DE69934646D1 - System und Verfahren zur dynamischen Zufuhr von gemischtem Gas - Google Patents

System und Verfahren zur dynamischen Zufuhr von gemischtem Gas

Info

Publication number
DE69934646D1
DE69934646D1 DE69934646T DE69934646T DE69934646D1 DE 69934646 D1 DE69934646 D1 DE 69934646D1 DE 69934646 T DE69934646 T DE 69934646T DE 69934646 T DE69934646 T DE 69934646T DE 69934646 D1 DE69934646 D1 DE 69934646D1
Authority
DE
Germany
Prior art keywords
fluid
gaseous mixture
blended gaseous
blended
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69934646T
Other languages
English (en)
Other versions
DE69934646T2 (de
Inventor
Almeida Botelho Alexandre De
Thomas Anthony Delprato
Robert William Ford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69934646D1 publication Critical patent/DE69934646D1/de
Publication of DE69934646T2 publication Critical patent/DE69934646T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2111—Flow rate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2113—Pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/90—Heating or cooling systems
    • B01F2035/99—Heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Accessories For Mixers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69934646T 1998-10-16 1999-10-14 System und Verfahren zur dynamischen Zufuhr von gemischtem Gas Expired - Fee Related DE69934646T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US174196 1998-10-16
US09/174,196 US6217659B1 (en) 1998-10-16 1998-10-16 Dynamic blending gas delivery system and method

Publications (2)

Publication Number Publication Date
DE69934646D1 true DE69934646D1 (de) 2007-02-15
DE69934646T2 DE69934646T2 (de) 2007-10-31

Family

ID=22635229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69934646T Expired - Fee Related DE69934646T2 (de) 1998-10-16 1999-10-14 System und Verfahren zur dynamischen Zufuhr von gemischtem Gas

Country Status (8)

Country Link
US (3) US6217659B1 (de)
EP (1) EP0994502B1 (de)
JP (1) JP3329775B2 (de)
KR (1) KR100360921B1 (de)
AT (1) ATE350140T1 (de)
DE (1) DE69934646T2 (de)
SG (1) SG91836A1 (de)
TW (1) TW538207B (de)

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US6474077B1 (en) 2001-12-12 2002-11-05 Air Products And Chemicals, Inc. Vapor delivery from a low vapor pressure liquefied compressed gas
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DE20205819U1 (de) 2002-04-12 2003-08-21 Kinetics Germany Gmbh Vorrichtung zur Bereitstellung von hochreinen Prozesschemikalien
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JP2004039921A (ja) * 2002-07-04 2004-02-05 Watanabe Shoko:Kk 成膜装置
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US6868869B2 (en) * 2003-02-19 2005-03-22 Advanced Technology Materials, Inc. Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases
US6909839B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Delivery systems for efficient vaporization of precursor source material
US20050120958A1 (en) * 2003-12-07 2005-06-09 Frank Lin Reactor
KR100591762B1 (ko) * 2004-01-19 2006-06-22 삼성전자주식회사 증착 장치 및 증착 방법
JP2006253696A (ja) * 2005-03-10 2006-09-21 Asm America Inc ガスインジェクタ制御システム
US20060243207A1 (en) * 2005-04-20 2006-11-02 Jursich Gregory M Fluid mixing and delivery system
JP2007051002A (ja) * 2005-08-19 2007-03-01 Kyocera Mita Corp 用紙カセット
CN100422628C (zh) * 2006-07-28 2008-10-01 周玉成 一种标准气体的动态配制系统
DE112008000803T5 (de) * 2007-03-30 2010-04-08 Tokyo Electron Limited Abscheidungsquelleneinheit, Abscheidungsvorrichtung und Temperatursteuereinrichtung einer Abscheidungsquelleneinheit
US8067061B2 (en) * 2007-10-25 2011-11-29 Asm America, Inc. Reaction apparatus having multiple adjustable exhaust ports
US20100051109A1 (en) * 2008-09-04 2010-03-04 Michael Meier CO2 dialer and manifold apparatus and system
US8486191B2 (en) * 2009-04-07 2013-07-16 Asm America, Inc. Substrate reactor with adjustable injectors for mixing gases within reaction chamber
KR20100119346A (ko) * 2009-04-30 2010-11-09 한국에이에스엠지니텍 주식회사 증착 장치
US8950414B2 (en) * 2009-07-31 2015-02-10 Tokyo Electron Limited Liquid processing apparatus, liquid processing method, and storage medium
US8671971B2 (en) 2010-08-25 2014-03-18 Michael Meier Systems and methods for providing a monitoring and deactivation apparatus for a beverage distribution system
JP5395102B2 (ja) 2011-02-28 2014-01-22 株式会社豊田中央研究所 気相成長装置
FR2976258B1 (fr) * 2011-06-09 2014-09-05 Air Liquide Installation de conditionnement de no a debitmetres massiques
JP5430621B2 (ja) * 2011-08-10 2014-03-05 Ｃｋｄ株式会社 ガス流量検定システム及びガス流量検定ユニット
TWI458843B (zh) * 2011-10-06 2014-11-01 Ind Tech Res Inst 蒸鍍裝置與有機薄膜的形成方法
JP5793103B2 (ja) * 2012-04-13 2015-10-14 岩谷産業株式会社 混合気体の供給方法及び供給装置
DE102014100135A1 (de) * 2014-01-08 2015-07-09 Aixtron Se Gasmischvorrichtung an einem Reaktor mit Wegeventil
JP2016134569A (ja) * 2015-01-21 2016-07-25 株式会社東芝 半導体製造装置
TWI772330B (zh) * 2016-10-14 2022-08-01 荷蘭商蜆殼國際研究所 用於定量分析氣態製程流之方法及設備
US10184496B2 (en) * 2016-12-06 2019-01-22 Airgas, Inc. Automatic pressure and vacuum clearing skid method
CN107058982B (zh) * 2017-01-23 2018-06-19 江苏菲沃泰纳米科技有限公司 一种具有多层结构防液涂层的制备方法
CN109237304A (zh) * 2018-06-04 2019-01-18 国网安徽省电力有限公司电力科学研究院 电气设备混合绝缘气体配制灌充系统
CN113262714A (zh) * 2021-05-19 2021-08-17 核工业理化工程研究院 三氟化溴和载荷气体配料方法及装置

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Also Published As

Publication number Publication date
KR100360921B1 (ko) 2002-11-22
US20020054956A1 (en) 2002-05-09
ATE350140T1 (de) 2007-01-15
US20010009138A1 (en) 2001-07-26
JP3329775B2 (ja) 2002-09-30
DE69934646T2 (de) 2007-10-31
JP2000223431A (ja) 2000-08-11
TW538207B (en) 2003-06-21
US6514564B2 (en) 2003-02-04
US6217659B1 (en) 2001-04-17
SG91836A1 (en) 2002-10-15
EP0994502B1 (de) 2007-01-03
KR20000029100A (ko) 2000-05-25
EP0994502A3 (de) 2000-07-26
EP0994502A2 (de) 2000-04-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee