DE69829625D1 - Verfahren und Vorrichtung zur Behandlung von Perfluorokohlenstoff - Google Patents
Verfahren und Vorrichtung zur Behandlung von PerfluorokohlenstoffInfo
- Publication number
- DE69829625D1 DE69829625D1 DE69829625T DE69829625T DE69829625D1 DE 69829625 D1 DE69829625 D1 DE 69829625D1 DE 69829625 T DE69829625 T DE 69829625T DE 69829625 T DE69829625 T DE 69829625T DE 69829625 D1 DE69829625 D1 DE 69829625D1
- Authority
- DE
- Germany
- Prior art keywords
- perfluorocarbon
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
- B01J4/002—Nozzle-type elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
- B01D47/063—Spray cleaning with two or more jets impinging against each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/346—Controlling the process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8659—Removing halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8659—Removing halogens or halogen compounds
- B01D53/8662—Organic halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/26—Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/02—Boron or aluminium; Oxides or hydroxides thereof
- B01J21/04—Alumina
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0207—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly horizontal
- B01J8/0221—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly horizontal in a cylindrical shaped bed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0242—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical
- B01J8/025—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical in a cylindrical shaped bed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0278—Feeding reactive fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0285—Heating or cooling the reactor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00026—Controlling or regulating the heat exchange system
- B01J2208/00035—Controlling or regulating the heat exchange system involving measured parameters
- B01J2208/00044—Temperature measurement
- B01J2208/00061—Temperature measurement of the reactants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00106—Controlling the temperature by indirect heat exchange
- B01J2208/00168—Controlling the temperature by indirect heat exchange with heat exchange elements outside the bed of solid particles
- B01J2208/00203—Coils
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00327—Controlling the temperature by direct heat exchange
- B01J2208/00336—Controlling the temperature by direct heat exchange adding a temperature modifying medium to the reactants
- B01J2208/00353—Non-cryogenic fluids
- B01J2208/00362—Liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00407—Controlling the temperature using electric heating or cooling elements outside the reactor bed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00415—Controlling the temperature using electric heating or cooling elements electric resistance heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00477—Controlling the temperature by thermal insulation means
- B01J2208/00495—Controlling the temperature by thermal insulation means using insulating materials or refractories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/0053—Controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00796—Details of the reactor or of the particulate material
- B01J2208/00805—Details of the particulate material
- B01J2208/00814—Details of the particulate material the particulate material being provides in prefilled containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00796—Details of the reactor or of the particulate material
- B01J2208/00823—Mixing elements
- B01J2208/00831—Stationary elements
- B01J2208/0084—Stationary elements inside the bed, e.g. baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00796—Details of the reactor or of the particulate material
- B01J2208/00884—Means for supporting the bed of particles, e.g. grids, bars, perforated plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00006—Large-scale industrial plants
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Fluid Mechanics (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31308997 | 1997-11-14 | ||
JP31308997 | 1997-11-14 | ||
JP14574898 | 1998-05-27 | ||
JP14574898 | 1998-05-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69829625D1 true DE69829625D1 (de) | 2005-05-12 |
DE69829625T2 DE69829625T2 (de) | 2005-09-15 |
Family
ID=26476794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69829625T Expired - Lifetime DE69829625T2 (de) | 1997-11-14 | 1998-11-09 | Verfahren und Vorrichtung zur Behandlung von Perfluorkohlenstoff |
Country Status (6)
Country | Link |
---|---|
US (2) | US7141221B2 (de) |
EP (1) | EP0916388B1 (de) |
KR (1) | KR100509304B1 (de) |
DE (1) | DE69829625T2 (de) |
SG (1) | SG71863A1 (de) |
TW (1) | TW550112B (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1129775A4 (de) * | 1998-08-17 | 2002-05-02 | Ebara Corp | Verfahren und vorrichtung zur behandlung von abgas mit fluor-verbindungen |
US6689252B1 (en) | 1999-07-28 | 2004-02-10 | Applied Materials, Inc. | Abatement of hazardous gases in effluent |
WO2001008786A1 (en) * | 1999-07-28 | 2001-02-08 | Applied Materials, Inc. | Method and apparatus for catalytic conversion of fluorinated compounds in gases |
US6361706B1 (en) * | 1999-08-13 | 2002-03-26 | Philips Electronics North America Corp. | Method for reducing the amount of perfluorocompound gas contained in exhaust emissions from plasma processing |
JP3976459B2 (ja) | 1999-11-18 | 2007-09-19 | 株式会社荏原製作所 | フッ素含有化合物を含む排ガスの処理方法及び装置 |
JP3994605B2 (ja) * | 1999-11-26 | 2007-10-24 | 株式会社日立製作所 | Pfcガスの処理方法及び処理装置 |
GB0101769D0 (en) * | 2001-01-24 | 2001-03-07 | Ineos Fluor Ltd | Decomposition of fluorine compounds |
JP4211227B2 (ja) * | 2001-03-16 | 2009-01-21 | 株式会社日立製作所 | 過弗化物の処理方法及びその処理装置 |
US6824748B2 (en) | 2001-06-01 | 2004-11-30 | Applied Materials, Inc. | Heated catalytic treatment of an effluent gas from a substrate fabrication process |
US7160521B2 (en) | 2001-07-11 | 2007-01-09 | Applied Materials, Inc. | Treatment of effluent from a substrate processing chamber |
CN101417205B (zh) * | 2001-12-04 | 2011-06-15 | 株式会社荏原制作所 | 处理废气的方法和装置 |
JP4214717B2 (ja) * | 2002-05-31 | 2009-01-28 | 株式会社日立製作所 | 過弗化物処理装置 |
JP2004082013A (ja) * | 2002-08-28 | 2004-03-18 | Hitachi Ltd | パーフルオロコンパウンド分解方法,分解触媒及び処理装置 |
KR101097240B1 (ko) * | 2003-04-01 | 2011-12-21 | 가부시키가이샤 에바라 세이사꾸쇼 | 배기 가스 처리 방법 및 장치 |
DE102004022092A1 (de) * | 2004-05-05 | 2005-11-24 | Bauer-Kompressoren Heinz Bauer | Oxidationskatalytische Abtrennvorrichtung |
JP4218618B2 (ja) * | 2004-09-10 | 2009-02-04 | 株式会社日立製作所 | 排ガス分解処理装置 |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US8095240B2 (en) | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
US7682574B2 (en) | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
GB0520468D0 (en) * | 2005-10-07 | 2005-11-16 | Boc Group Plc | Fluorine abatement |
CN101300411B (zh) | 2005-10-31 | 2012-10-03 | 应用材料公司 | 制程减降反应器 |
US20080003157A1 (en) * | 2006-02-11 | 2008-01-03 | Applied Materials, Inc. | Methods and apparatus for pfc abatement using a cdo chamber |
KR100742271B1 (ko) * | 2006-03-30 | 2007-07-24 | 고등기술연구원연구조합 | 고온 반응기 시스템의 급속냉각장치 |
KR100743399B1 (ko) * | 2006-06-15 | 2007-07-27 | 주식회사 에코프로 | 반도체 제조공정에서 발생하는 염소가스와 과불화물의처리장치 |
KR100801265B1 (ko) * | 2006-11-30 | 2008-02-11 | 주식회사 코캣 | 과불화화합물 분해시 발생하는 부생성물을 처리하는 배가스처리장치 및 방법 |
US8591819B2 (en) * | 2006-12-05 | 2013-11-26 | Ebara Corporation | Combustion-type exhaust gas treatment apparatus |
KR100954107B1 (ko) * | 2006-12-27 | 2010-04-23 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
JP2008181968A (ja) * | 2007-01-23 | 2008-08-07 | Toshiba Corp | 半導体製造システムおよび半導体装置の製造方法 |
US20080260575A1 (en) * | 2007-04-17 | 2008-10-23 | Honeywell International Inc. | Two-stage catox apparatus and process |
KR100907444B1 (ko) * | 2007-09-18 | 2009-07-10 | 한국화학연구원 | 입자상 물질에 대한 저항성을 갖는 촉매식 과불화 화합물처리 장치 및 방법 |
JP2011501102A (ja) | 2007-10-26 | 2011-01-06 | アプライド マテリアルズ インコーポレイテッド | 改良された燃料回路を使用した高性能な除害の方法及び装置 |
KR100978350B1 (ko) * | 2008-04-08 | 2010-08-26 | (주)이에이앤지 | 과불화화합물 가스 처리용 고온 스크러버 |
TWI452946B (zh) * | 2009-12-29 | 2014-09-11 | Univ Nat Yunlin Sci & Tech | Plasma reaction device |
CN102773013B (zh) * | 2012-07-23 | 2014-11-05 | 昆明理工大学 | 一种净化工业尾气中四氟化硅的方法 |
JP6343120B2 (ja) * | 2013-03-19 | 2018-06-13 | 昭和電工株式会社 | 過弗化物の処理装置、過弗化物の処理方法およびプログラム |
KR101638325B1 (ko) | 2014-09-03 | 2016-07-12 | 노영석 | 분리막시스템과 스크러버가 일체로 이루어지는 과불화화합물 분리시스템 |
US10375901B2 (en) | 2014-12-09 | 2019-08-13 | Mtd Products Inc | Blower/vacuum |
KR20190085358A (ko) | 2018-01-10 | 2019-07-18 | 김진홍 | 메탄올 수용액을 이용하여 유해한 불소화합물을 제거하는 장치 및 방법 |
WO2020149758A1 (en) | 2019-01-18 | 2020-07-23 | Inovacioni Centar Tehnolosko-Metalurskog Fakulteta U Beogradu Doo Beograd (Palilula) | Catalyst for the decomposition of organohalogen refrigerant fluids |
CN110917752A (zh) * | 2019-12-13 | 2020-03-27 | 扬州鑫科环保成套设备有限公司 | 一种喷漆废气过滤器滤袋喷粉预涂工艺 |
CN113163083B (zh) * | 2021-03-30 | 2022-08-30 | 盛泰光电科技股份有限公司 | 用于摄像头模组的生产方法 |
Family Cites Families (23)
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JPH0649086B2 (ja) * | 1989-08-05 | 1994-06-29 | 三井・デュポンフロロケミカル株式会社 | 塩弗化アルカンの接触分解法 |
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AT404431B (de) * | 1993-09-09 | 1998-11-25 | Chemie Linz Gmbh | Verfahren zur umweltgerechten entsorgung von triazinabfällen |
FI94515B (fi) * | 1994-03-04 | 1995-06-15 | Finnish Chemicals Oy | Menetelmä hydrauskatalyytin reaktivoimiseksi |
US6030591A (en) * | 1994-04-06 | 2000-02-29 | Atmi Ecosys Corporation | Process for removing and recovering halocarbons from effluent process streams |
US5759504A (en) * | 1994-12-28 | 1998-06-02 | Hitachi, Ltd. | Method for treating organohalogen compounds with catalyst |
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DE19532279C2 (de) * | 1995-09-01 | 1998-07-23 | Cs Halbleiter Solartech | Vorrichtung zur Reinigung von Gasen, die ozonabbauende und/oder klimawirksame halogenierte Verbindungen enthalten |
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JP3713333B2 (ja) * | 1996-07-04 | 2005-11-09 | 同和鉱業株式会社 | 弗化炭素類の分解法 |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
JP3977887B2 (ja) | 1997-01-14 | 2007-09-19 | 株式会社日立製作所 | フッ素化合物含有ガスの処理方法 |
JP3553310B2 (ja) | 1997-03-11 | 2004-08-11 | 株式会社荏原製作所 | 真空排気システム |
JP3593875B2 (ja) | 1997-03-24 | 2004-11-24 | 昭和電工株式会社 | パーフルオロ化合物の接触分解方法 |
WO1998046334A1 (fr) * | 1997-04-16 | 1998-10-22 | Ebara Corporation | Procede servant a supprimer des oxydes d'azote dans des gaz d'echappement |
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EP1340533B1 (de) * | 1997-06-20 | 2010-06-16 | Hitachi, Ltd. | Verfahren, Katalysator und Vorrichtung zur Zersetzung fluorierter Verbindungen |
JP3368820B2 (ja) | 1998-02-27 | 2003-01-20 | 株式会社日立製作所 | フッ素化合物含有ガスの処理方法および触媒 |
-
1998
- 1998-10-21 TW TW087117451A patent/TW550112B/zh not_active IP Right Cessation
- 1998-11-02 SG SG1998004403A patent/SG71863A1/en unknown
- 1998-11-09 DE DE69829625T patent/DE69829625T2/de not_active Expired - Lifetime
- 1998-11-09 EP EP98309136A patent/EP0916388B1/de not_active Expired - Lifetime
- 1998-11-13 KR KR10-1998-0048707A patent/KR100509304B1/ko not_active IP Right Cessation
-
2001
- 2001-05-16 US US09/855,673 patent/US7141221B2/en not_active Expired - Lifetime
-
2006
- 2006-06-23 US US11/473,072 patent/US7641867B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7641867B2 (en) | 2010-01-05 |
US7141221B2 (en) | 2006-11-28 |
SG71863A1 (en) | 2000-04-18 |
EP0916388B1 (de) | 2005-04-06 |
DE69829625T2 (de) | 2005-09-15 |
TW550112B (en) | 2003-09-01 |
US20010031228A1 (en) | 2001-10-18 |
US20060239869A1 (en) | 2006-10-26 |
EP0916388A3 (de) | 1999-12-08 |
EP0916388A2 (de) | 1999-05-19 |
KR100509304B1 (ko) | 2005-10-26 |
KR19990045278A (ko) | 1999-06-25 |
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