JPS6423132A - Stress sensor - Google Patents
Stress sensorInfo
- Publication number
- JPS6423132A JPS6423132A JP17947287A JP17947287A JPS6423132A JP S6423132 A JPS6423132 A JP S6423132A JP 17947287 A JP17947287 A JP 17947287A JP 17947287 A JP17947287 A JP 17947287A JP S6423132 A JPS6423132 A JP S6423132A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- thin
- thin film
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
PURPOSE:To obtain a high-sensitivity sensor having a good temp. characteristic and response characteristic by changing the magnetic permeability of a thin magnetic material film with the distortion by the stress of a substrate and detecting the change thereof in the form of inductance. CONSTITUTION:A thin Fe-Co-Zr film is formed on the Ti substrate 1 and is subjected to a heat treatment to form a thin soft magnetic film 3. An insulating film 2a is provided between the substrate 1 and an Al electrode 4a and insulating films 2b, 2c are provided respectively between the electrode 4a and the thin film 3 and between the thin film 3 and an Al electrode 4b. A coil having the thin film 3 as its magnetic core is, therefore, constituted by enclosing the thin film 3 from above and below with 2 layers of the films; the insulating films 2b, 2c and further enclosing the circumference thereof with the electrodes 4a, 4b. A detecting circuit (not shown in the figure) which detects the inductance is installed on the substrate 1 formed with the coil. The magnetic permeability of the thin film 3 having a magnetostriction is changed with the stress by the stress of the substrate 1 and the change thereof is detected as the inductance, by which the high-sensitivity sensor having the good temp. characteristic and response characteristic is obtd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17947287A JPS6423132A (en) | 1987-07-17 | 1987-07-17 | Stress sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17947287A JPS6423132A (en) | 1987-07-17 | 1987-07-17 | Stress sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6423132A true JPS6423132A (en) | 1989-01-25 |
Family
ID=16066441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17947287A Pending JPS6423132A (en) | 1987-07-17 | 1987-07-17 | Stress sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6423132A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0618628A1 (en) * | 1993-03-31 | 1994-10-05 | Matsushita Electric Industrial Co., Ltd. | Mechanical sensor |
| JPH0886697A (en) * | 1994-09-19 | 1996-04-02 | Honda Motor Co Ltd | Method for detecting surface stress of plane structural member |
| WO2012176475A1 (en) * | 2011-06-24 | 2012-12-27 | 国立大学法人金沢大学 | Magnetostrictive power-generating thin film strip, method for producing same, and magnetostrictive power-generating module |
| WO2023228886A1 (en) * | 2022-05-23 | 2023-11-30 | 国立大学法人 東京大学 | Information processing device, information analysis system, and measurement method |
-
1987
- 1987-07-17 JP JP17947287A patent/JPS6423132A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0618628A1 (en) * | 1993-03-31 | 1994-10-05 | Matsushita Electric Industrial Co., Ltd. | Mechanical sensor |
| US5502381A (en) * | 1993-03-31 | 1996-03-26 | Matsushita Electric Industrial Co., Ltd. | Stress sensor using magnetostriction thin film |
| JPH0886697A (en) * | 1994-09-19 | 1996-04-02 | Honda Motor Co Ltd | Method for detecting surface stress of plane structural member |
| WO2012176475A1 (en) * | 2011-06-24 | 2012-12-27 | 国立大学法人金沢大学 | Magnetostrictive power-generating thin film strip, method for producing same, and magnetostrictive power-generating module |
| JPWO2012176475A1 (en) * | 2011-06-24 | 2015-02-23 | 国立大学法人金沢大学 | Magnetostrictive power generation thin film piece, manufacturing method thereof, and magnetostrictive power generation module |
| WO2023228886A1 (en) * | 2022-05-23 | 2023-11-30 | 国立大学法人 東京大学 | Information processing device, information analysis system, and measurement method |
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