DE69809014T2 - Verbesserter Tintenstrahldruckkopf und dessen Herstellungsverfahren - Google Patents
Verbesserter Tintenstrahldruckkopf und dessen HerstellungsverfahrenInfo
- Publication number
- DE69809014T2 DE69809014T2 DE69809014T DE69809014T DE69809014T2 DE 69809014 T2 DE69809014 T2 DE 69809014T2 DE 69809014 T DE69809014 T DE 69809014T DE 69809014 T DE69809014 T DE 69809014T DE 69809014 T2 DE69809014 T2 DE 69809014T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- inkjet printhead
- improved inkjet
- improved
- printhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14024—Assembling head parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/922,272 US6062679A (en) | 1997-08-28 | 1997-08-28 | Printhead for an inkjet cartridge and method for producing the same |
US08/938,346 US6659596B1 (en) | 1997-08-28 | 1997-09-26 | Ink-jet printhead and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69809014D1 DE69809014D1 (de) | 2002-12-05 |
DE69809014T2 true DE69809014T2 (de) | 2003-06-26 |
Family
ID=27129836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69809014T Expired - Lifetime DE69809014T2 (de) | 1997-08-28 | 1998-08-25 | Verbesserter Tintenstrahldruckkopf und dessen Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (2) | US6659596B1 (de) |
EP (1) | EP0906828B1 (de) |
KR (1) | KR100546920B1 (de) |
DE (1) | DE69809014T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6336713B1 (en) | 1999-07-29 | 2002-01-08 | Hewlett-Packard Company | High efficiency printhead containing a novel nitride-based resistor system |
GB2416519B (en) * | 2002-06-07 | 2006-06-21 | Lexmark Int Inc | Energy efficient heater stack using dlc island |
US6637866B1 (en) * | 2002-06-07 | 2003-10-28 | Lexmark International, Inc. | Energy efficient heater stack using DLC island |
US7148079B1 (en) * | 2002-11-01 | 2006-12-12 | Advanced Micro Devices, Inc. | Diamond like carbon silicon on insulator substrates and methods of fabrication thereof |
US6805431B2 (en) | 2002-12-30 | 2004-10-19 | Lexmark International, Inc. | Heater chip with doped diamond-like carbon layer and overlying cavitation layer |
DE60314300T2 (de) * | 2003-08-18 | 2008-02-14 | Océ-Technologies B.V. | Zur verwendung mit einem mit einer kanalplatte aus kohlenstoff versehenen tintenstrahldrucker geeignete schmelzbare tinte |
KR100543176B1 (ko) * | 2003-11-06 | 2006-01-20 | 한국기계연구원 | 나노 패터닝용 프린팅헤드 장치 |
JP4208794B2 (ja) * | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4182035B2 (ja) * | 2004-08-16 | 2008-11-19 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4137027B2 (ja) * | 2004-08-16 | 2008-08-20 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4208793B2 (ja) * | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
US8251490B2 (en) * | 2006-10-17 | 2012-08-28 | Telecom Italia S.P.A. | Ink jet printing head |
KR102140938B1 (ko) | 2012-09-07 | 2020-08-04 | 고쿠리츠켄큐카이하츠호진 카가쿠기쥬츠신코키코 | 유기 중합 박막과 그 제조방법 |
EP3099497B1 (de) * | 2014-01-29 | 2020-01-22 | Hewlett-Packard Development Company, L.P. | Thermischer tintenstrahldruckkopf |
JP6942537B2 (ja) | 2017-06-29 | 2021-09-29 | キヤノン株式会社 | 液体吐出ヘッド |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4497890A (en) | 1983-04-08 | 1985-02-05 | Motorola, Inc. | Process for improving adhesion of resist to gold |
JPS60221395A (ja) | 1984-04-19 | 1985-11-06 | Yoshio Imai | ダイヤモンド薄膜の製造方法 |
US4663640A (en) | 1984-07-20 | 1987-05-05 | Canon Kabushiki Kaisha | Recording head |
US4719477A (en) | 1986-01-17 | 1988-01-12 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
US4678529A (en) * | 1986-07-02 | 1987-07-07 | Xerox Corporation | Selective application of adhesive and bonding process for ink jet printheads |
US4990939A (en) | 1988-09-01 | 1991-02-05 | Ricoh Company, Ltd. | Bubble jet printer head with improved operational speed |
US5073785A (en) | 1990-04-30 | 1991-12-17 | Xerox Corporation | Coating processes for an ink jet printhead |
US5469199A (en) | 1990-08-16 | 1995-11-21 | Hewlett-Packard Company | Wide inkjet printhead |
US5187500A (en) * | 1990-09-05 | 1993-02-16 | Hewlett-Packard Company | Control of energy to thermal inkjet heating elements |
US5317346A (en) | 1992-03-04 | 1994-05-31 | Hewlett-Packard Company | Compound ink feed slot |
US5278584A (en) | 1992-04-02 | 1994-01-11 | Hewlett-Packard Company | Ink delivery system for an inkjet printhead |
US5255022A (en) * | 1992-04-02 | 1993-10-19 | Xerox Corporation | Ink manifold having elastomer channel plate for ink jet printhead and process for making |
JP3115720B2 (ja) | 1992-09-29 | 2000-12-11 | キヤノン株式会社 | インクジェット記録ヘッド、該記録ヘッドを備えたインクジェット記録装置及び該記録ヘッドの製造方法 |
DE4235015C2 (de) | 1992-10-16 | 1994-08-18 | Fraunhofer Ges Forschung | Verfahren zur Herstellung von Diamantschichten |
JPH07243064A (ja) | 1994-01-03 | 1995-09-19 | Xerox Corp | 基板清掃方法 |
US5474808A (en) * | 1994-01-07 | 1995-12-12 | Michigan State University | Method of seeding diamond |
US5731046A (en) | 1994-01-18 | 1998-03-24 | Qqc, Inc. | Fabrication of diamond and diamond-like carbon coatings |
US5516500A (en) | 1994-08-09 | 1996-05-14 | Qqc, Inc. | Formation of diamond materials by rapid-heating and rapid-quenching of carbon-containing materials |
US5464667A (en) * | 1994-08-16 | 1995-11-07 | Minnesota Mining And Manufacturing Company | Jet plasma process and apparatus |
JP3361916B2 (ja) * | 1995-06-28 | 2003-01-07 | シャープ株式会社 | 微小構造の形成方法 |
US5812158A (en) * | 1996-01-18 | 1998-09-22 | Lexmark International, Inc. | Coated nozzle plate for ink jet printing |
US6126276A (en) * | 1998-03-02 | 2000-10-03 | Hewlett-Packard Company | Fluid jet printhead with integrated heat-sink |
US6561632B2 (en) * | 2001-06-06 | 2003-05-13 | Hewlett-Packard Development Company, L.P. | Printhead with high nozzle packing density |
-
1997
- 1997-09-26 US US08/938,346 patent/US6659596B1/en not_active Expired - Lifetime
-
1998
- 1998-08-25 EP EP98306792A patent/EP0906828B1/de not_active Expired - Lifetime
- 1998-08-25 DE DE69809014T patent/DE69809014T2/de not_active Expired - Lifetime
- 1998-08-27 KR KR1019980034915A patent/KR100546920B1/ko not_active IP Right Cessation
-
2003
- 2003-06-11 US US10/459,864 patent/US7048359B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR19990023939A (ko) | 1999-03-25 |
EP0906828B1 (de) | 2002-10-30 |
KR100546920B1 (ko) | 2006-06-21 |
US6659596B1 (en) | 2003-12-09 |
DE69809014D1 (de) | 2002-12-05 |
EP0906828A3 (de) | 2000-01-19 |
US7048359B2 (en) | 2006-05-23 |
US20030210302A1 (en) | 2003-11-13 |
EP0906828A2 (de) | 1999-04-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |