DE60106577T8 - Abnehmbare Schirmvorrichtung für Plasmareaktoren - Google Patents
Abnehmbare Schirmvorrichtung für Plasmareaktoren Download PDFInfo
- Publication number
- DE60106577T8 DE60106577T8 DE60106577T DE60106577T DE60106577T8 DE 60106577 T8 DE60106577 T8 DE 60106577T8 DE 60106577 T DE60106577 T DE 60106577T DE 60106577 T DE60106577 T DE 60106577T DE 60106577 T8 DE60106577 T8 DE 60106577T8
- Authority
- DE
- Germany
- Prior art keywords
- clamping means
- substrate holder
- shield arrangement
- reactive ion
- plasma reactors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Discharge Heating (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Walking Sticks, Umbrellas, And Fans (AREA)
- Treatment Of Fiber Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01401416A EP1263025B1 (de) | 2001-05-31 | 2001-05-31 | Abnehmbare Schirmvorrichtung für Plasmareaktoren |
Publications (3)
Publication Number | Publication Date |
---|---|
DE60106577D1 DE60106577D1 (de) | 2004-11-25 |
DE60106577T2 DE60106577T2 (de) | 2006-02-09 |
DE60106577T8 true DE60106577T8 (de) | 2006-04-27 |
Family
ID=8182753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60106577T Expired - Fee Related DE60106577T8 (de) | 2001-05-31 | 2001-05-31 | Abnehmbare Schirmvorrichtung für Plasmareaktoren |
Country Status (5)
Country | Link |
---|---|
US (1) | US20020179246A1 (de) |
EP (1) | EP1263025B1 (de) |
JP (1) | JP2003092288A (de) |
AT (1) | ATE280437T1 (de) |
DE (1) | DE60106577T8 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3992018B2 (ja) * | 2003-07-23 | 2007-10-17 | 松下電器産業株式会社 | プラズマ処理装置 |
FR2875054B1 (fr) | 2004-09-08 | 2006-12-01 | Cit Alcatel | Support de substrats minces |
US7439093B2 (en) * | 2005-09-16 | 2008-10-21 | Dalsa Semiconductor Inc. | Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etch |
JP2007294812A (ja) * | 2006-04-27 | 2007-11-08 | Fujikura Ltd | 冷却装置およびプラズマ処理装置 |
US8647438B2 (en) * | 2007-04-27 | 2014-02-11 | Applied Materials, Inc. | Annular baffle |
KR20100004857A (ko) * | 2008-07-03 | 2010-01-13 | 주성엔지니어링(주) | 건식 에칭 장치 |
KR101141577B1 (ko) * | 2010-07-07 | 2012-06-08 | (주)세미머티리얼즈 | 태양전지의 플라즈마 텍스처링 장치 및 방법 |
US9136794B2 (en) | 2011-06-22 | 2015-09-15 | Research Triangle Institute, International | Bipolar microelectronic device |
CN104878363B (zh) * | 2014-02-28 | 2017-07-21 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 机械卡盘及等离子体加工设备 |
JP2016051876A (ja) * | 2014-09-02 | 2016-04-11 | パナソニックIpマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
CN107305853A (zh) * | 2016-04-18 | 2017-10-31 | 北京北方华创微电子装备有限公司 | 反应腔室 |
GR1009426B (el) | 2016-04-27 | 2019-01-15 | Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων "Δημοκριτος" | Μεταβλητος κλωβος faraday σε αντιδραστηρα πλασματος για την βαση του υποστρωματος, τον δακτυλιο συγκρατησης, ή το ηλεκτροδιο ή συνδυασμο τους |
US20220108908A1 (en) * | 2020-10-06 | 2022-04-07 | Applied Materials, Inc. | Shadow ring kit for plasma etch wafer singulation process |
US20220178021A1 (en) * | 2020-12-08 | 2022-06-09 | Skytech Co., Ltd. | Wafer fixing mechanism and wafer pre-cleaning machine using the wafer fixing mechanism |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4512283A (en) * | 1982-02-01 | 1985-04-23 | Texas Instruments Incorporated | Plasma reactor sidewall shield |
US4632719A (en) * | 1985-09-18 | 1986-12-30 | Varian Associates, Inc. | Semiconductor etching apparatus with magnetic array and vertical shield |
US5484011A (en) * | 1986-12-19 | 1996-01-16 | Applied Materials, Inc. | Method of heating and cooling a wafer during semiconductor processing |
US5215619A (en) * | 1986-12-19 | 1993-06-01 | Applied Materials, Inc. | Magnetic field-enhanced plasma etch reactor |
JPH029115A (ja) * | 1988-06-28 | 1990-01-12 | Mitsubishi Electric Corp | 半導体製造装置 |
DE3943482C2 (de) * | 1989-05-08 | 1994-07-07 | Balzers Hochvakuum | Werkstückträger für ein scheibenförmiges Werkstück, sowie Vakuumprozeßkammer |
US5292399A (en) * | 1990-04-19 | 1994-03-08 | Applied Materials, Inc. | Plasma etching apparatus with conductive means for inhibiting arcing |
US5304248A (en) * | 1990-12-05 | 1994-04-19 | Applied Materials, Inc. | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
KR960006956B1 (ko) * | 1993-02-06 | 1996-05-25 | 현대전자산업주식회사 | 이시알(ecr) 장비 |
US5680013A (en) * | 1994-03-15 | 1997-10-21 | Applied Materials, Inc. | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces |
US6117349A (en) * | 1998-08-28 | 2000-09-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Composite shadow ring equipped with a sacrificial inner ring |
US6221221B1 (en) * | 1998-11-16 | 2001-04-24 | Applied Materials, Inc. | Apparatus for providing RF return current path control in a semiconductor wafer processing system |
US6123804A (en) * | 1999-02-22 | 2000-09-26 | Applied Materials, Inc. | Sectional clamp ring |
US6709547B1 (en) * | 1999-06-30 | 2004-03-23 | Lam Research Corporation | Moveable barrier for multiple etch processes |
US6176931B1 (en) * | 1999-10-29 | 2001-01-23 | International Business Machines Corporation | Wafer clamp ring for use in an ionized physical vapor deposition apparatus |
-
2001
- 2001-05-31 AT AT01401416T patent/ATE280437T1/de not_active IP Right Cessation
- 2001-05-31 EP EP01401416A patent/EP1263025B1/de not_active Expired - Lifetime
- 2001-05-31 DE DE60106577T patent/DE60106577T8/de not_active Expired - Fee Related
-
2002
- 2002-05-28 JP JP2002153359A patent/JP2003092288A/ja active Pending
- 2002-05-30 US US10/157,198 patent/US20020179246A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1263025B1 (de) | 2004-10-20 |
DE60106577T2 (de) | 2006-02-09 |
US20020179246A1 (en) | 2002-12-05 |
DE60106577D1 (de) | 2004-11-25 |
ATE280437T1 (de) | 2004-11-15 |
JP2003092288A (ja) | 2003-03-28 |
EP1263025A1 (de) | 2002-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ALCATEL LUCENT, PARIS, FR |
|
8339 | Ceased/non-payment of the annual fee |