DE69501222D1 - Plasmabehandlungskammer und Verfahren zur Behandlung der Substraten in einer Plasmabehandlungskammer - Google Patents

Plasmabehandlungskammer und Verfahren zur Behandlung der Substraten in einer Plasmabehandlungskammer

Info

Publication number
DE69501222D1
DE69501222D1 DE69501222T DE69501222T DE69501222D1 DE 69501222 D1 DE69501222 D1 DE 69501222D1 DE 69501222 T DE69501222 T DE 69501222T DE 69501222 T DE69501222 T DE 69501222T DE 69501222 D1 DE69501222 D1 DE 69501222D1
Authority
DE
Germany
Prior art keywords
plasma treatment
treatment chamber
substrates
treating
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69501222T
Other languages
English (en)
Other versions
DE69501222T2 (de
Inventor
Charles N Dornfest
John White
Craig Bercaw
Steve Tomozawa
Mark Fodor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22796865&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69501222(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE69501222D1 publication Critical patent/DE69501222D1/de
Publication of DE69501222T2 publication Critical patent/DE69501222T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32495—Means for protecting the vessel against plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
DE69501222T 1994-03-15 1995-03-15 Plasmabehandlungskammer und Verfahren zur Behandlung der Substraten in einer Plasmabehandlungskammer Expired - Fee Related DE69501222T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/213,880 US5680013A (en) 1994-03-15 1994-03-15 Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces

Publications (2)

Publication Number Publication Date
DE69501222D1 true DE69501222D1 (de) 1998-01-29
DE69501222T2 DE69501222T2 (de) 1998-07-09

Family

ID=22796865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69501222T Expired - Fee Related DE69501222T2 (de) 1994-03-15 1995-03-15 Plasmabehandlungskammer und Verfahren zur Behandlung der Substraten in einer Plasmabehandlungskammer

Country Status (5)

Country Link
US (2) US5680013A (de)
EP (1) EP0673056B1 (de)
JP (1) JPH0871408A (de)
KR (1) KR100242897B1 (de)
DE (1) DE69501222T2 (de)

Families Citing this family (154)

* Cited by examiner, † Cited by third party
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EP0673056A1 (de) 1995-09-20
DE69501222T2 (de) 1998-07-09
US5959409A (en) 1999-09-28
JPH0871408A (ja) 1996-03-19
KR950032709A (ko) 1995-12-22
KR100242897B1 (ko) 2000-03-02
US5680013A (en) 1997-10-21

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