ATE350140T1 - System und verfahren zur dynamischen zufuhr von gemischtem gas - Google Patents

System und verfahren zur dynamischen zufuhr von gemischtem gas

Info

Publication number
ATE350140T1
ATE350140T1 AT99120002T AT99120002T ATE350140T1 AT E350140 T1 ATE350140 T1 AT E350140T1 AT 99120002 T AT99120002 T AT 99120002T AT 99120002 T AT99120002 T AT 99120002T AT E350140 T1 ATE350140 T1 AT E350140T1
Authority
AT
Austria
Prior art keywords
fluid
gaseous mixture
blended gaseous
blended
vapor portion
Prior art date
Application number
AT99120002T
Other languages
English (en)
Inventor
Almeida Botelho Alexandre De
Thomas Anthony Delprato
Robert William Ford
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE350140T1 publication Critical patent/ATE350140T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2111—Flow rate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2113—Pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/90—Heating or cooling systems
    • B01F2035/99—Heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Accessories For Mixers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sampling And Sample Adjustment (AREA)
AT99120002T 1998-10-16 1999-10-14 System und verfahren zur dynamischen zufuhr von gemischtem gas ATE350140T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/174,196 US6217659B1 (en) 1998-10-16 1998-10-16 Dynamic blending gas delivery system and method

Publications (1)

Publication Number Publication Date
ATE350140T1 true ATE350140T1 (de) 2007-01-15

Family

ID=22635229

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99120002T ATE350140T1 (de) 1998-10-16 1999-10-14 System und verfahren zur dynamischen zufuhr von gemischtem gas

Country Status (8)

Country Link
US (3) US6217659B1 (de)
EP (1) EP0994502B1 (de)
JP (1) JP3329775B2 (de)
KR (1) KR100360921B1 (de)
AT (1) ATE350140T1 (de)
DE (1) DE69934646T2 (de)
SG (1) SG91836A1 (de)
TW (1) TW538207B (de)

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WO2008120610A1 (ja) * 2007-03-30 2008-10-09 Tokyo Electron Limited 蒸着源ユニット、蒸着装置および蒸着源ユニットの温度調整装置
US8067061B2 (en) * 2007-10-25 2011-11-29 Asm America, Inc. Reaction apparatus having multiple adjustable exhaust ports
US20100051109A1 (en) * 2008-09-04 2010-03-04 Michael Meier CO2 dialer and manifold apparatus and system
US8486191B2 (en) * 2009-04-07 2013-07-16 Asm America, Inc. Substrate reactor with adjustable injectors for mixing gases within reaction chamber
KR20100119346A (ko) * 2009-04-30 2010-11-09 한국에이에스엠지니텍 주식회사 증착 장치
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JP5430621B2 (ja) * 2011-08-10 2014-03-05 Ｃｋｄ株式会社 ガス流量検定システム及びガス流量検定ユニット
TWI458843B (zh) * 2011-10-06 2014-11-01 Ind Tech Res Inst 蒸鍍裝置與有機薄膜的形成方法
JP5793103B2 (ja) * 2012-04-13 2015-10-14 岩谷産業株式会社 混合気体の供給方法及び供給装置
DE102014100135A1 (de) * 2014-01-08 2015-07-09 Aixtron Se Gasmischvorrichtung an einem Reaktor mit Wegeventil
JP2016134569A (ja) * 2015-01-21 2016-07-25 株式会社東芝 半導体製造装置
TWI772330B (zh) * 2016-10-14 2022-08-01 荷蘭商蜆殼國際研究所 用於定量分析氣態製程流之方法及設備
US10184496B2 (en) * 2016-12-06 2019-01-22 Airgas, Inc. Automatic pressure and vacuum clearing skid method
CN107058982B (zh) * 2017-01-23 2018-06-19 江苏菲沃泰纳米科技有限公司 一种具有多层结构防液涂层的制备方法
CN109237304A (zh) * 2018-06-04 2019-01-18 国网安徽省电力有限公司电力科学研究院 电气设备混合绝缘气体配制灌充系统
CN113262714A (zh) * 2021-05-19 2021-08-17 核工业理化工程研究院 三氟化溴和载荷气体配料方法及装置

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Also Published As

Publication number Publication date
EP0994502A3 (de) 2000-07-26
DE69934646T2 (de) 2007-10-31
US20020054956A1 (en) 2002-05-09
JP2000223431A (ja) 2000-08-11
US20010009138A1 (en) 2001-07-26
EP0994502B1 (de) 2007-01-03
KR100360921B1 (ko) 2002-11-22
EP0994502A2 (de) 2000-04-19
US6514564B2 (en) 2003-02-04
US6217659B1 (en) 2001-04-17
TW538207B (en) 2003-06-21
JP3329775B2 (ja) 2002-09-30
DE69934646D1 (de) 2007-02-15
SG91836A1 (en) 2002-10-15
KR20000029100A (ko) 2000-05-25

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Legal Events

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