DE69320383D1 - Tintenstrahlkopfherstellungsverfahren - Google Patents

Tintenstrahlkopfherstellungsverfahren

Info

Publication number
DE69320383D1
DE69320383D1 DE69320383T DE69320383T DE69320383D1 DE 69320383 D1 DE69320383 D1 DE 69320383D1 DE 69320383 T DE69320383 T DE 69320383T DE 69320383 T DE69320383 T DE 69320383T DE 69320383 D1 DE69320383 D1 DE 69320383D1
Authority
DE
Germany
Prior art keywords
manufacturing process
inkjet head
head manufacturing
inkjet
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320383T
Other languages
English (en)
Other versions
DE69320383T2 (de
Inventor
Minoru Usui
Takahiro Katakura
Hideaki Sonehara
Takahiro Naka
Osamu Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69320383D1 publication Critical patent/DE69320383D1/de
Publication of DE69320383T2 publication Critical patent/DE69320383T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69320383T 1992-02-06 1993-02-08 Tintenstrahlkopfherstellungsverfahren Expired - Fee Related DE69320383T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2129892 1992-02-06
JP2129692 1992-02-06
JP14577392 1992-06-05
JP4359275A JP2932877B2 (ja) 1992-02-06 1992-12-25 インクジェットヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE69320383D1 true DE69320383D1 (de) 1998-09-24
DE69320383T2 DE69320383T2 (de) 1999-05-06

Family

ID=27457556

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320383T Expired - Fee Related DE69320383T2 (de) 1992-02-06 1993-02-08 Tintenstrahlkopfherstellungsverfahren

Country Status (5)

Country Link
US (1) US5375326A (de)
EP (1) EP0554912B1 (de)
JP (1) JP2932877B2 (de)
DE (1) DE69320383T2 (de)
HK (1) HK1009947A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3147132B2 (ja) * 1992-03-03 2001-03-19 セイコーエプソン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法
JP3415260B2 (ja) * 1993-05-12 2003-06-09 セイコーエプソン株式会社 インクジェット記録ヘッド及びその製造法
GB2288766B (en) * 1994-04-26 1997-11-12 Seiko Epson Corp Ink jet recording head and manufacturing method suitable for the ink jet recording head
EP0709202B1 (de) 1994-10-31 2002-07-03 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Tintenstrahlkopfes, mit diesem Verfahren hergestellter Tintenstrahldruckkopf und Tintenstrahlvorrichtung mit diesem Druckkopf
JP3570447B2 (ja) * 1994-12-21 2004-09-29 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置
JP3679863B2 (ja) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
EP0761447B1 (de) 1995-09-05 2002-12-11 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
US6729002B1 (en) 1995-09-05 2004-05-04 Seiko Epson Corporation Method of producing an ink jet recording head
JPH11138819A (ja) * 1997-11-11 1999-05-25 Canon Inc インクジェット記録ヘッドとその製造方法、及び該インクジェット記録ヘッドを備えてなるインクジェット記録装置
US6303274B1 (en) * 1998-03-02 2001-10-16 Hewlett-Packard Company Ink chamber and orifice shape variations in an ink-jet orifice plate
JP3389986B2 (ja) * 1999-01-12 2003-03-24 セイコーエプソン株式会社 インクジェット記録ヘッド
US6294317B1 (en) 1999-07-14 2001-09-25 Xerox Corporation Patterned photoresist structures having features with high aspect ratios and method of forming such structures
US6612032B1 (en) 2000-01-31 2003-09-02 Lexmark International, Inc. Manufacturing method for ink jet pen
US6488367B1 (en) * 2000-03-14 2002-12-03 Eastman Kodak Company Electroformed metal diaphragm
US6758934B2 (en) * 2000-07-17 2004-07-06 Lexmark International, Inc. Method and apparatus for adhesively securing ink jet pen components using thin film adhesives
US6684504B2 (en) * 2001-04-09 2004-02-03 Lexmark International, Inc. Method of manufacturing an imageable support matrix for printhead nozzle plates
US20050130075A1 (en) * 2003-12-12 2005-06-16 Mohammed Shaarawi Method for making fluid emitter orifice
US20060146091A1 (en) * 2004-12-30 2006-07-06 Bertelsen Craig M Methods for reducing deformations of films in micro-fluid ejection devices
US7585616B2 (en) * 2005-01-31 2009-09-08 Hewlett-Packard Development Company, L.P. Method for making fluid emitter orifice
JP6305036B2 (ja) * 2013-11-29 2018-04-04 キヤノン株式会社 液体吐出ヘッド
CN107414421B (zh) * 2017-07-25 2018-12-04 中国科学院长春光学精密机械与物理研究所 一种易变形弹性结构的加工方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE325370B (de) * 1967-03-06 1970-06-29 Gambro Ab
JPS57182449A (en) * 1981-05-07 1982-11-10 Fuji Xerox Co Ltd Forming method of ink jet multinozzle
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS608953A (ja) * 1983-06-29 1985-01-17 Omron Tateisi Electronics Co プログラム・アナライザ
JPS60183154A (ja) * 1984-03-01 1985-09-18 Canon Inc インクジエツト記録ヘツド
JPS6123832A (ja) * 1984-07-10 1986-02-01 Nissan Motor Co Ltd 分配型燃料噴射ポンプ
JP2611981B2 (ja) * 1987-02-04 1997-05-21 キヤノン株式会社 インクジエツト記録ヘツド用基板及びインクジエツト記録ヘツド
JPS63197652A (ja) * 1987-02-13 1988-08-16 Canon Inc インクジエツト記録ヘツドおよびその製造方法
JPS63202455A (ja) * 1987-02-17 1988-08-22 Alps Electric Co Ltd インクジエツトヘツドおよびその製造方法
JPH066374B2 (ja) * 1987-05-27 1994-01-26 株式会社トーキン 積層形圧電変位素子
JPH0224220A (ja) * 1988-07-12 1990-01-26 Sanden Corp 自動車用空気調和装置
JPH0242670A (ja) * 1988-08-02 1990-02-13 Sharp Corp 磁気記録再生装置
DE69012096T2 (de) * 1990-03-22 1995-01-12 Canon Kk Flüssigkeitsstrahlaufzeichnungskopf und Aufzeichnungsgerät, versehen mit diesem Kopf.
JP2830449B2 (ja) * 1990-10-23 1998-12-02 富士ゼロックス株式会社 インクジェット記録ヘッドの製造方法
JPH04191053A (ja) * 1990-11-27 1992-07-09 Canon Inc 液体噴射記録ヘッドの製造方法

Also Published As

Publication number Publication date
DE69320383T2 (de) 1999-05-06
EP0554912B1 (de) 1998-08-19
EP0554912A3 (en) 1994-09-07
EP0554912A2 (de) 1993-08-11
US5375326A (en) 1994-12-27
JP2932877B2 (ja) 1999-08-09
JPH0647918A (ja) 1994-02-22
HK1009947A1 (en) 1999-06-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee