DE69406169D1 - Mechanischer Sensor - Google Patents

Mechanischer Sensor

Info

Publication number
DE69406169D1
DE69406169D1 DE69406169T DE69406169T DE69406169D1 DE 69406169 D1 DE69406169 D1 DE 69406169D1 DE 69406169 T DE69406169 T DE 69406169T DE 69406169 T DE69406169 T DE 69406169T DE 69406169 D1 DE69406169 D1 DE 69406169D1
Authority
DE
Germany
Prior art keywords
mechanical sensor
mechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69406169T
Other languages
English (en)
Other versions
DE69406169T2 (de
Inventor
Shinji Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69406169D1 publication Critical patent/DE69406169D1/de
Application granted granted Critical
Publication of DE69406169T2 publication Critical patent/DE69406169T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00—Magnetostrictive devices
    • H10N35/101—Magnetostrictive devices with mechanical input and electrical output, e.g. generators, sensors
DE69406169T 1993-03-31 1994-03-29 Mechanischer Sensor Expired - Fee Related DE69406169T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5073199A JPH06288844A (ja) 1993-03-31 1993-03-31 力学量センサ

Publications (2)

Publication Number Publication Date
DE69406169D1 true DE69406169D1 (de) 1997-11-20
DE69406169T2 DE69406169T2 (de) 1998-05-20

Family

ID=13511244

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69406169T Expired - Fee Related DE69406169T2 (de) 1993-03-31 1994-03-29 Mechanischer Sensor

Country Status (4)

Country Link
US (1) US5502381A (de)
EP (1) EP0618628B1 (de)
JP (1) JPH06288844A (de)
DE (1) DE69406169T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5821129A (en) * 1997-02-12 1998-10-13 Grimes; Craig A. Magnetochemical sensor and method for remote interrogation
US5925827A (en) * 1997-09-25 1999-07-20 Lucent Technologies Inc. System and method for empirically determining shrinkage stresses in a molded package and power module employing the same
US20060012881A1 (en) * 2000-05-25 2006-01-19 Atomic Telecom Atomic layer controlled optical filter design for next generation dense wavelength division multiplexer
DE50211812D1 (de) * 2001-08-01 2008-04-17 Siemens Ag Sensoreinrichtung zur indirekten Strommessung
JP2003294548A (ja) * 2002-03-29 2003-10-15 Japan Science & Technology Corp 応力インピーダンス効果素子の製造方法及びその素子
KR100774775B1 (ko) * 2002-09-17 2007-11-07 앤터온 비.브이. 카메라 디바이스, 카메라 디바이스 제조 방법, 웨이퍼스케일 패키지 및 광학 어셈블리
US7104137B2 (en) * 2004-04-20 2006-09-12 Delphi Technologies, Inc. Magnetostrictive fluid-pressure sensor
US20140374151A1 (en) * 2013-06-24 2014-12-25 Jia Lin Yap Wire bonding method for flexible substrates
CN106197764B (zh) * 2016-07-11 2019-02-26 南昌大学 一种铁基非晶合金带材压磁效应的测试方法
CN108226825B (zh) * 2018-01-08 2020-03-24 上海交通大学 一种软磁薄膜平面线圈复合磁传感器及其制备方法
CN108387784B (zh) * 2018-02-02 2020-11-20 上海交通大学 一种磁膜电感传感器
CN112033277B (zh) * 2020-09-08 2021-10-08 东南大学 一种基于折纸结构的曲率传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194049A (ja) * 1984-03-13 1985-10-02 Matsushita Electric Ind Co Ltd 応力磁気センサ
JPS63182535A (ja) * 1987-01-23 1988-07-27 Kubota Ltd トルクセンサ
JPS6423132A (en) * 1987-07-17 1989-01-25 Matsushita Electric Ind Co Ltd Stress sensor
JPH01148928A (ja) * 1987-12-04 1989-06-12 Matsushita Electric Ind Co Ltd 応力センサ
JPH0499005A (ja) * 1990-06-26 1992-03-31 Yaskawa Electric Corp 磁歪膜

Also Published As

Publication number Publication date
JPH06288844A (ja) 1994-10-18
US5502381A (en) 1996-03-26
EP0618628A1 (de) 1994-10-05
DE69406169T2 (de) 1998-05-20
EP0618628B1 (de) 1997-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee