DE69228654T2 - Magnetfeldfühler - Google Patents

Magnetfeldfühler

Info

Publication number
DE69228654T2
DE69228654T2 DE69228654T DE69228654T DE69228654T2 DE 69228654 T2 DE69228654 T2 DE 69228654T2 DE 69228654 T DE69228654 T DE 69228654T DE 69228654 T DE69228654 T DE 69228654T DE 69228654 T2 DE69228654 T2 DE 69228654T2
Authority
DE
Germany
Prior art keywords
magnetic field
field sensor
sensor
magnetic
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69228654T
Other languages
English (en)
Other versions
DE69228654D1 (de
Inventor
Bharat B Pant
Richard B Fryer
Donald R Krahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25171999&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69228654(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE69228654D1 publication Critical patent/DE69228654D1/de
Publication of DE69228654T2 publication Critical patent/DE69228654T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
DE69228654T 1991-11-26 1992-11-23 Magnetfeldfühler Expired - Lifetime DE69228654T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/797,872 US5247278A (en) 1991-11-26 1991-11-26 Magnetic field sensing device

Publications (2)

Publication Number Publication Date
DE69228654D1 DE69228654D1 (de) 1999-04-22
DE69228654T2 true DE69228654T2 (de) 1999-09-30

Family

ID=25171999

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69228654T Expired - Lifetime DE69228654T2 (de) 1991-11-26 1992-11-23 Magnetfeldfühler

Country Status (4)

Country Link
US (1) US5247278A (de)
EP (1) EP0544479B1 (de)
CA (1) CA2083008C (de)
DE (1) DE69228654T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10014779B4 (de) * 2000-03-27 2011-11-10 Nxp B.V. MR-Winkelsensor

Families Citing this family (178)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5617071A (en) * 1992-11-16 1997-04-01 Nonvolatile Electronics, Incorporated Magnetoresistive structure comprising ferromagnetic thin films and intermediate alloy layer having magnetic concentrator and shielding permeable masses
DE4300605C2 (de) * 1993-01-13 1994-12-15 Lust Electronic Systeme Gmbh Sensorchip
JP2551321B2 (ja) * 1993-04-21 1996-11-06 日本電気株式会社 集積化磁気抵抗効果センサ
DE4319146C2 (de) * 1993-06-09 1999-02-04 Inst Mikrostrukturtechnologie Magnetfeldsensor, aufgebaut aus einer Ummagnetisierungsleitung und einem oder mehreren magnetoresistiven Widerständen
US5532584A (en) * 1993-08-31 1996-07-02 Eastman Kodak Company MR sensor including calibration circuit wherein signals are averaged for determining a correction factor and pole pieces are shaped to reduce field in gap therebetween
SI9300622A (en) * 1993-11-30 1995-06-30 Fakulteta Za Elektrotehniko In Integrated circuit with magnetic sensor
US5986461A (en) * 1996-09-17 1999-11-16 Intel Corporation UV methods for screening open circuit defects in CMOS integrated circuits
WO1996002847A1 (en) * 1994-07-20 1996-02-01 Honeywell Inc. Miniature magnetometer
US5500590A (en) * 1994-07-20 1996-03-19 Honeywell Inc. Apparatus for sensing magnetic fields using a coupled film magnetoresistive transducer
DE4436876A1 (de) * 1994-10-15 1996-04-18 Lust Antriebstechnik Gmbh Sensorchip
US5561368A (en) * 1994-11-04 1996-10-01 International Business Machines Corporation Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate
DE4439945C1 (de) * 1994-11-09 1996-02-08 Leica Ag Verfahren zur Stabilisierung der Richtungsanzeige von Magnetkompassen
US5570034A (en) * 1994-12-29 1996-10-29 Intel Corporation Using hall effect to monitor current during IDDQ testing of CMOS integrated circuits
DE19507303A1 (de) * 1995-03-02 1996-09-05 Siemens Ag Sensoreinrichtung mit einer Brückenschaltung von magnetoresistiven Sensorelementen
DE19520172A1 (de) * 1995-06-01 1996-12-05 Siemens Ag Magnetisierungseinrichtung für ein magnetoresistives Dünnschicht-Sensorelement mit einem Biasschichtteil
DE19520178A1 (de) * 1995-06-01 1996-12-05 Siemens Ag Magnetisierungsvorrichtung für magnetoresistive Dünnschicht-Sensorelemente in einer Brückenschaltung
US5850624A (en) * 1995-10-18 1998-12-15 The Charles Machine Works, Inc. Electronic compass
US5820924A (en) * 1996-05-16 1998-10-13 Honeywell Inc. Method of fabricating a magnetoresistive sensor
US6166539A (en) * 1996-10-30 2000-12-26 Regents Of The University Of Minnesota Magnetoresistance sensor having minimal hysteresis problems
US5747997A (en) * 1996-06-05 1998-05-05 Regents Of The University Of Minnesota Spin-valve magnetoresistance sensor having minimal hysteresis problems
US5831426A (en) * 1996-08-16 1998-11-03 Nonvolatile Electronics, Incorporated Magnetic current sensor
US5760581A (en) * 1996-09-17 1998-06-02 Intel Corporation Method and apparatus coupling together magneto field effect transistors in series to accumulate the effects of magnetic field for improved sensitivity and linearity
US5757055A (en) * 1996-09-17 1998-05-26 Intel Corporation Triple drain magneto field effect transistor with high conductivity central drain
US5801533A (en) * 1996-09-17 1998-09-01 Intel Corporation Method and apparatus with cascode biasing magneto field effect transistors for improved sensitivity and amplification
DE19648879C2 (de) * 1996-11-26 2000-04-13 Inst Mikrostrukturtechnologie Magnetfeldsensor mit parallelen magnetoresistiven Schichtstreifen
JP2976924B2 (ja) * 1997-05-19 1999-11-10 日本電気株式会社 薄膜感温抵抗材料およびその製造方法
US5952825A (en) * 1997-08-14 1999-09-14 Honeywell Inc. Magnetic field sensing device having integral coils for producing magnetic fields
US6529114B1 (en) * 1998-05-27 2003-03-04 Honeywell International Inc. Magnetic field sensing device
JP3623366B2 (ja) * 1998-07-17 2005-02-23 アルプス電気株式会社 巨大磁気抵抗効果素子を備えた磁界センサおよびその製造方法と製造装置
US6297628B1 (en) 1998-11-17 2001-10-02 Honeywell Inc Magnetoresistive bridge array
US6376933B1 (en) 1999-12-31 2002-04-23 Honeywell International Inc. Magneto-resistive signal isolator
US6271744B1 (en) 2000-03-03 2001-08-07 Trw Inc. Current sensing arrangement with encircling current-carrying line and ferromagnetic sheet concentrator
US6201466B1 (en) * 2000-03-29 2001-03-13 Delphi Technologies, Inc. Magnetoresistor array
DE10104453A1 (de) * 2001-02-01 2002-08-08 Philips Corp Intellectual Pty Anordnung zum Messen der magnetischen Feldstärke
DE10122468C1 (de) * 2001-05-09 2003-03-20 Heusler Isabellenhuette Elektrischer Widerstand und Verfahren zu seiner Herstellung
US6756782B2 (en) * 2001-06-01 2004-06-29 Koninklijke Philips Electronics N.V. Magnetic field measuring sensor having a shunt resistor and method of regulating the sensor
JP4028971B2 (ja) * 2001-08-28 2008-01-09 アルプス電気株式会社 磁気センサの組立方法
US6700371B2 (en) * 2001-09-05 2004-03-02 Honeywell International Inc. Three dimensional conductive strap for a magnetorestrictive sensor
JP2003075157A (ja) * 2001-09-06 2003-03-12 Seiko Instruments Inc 電子機器
US6717403B2 (en) 2001-09-06 2004-04-06 Honeywell International Inc. Method and system for improving the efficiency of the set and offset straps on a magnetic sensor
US6667682B2 (en) 2001-12-26 2003-12-23 Honeywell International Inc. System and method for using magneto-resistive sensors as dual purpose sensors
US7046117B2 (en) * 2002-01-15 2006-05-16 Honeywell International Inc. Integrated magnetic field strap for signal isolator
US7005958B2 (en) 2002-06-14 2006-02-28 Honeywell International Inc. Dual axis magnetic sensor
US7037604B2 (en) * 2002-07-23 2006-05-02 Honeywell International, Inc. Magnetic sensing device
WO2004013900A2 (en) * 2002-08-05 2004-02-12 Research Foundation Of The State University Of New York System and method for manufacturing embedded conformal electronics
US7016163B2 (en) * 2003-02-20 2006-03-21 Honeywell International Inc. Magnetic field sensor
JP2004301741A (ja) * 2003-03-31 2004-10-28 Denso Corp 磁気センサ
US7206693B2 (en) * 2003-04-15 2007-04-17 Honeywell International Inc. Method and apparatus for an integrated GPS receiver and electronic compassing sensor device
US7239000B2 (en) * 2003-04-15 2007-07-03 Honeywell International Inc. Semiconductor device and magneto-resistive sensor integration
US7265543B2 (en) * 2003-04-15 2007-09-04 Honeywell International Inc. Integrated set/reset driver and magneto-resistive sensor
US7126330B2 (en) * 2004-06-03 2006-10-24 Honeywell International, Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
US7557562B2 (en) * 2004-09-17 2009-07-07 Nve Corporation Inverted magnetic isolator
US7271587B2 (en) * 2004-12-16 2007-09-18 Honeywell International Inc. High resolution and low power magnetometer using magnetoresistive sensors
US7154267B2 (en) 2005-01-07 2006-12-26 Honeywell International, Inc. Method and system for electronic compass calibration and verification
DE102005047413B8 (de) * 2005-02-23 2012-06-06 Infineon Technologies Ag Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest
EP1860451B1 (de) * 2005-03-17 2012-06-27 Yamaha Corporation Dreiachsen-magnetsensor und herstellungsverfahren dafür
CN100346492C (zh) * 2005-05-20 2007-10-31 中国科学院合肥物质科学研究院 磁敏传感器阵列及其制造方法
DE102005060713B4 (de) * 2005-12-19 2019-01-24 Austriamicrosystems Ag Magnetfeldsensoranordnung und Verfahren zur berührungslosen Messung eines Magnetfeldes
US7420365B2 (en) * 2006-03-15 2008-09-02 Honeywell International Inc. Single chip MR sensor integrated with an RF transceiver
WO2007129284A1 (en) * 2006-05-10 2007-11-15 Koninklijke Philips Electronics N.V. System and methods for actuation on magnetoresistive sensors
US7528592B2 (en) * 2006-05-31 2009-05-05 Caterpillar Inc. Magnetoresistive sensor for current sensing
US7388372B2 (en) * 2006-05-31 2008-06-17 Caterpillar Inc. Electrical system with magnetoresistive sensors
WO2008120118A2 (en) * 2007-03-30 2008-10-09 Nxp B.V. Magneto-resistive sensor
DE102007040183A1 (de) 2007-08-25 2009-03-05 Sensitec Naomi Gmbh Magnetfeldsensor zur Erfassung eines äußeren magnetischen Felds, insbesondere des Erdmagnetfelds, sowie mit solchen Magnetfeldsensoren gebildetes Magnetfeldsensorsystem
US7923987B2 (en) 2007-10-08 2011-04-12 Infineon Technologies Ag Magnetic sensor integrated circuit with test conductor
EP2063229B1 (de) 2007-11-21 2012-05-02 Micronas GmbH Magnetfeldsensoranordnung
US8559139B2 (en) * 2007-12-14 2013-10-15 Intel Mobile Communications GmbH Sensor module and method for manufacturing a sensor module
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US8711524B2 (en) 2008-02-05 2014-04-29 Headway Technologies, Inc. Patterned MR device with controlled shape anisotropy
US7923996B2 (en) * 2008-02-26 2011-04-12 Allegro Microsystems, Inc. Magnetic field sensor with automatic sensitivity adjustment
US8269491B2 (en) 2008-02-27 2012-09-18 Allegro Microsystems, Inc. DC offset removal for a magnetic field sensor
US8242776B2 (en) * 2008-03-26 2012-08-14 Everspin Technologies, Inc. Magnetic sensor design for suppression of barkhausen noise
US8080993B2 (en) 2008-03-27 2011-12-20 Infineon Technologies Ag Sensor module with mold encapsulation for applying a bias magnetic field
US20090315554A1 (en) * 2008-06-20 2009-12-24 Honeywell International Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
US8063634B2 (en) * 2008-07-31 2011-11-22 Allegro Microsystems, Inc. Electronic circuit and method for resetting a magnetoresistance element
US7973527B2 (en) * 2008-07-31 2011-07-05 Allegro Microsystems, Inc. Electronic circuit configured to reset a magnetoresistance element
DE112010000848B4 (de) * 2009-02-17 2018-04-05 Allegro Microsystems, Llc Schaltungen und Verfahren zum Erzeugen eines Selbsttests eines Magnetfeldsensors
US7977941B2 (en) * 2009-02-25 2011-07-12 Everspin Technologies, Inc. Magnetic field sensing device
JP5620989B2 (ja) * 2009-07-22 2014-11-05 アレグロ・マイクロシステムズ・エルエルシー 磁界センサの診断動作モードを生成するための回路および方法
US8390283B2 (en) * 2009-09-25 2013-03-05 Everspin Technologies, Inc. Three axis magnetic field sensor
US20110169488A1 (en) * 2010-01-08 2011-07-14 Everspin Technologies, Inc. Method and structure for testing and calibrating magnetic field sensing device
US8525514B2 (en) * 2010-03-19 2013-09-03 Memsic, Inc. Magnetometer
US8518734B2 (en) 2010-03-31 2013-08-27 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
IT1402178B1 (it) * 2010-09-09 2013-08-28 St Microelectronics Srl Circuito di lettura a compensazione automatica dell'offset per un sensore di campo magnetico e relativo metodo di lettura a compensazione automatica dell'offset
UA99187C2 (ru) * 2010-10-21 2012-07-25 Инесса Антоновна Большакова Способ измерения магнитного поля
US10473731B2 (en) 2010-11-26 2019-11-12 Stmicroelectronics S.R.L. Magnetic sensor reading device, system and method
IT1403409B1 (it) 2010-12-20 2013-10-17 St Microelectronics Srl Circuito di polarizzazione per un sensore di campo magnetico, e relativo metodo di polarizzazione
IT1403434B1 (it) 2010-12-27 2013-10-17 St Microelectronics Srl Sensore di campo magnetico avente elementi magnetoresistivi anisotropi, con disposizione perfezionata di relativi elementi di magnetizzazione
IT1403433B1 (it) * 2010-12-27 2013-10-17 St Microelectronics Srl Sensore magnetoresistivo con capacita' parassita ridotta, e metodo
US20130320972A1 (en) 2011-02-03 2013-12-05 Uwe Loreit Magnetic field sensing device
US20140347047A1 (en) * 2011-02-22 2014-11-27 Voltafield Technology Corporation Magnetoresistive sensor
US8680846B2 (en) 2011-04-27 2014-03-25 Allegro Microsystems, Llc Circuits and methods for self-calibrating or self-testing a magnetic field sensor
CN102621505A (zh) * 2011-06-29 2012-08-01 中国科学院空间科学与应用研究中心 一种基于Offset反馈电路的磁阻磁强计
US8604777B2 (en) 2011-07-13 2013-12-10 Allegro Microsystems, Llc Current sensor with calibration for a current divider configuration
US8947082B2 (en) 2011-10-21 2015-02-03 University College Cork, National University Of Ireland Dual-axis anisotropic magnetoresistive sensors
CN102540113B (zh) * 2011-11-11 2014-07-02 江苏多维科技有限公司 磁场传感器
TWI452319B (zh) * 2012-01-09 2014-09-11 Voltafield Technology Corp 磁阻感測元件
US9116198B2 (en) * 2012-02-10 2015-08-25 Memsic, Inc. Planar three-axis magnetometer
US9201122B2 (en) 2012-02-16 2015-12-01 Allegro Microsystems, Llc Circuits and methods using adjustable feedback for self-calibrating or self-testing a magnetic field sensor with an adjustable time constant
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US9104922B2 (en) * 2012-06-15 2015-08-11 Honeywell International Inc. Anisotropic magneto-resistance (AMR) gradiometer/magnetometer to read a magnetic track
ITTO20120614A1 (it) * 2012-07-11 2014-01-12 St Microelectronics Srl Sensore magnetoresistivo integrato multistrato e relativo metodo di fabbricazione
TWI468715B (zh) * 2012-10-22 2015-01-11 Ind Tech Res Inst 用於感測外部磁場之磁場感測器
TWI468716B (zh) * 2012-11-12 2015-01-11 Voltafield Technology Corp 整合式磁阻感測裝置
CN103885005B (zh) * 2012-12-21 2018-11-02 上海矽睿科技有限公司 磁传感装置及其磁感应方法
CN103885004A (zh) * 2012-12-21 2014-06-25 磁感科技香港有限公司 一种磁传感装置及其磁感应方法、制备工艺
US9383425B2 (en) 2012-12-28 2016-07-05 Allegro Microsystems, Llc Methods and apparatus for a current sensor having fault detection and self test functionality
US9244134B2 (en) * 2013-01-15 2016-01-26 Infineon Technologies Ag XMR-sensor and method for manufacturing the XMR-sensor
US10725100B2 (en) 2013-03-15 2020-07-28 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an externally accessible coil
RU2536317C1 (ru) * 2013-04-19 2014-12-20 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ изготовления магниторезистивного датчика
US9134385B2 (en) 2013-05-09 2015-09-15 Honeywell International Inc. Magnetic-field sensing device
ITTO20130436A1 (it) 2013-05-29 2014-11-30 St Microelectronics Srl Magnetoresistore integrato di tipo amr a basso consumo
US9671214B2 (en) 2013-07-17 2017-06-06 Infineon Technologies Ag Discrete magnetic angle sensor device, a magnetic angle sensor arrangement, a method for generating an angle signal and a method for providing a sensor signal
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US9810519B2 (en) 2013-07-19 2017-11-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
ITTO20130775A1 (it) * 2013-09-26 2015-03-27 St Microelectronics Srl Dispositivo sensore con sistema di calibrazione integrato e metodo di calibrazione dello stesso
EP3199967B1 (de) 2013-12-26 2023-05-17 Allegro MicroSystems, LLC Verfahren und vorrichtung zur sensordiagnose
CN104779343B (zh) * 2014-01-13 2017-11-17 上海矽睿科技有限公司 一种磁传感装置
CN104793155B (zh) * 2014-01-21 2017-12-08 上海矽睿科技有限公司 一种磁传感装置及该装置的制备工艺
CN104793154A (zh) * 2014-01-21 2015-07-22 上海矽睿科技有限公司 磁传感装置及其制备工艺
US9534932B2 (en) * 2014-03-07 2017-01-03 Infineon Technologies Ag XMR angle sensor arrangement with safety mechanism and method for monitoring the same
CN104914385A (zh) * 2014-03-10 2015-09-16 上海矽睿科技有限公司 一种磁传感装置及该装置的制备方法
US9645220B2 (en) 2014-04-17 2017-05-09 Allegro Microsystems, Llc Circuits and methods for self-calibrating or self-testing a magnetic field sensor using phase discrimination
US9735773B2 (en) 2014-04-29 2017-08-15 Allegro Microsystems, Llc Systems and methods for sensing current through a low-side field effect transistor
US9354284B2 (en) 2014-05-07 2016-05-31 Allegro Microsystems, Llc Magnetic field sensor configured to measure a magnetic field in a closed loop manner
JP2016001118A (ja) * 2014-06-11 2016-01-07 三菱電機株式会社 電流検出装置、磁界検出装置及びこれらの方法
CN104280700B (zh) * 2014-09-28 2017-09-08 江苏多维科技有限公司 一种单芯片差分自由层推挽式磁场传感器电桥及制备方法
US9739846B2 (en) 2014-10-03 2017-08-22 Allegro Microsystems, Llc Magnetic field sensors with self test
US9823329B2 (en) 2014-10-15 2017-11-21 Honeywell International Inc. Magnetic current sensor calibration system
GB2533206B (en) * 2014-10-15 2017-04-19 Honeywell Int Inc Magnetic current sensor calibration system and method
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9804249B2 (en) 2014-11-14 2017-10-31 Allegro Microsystems, Llc Dual-path analog to digital converter
US9841485B2 (en) 2014-11-14 2017-12-12 Allegro Microsystems, Llc Magnetic field sensor having calibration circuitry and techniques
US10466298B2 (en) 2014-11-14 2019-11-05 Allegro Microsystems, Llc Magnetic field sensor with shared path amplifier and analog-to-digital-converter
US9322887B1 (en) 2014-12-01 2016-04-26 Allegro Microsystems, Llc Magnetic field sensor with magnetoresistance elements and conductive-trace magnetic source
US10288697B2 (en) 2015-01-13 2019-05-14 Stmicroelectronics S.R.L. AMR-type integrated magnetoresistive sensor for detecting magnetic fields perpendicular to the chip
US9638764B2 (en) 2015-04-08 2017-05-02 Allegro Microsystems, Llc Electronic circuit for driving a hall effect element with a current compensated for substrate stress
CN106291414B (zh) 2015-06-26 2019-12-20 意法半导体股份有限公司 大规模的集成amr磁电阻器
RU2601360C1 (ru) * 2015-07-14 2016-11-10 федеральное государственное бюджетное учреждение "Научно-производственный комплекс "Технологический центр" МИЭТ Магниторезистивный элемент
US9851417B2 (en) 2015-07-28 2017-12-26 Allegro Microsystems, Llc Structure and system for simultaneous sensing a magnetic field and mechanical stress
CN105182258A (zh) * 2015-10-21 2015-12-23 美新半导体（无锡）有限公司 能够实现重置和自检的磁场传感器
US10107873B2 (en) 2016-03-10 2018-10-23 Allegro Microsystems, Llc Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress
GB2548795A (en) * 2016-03-14 2017-10-04 Reventec Ltd A magnetic position sensor
CN205581283U (zh) * 2016-04-11 2016-09-14 江苏多维科技有限公司 一种具有初始化线圈封装的磁电阻传感器
US10132879B2 (en) 2016-05-23 2018-11-20 Allegro Microsystems, Llc Gain equalization for multiple axis magnetic field sensing
US10260905B2 (en) 2016-06-08 2019-04-16 Allegro Microsystems, Llc Arrangements for magnetic field sensors to cancel offset variations
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10041810B2 (en) 2016-06-08 2018-08-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as movement detectors
US10162017B2 (en) 2016-07-12 2018-12-25 Allegro Microsystems, Llc Systems and methods for reducing high order hall plate sensitivity temperature coefficients
JP6842741B2 (ja) * 2017-01-12 2021-03-17 アルプスアルパイン株式会社 磁気センサ
EP3367067B1 (de) * 2017-02-28 2019-07-03 Melexis Technologies SA Positionssensor und positionserfassungsverfahren
JP2018151304A (ja) 2017-03-14 2018-09-27 エイブリック株式会社 磁気センサ回路、検査方法、及び製造方法
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10520559B2 (en) 2017-08-14 2019-12-31 Allegro Microsystems, Llc Arrangements for Hall effect elements and vertical epi resistors upon a substrate
US11175353B2 (en) 2018-02-16 2021-11-16 Analog Devices International Unlimited Company Position sensor with compensation for magnet movement and related position sensing method
US10866117B2 (en) 2018-03-01 2020-12-15 Allegro Microsystems, Llc Magnetic field influence during rotation movement of magnetic target
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11194004B2 (en) 2020-02-12 2021-12-07 Allegro Microsystems, Llc Diagnostic circuits and methods for sensor test circuits
US11169223B2 (en) 2020-03-23 2021-11-09 Allegro Microsystems, Llc Hall element signal calibrating in angle sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11630130B2 (en) 2021-03-31 2023-04-18 Allegro Microsystems, Llc Channel sensitivity matching
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US11994541B2 (en) 2022-04-15 2024-05-28 Allegro Microsystems, Llc Current sensor assemblies for low currents

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902167A (en) * 1974-02-25 1975-08-26 Honeywell Inc Magnetic thin film switch
CA1126818A (en) * 1978-03-27 1982-06-29 Hiroyuki Ohkubo Apparatus for sensing an external magnetic field
CH651151A5 (de) * 1979-11-27 1985-08-30 Landis & Gyr Ag Messwandler zum messen eines insbesondere von einem messstrom erzeugten magnetfeldes.
IT1211140B (it) * 1980-12-09 1989-09-29 Sony Corp Dispositivo commutatore a sensore magnetico.
EP0074219B1 (de) * 1981-09-09 1985-11-27 EMI Limited Anordnung zum Auflösen magnetischer Feldkomponenten
US4533872A (en) * 1982-06-14 1985-08-06 Honeywell Inc. Magnetic field sensor element capable of measuring magnetic field components in two directions
DE3442278A1 (de) * 1984-11-20 1986-05-22 Philips Patentverwaltung Gmbh, 2000 Hamburg Magnetfeldmessgeraet
US4780848A (en) * 1986-06-03 1988-10-25 Honeywell Inc. Magnetoresistive memory with multi-layer storage cells having layers of limited thickness
US4829277A (en) * 1986-11-20 1989-05-09 General Motors Corporation Isotropic rare earth-iron field magnets for magnetic resonance imaging
GB2202635B (en) * 1987-03-26 1991-10-30 Devon County Council Detection of magnetic fields
US4823075A (en) * 1987-10-13 1989-04-18 General Electric Company Current sensor using hall-effect device with feedback
US4847584A (en) * 1988-10-14 1989-07-11 Honeywell Inc. Magnetoresistive magnetic sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10014779B4 (de) * 2000-03-27 2011-11-10 Nxp B.V. MR-Winkelsensor

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CA2083008C (en) 2001-01-16
EP0544479A3 (en) 1994-06-15
EP0544479B1 (de) 1999-03-17
US5247278A (en) 1993-09-21
DE69228654D1 (de) 1999-04-22
CA2083008A1 (en) 1993-05-27

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