DE69310474D1 - Piezoelektrischer Sensor - Google Patents

Piezoelektrischer Sensor

Info

Publication number
DE69310474D1
DE69310474D1 DE69310474T DE69310474T DE69310474D1 DE 69310474 D1 DE69310474 D1 DE 69310474D1 DE 69310474 T DE69310474 T DE 69310474T DE 69310474 T DE69310474 T DE 69310474T DE 69310474 D1 DE69310474 D1 DE 69310474D1
Authority
DE
Germany
Prior art keywords
piezoelectric sensor
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69310474T
Other languages
English (en)
Other versions
DE69310474T2 (de
Inventor
Toshihiko Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taisei Co Ltd
Original Assignee
Oki Ceramic Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Ceramic Industry Co Ltd filed Critical Oki Ceramic Industry Co Ltd
Publication of DE69310474D1 publication Critical patent/DE69310474D1/de
Application granted granted Critical
Publication of DE69310474T2 publication Critical patent/DE69310474T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DE69310474T 1992-10-19 1993-10-07 Piezoelektrischer Sensor Expired - Lifetime DE69310474T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27966092A JP3238492B2 (ja) 1992-10-19 1992-10-19 圧電センサ

Publications (2)

Publication Number Publication Date
DE69310474D1 true DE69310474D1 (de) 1997-06-12
DE69310474T2 DE69310474T2 (de) 1997-08-21

Family

ID=17614088

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310474T Expired - Lifetime DE69310474T2 (de) 1992-10-19 1993-10-07 Piezoelektrischer Sensor

Country Status (5)

Country Link
US (1) US5376860A (de)
EP (1) EP0594331B1 (de)
JP (1) JP3238492B2 (de)
CA (1) CA2107874C (de)
DE (1) DE69310474T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07221590A (ja) * 1994-01-31 1995-08-18 Matsushita Electric Ind Co Ltd 電子部品とその製造方法
CN1182479A (zh) * 1995-04-28 1998-05-20 罗斯蒙德公司 带高压隔离体装配件的压力变送器
EP0823045A1 (de) * 1995-04-28 1998-02-11 Rosemount Inc. Montagevorrichtung für druckübertrager
US6653760B1 (en) 1996-05-09 2003-11-25 Crest Ultrasonics Corporation Ultrasonic transducer using third harmonic frequency
JP3233041B2 (ja) * 1996-08-13 2001-11-26 株式会社村田製作所 圧電型電気音響変換器
JP3233059B2 (ja) * 1997-03-07 2001-11-26 株式会社村田製作所 超音波センサ
JP3812917B2 (ja) * 1997-05-14 2006-08-23 本田技研工業株式会社 圧電型アクチュエーター
JPH1120729A (ja) * 1997-07-02 1999-01-26 Toyota Autom Loom Works Ltd 車両におけるセンサの取付構造
US6313568B1 (en) 1999-12-01 2001-11-06 Cummins Inc. Piezoelectric actuator and valve assembly with thermal expansion compensation
DE50009672D1 (de) * 1999-12-17 2005-04-07 Argillon Gmbh Piezoelektrischer ultraschallwandler, der ein gehäuse und eine isolierschicht umfasst
DE10017760C1 (de) * 2000-04-10 2001-08-16 Festo Ag & Co Piezokeramischer Biegewandler sowie Verwendung des piezokeramischen Biegewandlers
US6570298B2 (en) * 2000-05-09 2003-05-27 Tokkyokiki Co., Ltd. Vibration control device and driving method thereof
DE10023556A1 (de) * 2000-05-15 2001-11-29 Festo Ag & Co Piezo-Biegewandler sowie Verwendung desselben
DE20202297U1 (de) * 2001-09-07 2002-08-29 Drei-S-Werk Präzisionswerkzeuge GmbH & Co Fertigungs-KG, 91126 Schwabach Flacher Aktor oder Sensor mit interner Vorspannung
CN100550618C (zh) * 2004-07-14 2009-10-14 株式会社村田制作所 压电器件及制作方法
JP2006105964A (ja) * 2004-09-13 2006-04-20 Denso Corp 圧電センサ
JP5089860B2 (ja) * 2004-12-03 2012-12-05 富士フイルム株式会社 圧電アクチュエータ及び液体吐出ヘッド
US7462977B2 (en) * 2005-04-07 2008-12-09 Kulite Semiconductor Products, Inc High temperature pressure transducer having a shaped ceramic face
JP4301298B2 (ja) * 2007-01-29 2009-07-22 株式会社デンソー 超音波センサ及び超音波センサの製造方法
JP4983282B2 (ja) * 2007-02-07 2012-07-25 パナソニック株式会社 音響整合部材
US9406314B1 (en) 2012-10-04 2016-08-02 Magnecomp Corporation Assembly of DSA suspensions using microactuators with partially cured adhesive, and DSA suspensions having PZTs with wrap-around electrodes
US8773820B1 (en) 2013-02-21 2014-07-08 Magnecomp Corporation PZT microactuator for disk drive suspension having electrical via and wrap-around electrode
US9322720B2 (en) * 2013-02-25 2016-04-26 U.S. Department Of Energy Use of aluminum nitride to obtain temperature measurements in a high temperature and high radiation environment
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9117468B1 (en) 2013-03-18 2015-08-25 Magnecomp Corporation Hard drive suspension microactuator with restraining layer for control of bending
US9330694B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation HDD microactuator having reverse poling and active restraining layer
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
WO2017089609A2 (de) * 2015-11-26 2017-06-01 Elmos Semiconductor Aktiengesellschaft Schwingelement für einen ultraschall-transducer mit mehrfachresonanz
RU2684139C1 (ru) * 2018-06-14 2019-04-04 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Пьезоэлектрический датчик
TWI707146B (zh) * 2019-06-12 2020-10-11 千竣科技有限公司 超聲波偵測裝置
JP2021057751A (ja) * 2019-09-30 2021-04-08 セイコーエプソン株式会社 超音波装置、及び超音波装置の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH429228A (de) * 1964-12-10 1967-01-31 Kistler Instrumente Ag Piezoelektrischer Einbaukörper zum Einbau in einen piezoelektrischen Wandler
US3441754A (en) * 1966-05-31 1969-04-29 Linden Lab Inc Base mounted piezoelectric transducer assembly having intermediate stress absorbing member
US3624264A (en) * 1970-02-18 1971-11-30 Arnold Lazarus Method and apparatus for sound and vibration detection
CH528178A (de) * 1970-08-14 1972-09-15 Siemens Ag Halterung für einen stabförmigen Quarzvibrator
US3935484A (en) * 1974-02-25 1976-01-27 Westinghouse Electric Corporation Replaceable acoustic transducer assembly
JPS55135718A (en) * 1979-04-10 1980-10-22 Nissan Motor Co Ltd Oscillation sensor
JPS57147018A (en) * 1981-03-06 1982-09-10 Nippon Soken Inc Knocking detector for internal combustion engine
US4551647A (en) * 1983-03-08 1985-11-05 General Electric Company Temperature compensated piezoelectric transducer and lens assembly and method of making the assembly
GB2155732B (en) * 1984-03-14 1987-05-28 Rolls Royce Stress wave transducer
JPH0220650Y2 (de) * 1984-11-27 1990-06-05
US5038069A (en) * 1987-11-09 1991-08-06 Texas Instruments Incorporated Cylinder pressure sensor for an internal combustion engine
US4825117A (en) * 1987-11-27 1989-04-25 General Electric Company Temperature compensated piezoelectric transducer assembly

Also Published As

Publication number Publication date
JP3238492B2 (ja) 2001-12-17
EP0594331A1 (de) 1994-04-27
US5376860A (en) 1994-12-27
JPH06133397A (ja) 1994-05-13
CA2107874C (en) 1999-03-23
DE69310474T2 (de) 1997-08-21
EP0594331B1 (de) 1997-05-07
CA2107874A1 (en) 1994-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KINSEKI, LTD., KOMAE, TOKIO/TOKYO, JP

8327 Change in the person/name/address of the patent owner

Owner name: TAISEI CO., LTD, SAITAMA, JP RICOH ELEMEX CORP., N