DE69406271D1 - Piezoelektrisches bauelement und verfahren zu seiner herstellung - Google Patents
Piezoelektrisches bauelement und verfahren zu seiner herstellungInfo
- Publication number
- DE69406271D1 DE69406271D1 DE69406271T DE69406271T DE69406271D1 DE 69406271 D1 DE69406271 D1 DE 69406271D1 DE 69406271 T DE69406271 T DE 69406271T DE 69406271 T DE69406271 T DE 69406271T DE 69406271 D1 DE69406271 D1 DE 69406271D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- piezoelectric component
- piezoelectric
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/098—Forming organic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
- H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9300949A FR2701188B1 (fr) | 1993-01-29 | 1993-01-29 | Procédé de fabrication de composant piézoélectrique. |
PCT/FR1994/000031 WO1994017562A1 (fr) | 1993-01-29 | 1994-01-11 | Procede de fabrication de composant piezoelectrique |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69406271D1 true DE69406271D1 (de) | 1997-11-20 |
DE69406271T2 DE69406271T2 (de) | 1998-02-12 |
Family
ID=9443510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69406271T Expired - Fee Related DE69406271T2 (de) | 1993-01-29 | 1994-01-11 | Piezoelektrisches bauelement und verfahren zu seiner herstellung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5703425A (de) |
EP (1) | EP0681746B1 (de) |
CA (1) | CA2154666A1 (de) |
DE (1) | DE69406271T2 (de) |
FR (1) | FR2701188B1 (de) |
WO (1) | WO1994017562A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2740644B1 (fr) * | 1995-10-26 | 1997-11-28 | Gemplus Sca | Procede de fabrication d'un transducteur sonore integre dans une carte a production de signaux acoustiques |
JPH11341838A (ja) * | 1998-05-20 | 1999-12-10 | Tokin Ceramics Corp | 積層型圧電アクチュエータ |
EP1537611A1 (de) * | 2002-09-11 | 2005-06-08 | Siemens Aktiengesellschaft | Keramischer körper mit einer homogenen keramikschicht und verfahren zum herstellen des keramischen körpers |
US8756776B1 (en) | 2005-12-09 | 2014-06-24 | Western Digital Technologies, Inc. | Method for manufacturing a disk drive microactuator that includes a piezoelectric element and a peripheral encapsulation layer |
FR2925765B1 (fr) * | 2007-12-21 | 2009-12-04 | E2V Semiconductors | Procede de fabrication de capteurs a couche de co-polymere p(vdf-trfe) et capteur correspondant |
ITTO20080180A1 (it) * | 2008-03-10 | 2009-09-11 | Fondazione Istituto Italiano Di Tecnologia | Procedimento ed apparecchiatura per la fabbricazione di attuatori polimerici multistrato adatti alla realizzazione di un muscolo artificiale. |
JP5235090B2 (ja) * | 2008-03-28 | 2013-07-10 | 富士フイルム株式会社 | 積層型圧電素子及びその製造方法 |
US8643980B1 (en) | 2008-12-15 | 2014-02-04 | Western Digital (Fremont), Llc | Micro-actuator enabling single direction motion of a magnetic disk drive head |
ITMC20110062A1 (it) * | 2011-11-10 | 2013-05-11 | Zeta Energy S R L | Bagaglio dotato di mezzi per il recupero e la trasformazione dell'energia ricavata dalle azioni dinamiche derivanti dal moto del bagaglio stesso. |
EP3041059B1 (de) * | 2014-12-31 | 2019-09-11 | LG Display Co., Ltd. | Vielschichtaktuator und anzeigevorrichtung die diesen beinhaltet |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2901644A (en) * | 1955-12-05 | 1959-08-25 | Tibbetts Lab Inc | Electromechanical device and method of making same |
US3155926A (en) * | 1962-03-22 | 1964-11-03 | Bell Telephone Labor Inc | Ultrasonic strip delay lines |
US3781955A (en) * | 1970-12-21 | 1974-01-01 | V Lavrinenko | Method of making a piezoelectric element |
GB1474369A (en) * | 1974-05-29 | 1977-05-25 | Secr Defence | Laminated piezoelectric transducers |
US4079437A (en) * | 1976-04-30 | 1978-03-14 | Minnesota Mining And Manufacturing | Machine and method for poling films of pyroelectric and piezoelectric material |
US4330730A (en) * | 1980-03-27 | 1982-05-18 | Eastman Kodak Company | Wound piezoelectric polymer flexure devices |
US4435667A (en) * | 1982-04-28 | 1984-03-06 | Peizo Electric Products, Inc. | Spiral piezoelectric rotary actuator |
US4833659A (en) * | 1984-12-27 | 1989-05-23 | Westinghouse Electric Corp. | Sonar apparatus |
US4632856A (en) * | 1985-02-06 | 1986-12-30 | Marcus Michael A | Multilayer thin film electrical devices free of adhesive |
US4879698A (en) * | 1988-11-03 | 1989-11-07 | Sensor Electronics, Inc. | Piezopolymer actuators |
US5559387A (en) * | 1994-05-13 | 1996-09-24 | Beurrier; Henry R. | Piezoelectric actuators |
-
1993
- 1993-01-29 FR FR9300949A patent/FR2701188B1/fr not_active Expired - Fee Related
-
1994
- 1994-01-11 CA CA002154666A patent/CA2154666A1/fr not_active Abandoned
- 1994-01-11 WO PCT/FR1994/000031 patent/WO1994017562A1/fr active IP Right Grant
- 1994-01-11 DE DE69406271T patent/DE69406271T2/de not_active Expired - Fee Related
- 1994-01-11 EP EP94904220A patent/EP0681746B1/de not_active Expired - Lifetime
- 1994-01-11 US US08/495,677 patent/US5703425A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2701188A1 (fr) | 1994-08-05 |
US5703425A (en) | 1997-12-30 |
EP0681746B1 (de) | 1997-10-15 |
WO1994017562A1 (fr) | 1994-08-04 |
CA2154666A1 (fr) | 1994-08-04 |
EP0681746A1 (de) | 1995-11-15 |
DE69406271T2 (de) | 1998-02-12 |
FR2701188B1 (fr) | 1995-03-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |