lies in the region of the lower edge of the funnel-shaped part of the end face.
  • the hot cathode can be designed such that the hot cathode consists of a U-shaped or V-shaped wire.
  • a tiny spot is then formed in the tip of the bend of the filament, which is least affected by the cooling effect and which, since it is also located at the location of the highest field strength, is a location of particularly intense electron emission .
  • the cooling effect of the surface parts of the hot cathode is the cause of the significant increase in the life of the hot cathode.
  • a further increase in the intensity of the X-rays which goes far beyond what is to be expected after the increase in electron emission, can be achieved in that the target has a spherically curved surface and the target angle has a value between 0 ° and 10.
  • This increase is unexpected, because up to now the experts have used different target angles according to Heel's teaching.
  • Here shows the interaction of the measures according to the invention on the cathode with the measures according to the invention on the anode, an increase in intensity by more than an order of magnitude, without any particular effort being made and without a loss in service life.
  • the hot cathode consists of a wire whose dimensions are large compared to the dimensions of the electron exit area, this wire being bent in a substantially U-shaped manner, that the grid as one Thick-walled, rotationally symmetrical body that surrounds the hot cathode is formed in the form of a hollow cylinder with an inward projection on the end face, the outside of which widens in a funnel shape, this funnel enclosing an angle of 100 to 140 °, - this grid serves on the one hand electric field formation, on the other hand as a radiation-absorbing body, which in turn emits radiation on its outward-facing sides - and that the hot cathode at its most distant point from the inside of the grid is arranged in the plane of the grid in a plane which is in the area the bottom edge of the funnel shaped side surface.
  • the target has a spherically curved surface and the target
  • the piston of the X-ray tube consists of two parts 1, 2.
  • the part 1 receives the cathode, consisting of the filament 3, which serves as an emitter for the electron current 11, the contacts 12, 13 for the filament 3 and the base 14 and the grid 4, which is also carried by the base 14 and which is connected via the connection contact 15 to a voltage source, not shown.
  • the part 2 serving as the anode accommodates in its interior focusing coils 5, deflection coils 6 provided with an air gap 26 and is provided with the target head 7, which receives the target 8 (the anti-cathode) and a shield 16 in its interior, which provides an opening for has the exit of the X-rays 10 generated at the target 8, which exit through the exit window 9.
  • the target head is cooled by a cooling liquid which flows into or out of a cooling space through the tubes 17. exit.
  • the piston of the x-ray tube has a vacuum connection 18.
  • the electrical connections for the focusing coil 5 and the deflection coils 6 are designated 19 to 22.
  • FIG. 2 the structure of the cathode and grid is shown in an enlarged view.
  • the filament 3 Via the connection contacts 12, 13, which end in clamping devices 27, 28 for the U-shaped filament (emitter) 3, the filament 3 is supplied with voltage, which makes this filament glow.
  • the two clamping devices 27, 28 are accommodated in a holder 29 which also supports the grating 4 by means of the insulating ring 30.
  • This grid 4 is designed as a thick-walled hollow cylinder, which has on its one end, surrounding the filament 3, an inward projection 34, which is formed on the outside in the form of a funnel 31, which has an opening angle ⁇ of 100 ° to 140 ° , preferably 120 °.
  • This funnel 31 merges on its inside into a cylindrical surface 32, the rounded edge 33.
  • the plane 35 in which the surface part of the heating wire 3 is located, which emits electrons. Due to the special geometric design of the grid, on the one hand generates an electric field, which has its peak value in the axis 36 where the axis 36 breaks through the surface of the heating wire 3 facing the target. On the other hand, the special geometric design of the grating 4 ensures that more radiation is emitted to the grating from all surface parts of the filament 3 than from the location of the filament at which the geometric axis breaks through the surface of the heating wire 3 facing the target. As a result, the surface of the heating wire is cooled everywhere, but the cooling is lowest at the location where the geometric axis 36 breaks through the surface of the heating wire facing the target 8.
  • the diameter D of the heating wire is chosen to be more than 0.17 mm, the inside diameter Ri is chosen to be greater than 0.1 D. These dimensions are significantly larger than the dimensions previously used for fine focus X-ray tubes.
  • the inner diameter Ri and the outer diameter Ra can also have significantly larger values. - In some cases, it is useful to provide the ring-shaped grid 4, which is solid like a block, with an additional apron 37 in order to increase the outward heat radiation. This apron 37 is advantageously made in one piece with the grid 4 and essentially represents a solid hollow cylinder.
  • the heating wire 3 instead of the heating wire 3, other shapes for the emitter can also be used, e.g. Emitters in the forms shown in FIGS. 5 and 6. These emitters made of solid material are also heated until they glow by current flowing through them.
  • FIG. 3 shows the detail 1 from FIG. 1, namely a part of the target head 7 and the target 8 in cross section.
  • the target 8 is designed as a solid block, which has a cylindrical or spherical surface on the side facing the electron stream 11.
  • the inside of the target head 7 is provided with a lining 16 made of lead.
  • the target head 7 has a lateral opening which is closed by the radiation exit window 9 for the emerging X-rays 10.
  • the values set on the target 8 are explained in more detail with reference to FIG. 4 (detail IV): the electron beam axis E of the electron beam with the electron beam diameter De runs parallel to the tube axis 36.
  • the point of impact of the electron beam axis E and the target radius of curvature R is chosen so that a target angle a of 10 ° results. Since, with the measures according to the invention, a very thinly focused electron beam already hits the target 8, the optical focal spot width BFo is very small.
  • the target angle A maximum intensity of X-rays of up to 10 ° is reached, the cause of which has not yet been scientifically clarified. It is assumed that conditions similar to those that occur with total reflection in the optics occur here.
  • the hot cathode does not necessarily have to consist of a current-carrying wire, it can also be heated indirectly, e.g. be heated inductively. In this case too, it is important that the dimensions of the hot cathode, which may well have the shape of a needle or a nail, are large compared to the dimensions of the electron exit area and that a point with a higher surface temperature than the other surface parts is indicated on the hot cathode the point at which the electric field between the anode and cathode reaches its highest value. However, there are also ways of heating the cathode both directly through a current flowing through it and additionally indirectly.

Landscapes

  • X-Ray Techniques (AREA)
EP83105571A 1982-06-16 1983-06-07 Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X Expired EP0096824B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT83105571T ATE29088T1 (de) 1982-06-16 1983-06-07 Feinfokus-roentgenroehre und verfahren zur bildung eines mikrofokus der elektronenemission einer roentgenroehren-gluehkathode.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3222511 1982-06-16
DE3222511A DE3222511C2 (de) 1982-06-16 1982-06-16 Feinfokus-Röntgenröhre

Publications (2)

Publication Number Publication Date
EP0096824A1 true EP0096824A1 (fr) 1983-12-28
EP0096824B1 EP0096824B1 (fr) 1987-08-19

Family

ID=6166125

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83105571A Expired EP0096824B1 (fr) 1982-06-16 1983-06-07 Tube à rayons X à foyer fin et procédé de formation d'un microfoyer d'émission électronique de la cathode à incandescence d'un tube à rayons X

Country Status (5)

Country Link
US (1) US4573186A (fr)
EP (1) EP0096824B1 (fr)
JP (1) JPH0618119B2 (fr)
AT (1) ATE29088T1 (fr)
DE (1) DE3222511C2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0168777A2 (fr) * 1984-07-19 1986-01-22 Scanray A/S Tube à rayons X
GB2183904A (en) * 1985-12-04 1987-06-10 Raytheon Co Cathode focusing arrangement
EP0473227A2 (fr) * 1990-08-28 1992-03-04 Koninklijke Philips Electronics N.V. Aimant pour utilisation dans un tube à transit d'un tube à rayons X
EP2609612B1 (fr) * 2010-08-27 2019-11-13 GE Sensing & Inspection Technologies GmbH Tubes à rayons x à microfoyer pour un dispositif à rayons x à haute résolution

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DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
US4868842A (en) * 1987-03-19 1989-09-19 Siemens Medical Systems, Inc. Cathode cup improvement
EP0355192B1 (fr) * 1988-08-25 1992-02-05 Spezialmaschinenbau Steffel GmbH & Co. KG Tube à rayons X omnidirectionnel
US5077777A (en) * 1990-07-02 1991-12-31 Micro Focus Imaging Corp. Microfocus X-ray tube
JPH04101339A (ja) * 1990-08-20 1992-04-02 Rigaku Denki Kogyo Kk Ｘ線管
US5515413A (en) * 1994-09-26 1996-05-07 General Electric Company X-ray tube cathode cup assembly
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
US6134300A (en) * 1998-11-05 2000-10-17 The Regents Of The University Of California Miniature x-ray source
US6185276B1 (en) * 1999-02-02 2001-02-06 Thermal Corp. Collimated beam x-ray tube
US7062017B1 (en) * 2000-08-15 2006-06-13 Varian Medical Syatems, Inc. Integral cathode
JP4762436B2 (ja) * 2001-05-16 2011-08-31 浜松ホトニクス株式会社 カソードユニット及び開放型ｘ線発生装置
US7180981B2 (en) * 2002-04-08 2007-02-20 Nanodynamics-88, Inc. High quantum energy efficiency X-ray tube and targets
US7138768B2 (en) * 2002-05-23 2006-11-21 Varian Semiconductor Equipment Associates, Inc. Indirectly heated cathode ion source
US7466799B2 (en) * 2003-04-09 2008-12-16 Varian Medical Systems, Inc. X-ray tube having an internal radiation shield
DE10352334B4 (de) * 2003-11-06 2010-07-29 Comet Gmbh Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung
CN1786819B (zh) * 2004-12-09 2011-08-10 Ge医疗系统环球技术有限公司 X射线光阑、x射线辐照器和x射线成像设备
WO2008047269A2 (fr) * 2006-10-17 2008-04-24 Philips Intellectual Property & Standards Gmbh Émetteur pour tubes à rayons x et procédé de chauffage dudit émetteur
US7737424B2 (en) * 2007-06-01 2010-06-15 Moxtek, Inc. X-ray window with grid structure
US20110121179A1 (en) * 2007-06-01 2011-05-26 Liddiard Steven D X-ray window with beryllium support structure
US20100323419A1 (en) * 2007-07-09 2010-12-23 Aten Quentin T Methods and Devices for Charged Molecule Manipulation
EP2190778A4 (fr) * 2007-09-28 2014-08-13 Univ Brigham Young Ensemble de nanotubes de carbone
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US7924983B2 (en) * 2008-06-30 2011-04-12 Varian Medical Systems, Inc. Thermionic emitter designed to control electron beam current profile in two dimensions
US20100239828A1 (en) * 2009-03-19 2010-09-23 Cornaby Sterling W Resistively heated small planar filament
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US7983394B2 (en) * 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source
US8526574B2 (en) 2010-09-24 2013-09-03 Moxtek, Inc. Capacitor AC power coupling across high DC voltage differential
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
JP5711007B2 (ja) 2011-03-02 2015-04-30 浜松ホトニクス株式会社 開放型ｘ線源用冷却構造及び開放型ｘ線源
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
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USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0168777A2 (fr) * 1984-07-19 1986-01-22 Scanray A/S Tube à rayons X
EP0168777A3 (en) * 1984-07-19 1987-08-19 Scanray A/S X-ray tube
GB2183904A (en) * 1985-12-04 1987-06-10 Raytheon Co Cathode focusing arrangement
US4764947A (en) * 1985-12-04 1988-08-16 The Machlett Laboratories, Incorporated Cathode focusing arrangement
EP0473227A2 (fr) * 1990-08-28 1992-03-04 Koninklijke Philips Electronics N.V. Aimant pour utilisation dans un tube à transit d'un tube à rayons X
EP0473227A3 (en) * 1990-08-28 1992-06-24 N.V. Philips' Gloeilampenfabrieken Magnet for use in a drift tube of an x-ray tube
EP2609612B1 (fr) * 2010-08-27 2019-11-13 GE Sensing & Inspection Technologies GmbH Tubes à rayons x à microfoyer pour un dispositif à rayons x à haute résolution

Also Published As

Publication number Publication date
DE3222511A1 (de) 1983-12-22
JPH0618119B2 (ja) 1994-03-09
DE3222511C2 (de) 1985-08-29
US4573186A (en) 1986-02-25
ATE29088T1 (de) 1987-09-15
EP0096824B1 (fr) 1987-08-19
JPS598251A (ja) 1984-01-17

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