DE69711131D1 - Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator - Google Patents

Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator

Info

Publication number
DE69711131D1
DE69711131D1 DE69711131T DE69711131T DE69711131D1 DE 69711131 D1 DE69711131 D1 DE 69711131D1 DE 69711131 T DE69711131 T DE 69711131T DE 69711131 T DE69711131 T DE 69711131T DE 69711131 D1 DE69711131 D1 DE 69711131D1
Authority
DE
Germany
Prior art keywords
resonator
production
electronic component
piezoelectric
piezoelectric resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69711131T
Other languages
English (en)
Other versions
DE69711131T2 (de
Inventor
Toshihiko Unami
Tetsuo Takeshima
Toshiyuki Baba
Shigemasa Kusabiraki
Hirohide Yoshino
Jiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69711131D1 publication Critical patent/DE69711131D1/de
Publication of DE69711131T2 publication Critical patent/DE69711131T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69711131T 1996-08-05 1997-04-01 Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator Expired - Lifetime DE69711131T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22302896A JP3577170B2 (ja) 1996-08-05 1996-08-05 圧電共振子とその製造方法およびそれを用いた電子部品

Publications (2)

Publication Number Publication Date
DE69711131D1 true DE69711131D1 (de) 2002-04-25
DE69711131T2 DE69711131T2 (de) 2002-10-31

Family

ID=16791717

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69711131T Expired - Lifetime DE69711131T2 (de) 1996-08-05 1997-04-01 Piezoelektrischer Resonator, Verfahren zu seiner Herstellung, und elektronisches Bauelement mit diesem Resonator

Country Status (6)

Country Link
US (1) US5900790A (de)
EP (1) EP0823781B1 (de)
JP (1) JP3577170B2 (de)
CN (2) CN1085442C (de)
DE (1) DE69711131T2 (de)
NO (1) NO971935L (de)

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JP3368214B2 (ja) * 1997-10-01 2003-01-20 株式会社村田製作所 ラダーフィルタおよび通信機器
JP3262050B2 (ja) * 1997-10-03 2002-03-04 株式会社村田製作所 電子部品およびラダーフィルタ
JP3262076B2 (ja) * 1997-10-03 2002-03-04 株式会社村田製作所 圧電共振子、圧電共振子の周波数調整方法および通信機器
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JP3729103B2 (ja) 2001-08-28 2005-12-21 株式会社村田製作所 圧電装置、ラダー型フィルタ及び圧電装置の製造方法
JP2003124766A (ja) * 2001-10-17 2003-04-25 Murata Mfg Co Ltd 積層型圧電共振子の製造方法
TW573375B (en) * 2001-12-17 2004-01-21 Intel Corp Film bulk acoustic resonator structure and method of making
US6822535B2 (en) * 2001-12-17 2004-11-23 Intel Corporation Film bulk acoustic resonator structure and method of making
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EP2056442B1 (de) * 2006-08-23 2014-04-30 NGK Insulators, Ltd. Piezoelektrisches aktorelement für einen ultraschallmotor
US8816567B2 (en) * 2011-07-19 2014-08-26 Qualcomm Mems Technologies, Inc. Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
JP6171516B2 (ja) * 2013-04-12 2017-08-02 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、電子機器、および移動体
CN204119569U (zh) * 2013-06-24 2015-01-21 上海科斗电子科技有限公司 电致发光条、电致发光片及电致发光显示器
CN108540105A (zh) * 2018-04-11 2018-09-14 武汉大学 射频谐振器结构
CN110190826B (zh) * 2019-05-31 2020-10-02 厦门市三安集成电路有限公司 谐振薄膜层、谐振器和滤波器

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Also Published As

Publication number Publication date
JPH1051261A (ja) 1998-02-20
DE69711131T2 (de) 2002-10-31
CN1198390C (zh) 2005-04-20
NO971935L (no) 1998-02-06
EP0823781A3 (de) 1998-09-02
CN1395367A (zh) 2003-02-05
US5900790A (en) 1999-05-04
CN1173080A (zh) 1998-02-11
CN1085442C (zh) 2002-05-22
EP0823781A2 (de) 1998-02-11
EP0823781B1 (de) 2002-03-20
NO971935D0 (no) 1997-04-25
JP3577170B2 (ja) 2004-10-13

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Legal Events

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8364 No opposition during term of opposition