DE69209132D1 - Piezoelektrischer Messfühler - Google Patents

Piezoelektrischer Messfühler

Info

Publication number
DE69209132D1
DE69209132D1 DE69209132T DE69209132T DE69209132D1 DE 69209132 D1 DE69209132 D1 DE 69209132D1 DE 69209132 T DE69209132 T DE 69209132T DE 69209132 T DE69209132 T DE 69209132T DE 69209132 D1 DE69209132 D1 DE 69209132D1
Authority
DE
Germany
Prior art keywords
piezoelectric sensor
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69209132T
Other languages
English (en)
Other versions
DE69209132T2 (de
Inventor
Hideki Toyoda
Takao Kojima
Tetsuma Shimozato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03349644A external-priority patent/JP3123796B2/ja
Priority claimed from US07/865,993 external-priority patent/US5739626A/en
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of DE69209132D1 publication Critical patent/DE69209132D1/de
Application granted granted Critical
Publication of DE69209132T2 publication Critical patent/DE69209132T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
DE69209132T 1991-04-27 1992-04-16 Piezoelektrischer Messfühler Expired - Fee Related DE69209132T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP12541491 1991-04-27
JP03349644A JP3123796B2 (ja) 1991-04-27 1991-12-06 圧電センサ
US07/865,993 US5739626A (en) 1991-04-27 1992-04-09 Piezoelectric sensor

Publications (2)

Publication Number Publication Date
DE69209132D1 true DE69209132D1 (de) 1996-04-25
DE69209132T2 DE69209132T2 (de) 1996-10-10

Family

ID=27315126

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69209132T Expired - Fee Related DE69209132T2 (de) 1991-04-27 1992-04-16 Piezoelektrischer Messfühler

Country Status (2)

Country Link
EP (1) EP0511762B1 (de)
DE (1) DE69209132T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3123799B2 (ja) * 1991-12-24 2001-01-15 日本特殊陶業株式会社 圧力センサ
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ
US6259372B1 (en) * 1999-01-22 2001-07-10 Eaton Corporation Self-powered wireless transducer
DE10114045A1 (de) * 2001-03-22 2002-10-02 Bosch Gmbh Robert Schwingungsaufnehmer zur Befestigung an einem Schwingungen aufweisenden Bauteil
WO2004031711A1 (ja) * 2002-10-01 2004-04-15 National Institute Of Advanced Industrial Science And Technology 圧電センサおよびそれを備えた入力装置
DE102004007202B4 (de) * 2003-02-17 2016-06-16 Denso Corporation Druckdetektor mit langgestrecktem Gehäuse zur Aufnahme eines druckempfindlichen Elementes
US6962084B2 (en) * 2003-08-06 2005-11-08 Honeywell International Inc. Sensor with molded sensor diaphragm cover
DE102004047143A1 (de) * 2004-09-29 2006-04-06 Robert Bosch Gmbh Piezoelektrischer Brennraum-Drucksensor mit einem Druckübertragungsstift

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5219434B2 (de) * 1971-09-25 1977-05-27
JPS6048117B2 (ja) * 1980-07-16 1985-10-25 東北金属工業株式会社 圧電素子の製造方法
JPS6123933A (ja) * 1984-07-12 1986-02-01 Meiyou Denki Kk 耐熱耐振型圧力検出器
JP2565346B2 (ja) * 1987-06-26 1996-12-18 清水 郁子 分極反転領域を有するＬｉＮｂＯ▲下３▼／ＬｉＴａＯ▲下３▼単結晶圧電基板及びその製造方法
JPH0260219A (ja) * 1988-08-25 1990-02-28 Fujitsu Ltd 圧電振動子の製造方法
JPH0624150Y2 (ja) * 1989-04-03 1994-06-22 日本特殊陶業株式会社 温度および圧力センサ付きスパークプラグ
JPH0371681A (ja) * 1989-08-11 1991-03-27 Brother Ind Ltd 複合圧電セラミックス素子の製造方法

Also Published As

Publication number Publication date
EP0511762A3 (en) 1993-12-22
EP0511762A2 (de) 1992-11-04
EP0511762B1 (de) 1996-03-20
DE69209132T2 (de) 1996-10-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee