JPS5429977A - Detection system for position - Google Patents
Detection system for positionInfo
- Publication number
- JPS5429977A JPS5429977A JP9506277A JP9506277A JPS5429977A JP S5429977 A JPS5429977 A JP S5429977A JP 9506277 A JP9506277 A JP 9506277A JP 9506277 A JP9506277 A JP 9506277A JP S5429977 A JPS5429977 A JP S5429977A
- Authority
- JP
- Japan
- Prior art keywords
- processing
- detection system
- detection
- pattern
- compressively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To simplify the detection of a chip position by enabling an optical system to scan compressively a pattern in a fixed direction in a detection area provided onto a semiconductor wafer and by threshold-level-processing electric signals, which correspond to the only obtained bump string or a scribe line, or by matching-processing with a reference pattern.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506277A JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506277A JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5429977A true JPS5429977A (en) | 1979-03-06 |
JPS5653217B2 JPS5653217B2 (en) | 1981-12-17 |
Family
ID=14127525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9506277A Granted JPS5429977A (en) | 1977-08-10 | 1977-08-10 | Detection system for position |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429977A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54136180A (en) * | 1978-04-14 | 1979-10-23 | Hitachi Ltd | Position detecting method for chip on semiconductor wafer |
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JPS58208603A (en) * | 1982-05-31 | 1983-12-05 | Hitachi Ltd | Position detecting method |
JPS62188901A (en) * | 1987-02-06 | 1987-08-18 | Canon Inc | Optical position detector |
JPH02194200A (en) * | 1989-01-20 | 1990-07-31 | Eagle Ind Co Ltd | Additive for plating bath |
JP2017503205A (en) * | 2013-12-31 | 2017-01-26 | シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド | Focusing leveling device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE451924B (en) * | 1982-10-12 | 1987-11-02 | Ericsson Telefon Ab L M | REGULATOR FOR REGULATING A CHARGING CURRENT TO A SINGLE CELL IN A BATTERY OF CELLS |
-
1977
- 1977-08-10 JP JP9506277A patent/JPS5429977A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54136180A (en) * | 1978-04-14 | 1979-10-23 | Hitachi Ltd | Position detecting method for chip on semiconductor wafer |
JPS624851B2 (en) * | 1978-04-14 | 1987-02-02 | Hitachi Ltd | |
JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
JPS58208603A (en) * | 1982-05-31 | 1983-12-05 | Hitachi Ltd | Position detecting method |
JPS62188901A (en) * | 1987-02-06 | 1987-08-18 | Canon Inc | Optical position detector |
JPH02194200A (en) * | 1989-01-20 | 1990-07-31 | Eagle Ind Co Ltd | Additive for plating bath |
JP2017503205A (en) * | 2013-12-31 | 2017-01-26 | シャンハイ マイクロ エレクトロニクス イクイプメント カンパニー リミティド | Focusing leveling device |
Also Published As
Publication number | Publication date |
---|---|
JPS5653217B2 (en) | 1981-12-17 |
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