DE69927433T2 - Keramisches Heizelement und dasselbe benützender Sauerstoffühler - Google Patents
Keramisches Heizelement und dasselbe benützender Sauerstoffühler Download PDFInfo
- Publication number
- DE69927433T2 DE69927433T2 DE69927433T DE69927433T DE69927433T2 DE 69927433 T2 DE69927433 T2 DE 69927433T2 DE 69927433 T DE69927433 T DE 69927433T DE 69927433 T DE69927433 T DE 69927433T DE 69927433 T2 DE69927433 T2 DE 69927433T2
- Authority
- DE
- Germany
- Prior art keywords
- heating element
- ceramic
- ceramic heating
- heat
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 150
- 238000010438 heat treatment Methods 0.000 title claims description 113
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 28
- 239000001301 oxygen Substances 0.000 title claims description 28
- 229910052760 oxygen Inorganic materials 0.000 title claims description 28
- 230000020169 heat generation Effects 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 51
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 32
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 31
- 229910052702 rhenium Inorganic materials 0.000 claims description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 29
- 229910052721 tungsten Inorganic materials 0.000 claims description 27
- 239000010937 tungsten Substances 0.000 claims description 27
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 15
- 229910052750 molybdenum Inorganic materials 0.000 claims description 15
- 239000011733 molybdenum Substances 0.000 claims description 15
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 13
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 238000005245 sintering Methods 0.000 description 19
- 239000000203 mixture Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 15
- 239000000843 powder Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- 239000007784 solid electrolyte Substances 0.000 description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 4
- 239000004615 ingredient Substances 0.000 description 4
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229960002380 dibutyl phthalate Drugs 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 235000021384 green leafy vegetables Nutrition 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000700 radioactive tracer Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000012854 evaluation process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000001062 red colorant Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/286—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an organic material, e.g. plastic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/027—Heaters specially adapted for glow plug igniters
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Resistance Heating (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Surface Heating Bodies (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17396098 | 1998-06-05 | ||
| JP17396098 | 1998-06-05 | ||
| JP6839499 | 1999-03-15 | ||
| JP11068394A JP2000058237A (ja) | 1998-06-05 | 1999-03-15 | セラミックヒ―タ及びそれを用いた酸素センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69927433D1 DE69927433D1 (de) | 2006-02-09 |
| DE69927433T2 true DE69927433T2 (de) | 2006-06-22 |
Family
ID=26409622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69927433T Expired - Lifetime DE69927433T2 (de) | 1998-06-05 | 1999-06-03 | Keramisches Heizelement und dasselbe benützender Sauerstoffühler |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6169275B1 (enExample) |
| EP (1) | EP0963137B1 (enExample) |
| JP (1) | JP2000058237A (enExample) |
| DE (1) | DE69927433T2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016120536A1 (de) * | 2016-10-27 | 2018-05-03 | Heraeus Noblelight Gmbh | Infrarotstrahler |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000277240A (ja) * | 1999-03-26 | 2000-10-06 | Ibiden Co Ltd | セラミックヒーター |
| DE10012245A1 (de) * | 2000-03-14 | 2001-10-04 | Bosch Gmbh Robert | Keramischer Grünkörper mit einer platinhaltigen, photostrukturierbaren Funktionsschicht und Verfahren zu dessen Herstellung |
| JP3516392B2 (ja) * | 2000-06-16 | 2004-04-05 | イビデン株式会社 | 半導体製造・検査装置用ホットプレート |
| DE10052948A1 (de) * | 2000-10-25 | 2002-05-08 | Dittrich Elektronic Gmbh & Co | Heizelement |
| JP4524910B2 (ja) * | 2000-12-08 | 2010-08-18 | 株式会社デンソー | 積層型ガスセンサ及びそれを用いたガス濃度検出装置 |
| DE10339458A1 (de) * | 2002-08-28 | 2004-03-25 | Denso Corp., Kariya | Gasmessfühler und Verfahren zu dessen Herstellung |
| US20040222210A1 (en) * | 2003-05-08 | 2004-11-11 | Hongy Lin | Multi-zone ceramic heating system and method of manufacture thereof |
| DE10359569A1 (de) * | 2003-12-18 | 2005-07-28 | Robert Bosch Gmbh | Keramischer Schichtverbund |
| KR100908429B1 (ko) | 2003-12-24 | 2009-07-21 | 쿄세라 코포레이션 | 세라믹 히터 및 그 제조 방법 |
| JP4884103B2 (ja) * | 2005-06-29 | 2012-02-29 | 京セラ株式会社 | セラミックヒータおよびガスセンサ素子 |
| US7999211B2 (en) * | 2006-09-01 | 2011-08-16 | Hewlett-Packard Development Company, L.P. | Heating element structure with isothermal and localized output |
| JP4826461B2 (ja) * | 2006-12-15 | 2011-11-30 | 株式会社デンソー | セラミックヒータ及びこれを用いたガスセンサ素子 |
| KR100963224B1 (ko) * | 2009-02-03 | 2010-06-10 | (주) 더몰론코리아 | 물 또는 공기 중에서 겸용 사용이 가능한 세라믹 코팅 히터 |
| CN103229590A (zh) * | 2010-10-12 | 2013-07-31 | 马克卡车公司 | 用于气液混合环境的受热传感器元件 |
| US8546732B2 (en) | 2010-11-10 | 2013-10-01 | Lam Research Corporation | Heating plate with planar heater zones for semiconductor processing |
| CN103748460A (zh) * | 2011-08-26 | 2014-04-23 | 罗伯特·博世有限公司 | 用于获取测量气体空间中气体的至少一个性能的传感器元件 |
| JP5403017B2 (ja) | 2011-08-30 | 2014-01-29 | 株式会社デンソー | セラミックヒータ及びそれを用いたガスセンサ素子 |
| JP6227300B2 (ja) * | 2013-06-27 | 2017-11-08 | 日本特殊陶業株式会社 | ヒータおよびガスセンサ素子 |
| CN104185317B (zh) * | 2014-08-14 | 2016-09-07 | 厦门格睿伟业电子科技有限公司 | 一种双层包压陶瓷发热管 |
| JP6769650B2 (ja) * | 2015-08-21 | 2020-10-14 | 日本碍子株式会社 | セラミックスヒータ，センサ素子及びガスセンサ |
| JP6796358B2 (ja) | 2015-08-21 | 2020-12-09 | 日本碍子株式会社 | セラミックスヒータ，センサ素子及びガスセンサ |
| US10712307B2 (en) | 2015-08-21 | 2020-07-14 | Ngk Insulators, Ltd. | Ceramic heater, sensor element, and gas sensor |
| DE102015223493A1 (de) | 2015-11-26 | 2017-06-01 | E.G.O. Elektro-Gerätebau GmbH | Heizeinrichtung |
| WO2017159144A1 (ja) * | 2016-03-16 | 2017-09-21 | 日本特殊陶業株式会社 | セラミックヒータ |
| US10707067B2 (en) * | 2016-09-22 | 2020-07-07 | Heraeus Noblelight Gmbh | Infrared radiating element |
| DE102016118137A1 (de) * | 2016-09-26 | 2018-03-29 | Heraeus Noblelight Gmbh | Infrarotflächenstrahler |
| JP6792539B2 (ja) * | 2017-10-31 | 2020-11-25 | 日本特殊陶業株式会社 | 流体加熱用のセラミックヒータ |
| GB201800548D0 (en) * | 2018-01-12 | 2018-02-28 | Project Paradise Ltd | A Method of printing an electric heating element, and an electric heating element produced thereby |
| CN207869432U (zh) * | 2018-03-07 | 2018-09-14 | 东莞市国研电热材料有限公司 | 一种多温区陶瓷发热体 |
| US11937342B2 (en) * | 2019-09-23 | 2024-03-19 | Battelle Memorial Institute | Spot heater |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3875413A (en) * | 1973-10-09 | 1975-04-01 | Hewlett Packard Co | Infrared radiation source |
| JPS61109289A (ja) * | 1984-11-01 | 1986-05-27 | 日本碍子株式会社 | セラミツクヒ−タおよびその製造方法 |
| JPH01194282A (ja) * | 1988-01-28 | 1989-08-04 | Ngk Insulators Ltd | セラミック・ヒータ及び電気化学的素子並びに酸素分析装置 |
| JP2535372B2 (ja) * | 1988-03-09 | 1996-09-18 | 日本碍子株式会社 | セラミック・ヒ―タ及び電気化学的素子並びに酸素分析装置 |
| JPH01313362A (ja) * | 1988-06-09 | 1989-12-18 | Ngk Spark Plug Co Ltd | セラミック発熱体およびその製造方法 |
| EP0360418B1 (en) * | 1988-08-25 | 1995-02-15 | Toshiba Lighting & Technology Corporation | Strip heater |
| JP3020013B2 (ja) | 1991-08-02 | 2000-03-15 | 日本特殊陶業株式会社 | 酸素センサ用セラミックヒータ |
| JP3016669B2 (ja) | 1992-12-17 | 2000-03-06 | 日本特殊陶業株式会社 | セラミックヒータ |
| US5705261A (en) * | 1993-10-28 | 1998-01-06 | Saint-Gobain/Norton Industrial Ceramics Corporation | Active metal metallization of mini-igniters by silk screening |
| JP2828575B2 (ja) * | 1993-11-12 | 1998-11-25 | 京セラ株式会社 | 窒化珪素質セラミックヒータ |
| US5895591A (en) * | 1994-07-06 | 1999-04-20 | Ngk Spark Plug Co., Ltd. | Ceramic heater and oxygen sensor |
| JP3523937B2 (ja) * | 1994-07-06 | 2004-04-26 | 日本特殊陶業株式会社 | センサ用セラミックヒータ及び酸素センサ |
| JP3230793B2 (ja) * | 1995-01-24 | 2001-11-19 | 富士電機株式会社 | セラミックス発熱体 |
| JP3110974B2 (ja) | 1995-05-16 | 2000-11-20 | 日本特殊陶業株式会社 | メタライズ発熱層を有するアルミナ質セラミックヒータ |
| JPH0949818A (ja) | 1995-08-07 | 1997-02-18 | Ngk Spark Plug Co Ltd | ガス検出センサ用ヒータ及び電力制御装置 |
| JP3182639B2 (ja) | 1995-08-10 | 2001-07-03 | 日本特殊陶業株式会社 | セラミックヒータ及びその製造方法 |
| CA2243249C (en) * | 1996-01-26 | 2003-06-03 | Saint-Gobain Industrial Ceramics, Inc. | Novel ceramic igniter and method of using the same |
| JPH09266059A (ja) | 1996-03-29 | 1997-10-07 | Ngk Spark Plug Co Ltd | セラミックヒータ及びその製造方法 |
| JPH10104067A (ja) * | 1996-09-27 | 1998-04-24 | Fuji Electric Co Ltd | 二珪化モリブデン複合セラミックス赤外線光源もしくは発熱源 |
-
1999
- 1999-03-15 JP JP11068394A patent/JP2000058237A/ja active Pending
- 1999-06-03 DE DE69927433T patent/DE69927433T2/de not_active Expired - Lifetime
- 1999-06-03 EP EP99304357A patent/EP0963137B1/en not_active Expired - Lifetime
- 1999-06-03 US US09/325,173 patent/US6169275B1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016120536A1 (de) * | 2016-10-27 | 2018-05-03 | Heraeus Noblelight Gmbh | Infrarotstrahler |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0963137A3 (en) | 2001-10-10 |
| EP0963137A2 (en) | 1999-12-08 |
| DE69927433D1 (de) | 2006-02-09 |
| US6169275B1 (en) | 2001-01-02 |
| JP2000058237A (ja) | 2000-02-25 |
| EP0963137B1 (en) | 2005-09-28 |
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| 8364 | No opposition during term of opposition |