DE69625296D1 - Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren - Google Patents

Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren

Info

Publication number
DE69625296D1
DE69625296D1 DE69625296T DE69625296T DE69625296D1 DE 69625296 D1 DE69625296 D1 DE 69625296D1 DE 69625296 T DE69625296 T DE 69625296T DE 69625296 T DE69625296 T DE 69625296T DE 69625296 D1 DE69625296 D1 DE 69625296D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
recording head
jet recording
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69625296T
Other languages
English (en)
Other versions
DE69625296T2 (de
Inventor
Shinji Yasukawa
Minoru Usui
Takahiro Naka
Tsuyoshi Kitahara
Noriaki Okazawa
Hideaki Sonehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP26919195A external-priority patent/JP3233189B2/ja
Priority claimed from JP26058795A external-priority patent/JP3291999B2/ja
Priority claimed from JP30662295A external-priority patent/JP3386093B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69625296D1 publication Critical patent/DE69625296D1/de
Publication of DE69625296T2 publication Critical patent/DE69625296T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69625296T 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren Expired - Lifetime DE69625296T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP25178795 1995-09-05
JP26919195A JP3233189B2 (ja) 1995-09-22 1995-09-22 インクジェット式記録ヘッド、及びその製造方法
JP26058795A JP3291999B2 (ja) 1995-10-06 1995-10-06 インクジェット式印字ヘッド
JP30662295A JP3386093B2 (ja) 1995-10-31 1995-10-31 インクジェット式記録ヘッド
JP17060596 1996-06-10

Publications (2)

Publication Number Publication Date
DE69625296D1 true DE69625296D1 (de) 2003-01-23
DE69625296T2 DE69625296T2 (de) 2003-07-17

Family

ID=27528508

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69625296T Expired - Lifetime DE69625296T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69628954T Expired - Lifetime DE69628954T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69629220T Expired - Lifetime DE69629220T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69628954T Expired - Lifetime DE69628954T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69629220T Expired - Lifetime DE69629220T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren

Country Status (3)

Country Link
US (3) US6139132A (de)
EP (3) EP0761447B1 (de)
DE (3) DE69625296T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0761447B1 (de) 1995-09-05 2002-12-11 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
JP3402349B2 (ja) 1996-01-26 2003-05-06 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
KR100514711B1 (ko) 1997-05-14 2005-09-15 세이코 엡슨 가부시키가이샤 분사 장치의 노즐 형성 방법 및 잉크 젯 헤드의 제조 방법
US6322203B1 (en) * 1998-02-19 2001-11-27 Seiko Epson Corporation Ink jet recording head and ink jet recorder
JP2000033713A (ja) 1998-07-17 2000-02-02 Seiko Epson Corp インクジェット印刷ヘッド及びインクジェットプリンタ
JP3436299B2 (ja) * 1998-08-21 2003-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
ATE255505T1 (de) * 1999-03-29 2003-12-15 Seiko Epson Corp Tintenstrahlaufzeichnungskopf, piezoelektrische vibratorelementeinheit und verfahren zur herstellung der piezoelektrischen vibratorelementeinheit
US6578953B2 (en) 1999-03-29 2003-06-17 Seiko Epson Corporation Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit
DE60040637D1 (de) 1999-08-27 2008-12-11 Oce Tech Bv Tintenstrahldruckkopfkanalstruktur
EP1078761B1 (de) * 1999-08-27 2008-10-29 Océ-Technologies B.V. Tintenstrahldruckkopfkanalstruktur
JP3389987B2 (ja) 1999-11-11 2003-03-24 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
US6631980B2 (en) 2000-01-19 2003-10-14 Seiko Epson Corporation Liquid jetting head
KR100499118B1 (ko) * 2000-02-24 2005-07-04 삼성전자주식회사 단결정 실리콘 웨이퍼를 이용한 일체형 유체 노즐어셈블리 및 그 제작방법
JP3578129B2 (ja) * 2000-10-02 2004-10-20 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP2003094633A (ja) * 2001-09-20 2003-04-03 Ricoh Co Ltd 静電インクジェットヘッドおよび記録装置
US20030140496A1 (en) * 2002-01-31 2003-07-31 Shen Buswell Methods and systems for forming slots in a semiconductor substrate
US7051426B2 (en) * 2002-01-31 2006-05-30 Hewlett-Packard Development Company, L.P. Method making a cutting disk into of a substrate
US6911155B2 (en) * 2002-01-31 2005-06-28 Hewlett-Packard Development Company, L.P. Methods and systems for forming slots in a substrate
US7121651B2 (en) * 2002-05-09 2006-10-17 Brother Kogyo Kabushiki Kaisha Droplet-jetting device with pressure chamber expandable by elongation of pressure-generating section
JP3687662B2 (ja) * 2002-07-05 2005-08-24 セイコーエプソン株式会社 液体噴射ヘッド
JP3726909B2 (ja) * 2002-07-10 2005-12-14 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
KR100571804B1 (ko) * 2003-01-21 2006-04-17 삼성전자주식회사 액적 토출기 및 이를 채용한 잉크젯 프린트헤드
US6902260B2 (en) * 2003-07-24 2005-06-07 Hewlett-Packard Development Company, L.P. Fluid ejection device adherence
US20050036004A1 (en) * 2003-08-13 2005-02-17 Barbara Horn Methods and systems for conditioning slotted substrates
JP2006068916A (ja) * 2004-08-31 2006-03-16 Ricoh Printing Systems Ltd インクジェットヘッド
JP4594262B2 (ja) * 2006-03-17 2010-12-08 日本碍子株式会社 吐出デバイス
JP2008238594A (ja) * 2007-03-27 2008-10-09 Seiko Epson Corp 液体噴射ヘッド、及び、液体噴射装置
US7874654B2 (en) * 2007-06-14 2011-01-25 Hewlett-Packard Development Company, L.P. Fluid manifold for fluid ejection device
US8177338B2 (en) * 2009-12-10 2012-05-15 Xerox Corporation High frequency mechanically actuated inkjet
JP5110105B2 (ja) * 2010-03-03 2012-12-26 株式会社豊田中央研究所 Ｍｅｍｓ構造体とその製造方法
JP5927761B2 (ja) 2011-02-04 2016-06-01 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、及び、液体噴射ヘッドの製造方法
JP6624372B2 (ja) * 2015-10-30 2019-12-25 セイコーエプソン株式会社 液体吐出装置
JP6708945B2 (ja) 2015-10-30 2020-06-10 セイコーエプソン株式会社 液体吐出装置

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55109668A (en) 1980-01-07 1980-08-23 Ricoh Co Ltd Vibrator of ink jet device
JPS608953A (ja) * 1983-06-29 1985-01-17 Omron Tateisi Electronics Co プログラム・アナライザ
JPS5994495A (ja) 1983-10-26 1984-05-31 松下電工株式会社 電磁継電器等の端子部封止装置
JPS6236478A (ja) 1985-08-10 1987-02-17 Tohoku Metal Ind Ltd 接着方法
JPH066374B2 (ja) * 1987-05-27 1994-01-26 株式会社トーキン 積層形圧電変位素子
JP3187757B2 (ja) 1987-07-10 2001-07-11 利康 鈴木 スイッチング手段の駆動回路
US5157420A (en) * 1989-08-17 1992-10-20 Takahiro Naka Ink jet recording head having reduced manufacturing steps
JP2861117B2 (ja) 1989-10-05 1999-02-24 セイコーエプソン株式会社 インクジェットプリンタヘッド及びその製造方法
JPH03187756A (ja) * 1989-12-15 1991-08-15 Sharp Corp 液滴噴出装置
JPH03187757A (ja) * 1989-12-15 1991-08-15 Sharp Corp 液滴噴出装置
JPH03187755A (ja) * 1989-12-15 1991-08-15 Sharp Corp 液滴噴出装置
JP3041952B2 (ja) * 1990-02-23 2000-05-15 セイコーエプソン株式会社 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
JPH042790A (ja) * 1990-04-18 1992-01-07 Seiko Epson Corp シリコン基板の加工方法
JPH04129745A (ja) * 1990-09-21 1992-04-30 Seiko Epson Corp インクジェットヘッド
JPH0562964A (ja) * 1990-10-12 1993-03-12 Seiko Epson Corp シリコン基板の加工方法
JP3121850B2 (ja) 1991-02-28 2001-01-09 日東電工株式会社 酸分泌抑制物質の単離方法
JP3262134B2 (ja) 1992-02-12 2002-03-04 セイコーエプソン株式会社 インクジェット記録ヘッド、及びその製造方法
JP2932877B2 (ja) * 1992-02-06 1999-08-09 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP3147132B2 (ja) * 1992-03-03 2001-03-19 セイコーエプソン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法
US5506608A (en) * 1992-04-02 1996-04-09 Hewlett-Packard Company Print cartridge body and nozzle member having similar coefficient of thermal expansion
US5537133A (en) * 1992-04-02 1996-07-16 Hewlett-Packard Company Restraining element for a print cartridge body to reduce thermally induced stress
EP0573055B1 (de) * 1992-06-05 1997-04-23 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JP3168713B2 (ja) 1992-08-06 2001-05-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
JP3125536B2 (ja) 1993-10-01 2001-01-22 セイコーエプソン株式会社 インクジェットヘッド
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP3324622B2 (ja) * 1993-12-09 2002-09-17 セイコーエプソン株式会社 シリコン単結晶基板のエッチング加工方法
JP3235635B2 (ja) * 1993-11-29 2001-12-04 セイコーエプソン株式会社 インクジェット記録ヘッド
JPH07266552A (ja) 1994-03-29 1995-10-17 Seiko Epson Corp インクジェットヘッド及び記録方法
JPH07329292A (ja) 1994-04-13 1995-12-19 Seiko Epson Corp インクジェット式記録ヘッド
EP0974466B1 (de) * 1995-04-19 2003-03-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
JP3679863B2 (ja) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
EP0761447B1 (de) 1995-09-05 2002-12-11 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
JP3187755B2 (ja) 1997-10-03 2001-07-11 株式会社小糸製作所 車両用灯具
JP3187756B2 (ja) 1997-10-20 2001-07-11 三菱レイヨン株式会社 プール水の浄化方法

Also Published As

Publication number Publication date
DE69629220D1 (de) 2003-08-28
US20020140782A1 (en) 2002-10-03
EP0761447B1 (de) 2002-12-11
EP1104697B1 (de) 2003-07-23
EP1104698A3 (de) 2002-01-09
DE69628954T2 (de) 2004-05-27
US6139132A (en) 2000-10-31
EP0761447A3 (de) 1998-11-25
EP1104698B1 (de) 2003-07-02
DE69625296T2 (de) 2003-07-17
EP0761447A2 (de) 1997-03-12
DE69629220T2 (de) 2004-04-15
EP1104697A2 (de) 2001-06-06
US6561633B2 (en) 2003-05-13
DE69628954D1 (de) 2003-08-07
EP1104698A2 (de) 2001-06-06
EP1104697A3 (de) 2002-01-09
US6460981B1 (en) 2002-10-08

Similar Documents

Publication Publication Date Title
DE69629220D1 (de) Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren
DE69306198D1 (de) Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69528444D1 (de) Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Aufzeichnungsvorrichtung
DE69717175D1 (de) Tintenstrahlaufzeichnungskopf und Herstellungsverfahren dafür
DE69627045D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69825359D1 (de) Tintenstrahlaufzeichnngsverfahren und Herstellungsverfahren dafür
DE69618156D1 (de) Strahldrucktintezusammensetzung und Aufzeichnungsverfahren
DE69823404D1 (de) Tintenstrahltinte und Tintenstrahlaufzeichnungsverfahren
GB2282992B (en) Ink jet recording head and method of manufacturing the same
DE69823783D1 (de) Tintenstrahlaufzeichnungskopfherstellungsverfahren
DE69514966D1 (de) Tintenstrahlaufzeichnungskopf
DE69515806D1 (de) Tintenstrahldrucker und reinigungsverfahren des aufzeichnungskopfes
DE69608085D1 (de) Tintenstrahl-Tinte, Tintenstrahl-Aufzeichnungsverfahren und Tintenstrahlgerät
DE69610682D1 (de) Tintenstrahlaufzeichnungskopf
DE69523422D1 (de) Tinte und Tintestrahlaufzeichnungverfahren
DE69605586D1 (de) Tintenstrahlaufzeichnungskopf
DE69424815D1 (de) Tintenstrahlaufzeichnungsgerät und sein Steuerverfahren
DE69812455D1 (de) Tintenstrahlaufzeichnungsverfahren und -gerät
DE69622354D1 (de) Tintenstrahlaufzeichnungsverfahren und -gerät
DE69526547D1 (de) Tintenstrahlaufzeichnungsgerät und Verfahren
DE69628234D1 (de) Tintenstrahlkopf, Tintenstrahlvorrichtung und Tintenstrahlaufzeichnungsverfahren
DE69724875D1 (de) Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
DE69530280D1 (de) Farbstrahldruckkopfherstellungsverfahren
GB2288766B (en) Ink jet recording head and manufacturing method suitable for the ink jet recording head
DE69632884D1 (de) Tinte und Verfahren zum Tintenstrahlaufzeichnen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition