DE69222745T2 - Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor - Google Patents

Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor

Info

Publication number
DE69222745T2
DE69222745T2 DE69222745T DE69222745T DE69222745T2 DE 69222745 T2 DE69222745 T2 DE 69222745T2 DE 69222745 T DE69222745 T DE 69222745T DE 69222745 T DE69222745 T DE 69222745T DE 69222745 T2 DE69222745 T2 DE 69222745T2
Authority
DE
Germany
Prior art keywords
acceleration
magnetic field
field sensor
piezoelectric force
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69222745T
Other languages
English (en)
Other versions
DE69222745D1 (de
Inventor
Kazuhiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69222745D1 publication Critical patent/DE69222745D1/de
Publication of DE69222745T2 publication Critical patent/DE69222745T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
DE69222745T 1991-07-17 1992-07-09 Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor Expired - Fee Related DE69222745T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP03203876A JP3141954B2 (ja) 1991-07-17 1991-07-17 圧電素子を用いた力・加速度・磁気のセンサ
PCT/JP1992/000882 WO1993002342A1 (en) 1991-07-17 1992-07-09 Sensor for force, acceleration and magnetism using piezoelectric devices

Publications (2)

Publication Number Publication Date
DE69222745D1 DE69222745D1 (de) 1997-11-20
DE69222745T2 true DE69222745T2 (de) 1998-02-12

Family

ID=16481181

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69222745T Expired - Fee Related DE69222745T2 (de) 1991-07-17 1992-07-09 Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor

Country Status (5)

Country Link
US (1) US5365799A (de)
EP (1) EP0549807B1 (de)
JP (1) JP3141954B2 (de)
DE (1) DE69222745T2 (de)
WO (1) WO1993002342A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10032363C2 (de) * 1999-07-07 2003-12-18 Agency Ind Science Techn An einer Fingerspitze angebrachter Kraft-Momenten-Sensor mit sechs Freiheitsgraden

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JP6053247B1 (ja) 2015-01-26 2016-12-27 株式会社ワコーテック 力覚センサ
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JP6002868B1 (ja) 2015-04-07 2016-10-05 株式会社トライフォース・マネジメント 力覚センサおよびこれに用いる構造体
JP5996078B1 (ja) 2015-10-19 2016-09-21 株式会社トライフォース・マネジメント 発電素子
JP6571873B2 (ja) * 2015-12-04 2019-09-04 キストラー ホールディング アクチエンゲゼルシャフト 加速度測定装置及び加速度測定装置を製造するための方法
CN106289619A (zh) * 2016-09-13 2017-01-04 中国科学院长春光学精密机械与物理研究所 一种高精度高刚度六维力测量平台
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US11691871B2 (en) 2021-06-18 2023-07-04 Infineon Technologies Ag Microelectromechanical system (MEMS) vibration sensor having a segmented backplate

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DE10032363C2 (de) * 1999-07-07 2003-12-18 Agency Ind Science Techn An einer Fingerspitze angebrachter Kraft-Momenten-Sensor mit sechs Freiheitsgraden

Also Published As

Publication number Publication date
EP0549807A4 (en) 1994-06-15
EP0549807A1 (de) 1993-07-07
EP0549807B1 (de) 1997-10-15
JP3141954B2 (ja) 2001-03-07
US5365799A (en) 1994-11-22
JPH0526744A (ja) 1993-02-02
WO1993002342A1 (en) 1993-02-04
DE69222745D1 (de) 1997-11-20

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