DE69432161T2 - Tintenstrahldruckkopf und sein Herstellungsverfahren - Google Patents

Tintenstrahldruckkopf und sein Herstellungsverfahren

Info

Publication number
DE69432161T2
DE69432161T2 DE69432161T DE69432161T DE69432161T2 DE 69432161 T2 DE69432161 T2 DE 69432161T2 DE 69432161 T DE69432161 T DE 69432161T DE 69432161 T DE69432161 T DE 69432161T DE 69432161 T2 DE69432161 T2 DE 69432161T2
Authority
DE
Germany
Prior art keywords
manufacturing process
inkjet printhead
printhead
inkjet
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69432161T
Other languages
English (en)
Other versions
DE69432161D1 (de
Inventor
Miura Suwa-Shi Kazuhiko
Furuta Tatsuo
Sakai Shinri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30115093A external-priority patent/JP3235630B2/ja
Priority claimed from JP27985793A external-priority patent/JP3141652B2/ja
Priority claimed from JP34131293A external-priority patent/JP3324622B2/ja
Priority claimed from JP32858293A external-priority patent/JP3235311B2/ja
Priority claimed from JP32858193A external-priority patent/JP3235310B2/ja
Priority claimed from JP10063694A external-priority patent/JP3419420B2/ja
Priority claimed from JP12147994A external-priority patent/JP3189575B2/ja
Priority claimed from JP16826494A external-priority patent/JP3326970B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69432161D1 publication Critical patent/DE69432161D1/de
Publication of DE69432161T2 publication Critical patent/DE69432161T2/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
DE69432161T 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren Expired - Lifetime DE69432161T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP30115093A JP3235630B2 (ja) 1993-11-05 1993-11-05 インクジェット式記録ヘッド
JP27985793A JP3141652B2 (ja) 1993-11-09 1993-11-09 インクジェットヘッドおよびインクジェットヘッドの製造方法
JP34131293A JP3324622B2 (ja) 1993-12-09 1993-12-09 シリコン単結晶基板のエッチング加工方法
JP32858193A JP3235310B2 (ja) 1993-12-24 1993-12-24 インクジェット式記録ヘッド
JP32858293A JP3235311B2 (ja) 1993-12-24 1993-12-24 インクジェット式記録ヘッド
JP10063694A JP3419420B2 (ja) 1994-04-14 1994-04-14 インクジェット式記録ヘッド
JP12147994A JP3189575B2 (ja) 1994-06-02 1994-06-02 インクジェット式記録ヘッド
JP16826494A JP3326970B2 (ja) 1994-07-20 1994-07-20 インクジェット式記録ヘッドおよびその製造方法

Publications (2)

Publication Number Publication Date
DE69432161D1 DE69432161D1 (de) 2003-03-27
DE69432161T2 true DE69432161T2 (de) 2003-07-24

Family

ID=27572947

Family Applications (5)

Application Number Title Priority Date Filing Date
DE69432197T Expired - Lifetime DE69432197T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69432160T Expired - Lifetime DE69432160T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf
DE69431315T Expired - Lifetime DE69431315T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69432161T Expired - Lifetime DE69432161T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69432136T Expired - Lifetime DE69432136T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren

Family Applications Before (3)

Application Number Title Priority Date Filing Date
DE69432197T Expired - Lifetime DE69432197T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69432160T Expired - Lifetime DE69432160T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf
DE69431315T Expired - Lifetime DE69431315T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69432136T Expired - Lifetime DE69432136T2 (de) 1993-11-05 1994-11-07 Tintenstrahldruckkopf und sein Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5956058A (de)
EP (5) EP0652108B1 (de)
DE (5) DE69432197T2 (de)
SG (4) SG75130A1 (de)

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DE69625296T2 (de) 1995-09-05 2003-07-17 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
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Also Published As

Publication number Publication date
DE69432197T2 (de) 2003-07-17
EP0980757A2 (de) 2000-02-23
DE69432197D1 (de) 2003-04-03
EP0980759B1 (de) 2003-02-19
DE69432161D1 (de) 2003-03-27
EP0980756A3 (de) 2000-12-06
DE69431315T2 (de) 2003-01-09
EP0652108A2 (de) 1995-05-10
US5956058A (en) 1999-09-21
EP0980759A2 (de) 2000-02-23
EP0980755A3 (de) 2000-12-06
EP0980759A3 (de) 2000-12-06
SG75129A1 (en) 2000-09-19
EP0980756A2 (de) 2000-02-23
SG75130A1 (en) 2000-09-19
DE69432160T2 (de) 2003-07-24
EP0980755A2 (de) 2000-02-23
DE69432136T2 (de) 2003-07-31
EP0980756B1 (de) 2003-02-26
EP0980755B1 (de) 2002-09-04
EP0980757A3 (de) 2000-12-06
US5723053A (en) 1998-03-03
SG75132A1 (en) 2000-09-19
EP0652108B1 (de) 2003-02-19
DE69432136D1 (de) 2003-03-27
SG75131A1 (en) 2000-09-19
EP0652108A3 (de) 1998-04-01
DE69431315D1 (de) 2002-10-10
DE69432160D1 (de) 2003-03-27
EP0980757B1 (de) 2003-02-19

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