DE69311327D1 - Mikrotechnologisch hergestellter sensor - Google Patents

Mikrotechnologisch hergestellter sensor

Info

Publication number
DE69311327D1
DE69311327D1 DE69311327T DE69311327T DE69311327D1 DE 69311327 D1 DE69311327 D1 DE 69311327D1 DE 69311327 T DE69311327 T DE 69311327T DE 69311327 T DE69311327 T DE 69311327T DE 69311327 D1 DE69311327 D1 DE 69311327D1
Authority
DE
Germany
Prior art keywords
technology sensor
micro technology
micro
sensor
technology
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311327T
Other languages
English (en)
Other versions
DE69311327T2 (de
Inventor
Bindert Douma
Peter Eigenraam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shell Internationale Research Maatschappij BV
Original Assignee
Shell Internationale Research Maatschappij BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shell Internationale Research Maatschappij BV filed Critical Shell Internationale Research Maatschappij BV
Publication of DE69311327D1 publication Critical patent/DE69311327D1/de
Application granted granted Critical
Publication of DE69311327T2 publication Critical patent/DE69311327T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Pressure Sensors (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69311327T 1992-03-30 1993-03-24 Mikrotechnologisch hergestellter sensor Expired - Fee Related DE69311327T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP92200910 1992-03-30
PCT/EP1993/000736 WO1993020422A1 (en) 1992-03-30 1993-03-24 Micromachined sensor device

Publications (2)

Publication Number Publication Date
DE69311327D1 true DE69311327D1 (de) 1997-07-10
DE69311327T2 DE69311327T2 (de) 1997-09-25

Family

ID=8210517

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311327T Expired - Fee Related DE69311327T2 (de) 1992-03-30 1993-03-24 Mikrotechnologisch hergestellter sensor

Country Status (8)

Country Link
US (1) US5338929A (de)
EP (1) EP0634008B1 (de)
AU (1) AU671985B2 (de)
BR (1) BR9306173A (de)
CA (1) CA2133217C (de)
DE (1) DE69311327T2 (de)
NO (1) NO308051B1 (de)
WO (1) WO1993020422A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
US5780844A (en) * 1996-04-23 1998-07-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Strain insensitive optical phase locked loop
US6408496B1 (en) 1997-07-09 2002-06-25 Ronald S. Maynard Method of manufacturing a vibrational transducer
EP1153194B1 (de) 1999-01-13 2003-11-19 Vermeer Manufacturing Company Automatisiertes bohrplanungsverfahren und vorrichtung zum horizontalen richtungsbohren
US6315062B1 (en) 1999-09-24 2001-11-13 Vermeer Manufacturing Company Horizontal directional drilling machine employing inertial navigation control system and method
US6834552B1 (en) * 1999-11-03 2004-12-28 Vestas Wind Systems A/S Fibre-optical strain-gauge
US7176048B1 (en) 2004-12-12 2007-02-13 Burns David W Optically coupled sealed-cavity resonator and process
US7443509B1 (en) 2004-12-12 2008-10-28 Burns David W Optical and electronic interface for optically coupled resonators
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
US7379629B1 (en) 2004-12-12 2008-05-27 Burns David W Optically coupled resonant pressure sensor
US7673679B2 (en) * 2005-09-19 2010-03-09 Schlumberger Technology Corporation Protective barriers for small devices
FR2928007B1 (fr) * 2008-02-22 2010-02-19 Senseor Procede d'interrogation de resonateur piezoelectrique et dispositif d'interrogation integrant le procede d'interrogation.
WO2012061845A1 (en) * 2010-11-05 2012-05-10 Baker Hughes Incorporated An apparatus, system and method for estimating a property. of a downhole fluid
US9512715B2 (en) * 2013-07-30 2016-12-06 General Electric Company Systems and methods for pressure and temperature measurement
US20150276686A1 (en) * 2014-03-26 2015-10-01 General Electric Company Systems and methods for addressing one or more sensors along a cable

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535638A (en) * 1983-10-03 1985-08-20 Quartztronics, Inc. Resonator transducer system with temperature compensation
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
GB8610252D0 (en) * 1986-04-26 1986-06-25 Stc Plc Remote sensor
US4972076A (en) * 1988-09-29 1990-11-20 Schlumberger Industries Limited Solid state sensor with dual resonant vibratable members
GB2223582B (en) * 1988-10-04 1992-06-17 Stc Plc Transducer device
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
US5085080A (en) * 1990-10-05 1992-02-04 Micron Technology, Inc. Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance

Also Published As

Publication number Publication date
CA2133217A1 (en) 1993-10-14
AU3752393A (en) 1993-11-08
DE69311327T2 (de) 1997-09-25
NO308051B1 (no) 2000-07-10
CA2133217C (en) 2004-07-20
NO943607L (no) 1994-09-29
EP0634008A1 (de) 1995-01-18
WO1993020422A1 (en) 1993-10-14
BR9306173A (pt) 1998-01-13
NO943607D0 (no) 1994-09-28
US5338929A (en) 1994-08-16
EP0634008B1 (de) 1997-06-04
AU671985B2 (en) 1996-09-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee