DE69406271T2 - Piezoelektrisches bauelement und verfahren zu seiner herstellung - Google Patents

Piezoelektrisches bauelement und verfahren zu seiner herstellung

Info

Publication number
DE69406271T2
DE69406271T2 DE69406271T DE69406271T DE69406271T2 DE 69406271 T2 DE69406271 T2 DE 69406271T2 DE 69406271 T DE69406271 T DE 69406271T DE 69406271 T DE69406271 T DE 69406271T DE 69406271 T2 DE69406271 T2 DE 69406271T2
Authority
DE
Germany
Prior art keywords
production
piezoelectric component
piezoelectric
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69406271T
Other languages
English (en)
Other versions
DE69406271D1 (de
Inventor
Thierry Feral
Bernard Fromont
Ronan Stephan
Eric Sernit
Olivier Lacour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Application granted granted Critical
Publication of DE69406271D1 publication Critical patent/DE69406271D1/de
Publication of DE69406271T2 publication Critical patent/DE69406271T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure of cylindrical shape with stacking in radial direction, e.g. coaxial or spiral type rolls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
DE69406271T 1993-01-29 1994-01-11 Piezoelektrisches bauelement und verfahren zu seiner herstellung Expired - Fee Related DE69406271T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9300949A FR2701188B1 (fr) 1993-01-29 1993-01-29 Procédé de fabrication de composant piézoélectrique.
PCT/FR1994/000031 WO1994017562A1 (fr) 1993-01-29 1994-01-11 Procede de fabrication de composant piezoelectrique

Publications (2)

Publication Number Publication Date
DE69406271D1 DE69406271D1 (de) 1997-11-20
DE69406271T2 true DE69406271T2 (de) 1998-02-12

Family

ID=9443510

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69406271T Expired - Fee Related DE69406271T2 (de) 1993-01-29 1994-01-11 Piezoelektrisches bauelement und verfahren zu seiner herstellung

Country Status (6)

Country Link
US (1) US5703425A (de)
EP (1) EP0681746B1 (de)
CA (1) CA2154666A1 (de)
DE (1) DE69406271T2 (de)
FR (1) FR2701188B1 (de)
WO (1) WO1994017562A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2740644B1 (fr) * 1995-10-26 1997-11-28 Gemplus Sca Procede de fabrication d'un transducteur sonore integre dans une carte a production de signaux acoustiques
JPH11341838A (ja) * 1998-05-20 1999-12-10 Tokin Ceramics Corp 積層型圧電アクチュエータ
JP2006512750A (ja) * 2002-09-11 2006-04-13 シーメンス　アクチエンゲゼルシヤフト 均一なセラミック層を有するセラミック体およびセラミック体の製造方法
US8756776B1 (en) 2005-12-09 2014-06-24 Western Digital Technologies, Inc. Method for manufacturing a disk drive microactuator that includes a piezoelectric element and a peripheral encapsulation layer
FR2925765B1 (fr) * 2007-12-21 2009-12-04 E2V Semiconductors Procede de fabrication de capteurs a couche de co-polymere p(vdf-trfe) et capteur correspondant
ITTO20080180A1 (it) * 2008-03-10 2009-09-11 Fondazione Istituto Italiano Di Tecnologia Procedimento ed apparecchiatura per la fabbricazione di attuatori polimerici multistrato adatti alla realizzazione di un muscolo artificiale.
JP5235090B2 (ja) * 2008-03-28 2013-07-10 富士フイルム株式会社 積層型圧電素子及びその製造方法
US8643980B1 (en) 2008-12-15 2014-02-04 Western Digital (Fremont), Llc Micro-actuator enabling single direction motion of a magnetic disk drive head
ITMC20110062A1 (it) * 2011-11-10 2013-05-11 Zeta Energy S R L Bagaglio dotato di mezzi per il recupero e la trasformazione dell'energia ricavata dalle azioni dinamiche derivanti dal moto del bagaglio stesso.
EP3041059B1 (de) * 2014-12-31 2019-09-11 LG Display Co., Ltd. Vielschichtaktuator und anzeigevorrichtung die diesen beinhaltet

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2901644A (en) * 1955-12-05 1959-08-25 Tibbetts Lab Inc Electromechanical device and method of making same
US3155926A (en) * 1962-03-22 1964-11-03 Bell Telephone Labor Inc Ultrasonic strip delay lines
US3781955A (en) * 1970-12-21 1974-01-01 V Lavrinenko Method of making a piezoelectric element
GB1474369A (en) * 1974-05-29 1977-05-25 Secr Defence Laminated piezoelectric transducers
US4079437A (en) * 1976-04-30 1978-03-14 Minnesota Mining And Manufacturing Machine and method for poling films of pyroelectric and piezoelectric material
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
US4435667A (en) * 1982-04-28 1984-03-06 Peizo Electric Products, Inc. Spiral piezoelectric rotary actuator
US4833659A (en) * 1984-12-27 1989-05-23 Westinghouse Electric Corp. Sonar apparatus
US4632856A (en) * 1985-02-06 1986-12-30 Marcus Michael A Multilayer thin film electrical devices free of adhesive
US4879698A (en) * 1988-11-03 1989-11-07 Sensor Electronics, Inc. Piezopolymer actuators
US5559387A (en) * 1994-05-13 1996-09-24 Beurrier; Henry R. Piezoelectric actuators

Also Published As

Publication number Publication date
EP0681746B1 (de) 1997-10-15
CA2154666A1 (fr) 1994-08-04
DE69406271D1 (de) 1997-11-20
FR2701188B1 (fr) 1995-03-03
WO1994017562A1 (fr) 1994-08-04
FR2701188A1 (fr) 1994-08-05
EP0681746A1 (de) 1995-11-15
US5703425A (en) 1997-12-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee